KR20080062167A - Rack master and stocker - Google Patents

Rack master and stocker Download PDF

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Publication number
KR20080062167A
KR20080062167A KR1020060137615A KR20060137615A KR20080062167A KR 20080062167 A KR20080062167 A KR 20080062167A KR 1020060137615 A KR1020060137615 A KR 1020060137615A KR 20060137615 A KR20060137615 A KR 20060137615A KR 20080062167 A KR20080062167 A KR 20080062167A
Authority
KR
South Korea
Prior art keywords
sensor
cassette
reflector
rack master
unit
Prior art date
Application number
KR1020060137615A
Other languages
Korean (ko)
Inventor
허강용
Original Assignee
엘지디스플레이 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지디스플레이 주식회사 filed Critical 엘지디스플레이 주식회사
Priority to KR1020060137615A priority Critical patent/KR20080062167A/en
Publication of KR20080062167A publication Critical patent/KR20080062167A/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/10—Storage devices mechanical with relatively movable racks to facilitate insertion or removal of articles
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

A rack master and a storage apparatus having the rack master are provided to allow an operator to adjust the angle of a reflector using a guide cover when the reflector is wrongly disposed, thereby easily correcting an error. A rack master loads cassettes and includes a vertically moving unit(150) and a sensor unit(200). The vertically moving unit vertically moves the cassettes. The sensor unit is attached to the vertically moving unit and guides a signal direction. A storage apparatus includes the rack master and a shelf. The shelf has a reflector. The reflector and the sensor unit are arranged opposite to each other.

Description

Rack master and storage device having same {Rack master and Stocker}

1 is a plan view showing a conventional storage device.

Figure 2a is a view showing the reflector defects in a conventional storage device.

Figure 2b is a view showing the angle of the conventional sensor and the reflector.

3 is a perspective view of a storage device according to the present invention;

4 is a plan view showing a part of a storage device and a rack master according to the present invention;

5 shows a sensor unit according to the invention.

6 is an enlarged perspective view of the guide cover of FIG. 5;

<Explanation of symbols for the main parts of the drawings>

  1: Storage device 10: Self

 50: reflector 100: rack master

 110: moving unit 130: robot unit

 150: elevator 155: platform

 200: sensor unit 210: sensor

250: guide cover 300: cassette

The present invention relates to a rack master and a storage device having the same.

Recently, the liquid crystal display device has a high contrast ratio, is suitable for gray scale display or moving image display, and has low power consumption. Therefore, the liquid crystal display device has gradually been used as an alternative means to overcome the disadvantage of cathode ray tube (CRT). It is expanding.

The manufacturing process of the liquid crystal display device may be divided into three processes, a substrate manufacturing process, a cell manufacturing process, and a module process. Such a liquid crystal display manufacturing process may be performed through the substrate manufacturing process, cell process, and module process. Should be returned or transported sequentially or in group form to the manufacturing equipment used in each process.

The substrates must be free from contamination by foreign matter during manufacture and must also be protected from external impacts. Corresponding cassettes can be used to enable storage and transport of multiple substrates.

That is, in the manufacturing process of the liquid crystal display device, a cassette storage device such as a storage device for temporarily storing the cassettes provided in the above steps and a transfer device capable of transferring the cassette should be provided.

1 is a plan view showing a conventional storage device.

As shown in FIG. 1, the storage device 501 includes a rack master 600 capable of carrying a cassette 800 and a plurality of shelves 510 which are storage spaces in which the cassette 800 may be stored. Equipped.

The shelf 510 has a space for storing one cassette 800. The shelf 510 is provided with a reflecting plate 550 for checking whether or not the cassette 800 is loaded in the shelf 510. The reflective plate 550 is disposed behind the shelf 510.

The rack master 600 is a moving part 610 capable of moving the cassette 800 to another place, a robot part capable of loading / unloading the cassette 800 to the rack master 600, the cassette. A lifting unit 650 capable of moving the 800 in the vertical direction is provided.

The lifting unit 650 is provided with a sensor 710 corresponding to the reflective plate 550 to detect whether the cassette 800 is mounted on the shelf 510.

The reflective plate 550 and the sensor 710 are disposed in opposite directions to each other, and the detection signal generated by the sensor 710 and the reflective plate 550 should be formed to face each other.

The reflective plate 550 reflects the detection signal so that the angle of the reflective plate 550 and the position of the sensor 710 face each other so as to detect the detection signal returned by the sensor 710.

Therefore, when the cassette 800 is not loaded on the shelf 510, the signal generated by the sensor 710 is reflected by the reflector 550, and the sensor 710 detects the reflected signal. It is detected that the cassette 800 is not loaded on the shelf 510.

On the other hand, when the cassette 800 is stacked on the shelf 510, the signal generated by the sensor 710 is blocked by the cassette 800, and there is no signal returned from the cassette 800. It is detected as a signal that the 800 is loaded.

