KR20080060187A - Sintering aid, sintered bode and ceramic condenser - Google Patents

Sintering aid, sintered bode and ceramic condenser Download PDF

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KR20080060187A
KR20080060187A KR1020070137555A KR20070137555A KR20080060187A KR 20080060187 A KR20080060187 A KR 20080060187A KR 1020070137555 A KR1020070137555 A KR 1020070137555A KR 20070137555 A KR20070137555 A KR 20070137555A KR 20080060187 A KR20080060187 A KR 20080060187A
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component
point
compound
sintering aid
molar ratio
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노부타케 히라이
코타로 하타케
다카시 마키
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삼성전기주식회사
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    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64Burning or sintering processes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/002Details
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Abstract

A sintering aid is provided to produce a dense sintered material without deteriorating characteristics of the sintered material even when a dielectric layer material is fired at low temperature. A sintering aid includes a first component of a silicon compound, a second component comprising at least one of a boron compound and an aluminum compound, and a third component comprising at least one selected from a barium compound, a zinc compound, and a calcium compound. When a molar ratio of the first component is X, a molar ratio of the second component is Y, and a molar ratio of the third component is Z, a composition(X,Y,Z) formed by the molar ratios of the first, second, and third components satisfies the boundary surrounded by a point A(X, Y, Z)=(0.21, 0.37, 0.42), a point B(X, Y, Z)=(0.364, 0.192, 0.444), a point C(X, Y, Z)=(0.47, 0.174, 0.356), a point D(X, Y, Z)=(0.618, 0.182, 0.20), a point E(X, Y, Z)=(0.618, 0.228, 0.154), and a point F(X, Y, Z)=(0.261, 0.375, 0.364) of a triangle comprising a point(X, Y, Z)=(1, 0, 0), a point(X, Y, Z)=(0, 1, 0), and a point(X, Y, Z)=(0, 0, 1) as the three apices of the triangle.

Description

소결조제, 소결체 및 세라믹콘덴서{SINTERING AID, SINTERED BODE AND CERAMIC CONDENSER}Sintering aids, sintered bodies and ceramic capacitors {SINTERING AID, SINTERED BODE AND CERAMIC CONDENSER}

본 발명은, 소결조제, 이 소결조제를 첨가한 소결체 및 이 소결체를 유전체층으로 사용한 세라믹콘덴서에 관한 것이다.The present invention relates to a sintering aid, a sintered body to which the sintering aid is added, and a ceramic capacitor using the sintered body as a dielectric layer.

종래, 적층 세라믹콘덴서에서 유전체층의 재료로 티탄산바륨이 많이 이용되고 있으나 이 종류의 분말은 그대로는 소결하기 어려워 소결을 촉진시키는 소결조제를 첨가한 후에 소성을 하고 있다(예를 들면, 일본특개 2002-338332호 공보, 일본특개 2002-338333호 공보).Conventionally, barium titanate is widely used as a material for dielectric layers in multilayer ceramic capacitors, but this kind of powder is difficult to sinter as it is, and then fired after adding a sintering aid that promotes sintering (for example, Japanese Patent Laid-Open No. 2002-). 338332, Japanese Patent Laid-Open No. 2002-338333).

최근에 전자 회로의 소형화, 고밀도화와 함께 세라믹콘덴서의 소형 대용량화가 강하게 요구되고 있다. 그리고, 세라믹콘덴서의 소형 대용량화를 위해 내부 전극층 및 유전체층의 박층화와 적층 수의 증가가 시도되고 있다. 하지만, 내부 전극의 박층화가 진행되면 특히, 내부 전극의 재료로 가격이 싼 Ni나 Ni합금을 이용한 경우에는 Ni의 구상(球狀)화 수축에 의해 내부 전극이 끊어지거나 디라미네이션(delamination: 층간박리) 등이 생기기 쉽게 되고, 이와 함께 용량이 저하하는 문제가 있다. 이를 방지하기 위해 소성 온도를 낮추는 방법이 있으나 소성 온도가 낮으면 소결하지 않거나 치밀한 소결체를 얻을 수 없거나 전기특성이 저하되는 문제가 발행한다.Recently, with the miniaturization and high density of electronic circuits, there is a strong demand for miniaturization of ceramic capacitors. In order to increase the size and capacity of ceramic capacitors, internal electrode layers and dielectric layers have been made thinner and more stacked. However, when the thickness of the inner electrode proceeds, in particular, when the inexpensive Ni or Ni alloy is used as the material of the inner electrode, the inner electrode may be broken or delamination due to the spherical shrinkage of Ni. ) Tends to occur, and there is a problem in that the capacity decreases. In order to prevent this, there is a method of lowering the firing temperature, but if the firing temperature is low, there is a problem in that the sintered body cannot be obtained, a compact sintered body cannot be obtained, or the electrical characteristics are lowered.

본 발명은, 저온에서 소성하여도 특성을 저해하지 않고 치밀화된 결정체를 얻을 수 있는 소결조제, 소결체 및 세라믹콘덴서를 제공한다.The present invention provides a sintering aid, a sintered body and a ceramic capacitor capable of obtaining densified crystals without impairing properties even when fired at a low temperature.

본 발명의 일 형태에 의하면, 실리콘(Si) 화합물로 된 제1 성분과, 붕소(B) 화합물 및 알루미늄(Al) 화합물 중 적어도 하나를 포함하는 제2 성분과 바륨(Ba) 화합물, 아연(Zn) 화합물 및 칼슘(Ca) 화합물 중 적어도 하나를 포함하는 제3 성분을 포함하는 소결조제이며, 상기 제1 성분의 몰비를 X, 상기 제2 성분의 몰비를 Y, 상기 제3 성분의 몰비를 Z로 한 경우 이들 제1 성분, 제2 성분, 제3 성분의 몰비에 의한 조성비(X, Y, Z)는 점(X, Y, Z) = (1, 0, 0), 점(X, Y, Z) = (0, 1, 0) 및 점(X, Y, Z) = (0, 0, 1)의 3점을 꼭지점으로 하는 삼각형의 점A(X, Y, Z) = (0.21, 0.37, 0.42), 점B(X, Y, Z) = (0.364, 0.192, 0.444), 점C(X, Y, Z) = (0.47, 0.174, 0.356), 점D(X, Y, Z) = (0.618, 0.182, 0.20) 및 점E(X, Y, Z) = (0.618, 0.228, 0.154) 및 점F(X, Y, Z) = (0.261, 0.375, 0.364)로 둘러싸인 범위 내를 만족하는 것을 특징으로 하는 소결조제가 제공된다.According to one embodiment of the present invention, a second component containing at least one of a first component made of a silicon (Si) compound, a boron (B) compound, and an aluminum (Al) compound, a barium (Ba) compound, and zinc (Zn) ) A sintering aid comprising a third component comprising at least one of a compound and a calcium (Ca) compound, wherein X is the molar ratio of the first component, Y is the molar ratio of the second component, and Z is the molar ratio of the third component. In this case, the composition ratio (X, Y, Z) based on the molar ratio of these first components, the second components, and the third components is the point (X, Y, Z) = (1, 0, 0), the point (X, Y). , Z) = (0, 1, 0) and point (X, Y, Z) = (0, 0, 1) triangle point A (X, Y, Z) = (0.21, 0.37, 0.42), point B (X, Y, Z) = (0.364, 0.192, 0.444), point C (X, Y, Z) = (0.47, 0.174, 0.356), point D (X, Y, Z) = (0.618, 0.182, 0.20) and point E (X, Y, Z) = (0.618, 0.228, 0.154) and point F (X, Y, Z) = satisfies the range surrounded by (0.261, 0.375, 0.364) Provided is a sintering aid, characterized in that do.

