KR20080062167A - Rack master and stocker - Google Patents
Rack master and stocker Download PDFInfo
- Publication number
- KR20080062167A KR20080062167A KR1020060137615A KR20060137615A KR20080062167A KR 20080062167 A KR20080062167 A KR 20080062167A KR 1020060137615 A KR1020060137615 A KR 1020060137615A KR 20060137615 A KR20060137615 A KR 20060137615A KR 20080062167 A KR20080062167 A KR 20080062167A
- Authority
- KR
- South Korea
- Prior art keywords
- sensor
- cassette
- reflector
- rack master
- unit
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/10—Storage devices mechanical with relatively movable racks to facilitate insertion or removal of articles
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
Description
1 is a plan view showing a conventional storage device.
Figure 2a is a view showing the reflector defects in a conventional storage device.
Figure 2b is a view showing the angle of the conventional sensor and the reflector.
3 is a perspective view of a storage device according to the present invention;
4 is a plan view showing a part of a storage device and a rack master according to the present invention;
5 shows a sensor unit according to the invention.
6 is an enlarged perspective view of the guide cover of FIG. 5;
<Explanation of symbols for the main parts of the drawings>
1: Storage device 10: Self
50: reflector 100: rack master
110: moving unit 130: robot unit
150: elevator 155: platform
200: sensor unit 210: sensor
250: guide cover 300: cassette
The present invention relates to a rack master and a storage device having the same.
Recently, the liquid crystal display device has a high contrast ratio, is suitable for gray scale display or moving image display, and has low power consumption. Therefore, the liquid crystal display device has gradually been used as an alternative means to overcome the disadvantage of cathode ray tube (CRT). It is expanding.
The manufacturing process of the liquid crystal display device may be divided into three processes, a substrate manufacturing process, a cell manufacturing process, and a module process. Such a liquid crystal display manufacturing process may be performed through the substrate manufacturing process, cell process, and module process. Should be returned or transported sequentially or in group form to the manufacturing equipment used in each process.
The substrates must be free from contamination by foreign matter during manufacture and must also be protected from external impacts. Corresponding cassettes can be used to enable storage and transport of multiple substrates.
That is, in the manufacturing process of the liquid crystal display device, a cassette storage device such as a storage device for temporarily storing the cassettes provided in the above steps and a transfer device capable of transferring the cassette should be provided.
1 is a plan view showing a conventional storage device.
As shown in FIG. 1, the
The
The
The
The
The
Therefore, when the
On the other hand, when the
FIG. 2A is a view illustrating a reflector defect in a conventional storage device, and FIG. 2B is a view illustrating angles of a conventional sensor and a reflector. Here, the storage device will be described with reference to FIG. 1.
2A and 2B, the
However, the
Therefore, since the detection signal reflected by the
Alternatively, when the
In order to solve the double loading failure, the operator performs an operation of adjusting the angle of the
Therefore, the angle of the
If the angle of the
An object of the present invention is to provide a rack master capable of easily adjusting the angle of the reflector so as to face each other with a reflector such that the sensor is disposed on an elevation part and a guide cover covering the sensor. .
Rack master according to the present invention for achieving the above object is to load the cassette, the lifting unit capable of moving the cassette in the vertical direction; It is formed in the lifting unit, and includes a sensor unit for guiding the signal direction.
Storage device according to the present invention for achieving the above object is a shelf having a reflector; And a rack master including a lift unit configured to load the cassette and move the cassette in a vertical direction, the lift unit including a sensor unit for guiding a signal direction, and the reflector and the sensor unit face each other. Characterized in that arranged to see.
Hereinafter, a rack master according to embodiments of the present invention and a storage device having the same will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the following embodiments, which are common in the art. Those skilled in the art will be able to implement the invention in various other forms without departing from the spirit of the invention. In the accompanying drawings, the dimensions of the lifting unit, the sensor unit, the reflecting plate is shown in an enlarged scale than actual for clarity of the invention. In the present invention, when the lift, sensor unit, reflector and other structures are referred to as being formed "on", "upper" or "lower", the lift, sensor unit, reflector and other structures are directly lifted. Means formed on or below the portion, sensor unit, reflector and other structures, or other lifting, sensor unit, reflector and other structures may be further formed on the substrate.
Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
3 is a perspective view showing a storage device according to the present invention.
Referring to FIG. 3, the
The
The moving
The
The
The
On the other hand, the
Before loading the
4 is a plan view showing a part of a storage device and a rack master according to the present invention.
Referring to FIG. 4, the
At the edge of the
The
The
The
The signal generated by the
On the other hand, if a signal returned to the
5 is a view showing a sensor unit according to the present invention, Figure 6 is an enlarged perspective view of the guide cover of FIG. Here, the rack master and the storage device will be described with reference to FIGS. 3 and 4.
Referring to FIG. 5, the
The
The
The
The
Referring to FIG. 6, the
The
The
As such, the
Accordingly, when the
In addition, since the signal generated by the
The rack master and the storage device having the same according to the present invention have an effect of facilitating error correction measures by the operator to adjust the twisted angle of the reflector using a guide cover when the double reflecting failure occurs because the reflector is twisted. . And there is an effect that can reduce the poor action processing time.
In addition, since the signal generated by the sensor is visible to the naked eye, there is an effect that can prevent the same failure occurs.
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060137615A KR20080062167A (en) | 2006-12-29 | 2006-12-29 | Rack master and stocker |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060137615A KR20080062167A (en) | 2006-12-29 | 2006-12-29 | Rack master and stocker |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20080062167A true KR20080062167A (en) | 2008-07-03 |
Family
ID=39814326
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020060137615A KR20080062167A (en) | 2006-12-29 | 2006-12-29 | Rack master and stocker |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR20080062167A (en) |
-
2006
- 2006-12-29 KR KR1020060137615A patent/KR20080062167A/en not_active Application Discontinuation
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