FIG. 2A is a view illustrating a reflector defect in a conventional storage device, and FIG. 2B is a view illustrating angles of a conventional sensor and a reflector. Here, the storage device will be described with reference to FIG. 1.

2A and 2B, the reflector 550 may be distorted due to the process of loading the cassette 800 into the shelf 510 and other reasons. Thus, the sensor 710 and the reflector 550 do not face each other, and the angle of the reflector 550 is twisted.

However, the reflection plate 550 does not return the detection signal to the direction in which the sensor 710 is located, but reflects the detection signal in a different direction.

Therefore, since the detection signal reflected by the reflector 550 is reflected in the other direction, the sensor 710 detects that the cassette 800 is loaded on the shelf 510.

Alternatively, when the cassette 800 is stacked on the shelf 510, the angle of the reflecting plate 550 is distorted, so that the signal reflected on the reflecting plate 550 is reflected by the sensor even though the cassette 800 is present. 710 may be detected. Therefore, the sensor 710 loads the cassette 800 on the shelf 510, causing a double loading failure.

In order to solve the double loading failure, the operator performs an operation of adjusting the angle of the reflector plate 550. However, since the detection signal generated by the sensor 710 is invisible to the operator, it is difficult to adjust the angle of the reflector 550.

Therefore, the angle of the reflector 550 is adjusted several times, and there is a disadvantage in that it takes a long time to solve the defect.

If the angle of the reflector 550 is adjusted incorrectly while adjusting the angle of the reflector 550, the same defect may be repeatedly generated.

An object of the present invention is to provide a rack master capable of easily adjusting the angle of the reflector so as to face each other with a reflector such that the sensor is disposed on an elevation part and a guide cover covering the sensor. .

Rack master according to the present invention for achieving the above object is to load the cassette, the lifting unit capable of moving the cassette in the vertical direction; It is formed in the lifting unit, and includes a sensor unit for guiding the signal direction.

Storage device according to the present invention for achieving the above object is a shelf having a reflector; And a rack master including a lift unit configured to load the cassette and move the cassette in a vertical direction, the lift unit including a sensor unit for guiding a signal direction, and the reflector and the sensor unit face each other. Characterized in that arranged to see.

Hereinafter, a rack master according to embodiments of the present invention and a storage device having the same will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the following embodiments, which are common in the art. Those skilled in the art will be able to implement the invention in various other forms without departing from the spirit of the invention. In the accompanying drawings, the dimensions of the lifting unit, the sensor unit, the reflecting plate is shown in an enlarged scale than actual for clarity of the invention. In the present invention, when the lift, sensor unit, reflector and other structures are referred to as being formed "on", "upper" or "lower", the lift, sensor unit, reflector and other structures are directly lifted. Means formed on or below the portion, sensor unit, reflector and other structures, or other lifting, sensor unit, reflector and other structures may be further formed on the substrate.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

3 is a perspective view showing a storage device according to the present invention.

Referring to FIG. 3, the storage device 1 includes a plurality of shelves 10, which are storage spaces, and a rack master 100 capable of moving a cassette 300 to load / unload the shelves 10. It includes.

The rack master 100 includes a moving part 110 having a moving means to move to another place, a robot part 130 capable of loading / unloading a cassette 300, and the robot part 130. It is provided with a lifting unit 150 that can move in the vertical direction.

The moving unit 110 may move the rack master 100 to another place. Therefore, it is possible to move the cassette 300 and the like loaded on the rack master 100 to another place.

The robot unit 130 has a loading / unloading unit provided in a flat plate shape for loading the cassette 300, and an arm shape for loading / unloading the cassette 300 in the loading / unloading unit. It is provided with a robot arm for moving the loading / unloading unit to a place where the cassette 300 is provided.

The rack master 100 provided as described above moves to the shelf 10 capable of loading and moving the cassette 300 to load the cassette 300 to move the cassette 300 to the shelf 10. Will be loaded.

The lifting unit 150 may move the robot unit 130 in the vertical direction. Therefore, it is possible to increase the efficiency of space utilization that can be loaded in the cassette 300 in the vertical direction.

On the other hand, the lifting unit 150 is provided with a sensor unit 200. The sensor unit 200 will be described in detail later.

Before loading the cassette 300 into the designated shelf 10, check whether the shelf 10 is an empty shelf 10 or a cassette 10 in which the cassette 300 is loaded and the cassette 300 is loaded. The loading process on the shelf 10 is performed.

4 is a plan view showing a part of a storage device and a rack master according to the present invention.

Referring to FIG. 4, the storage device 1 includes a rack master 100 having a shelf 10, which is a storage space, and a lifting unit 150 capable of moving the cassette 300 upward and downward in the shelf 10. ).

At the edge of the shelf 10, a seating unit 20 for mounting the cassette 300 is provided, and either side of the seating unit 20 is provided with a reflecting plate 50 formed at a predetermined angle. The reflector 50 may be disposed inside the shelf 10.