또한, 본 발명의 다른 일 형태에 의하면, 티탄산바륨을 주성분으로 포함하는 원료에 상기 소결조제를 첨가해 소성해서 만들어지는 것을 특징으로 하는 소결체가 제공된다.According to another aspect of the present invention, there is provided a sintered compact, which is produced by adding and sintering the sintering aid to a raw material containing barium titanate as a main component.

나아가, 본 발명의 또 다른 일 형태에 의하면, 복수의 전극과 이들 전극 간 에 설치되어 상기 소결체로 만들어진 유전체층을 구비하는 것을 특징으로 하는 세라믹콘덴서가 제공된다.Furthermore, according to another aspect of the present invention, there is provided a ceramic capacitor, comprising a plurality of electrodes and a dielectric layer provided between the electrodes and made of the sintered body.

본 발명에 의하면, 저온에서 소결해도 특성을 해치지 않고 치밀화된 결정체를 얻을 수 있는 소결조제, 소결체 및 세라믹콘덴서가 제공된다.According to the present invention, there is provided a sintering aid, a sintered body and a ceramic capacitor capable of obtaining densified crystals without compromising properties even when sintered at low temperature.

이하, 첨부된 도면을 참조하여 본 발명의 실시형태에 대해 설명한다.Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

본 발명의 실시형태에 관한 소결조제는 실리콘(Si) 화합물(예를 들면 SiO2) 로 된 제1 성분과 붕소(B) 화합물(예를 들면 B2O3) 및 알루미늄(Al) 화합물(예를 들면, Al2O3) 중 적어도 하나를 포함하는 제2 성분과 바륨(Ba) 화합물(예를 들면, BaCO3), 아연(Zn) 화합물(예를 들면, ZnO) 및 칼슘(Ca) 화합물(예를 들면, CaCO3) 중 적어도 하나를 포함하는 제3 성분을 갖는다.The sintering aid according to the embodiment of the present invention is a first component of a silicon (Si) compound (for example, SiO 2 ), a boron (B) compound (for example, B 2 O 3 ), and an aluminum (Al) compound (for example For example, a second component comprising at least one of Al 2 O 3 ) and a barium (Ba) compound (eg, BaCO 3 ), a zinc (Zn) compound (eg, ZnO) and a calcium (Ca) compound (for example, CaCO 3) has a third component comprising at least one of.

제1 성분의 몰비를 X, 제2 성분의 몰비를 Y, 제3 성분의 몰비를 Z로 한 경우, 이들 제1 성분, 제2 성분, 제3 성분의 몰비에 의한 조성비(X, Y, Z)는 점(X, Y, Z) = (1, 0, 0), 점(X, Y, Z) = (0, 1, 0) 및 점(X, Y, Z) = (0, 0, 1)의 3점을 꼭지점으로 하는 삼각형의 점A(X, Y, Z) = (0.21, 0.37, 0.42), 점B(X, Y, Z) = (0.364, 0.192, 0.444), 점C(X, Y, Z) = (0.47, 0.174, 0.356), 점D(X, Y, Z) = (0.618, 0.182, 0.20) 및 점E(X, Y, Z) = (0.618, 0.228, 0.154) 및 점F(X, Y, Z) = (0.261, 0.375, 0.364)로 둘러싸인 범위 내를 만족한다. When the molar ratio of the first component is X, the molar ratio of the second component is Y, and the molar ratio of the third component is Z, the composition ratio (X, Y, Z) by the molar ratio of these first component, the second component, and the third component ) Points (X, Y, Z) = (1, 0, 0), points (X, Y, Z) = (0, 1, 0) and points (X, Y, Z) = (0, 0, Point A (X, Y, Z) = (0.21, 0.37, 0.42), Point B (X, Y, Z) = (0.364, 0.192, 0.444), Point C ( X, Y, Z) = (0.47, 0.174, 0.356), point D (X, Y, Z) = (0.618, 0.182, 0.20) and point E (X, Y, Z) = (0.618, 0.228, 0.154) And points F (X, Y, Z) = (0.261, 0.375, 0.364) are satisfied.

본 발명자 등은 상기 제1 ~ 제3 성분의 조성비(몰비)를 다양하게 바꾼 13개의 소결조제의 샘플 A ~ M을 시작(試作)했다. 각 샘플 A ~ M의 제1 ~ 제3 성분의 조성비(몰비)를 표1에 나타냈다.The present inventors started samples A-M of thirteen sintering aids which varied the composition ratio (molar ratio) of the said 1st-3rd component. Table 1 shows the composition ratio (molar ratio) of the 1st-3rd components of each sample A-M.

각 성분의 몰비Molar ratio of each component BaOBaO ZnOZnO SiO2 SiO 2 B2O3 B 2 O 3 Al2O3 Al 2 O 3 CaOCaO 제1 성분First component 제2 성분Second component 제3 성분Third component 샘플ASample A 0.240.24 0.180.18 0.210.21 0.370.37 0.210.21 0.370.37 0.420.42 샘플BSample B 0.1270.127 0.1630.163 0.3640.364 0.1460.146 0.0460.046 0.1530.153 0.3640.364 0.1920.192 0.4440.444 샘플CSample C 0.1580.158 0.1980.198 0.470.47 0.1740.174 0.470.47 0.1740.174 0.3560.356 샘플DSample D 0.0930.093 0.0180.018 0.6180.618 0.1540.154 0.0280.028 0.0890.089 0.6180.618 0.1820.182 0.20.2 샘플ESample E 0.0470.047 0.0180.018 0.6180.618 0.20.2 0.0280.028 0.0890.089 0.6180.618 0.2280.228 0.1540.154 샘플FSample F 0.1280.128 0.0960.096 0.2610.261 0.3370.337 0.0380.038 0.140.14 0.2610.261 0.3750.375 0.3640.364 샘플GSample G 0.130.13 0.1250.125 0.310.31 0.240.24 0.0450.045 0.150.15 0.310.31 0.2850.285 0.4050.405 샘플HSample H 0.190.19 0.160.16 0.3650.365 0.20.2 0.0450.045 0.040.04 0.3650.365 0.2450.245 0.390.39 샘플ISample I 0.10.1 0.160.16 0.40.4 0.20.2 0.040.04 0.10.1 0.40.4 0.240.24 0.360.36 샘플JSample J 0.1050.105 0.160.16 0.450.45 0.20.2 0.0450.045 0.040.04 0.450.45 0.2450.245 0.3050.305 샘플KSample K 0.160.16 0.180.18 0.2040.204 0.1760.176 0.0480.048 0.2230.223 0.2040.204 0.2240.224 0.5730.573 샘플LSample L 0.1530.153 0.1060.106 0.4160.416 0.0560.056 0.0460.046 0.2230.223 0.4160.416 0.1020.102 0.4820.482 샘플MSample M 0.1040.104 0.0180.018 0.6240.624 0.1040.104 0.0350.035 0.1160.116 0.6240.624 0.1390.139 0.2370.237

샘플A의 제1 성분, 제2 성분, 제3 성분의 몰비에 의한 조성비(X, Y, Z)는 도 1의 삼각형의 점A (X, Y, Z) = (0.21, 0.37, 0.42)로 나타난다.The composition ratio (X, Y, Z) by the molar ratio of the first component, the second component, and the third component of Sample A is represented by the points A (X, Y, Z) = (0.21, 0.37, 0.42) of the triangle of FIG. appear.

샘플B의 제1 성분, 제2 성분, 제3 성분의 몰비에 의한 조성비(X, Y, Z)는 도 1의 삼각형의 점B (X, Y, Z) = (0.364, 0.192, 0.444)로 나타난다.The composition ratio (X, Y, Z) by the molar ratio of the first component, the second component, and the third component of Sample B is represented by the points B (X, Y, Z) = (0.364, 0.192, 0.444) of the triangle of FIG. appear.

샘플C의 제1 성분, 제2 성분, 제3 성분의 몰비에 의한 조성비(X, Y, Z)는 도 1의 삼각형의 점C (X, Y, Z) = (0.47, 0.174, 0.356)로 나타난다.The composition ratio (X, Y, Z) by the molar ratio of the first component, the second component, and the third component of the sample C is represented by the point C (X, Y, Z) = (0.47, 0.174, 0.356) of the triangle of FIG. appear.

샘플D의 제1 성분, 제2 성분, 제3 성분의 몰비에 의한 조성비(X, Y, Z)는 도 1의 삼각형의 점D (X, Y, Z) = (0.618, 0.182, 0.20)로 나타난다.The composition ratio (X, Y, Z) by the molar ratio of the first component, the second component, and the third component of the sample D is represented by the point D (X, Y, Z) = (0.618, 0.182, 0.20) of the triangle of FIG. appear.

샘플E의 제1 성분, 제2 성분, 제3 성분의 몰비에 의한 조성비(X, Y, Z)는 도 1의 삼각형의 점E (X, Y, Z) = (0.618, 0.228, 0.154)로 나타난다.The composition ratio (X, Y, Z) by the molar ratio of the first component, the second component, and the third component of Sample E is represented by the point E (X, Y, Z) = (0.618, 0.228, 0.154) of the triangle of FIG. appear.

샘플F의 제1 성분, 제2 성분, 제3 성분의 몰비에 의한 조성비(X, Y, Z)는 도 1의 삼각형의 점F (X, Y, Z) = (0.261, 0.375, 0.364)로 나타난다.The composition ratio (X, Y, Z) by the molar ratio of the first component, the second component, and the third component of the sample F is represented by the points F (X, Y, Z) = (0.261, 0.375, 0.364) of the triangle of FIG. appear.

샘플G의 제1 성분, 제2 성분, 제3 성분의 몰비에 의한 조성비(X, Y, Z)는 도 1의 삼각형의 점G (X, Y, Z) = (0.31, 0.285, 0.405)로 나타난다.The composition ratio (X, Y, Z) by the molar ratio of the first component, the second component, and the third component of the sample G is represented by the points G (X, Y, Z) = (0.31, 0.285, 0.405) of the triangle of FIG. appear.

샘플H의 제1 성분, 제2 성분, 제3 성분의 몰비에 의한 조성비(X, Y, Z)는 도 1의 삼각형의 점H (X, Y, Z) = (0.365, 0.245, 0.39)로 나타난다.The composition ratio (X, Y, Z) by the molar ratio of the first component, the second component, and the third component of the sample H is represented by the points H (X, Y, Z) = (0.365, 0.245, 0.39) of the triangle of FIG. appear.

샘플I의 제1 성분, 제2 성분, 제3 성분의 몰비에 의한 조성비(X, Y, Z)는 도 1의 삼각형의 점I (X, Y, Z) = (0.4, 0.24, 0.36)로 나타난다.The composition ratio (X, Y, Z) by the molar ratio of the first component, the second component, and the third component of the sample I is represented by the point I (X, Y, Z) = (0.4, 0.24, 0.36) of the triangle of FIG. appear.

샘플J의 제1 성분, 제2 성분, 제3 성분의 몰비에 의한 조성비(X, Y, Z)는 도 1의 삼각형의 점J (X, Y, Z) = (0.45, 0.245, 0.305)로 나타난다.The composition ratio (X, Y, Z) by the molar ratio of the first component, the second component, and the third component of the sample J is set to the point J (X, Y, Z) = (0.45, 0.245, 0.305) of the triangle of FIG. appear.

샘플K의 제1 성분, 제2 성분, 제3 성분의 몰비에 의한 조성비(X, Y, Z)는 도 1의 삼각형의 점K (X, Y, Z) = (0.204, 0.224, 0.573)로 나타난다.The composition ratio (X, Y, Z) by the molar ratio of the first component, the second component, and the third component of the sample K is set to the point K (X, Y, Z) = (0.204, 0.224, 0.573) of the triangle of FIG. appear.

샘플L의 제1 성분, 제2 성분, 제3 성분의 몰비에 의한 조성비(X, Y, Z)는 도 1의 삼각형의 점L (X, Y, Z) = (0.416, 0.102, 0.482)로 나타난다.The composition ratio (X, Y, Z) by the molar ratio of the first component, the second component, and the third component of the sample L is represented by the points L (X, Y, Z) = (0.416, 0.102, 0.482) of the triangle of FIG. appear.

샘플M의 제1 성분, 제2 성분, 제3 성분의 몰비에 의한 조성비(X, Y, Z)는 도 1의 삼각형의 점M (X, Y, Z) = (0.624, 0.139, 0.237)로 나타난다.The composition ratio (X, Y, Z) by the molar ratio of the first component, the second component, and the third component of the sample M is represented by the points M (X, Y, Z) = (0.624, 0.139, 0.237) of the triangle of FIG. appear.

소결조제의 각 샘플 A ~ M은 도 2에 나타낸 단계에 따라 제조된다.Each sample A to M of the sintering aid is prepared according to the steps shown in FIG.

우선, 단계 S1으로, 표1에 나타낸 조성비를 바탕으로 각 성분 화합물을 조합해 건식혼합을 행해 분말을 얻는다. 또는 각 성분 화합물을 조합해 습식혼합·분쇄를 행해 슬러리를 만들고 이 슬러리를 탈수건조해서 분말을 마련한다.First, in step S1, dry mixing is performed by combining the respective component compounds based on the composition ratios shown in Table 1 to obtain a powder. Alternatively, each component compound is combined to be wet mixed and pulverized to form a slurry, and the slurry is dehydrated and dried to prepare a powder.