The rack master 100 is provided with a lifting unit 150 that can move the cassette 300 in the up / down direction, the lifting unit 150 is provided with a sensor unit 200.

The sensor unit 200 may generate a signal and sense the return signal. The sensor unit 200 may be formed of a laser point. The sensor unit 200 may be provided with a guide cover 250 for guiding the direction of the signal. The sensor unit 200 will be described in detail with reference to FIGS. 5 and 6.

The sensor unit 200 may be disposed in a diagonal direction with the reflecting plate 50. In order to confirm the existence of the cassette 300, the reflective plate 50 and the sensor unit 200 are disposed diagonally with the cassette 300 interposed therebetween.

The signal generated by the sensor unit 200 detects the signal reflected back from the reflector 50. Therefore, it is possible to confirm that the shelf 10 is empty by detecting a signal from which the signal is returned, so that the cassette 300 can be loaded into the shelf 10.

On the other hand, if a signal returned to the sensor unit 200 is not detected, the signal is reflected by the cassette 300 loaded in the shelf 10 so that the sensor unit 200 does not detect the signal returned. It is confirmed that the cassette 300 is stacked on the shelf 10.

5 is a view showing a sensor unit according to the present invention, Figure 6 is an enlarged perspective view of the guide cover of FIG. Here, the rack master and the storage device will be described with reference to FIGS. 3 and 4.

Referring to FIG. 5, the sensor unit 200 may be formed in the lifting unit 150 of the rack master 100. The sensor unit 200 includes a sensor 210 and a guide cover 250 covering the sensor 210.

The sensor 210 is coupled to the lifting unit 150, the sensor 210 may be provided as a laser point device that can generate a laser.

The sensor unit 200 may move along the lifting unit 150.

The guide cover 250 may cover the sensor 210 in the form of a cap. The guide cover 250 may be formed in a shape that can be attached / removed from the sensor 210.

The guide cover 250 may be supported by the sensor 210 to guide the direction of the laser beam generated by the sensor 210.

Referring to FIG. 6, the guide cover 250 includes a body 252, a guide part 254 protruding from the body 252 to face the reflector plate 50, and a sensor 210. It may include an insertion hole 256 and a support member 258 extending from the body 252 to support the guide cover 250 to the sensor 210.

The body 252 may cover the sensor 210. A support member 258 capable of supporting the guide cover 250 to the sensor 210 inserted through the insertion hole 256 is extended to the body 252.

The body 252 is provided with a guide portion 254 for guiding the signal direction of the sensor 210.

As such, the guide cover 250 may be provided to cover the sensor 210, and the operator may visually check the direction of the laser beam guided by the guide cover 250.

Accordingly, when the reflector plate 50 is misaligned and a double load failure occurs, the operator can easily correct an error correcting action of adjusting the misaligned angle of the reflector plate 50 using the guide cover 250. Therefore, there is an advantage that can reduce the defective action processing time.

In addition, since the signal generated by the sensor 210 is visually seen as a point, the same defect can be prevented from occurring.

The rack master and the storage device having the same according to the present invention have an effect of facilitating error correction measures by the operator to adjust the twisted angle of the reflector using a guide cover when the double reflecting failure occurs because the reflector is twisted. . And there is an effect that can reduce the poor action processing time.

In addition, since the signal generated by the sensor is visible to the naked eye, there is an effect that can prevent the same failure occurs.

Claims (6)

A lifter configured to stack a cassette and move the cassette in a vertical direction; The rack master is formed in the lifting portion, comprising a sensor unit for guiding the signal direction. The method of claim 1, The sensor unit A sensor for generating a signal; And a guide cover covering the sensor and guiding the direction of the signal. The method of claim 2, The sensor is a rack master, characterized in that the laser to generate a laser point recognized by the human eye. The method of claim 1, The guide cover is Body; An insertion hole formed in the body to receive the sensor; A support member formed to be supported by the sensor; Rack master is connected to the body and comprises a guide for guiding the signal direction of the sensor. The method of claim 1, Self with reflector; And a rack master including a lifting unit configured to load the cassette and move the cassette in a vertical direction, the lifting unit and including a sensor unit for guiding a signal direction. Storage device, characterized in that the reflecting plate and the sensor unit are disposed to face each other. The method of claim 1, And the reflector and the sensor unit are disposed to face each other in a diagonal direction.
KR1020060137615A 2006-12-29 2006-12-29 Rack master and stocker KR20080062167A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020060137615A KR20080062167A (en) 2006-12-29 2006-12-29 Rack master and stocker

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020060137615A KR20080062167A (en) 2006-12-29 2006-12-29 Rack master and stocker

Publications (1)

Publication Number Publication Date
KR20080062167A true KR20080062167A (en) 2008-07-03

Family

ID=39814326

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060137615A KR20080062167A (en) 2006-12-29 2006-12-29 Rack master and stocker

Country Status (1)

Country Link
KR (1) KR20080062167A (en)

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