마련된 분말을 예를 들면 (Pt-Rh)로 된 도가니에 넣어 대기중 1,200~1,700℃에서 3~4시간 용해하고(단계 S2) 이 용탕을 주형에 부어(단계 3) 급냉하여 유리화 시킨다(단계 S4). 이 유리를 분쇄하여(단계 S5) 소결조제의 각 샘플 A~M을 제조하였다.The prepared powder is placed in a crucible made of (Pt-Rh), for example, and dissolved in the atmosphere at 1,200 to 1,700 ° C for 3 to 4 hours (step S2). ). This glass was pulverized (step S5) to prepare respective samples A to M of the sintering aid.

주성분으로 티탄산바륨(BaTiO3)을 부성분으로 바륨의 탄산염(BaCO3), 디스프로슘 산화물(Dy2O3), 마그네슘 산화물(MgO), 망간 산화물(Mn3O4)를 포함하는 원료에 상술한 도 1에 나타나 있는 삼각형의 점A, B 및 C로 둘러싸인 범위 내를 만족하는 조성을 갖는 소결조제를 첨가하고 이들을 예를 들면 환원성분위기에서 소성해서 제조된다.The above-described raw material containing barium titanate (BaTiO 3 ) as a main component and barium carbonate (BaCO 3 ), dysprosium oxide (Dy 2 O 3 ), magnesium oxide (MgO), and manganese oxide (Mn 3 O 4 ) as a main component. It is produced by adding a sintering aid having a composition that satisfies the range surrounded by the triangles A, B and C shown in Fig. 1 and firing them in a reducing component atmosphere, for example.

상술한 도 1에 나타나 있는 삼각형의 점 A, B, C, D, E 및 F로 둘러싸인 범위 내를 만족하는 조성비의 소결조제를 첨가하고 티탄산바륨을 주성분으로 하는 분말을 소성함으로써 저온(1,050℃이하)의 소성온도라도 소결을 촉진시킬 수 있고 치밀하며 전기특성의 악화도 억제된 소결체를 얻을 수 있다. 또, 저온에서의 소결로 제조 비용의 저감도 꾀할 수 있다.By adding a sintering aid having a composition ratio that satisfies the range surrounded by the triangles A, B, C, D, E and F shown in FIG. The sintered body can be sintered even at the firing temperature of), and the compact and compact electrical properties can be obtained. In addition, it is possible to reduce the production cost of the sintering furnace at low temperature.

도 3은 본 실시형태에 관한 세라믹콘덴서의 단면 구조를 예시하는 모식 단면도이다.3 is a schematic sectional view illustrating a cross-sectional structure of the ceramic capacitor according to the present embodiment.

상기 세라믹콘덴서는 대향하는 내부전극(2) 간에 상술한 도 1에 나타나 있는 삼각형의 점 A, B, C, D, E 및 F로 둘러싸인 범위 내를 만족하는 조성비의 소결조제를 첨가해 소성된 소결체를 포함하는 유전체층(1)이 설치된 구조를 갖는다. 이는 이 소결체를 시트 형태로 형성한 그린시트의 한쪽 면에 내부전극(2)을 형성하고 이를 복수 매 적층해 소성함으로써 얻어진다. 또 이 적층체의 측면에는 내부전극(2)의 가장자리 부분에 접속된 외부전극(3, 4)이 설치되어 있다.The ceramic capacitor is fired by adding a sintering aid having a composition ratio that satisfies the range surrounded by the points A, B, C, D, E and F of the triangle shown in FIG. 1 described above between the opposing internal electrodes 2. It has a structure provided with a dielectric layer (1) comprising a. This is obtained by forming the internal electrodes 2 on one side of the green sheet in which the sintered body is formed in the form of a sheet, laminating a plurality of them and firing them. Moreover, the external electrodes 3 and 4 connected to the edge part of the internal electrode 2 are provided in the side surface of this laminated body.

내부전극(2)과 외부전극(3, 4)의 재료로는 Cu, Ni, W, Mo 등의 금속 또는 이들의 합금 In-Ga, Ag, Ag-10Pd 합금 등 또는 탄소, 그래파이트, 탄소와 그래파이트의 혼합물 등을 사용할 수 있다.As the material of the internal electrodes 2 and the external electrodes 3, 4, metals such as Cu, Ni, W, Mo, or alloys thereof, In-Ga, Ag, Ag-10Pd alloys, or the like, or carbon, graphite, carbon and graphite Mixtures thereof and the like can be used.

내부전극(2)은 예를 들면 상기 주된 재료로 만들어진 분말에 유기바인더, 분산제, 유기용제, 필요에 따라 환원제 등을 소정량 첨가한 후에 섞어서 반죽해 소정의 점도가 된 유전 페이스트를 그린시트의 한쪽 면에 소정의 패턴이 되도록 인쇄하고 환원분위기에서 소성함으로써 형성된다. 내부전극(2)으로는 비교적 가격이 싼 Ni 또는 Ni 합금이 바람직하다.The internal electrode 2 is a powder made of the main material, for example, a predetermined amount of an organic binder, a dispersant, an organic solvent, a reducing agent, etc. is added, and then mixed and kneaded to obtain a dielectric paste having a predetermined viscosity. It is formed by printing the surface to have a predetermined pattern and firing it in a reducing atmosphere. As the internal electrode 2, Ni or Ni alloy, which is relatively inexpensive, is preferable.

또, 외부전극(3, 4)으로는 저저항이며 가격이 저렴한 점에서 Cu가 바람직하다. 외부전극(3, 4)은 내부 전극(2) 및 유전체층(1)으로 된 적층체에 대해 그 외측면에 도포법 등을 이용하여 형성된다.Moreover, Cu is preferable as the external electrodes 3 and 4 because it is low in resistance and inexpensive. The external electrodes 3 and 4 are formed on the outer surface of the laminate of the internal electrode 2 and the dielectric layer 1 by applying a coating method or the like.

본 실시형태에 관한 세라믹콘덴서에 의하면 1,050℃ 이하의 저온소성이 가능하게 되기 때문에 특히 Ni와 Ni합금을 내부 전극(2)에 사용하는 경우에도 Ni의 구상화수축을 억제할 수 있고 이에 기인하는 적극의 끊어짐과 디라미네이션 등의 구조 결함을 방지할 수 있다. 이에 의해 콘덴서의 용량저하를 억제할 수 있다. 또, 내부전극(2)으로는 공기 중에서 간단히 산화되는 비금속인 Ni 또는 Ni합금을 사용하는 경우에는 이 Ni 또는 Ni합금이 산화되지 않도록 환원성분위기에서 소성할 필요가 있으나 이 경우에 상술한 본 실시형태에 관한 소결조제를 첨가해 소성된 소결체는 내환원성이 우수하고 이 소결체를 사용한 유전체층(1)의 환원을 억제할 수 있다. 이로써, 유전체층(1)의 비유전율을 높일 수 있고 세라믹콘덴서의 용량을 크게 할 수 있다.According to the ceramic capacitor according to the present embodiment, low-temperature firing of 1,050 ° C. or lower is possible, and therefore, spherical shrinkage of Ni can be suppressed even when Ni and Ni alloys are used for the internal electrode 2, thereby resulting in positive Structural defects such as breaks and delaminations can be prevented. As a result, the capacity decrease of the capacitor can be suppressed. In addition, when using Ni or Ni alloy which is a nonmetal which is simply oxidized in air, the internal electrode 2 needs to be fired in a reducing component so that the Ni or Ni alloy is not oxidized, but in this case, the present embodiment described above The sintered compact obtained by adding the sintering aid according to the present invention has excellent reduction resistance and can suppress the reduction of the dielectric layer 1 using the sintered compact. As a result, the dielectric constant of the dielectric layer 1 can be increased and the capacity of the ceramic capacitor can be increased.

다음으로, 본 실시형태에 관한 세라믹콘덴서 제조방법의 일 예에 대해 설명한다.Next, an example of the manufacturing method of the ceramic capacitor which concerns on this embodiment is demonstrated.

우선, 유전체층의 주성분 BaTiO3의 원료로 예를 들면 BaCO3, TiO2를 조합한다.First, for example, BaCO 3 and TiO 2 are combined as a raw material of the main component BaTiO 3 of the dielectric layer.

다음으로, 상기 주성분의 화합물을 볼밀에 넣고 물을 넣어 습식으로 약 20분간 혼합·분쇄를 행해 슬러리로 만든다. 그리고, 이 슬러리를 탈수·건조해 1,000℃ 이상에서 임시로 태운 후 분쇄해 평균 입자 지름이 0.3㎛ 미만이 되도록 입자를 조정했다. 또 평균 입자의 지름은 주사형 전자현미경으로 분말을 관찰하고 100개의 입자의 입자 지름을 측정해서 구했다.Next, the compound of the main component is put into a ball mill, water is added, wet and mixed for about 20 minutes, and pulverized to obtain a slurry. Then, the slurry was dehydrated and dried, temporarily burned at 1,000 ° C. or higher, and then pulverized to adjust the particles so that the average particle diameter was less than 0.3 μm. The average particle diameter was obtained by observing the powder with a scanning electron microscope and measuring the particle diameter of 100 particles.

다음으로, 상기 주성분에 대해 부성분으로 BaCO3, Dy2O3, MgO, Mn3O4의 분말과 또 상술의 소결조제의 분말을 볼밀에 넣어 톨루엔에탄올 혼합용제, 폴리비닐부틸알계 바인더 및 가소제와 함께 적당한 점도가 될 때까지 혼합하고 닥터브레이드법으로 그린시트를 제작했다.Next, a powder of BaCO 3 , Dy 2 O 3 , MgO, Mn 3 O 4 , and the powder of the above-mentioned sintering aid are placed in a ball mill with respect to the main component in a toluene ethanol mixed solvent, a polyvinylbutylal binder, a plasticizer, The mixture was mixed together until a proper viscosity was prepared, and a green sheet was manufactured by the doctor blade method.

다음으로, 각 그린시트 상에 Ni분말로 된 유전 페이스트를 사용해 내부전극을 소정의 형상으로 스크린 인쇄한 후 이 도전 페이스트가 인쇄된 그린시트를 복수 적층하고 열압착해서 일체화해 적층체를 제작했다.Next, after screen printing the internal electrodes in a predetermined shape using a dielectric paste made of Ni powder on each green sheet, a plurality of green sheets printed with the conductive paste were laminated, thermocompression-bonded and integrated to prepare a laminate.

그리고, 이 적층체를 공기 중에서 가열해 유기바인더를 제거한 후 1,100℃의 환원성분위기에서 2시간 소성한 후 또, 1,000℃의 N2가스분위기에서 2시간 재산화처리를 한 다음 내부전극이 노출하고 있는 적층체의 가장자리 면 부분에 외부전극을 가열해 붙여 도 3에 예시된 구조를 제조하였다.The laminate was heated in air to remove the organic binder, calcined for 2 hours in a reducing atmosphere at 1,100 ° C, and then reoxidized for 2 hours in an N 2 gas atmosphere at 1,000 ° C. The external electrode was heated to the edge surface portion of the laminate to prepare the structure illustrated in FIG. 3.

본 발명자 등은 상술한 소결조제의 샘플 A~M을 첨가해 얻은 소결체에 대해 비유전율(ε), 유전손실(tanδ), 비저항, 용량변화율, 밀도를 측정해 평가를 했다. 그 결과를 표2, 표3에 나타냈다.The present inventors evaluated and evaluated the relative dielectric constant (epsilon), dielectric loss (tan-delta), specific resistance, capacity change rate, and density with respect to the sintered compact obtained by adding the samples A-M of the sintering aid mentioned above. The results are shown in Tables 2 and 3.

평가 evaluation 소결조제Sintering aid 소성온도 (℃)Firing temperature (℃) 비유전율εRelative permittivity ε 유전손실tanδ(%)Dielectric loss tanδ (%) 밀도 (g/㎤)Density (g / cm 3) 비저항 (Ω·㎝)Resistivity (Ωcm) 종류Kinds 중량%weight% NGNG AA 1.01.0 10111011 소성불충분 5.53Insufficient plasticity 5.53 AA 1.01.0 10201020 17001700 0.810.81 5.795.79 1.0E+131.0E + 13 AA 1.01.0 10291029 17521752 0.870.87 5.805.80 1.0E+131.0E + 13 AA 1.01.0 10371037 18101810 0.890.89 5.855.85 1.7E+131.7E + 13 AA 1.01.0 10491049 18831883 0.900.90 5.895.89 1.5E-131.5E-13 NGNG BB 1.01.0 10161016 소성불충분 5.28Insufficient plasticity 5.28 BB 1.01.0 10291029 20302030 1.021.02 5.725.72 1.1E+131.1E + 13 BB 1.01.0 10331033 20862086 1.291.29 5.785.78 2.4E+132.4E + 13 BB 1.01.0 10411041 20962096 1.061.06 5.815.81 1.2E+131.2E + 13 BB 1.01.0 10491049 21852185 1.231.23 5.835.83 8.0E+138.0E + 13 NGNG CC 0.60.6 10111011 소성불충분 5.33Insufficient plasticity 5.33 CC 0.60.6 10241024 18531853 1.011.01 5.765.76 2.0E+132.0E + 13 CC 0.60.6 10331033 18981898 1.121.12 5.815.81 2.9E+132.9E + 13 CC 0.60.6 10491049 18901890 1.081.08 5.835.83 3.7E+133.7E + 13

NGNG CC 0.80.80.80.8 10331033 소성불충분 5.69Insufficient Firing 5.69 CC 0.80.8 10491049 18571857 1.111.11 5.845.84 3.5E+133.5E + 13 NGNG DD 0.60.6 10111011 소성불충분 5.56Insufficient plasticity 5.56 DD 0.60.6 10251025 18261826 1.291.29 5.705.70 1.0E+131.0E + 13 DD 0.60.6 10331033 18641864 1.381.38 5.745.74 9.8E+129.8E + 12 DD 0.60.6 10491049 18511851 1.361.36 5.745.74 1.0E+131.0E + 13 NGNG DD 0.80.8 10331033 소성불충분 5.58Insufficient Firing 5.58 DD 0.80.8 10491049 18031803 1.301.30 5.785.78 1.3E+131.3E + 13 NGNG EE 0.60.6 10161016 소성불충분 5.55Insufficient plasticity 5.55 EE 0.60.6 10291029 17931793 1.401.40 5.725.72 5.6E+125.6E + 12 EE 0.60.6 10331033 18051805 1.421.42 5.745.74 7.3E+127.3E + 12 EE 0.60.6 10491049 18001800 1.471.47 5.755.75 9.2E+129.2E + 12 NGNG EE 0.40.4 10331033 소성불충분 5.46Insufficient plasticity 5.46 EE 0.40.4 10491049 17341734 1.291.29 5.795.79 1.4E+131.4E + 13

평가 evaluation 소결조제Sintering aid 소성온도 (℃)Firing temperature (℃) 비유전율 εRelative permittivity ε 유전손실t anδ(%)Dielectric loss t anδ (%) 밀도 (g/㎤)Density (g / cm 3) 비저항 (Ω·㎝)Resistivity (Ωcm) 종류Kinds 중량%weight% NGNG FF 1.01.0 10071007 소성불충분Insufficient plasticity 5.685.68 FF 1.01.0 10161016 17201720 0.730.73 5.785.78 9.4E+129.4E + 12 FF 1.01.0 10251025 17881788 0.840.84 5.835.83 1.1E+131.1E + 13 FF 1.01.0 10331033 18381838 0.830.83 5.845.84 1.7E+131.7E + 13 FF 1.01.0 10411041 19071907 0.880.88 5.895.89 2.1E+132.1E + 13 NGNG GG 1.01.0 10031003 소성불충분Insufficient plasticity 5.505.50 GG 1.01.0 10111011 19821982 1.111.11 5.715.71 1.9E+131.9E + 13 GG 1.01.0 10201020 20192019 1.061.06 5.765.76 2.0E+132.0E + 13 GG 1.01.0 10331033 20392039 1.001.00 5.855.85 2.4E+132.4E + 13 GG 1.01.0 10411041 20952095 0.990.99 5.895.89 2.2E+132.2E + 13 GG 1.01.0 10491049 20912091 1.021.02 5.875.87 2.4E+132.4E + 13 NGNG HH 1.01.0 10031003 소성불충분Insufficient plasticity 5.585.58 HH 1.01.0 10111011 16001600 1.181.18 5.705.70 1.0E+131.0E + 13 HH 1.01.0 10161016 16401640 1.111.11 5.735.73 1.6E+131.6E + 13 HH 1.01.0 10251025 17361736 1.261.26 5.785.78 1.7E+131.7E + 13 HH 1.01.0 10291029 17431743 1.021.02 5.805.80 1.8E+131.8E + 13 HH 1.01.0 10371037 18851885 1.271.27 5.855.85 1.5E+131.5E + 13 HH 1.01.0 10491049 20222022 1.271.27 5.905.90 1.1E+131.1E + 13 NGNG II 1.01.0 997997 소성불충분Insufficient plasticity 5.645.64 II 1.01.0 10071007 17241724 1.071.07 5.725.72 1.5E+131.5E + 13 II 1.01.0 10161016 17591759 1.161.16 5.735.73 1.4E+131.4E + 13 II 1.01.0 10331033 18831883 1.211.21 5.755.75 1.5E+131.5E + 13 II 1.01.0 10491049 19451945 1.271.27 5.775.77 1.3E+131.3E + 13 NGNG JJ 1.01.0 10161016 소성불충분Insufficient plasticity 5.625.62 JJ 1.01.0 10251025 18531853 1.191.19 5.725.72 1.6E+131.6E + 13 JJ 1.01.0 10331033 19051905 1.271.27 5.735.73 1.5E+131.5E + 13 JJ 1.01.0 10491049 19491949 1.371.37 5.745.74 1.1E+131.1E + 13 NGNG KK 1.01.0 10491049 소성불충분Insufficient plasticity 5.675.67 NGNG LL 1.01.0 10491049 소성불충분Insufficient plasticity 5.695.69 NGNG MM 1.01.0 10491049 소성불충분Insufficient plasticity 5.595.59

평가시료는 이하와 같이 제작했다. 주성분으로 티탄산바륨을 부성분으로 BaCO3, Dy2O3, MgO, Mn3O4를 또 상술의 샘플 A~M을 소결조제로 포함하는 그린시트를 1(㎝) 각도로 자르고 두께가 1(㎜)가 되도록 쌓았다. 다음으로 이것을 1000(㎏/㎤)의 압력으로 성형한다. 계속해서 수지성분을 소각하기 위해 300℃에서 10시간 공기 중에서 소성을 행한 후 N2, H2 및 H2O로 된 혼합가스의 환원성분위기에서 표2에 나타낸 소성온도로 환원분위기에서 2시간 소성했다. 그 후 질소가스 안에서 1000℃로 안정시켜 2시간 재산화 처리를 행했다. The evaluation sample was produced as follows. A green sheet containing barium titanate as a main component and BaCO 3 , Dy 2 O 3 , MgO, Mn 3 O 4 as the main components and the above-mentioned samples A to M as a sintering aid was cut at an angle of 1 cm and the thickness was 1 (mm). ) To be stacked. Next, this is molded at a pressure of 1000 (kg / cm 3). Subsequently, calcining was carried out at 300 ° C. for 10 hours in order to incinerate the resin component, and then calcined at a reducing atmosphere for 2 hours in the reducing atmosphere of the mixed gas of N 2 , H 2 and H 2 O at the firing temperatures shown in Table 2. . Then, it stabilized at 1000 degreeC in nitrogen gas, and the reoxidation process was performed for 2 hours.

각 평가시료에 있어서, 주성분인 티탄산바륨(Ba/Ti)의 비는 0.998에서 1.003이다. 이 주성분에 대해 Ba 원소 첨가량은 1.0 몰퍼센트, Dy 원소 첨가량은 0.9 몰퍼센트, Mg 원소 첨가량은 1.1 몰퍼센트, Mn 원소 첨가량은 0.2 몰퍼센트이다. 소결조제의 각 샘플 A~M의 주성분에 대한 첨가량(중량부)은 표2와 같이 다양하게 변경했다.In each evaluation sample, the ratio of barium titanate (Ba / Ti) as a main component is 0.998 to 1.003. Ba element addition amount is 1.0 mol%, Dy element addition amount is 0.9 mol%, Mg element addition amount is 1.1 mol%, and Mn element addition amount is 0.2 mol% with respect to this main component. The addition amount (weight part) with respect to the main component of each sample A-M of a sintering aid was changed variously as Table 2.

밀도(g/㎤)는 아르키메데스법을 이용하여 측정했다.Density (g / cm <3>) was measured using the Archimedes method.

각 종 전기특성의 측정은 상기 평가시료의 양끝 면에 In-Ga를 도포해 콘덴서 구조로 한 후에 행했다.The electrical characteristics of each species were measured after In-Ga was applied to both ends of the evaluation sample to form a condenser structure.

비유전율ε은 주파수 1(㎑), 전압 1.0(ν)의 조건으로 LCR 미터를 이용해 정전용량을 측정하고 이 측정으로 얻어진 정전용량, 유전체층의 두께 및 전극면적에서 산출했다. The relative permittivity? Was measured using an LCR meter under the condition of frequency 1 (kW) and voltage 1.0 (?), And was calculated from the capacitance, the thickness of the dielectric layer, and the electrode area obtained by the measurement.

유전손실tanδ(%)은 상기 비유전율과 동일 조건 하에서 LCR 미터를 이용해 측정했다.Dielectric loss tan δ (%) was measured using an LCR meter under the same conditions as the relative dielectric constant.

비저항(Ω/㎝)은 25℃의 조건 하에서 직류 250(ν)의 전압을 1분간 인가해 측정했다.Specific resistance (kV / cm) was measured by applying the voltage of direct current 250 ((nu)) for 1 minute on 25 degreeC conditions.

밀도가 5.7(g/㎤) 이상, 비유전율이 1600 이상, 유전손실이 3.0(%) 이하 내로 적어도 하나를 만족하지 않는 경우 원하는 특성을 얻지 못해 평과결과를 「NG」로 했다.When the density did not satisfy at least one of 5.7 (g / cm 3) or more, relative permittivity of 1600 or more, and dielectric loss of 3.0 (%) or less, desired characteristics were not obtained and the evaluation result was "NG".

표 2에 의하면, 도 1에 나타낸 삼각형의 점 A, B, C, D, E 및 F로 둘러싸인 범위 내를 만족하는 조성비의 소결조제라면 주성분(티탄산바륨)에 대한 점가량을 적절히 설정함으로써 상기 각 조건을 만족하는 밀도이며 전기특성에도 우수한 소결체 및 콘덴서를 1050℃이하의 저온소성으로 얻을 수 있다는 결과를 얻었다.According to Table 2, if the sintering aid of the composition ratio that satisfies the range surrounded by the points A, B, C, D, E and F of the triangle shown in Fig. 1 is appropriately set by the point amount for the main component (barium titanate), The result was that a sintered compact and a condenser having a high density and satisfactory electrical characteristics can be obtained at a low temperature baking of 1050 캜 or lower.

또, 본 발명자 등은 유전체층과 전극을 적층한 시료에 대한 각종 평가를 행했다.Moreover, the present inventors performed various evaluations about the sample which laminated | stacked the dielectric layer and the electrode.

소결조제Sintering aid 소성온도 (℃)Firing temperature (℃) 비유전율εRelative permittivity ε 유전손실 tanδDielectric loss tanδ 절연저항 logR(Ω)Insulation resistance logR (Ω) -55℃의 용량변화율(%)Capacity change rate of -55 ℃ (%) 88℃의 용량변화율(%)Capacity change rate of 88 ℃ (%) 종류Kinds 중량부Parts by weight AA 1.01.0 10371037 25702570 5.55.5 10.210.2 -3.9-3.9 -14.6-14.6 BB 1.01.0 10411041 29342934 6.46.4 10.110.1 -3.5-3.5 -0.1-0.1 CC 0.60.6 10331033 27712771 6.56.5 10.110.1 -3.4-3.4 -6.6-6.6 DD 0.60.6 10491049 27102710 5.55.5 10.110.1 -3.5-3.5 -7.8-7.8 EE 0.60.6 10491049 26282628 6.66.6 10.410.4 -3.5-3.5 -8.6-8.6 FF 1.01.0 10451045 27832783 6.26.2 10.110.1 0.60.6 -5.6-5.6 GG 1.01.0 10411041 28912891 5.65.6 10.310.3 -4.9-4.9 -4.7-4.7 HH 1.01.0 10371037 27402740 5.85.8 10.210.2 -2.9-2.9 -3.6-3.6 II 1.01.0 10491049 27002700 6.16.1 10.110.1 -3.0-3.0 -6.1-6.1 JJ 1.01.0 10491049 27302730 6.36.3 10.210.2 -3.2-3.2 -7.2-7.2

유전체층 한 층별 두께는 5㎛이고 유효 유전체층은 10층으로 했다. 또, 한 층별 내부(대향) 전극면적은 0.91(㎟)로 했다.The thickness of each dielectric layer was 5 mu m and the effective dielectric layer was 10 layers. In addition, the inner (facing) electrode area per layer was set to 0.91 (mm 2).

유전체층은 표 2를 참조해 상술한 평가시험과 같이 이하와 같은 방법으로 제작했다. 주성분으로 티탄산바륨을 부성분으로 BaCO3, Dy2O3, MgO, Mn3O4를 또 표 4에 나타낸 종류의 소결조제를 포함하는 슬러리를 닥터브레이드법으로 PET 필름으로 도포하고 소성 후 5㎛가 된 그린시트를 성형했다. 만들어진 그린시트에 내부전극인 Ni 페이스트를 인쇄해 형성했다. 이들을 10층으로 적층하고 열압착해서 적층체를 만들었다. 이어서, 이 적층체를 폭 2.0㎜, 길이 3.8㎜, 두께 0.6㎜가 되도록 가공했다. 다음으로 이를 대기 중 300℃에서 10시간 가열해 유기바인더(수지성분)를 소각했다. 그 후 N2, H2 H2O로 된 혼합가스의 환원분위기에서 표 4에 나타낸 소성온도로 2시간 소성했다. 다음으로 질소가스분위기에서 1000℃로 안정시켜 2시간 재산화 처리를 행했다. 그 후, 소결시킨 적층체 외측면(대향하는 위치에 있는 절단면)에 Cu로 된 도전성 페이스트를 도포하고 N2가스분위기에서 650℃의 온도로 달구어 붙여서 도 3에 나타낸 것과 같이 내부전극과 전기적으로 접속된 외부전극을 형성해 적층 세라믹콘덴서를 작성했다. 각 평가시료에서 주성분인 티탄산바륨의(Ba/Ti) 비는 0.998이다. 이 주성분에 대해 Ba 원소 첨가량은 Ba 화합물의 Ba로 환산해 1.0 몰부이며 Dy 원소 첨가량은 Dy 화합물의 Dy로 환산해 0.9 몰부이고 Mg 원소 첨가량은 Mg 화합물의 Mg로 환산해 1.1 몰부이며 Mn 원소 첨가량은 Mn 화합물의 Mn으로 환산해 0.2 몰부이다. 소결조제의 각 샘플의 주성분에 대한 첨가량(중량부)은 표 4에 나타낸 바와 같다. 각종 특성의 측정방법으로 비유전율ε은 주파수 1(㎑), 전압 1.0(ν)의 조건에서 LCR 미터를 이용해 정전용량을 측정하고 이 측정에 의해 얻어진 정전용량, 유전체층의 두께 및 내부전극면적에서 산출했다. 유전손실tanδ(%)은 비유전율과 동일한 조건하에서 LCR 미터를 이용해 측정했다. 용량변화율은 각 적층 세라믹콘덴서를 상온의 통에 넣어 -55℃에서 85℃의 각 온도에서 주파수 1(㎑), 전압 1.0(ν)의 조건으로 LCR 미터를 이용해서 정전용량은 측정했다.The dielectric layer was produced by the following method as in the evaluation test described above with reference to Table 2. As a main component, barium titanate was used as a secondary component, and BaCO 3 , Dy 2 O 3 , MgO, Mn 3 O 4 , and a slurry containing a sintering aid of the kind shown in Table 4 were applied to the PET film by the doctor blade method. Molded green sheets were molded. Ni paste, an internal electrode, was printed on the green sheet. These were laminated | stacked in 10 layers and thermocompression-bonded to make the laminated body. Next, this laminated body was processed so that it might become width 2.0mm, length 3.8mm, and thickness 0.6mm. Next, it was heated for 10 hours at 300 ° C. in the air to incinerate the organic binder (resin component). Thereafter, the mixture was calcined for 2 hours at the firing temperature shown in Table 4 in a reducing atmosphere of a mixed gas of N 2 and H 2 H 2 O. Next, it was stabilized at 1000 degreeC in nitrogen gas atmosphere, and the reoxidation process was performed for 2 hours. Thereafter, a conductive paste made of Cu is applied to the outer surface of the sintered laminate (cutting surface at the opposite position), and heated at 650 ° C. in an N 2 gas atmosphere to be electrically connected to the internal electrode as shown in FIG. 3. The formed external electrode was formed to create a multilayer ceramic capacitor. The ratio (Ba / Ti) of barium titanate as a main component in each sample was 0.998. For this main component, the amount of Ba element added is 1.0 mol part in terms of Ba of Ba compound, the amount of Dy element added is 0.9 mol part in Dy of Dy compound, the amount of Mg element is 1.1 mol part in Mg of Mg compound, and the amount of Mn element added is It is 0.2 mol part in terms of Mn of Mn compound. The addition amount (weight part) with respect to the main component of each sample of a sintering aid is as showing in Table 4. As a method of measuring various characteristics, the relative permittivity ε is measured by using an LCR meter under the condition of frequency 1 (㎑) and voltage 1.0 (ν), and calculated from capacitance, thickness of dielectric layer and internal electrode area obtained by this measurement. did. The dielectric loss tanδ (%) was measured using an LCR meter under the same conditions as the relative dielectric constant. The capacitance change rate was measured using an LCR meter under conditions of a frequency of 1 (Hz) and a voltage of 1.0 (ν) at temperatures of -55 ° C to 85 ° C in each laminated ceramic capacitor.

표 4의 결과보다 상술한 본 실시형태에 관한 소결조제를 이용해 얻은 적층체는 EIA(Electronic Industries Association)의 X5R규격(-55℃에서 85℃의 용량변화율(25℃기준)이 플러스 마이너스 15%)에 적합한 것이 확인되었다. The laminated body obtained using the sintering aid which concerns on this embodiment mentioned above from the result of Table 4 is the X5R specification of EIA (Electronic Industries Association) (capacity change rate of (-55 degreeC to 85 degreeC (25 degreeC reference | standard) plus minus 15%)). It was confirmed that it is suitable for.

도 1은 본 발명의 실시형태에 관한 소결조제에 포함되는 제1 ~ 제3 성분의 조성범위를 나타내는 삼각형이다.BRIEF DESCRIPTION OF THE DRAWINGS It is a triangle which shows the composition range of the 1st-3rd component contained in the sintering aid which concerns on embodiment of this invention.

도 2는 본 발명의 실시형태에 관한 소결조제 제조방법의 플로우 차트이다.2 is a flow chart of a sintering aid manufacturing method according to the embodiment of the present invention.

도 3은 본 발명의 실시형태에 관한 세라믹콘덴서의 단면구조를 예시하는 모식 단면도이다.3 is a schematic sectional view illustrating a cross-sectional structure of a ceramic capacitor according to an embodiment of the present invention.

<도면의 주요부분에 대한 부호설명><Code Description of Main Parts of Drawing>

1: 유전체층 1: dielectric layer

2: 내부전극 2: internal electrode

3: 외부전극3: external electrode

Claims (4)

실리콘(Si) 화합물로 된 제1 성분과 붕소(B) 화합물 및 알루미늄(Al) 화합물 중 적어도 하나를 포함하는 제2 성분과 바륨(Ba) 화합물, 아연(Zn) 화합물 및 칼슘(Ca) 화합물 중 적어도 하나를 포함하는 제3 성분을 포함하는 소결조제이며,Among the second component comprising at least one of a first component of a silicon (Si) compound, a boron (B) compound, and an aluminum (Al) compound, and a barium (Ba) compound, a zinc (Zn) compound, and a calcium (Ca) compound. A sintering aid comprising a third component comprising at least one, 상기 제1 성분의 몰비를 X, 상기 제2 성분의 몰비를 Y, 상기 제3 성분의 몰비를 Z로 한 경우 이들 제1 성분, 제2 성분, 제3 성분의 몰비에 의한 조성비(X, Y, Z)는 점(X, Y, Z) = (1, 0, 0), 점(X, Y, Z) = (0, 1, 0) 및 점(X, Y, Z) = (0, 0, 1) 3점을 꼭지점으로 하는 삼각형의 점A(X, Y, Z) = (0.21, 0.37, 0.42), 점B(X, Y, Z) = (0.364, 0.192, 0.444), 점C(X, Y, Z) = (0.47, 0.174, 0.356), 점D(X, Y, Z) = (0.618, 0.182, 0.20) 및 점E(X, Y, Z) = (0.618, 0.228, 0.154) 및 점F(X, Y, Z) = (0.261, 0.375, 0.364)로 둘러싸인 범위 내를 만족하는 것을 특징으로 하는 소결조제. When the molar ratio of the first component is X, the molar ratio of the second component is Y and the molar ratio of the third component is Z, the composition ratio (X, Y) by the molar ratio of these first components, the second component, and the third component , Z) points (X, Y, Z) = (1, 0, 0), points (X, Y, Z) = (0, 1, 0) and points (X, Y, Z) = (0, Points A (X, Y, Z) = (0.21, 0.37, 0.42), Point B (X, Y, Z) = (0.364, 0.192, 0.444), Point C (X, Y, Z) = (0.47, 0.174, 0.356), point D (X, Y, Z) = (0.618, 0.182, 0.20) and point E (X, Y, Z) = (0.618, 0.228, 0.154 ) And point F (X, Y, Z) = (0.261, 0.375, 0.364) in the range surrounded by the sintering aid. 티탄산바륨을 주성분으로 포함하는 원료에 제1항에 기재된 소결소제를 첨가하고 소성하여 제조된 것을 특징으로 하는 소결체.A sintered compact prepared by adding and sintering the sintering agent according to claim 1 to a raw material containing barium titanate as a main component. 복수의 전극과,A plurality of electrodes, 상기 전극 간에 설치되어 제2항에 기재된 소결체로 만들어진 유전체층을 구비하는 것을 특징으로 하는 세라믹콘덴서.A ceramic capacitor, provided between the electrodes, comprising a dielectric layer made of the sintered body according to claim 2. 제3항에 있어서,The method of claim 3, 상기 전극은 Ni 또는 Ni합금을 포함하는 것을 특징으로 하는 세라믹콘덴서.The electrode is a ceramic capacitor, characterized in that it comprises Ni or Ni alloy.
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