KR20080059716A - System for manage unity parts of semiconductor manufacturing equipment and application method of hindrance parts - Google Patents

Abstract

A system for managing unity parts of semiconductor manufacturing equipment and an application method of hindrance parts are provided to prevent consumption of an unnecessary time by performing an application process rapidly. A PDA(52) includes a bar code reader for reading bar codes attached to parts in order to apply corresponding hindrance parts. A mobile application server(54) is connected to the PDA through the internet(56) in order to receive data related to part information from the PDA and to transmit the received data to an equipment management server(58). The mobile application server transmits the information received from the equipment management server to the PDA. The equipment management server is connected to the internet in order to manage unity parts and receive application information related to the hindrance parts. The equipment management server manages the unity parts and stores the application information related to the hindrance parts.

Description

System for manage unity parts of semiconductor manufacturing equipment and Application method of hindrance parts}

1 is a configuration diagram of a system for managing integrated parts of a conventional semiconductor manufacturing facility

2 is an exemplary diagram showing a state where a failure occurs on a monitor

3 to 6 are examples of screen display states for performing a procedure for applying for a faulty part.

7 is a block diagram of an integrated parts management system according to an embodiment of the present invention.

8 is a control flowchart for requesting a work request for a broken component by reading a barcode using a PDA 52 according to an embodiment of the present invention.

<Description of Symbols for Main Parts of Drawings>

50: barcode 52: PDA

54: mobile application server 56: Internet network

58: facility maintenance management server 60: database

The present invention relates to a circulating product management system and a method of the semiconductor manufacturing equipment, and in particular, in the semiconductor manufacturing line, the application for receiving and managing barcodes by using a PDA to replace a component for replacement in the event of a failure of a specific component of the equipment. An integrated parts management system for semiconductor manufacturing equipment.

In general, with the development of science and technology outside of modern times, various electronic devices have been developed, and these electronic devices have been highly functionalized and miniaturized due to the development of semiconductor devices having high integration density.

The manufacture of semiconductor devices requires a high degree of precision, and in order to manufacture semiconductor devices, most semiconductor manufacturing facilities, such as thin film deposition equipment and etching equipment, according to the semiconductor device manufacturing process are arranged in the semiconductor manufacturing line. The manufacturing process is performed.

Such semiconductor manufacturing facilities are generally installed in two parts, a process facility in which a predetermined process for a wafer is substantially progressed, and a supply facility connected to the process facility to assist a predetermined process performed in the process facility.

At this time, the process equipment and supply equipment are separated from each other in an interconnected state in order to prevent accidental accidents that may occur during the space utilization side or process progress. Therefore, the process equipment is provided in the FAB (Fablication) line and the supply equipment is located in the underground tank or the service area.

On the other hand, the process service is connected on-line with a host computer having a predetermined data collection function, and various data related to the process equipment are input and stored in the host computer. At this time, the process equipment can perform continuous data exchange through, for example, a Semi Equipment Communication Standard (SECS) protocol through a predetermined communication port in charge of data communication with the host computer.

On the other hand, when managing data on integrated parts (circulating pumps, generators, SMCs, electronic devices, etc.) that are put into the process and supply facilities, the operator manages the integrated parts before inserting the integrated parts into the process and supply facilities. The data was stored on the host computer through the keyboard of the computer.

1 is a configuration diagram of a system for managing integrated parts of a conventional semiconductor manufacturing facility.

A host computer (10) for storing and managing stock quantity and integrated parts request information for integrated parts;

The terminal 12 is connected to the host computer 10, respectively, and controls the terminal 12 for controlling online inquiry of the stock of the integrated parts or requesting the integrated parts online for replacement.

The terminal 12 is located on each FAB line and can be connected in plural, and is installed at a different remote location from the host computer 10 and connected through an internet network.

In the process facility, if a fault occurs during the process, the fault occurs on the monitor as shown in FIG. The engineer checks the location of the failure and, for example, if the pump installed in the basement has a failure, it moves to the basement, finds the location of the failed pump and records the serial number (S / N) of the pump on a paper. Go to the FAB line is installed through the terminal 12 to request the work request of the pump that has a failure. The host computer 10 and the plurality of terminals 12 are connected through an internet network. In the terminal 12, when a URL address is input to connect with the host computer 10, which is the facility maintenance management system AEGIS, the communication network is connected. When the communication network is connected to the host computer 10 and the terminal 12, menu screen data is transmitted from the host computer 10 to the terminal 12 and displayed as shown in FIG. 3. When the engineer clicks WRS on the menu screen displayed on the terminal 12 as shown in FIG. 3, the host computer 10 transmits the menu screen data to the terminal 12 to display the screen as shown in FIG. 4. When the engineer clicks the WRS circular goods request menu on the menu screen displayed on the terminal 12 as shown in FIG. 4, the host computer 10 transmits the menu screen data to the terminal 12 to display the screen as shown in FIG. 5. When the engineer clicks the circulating product TYPE → PUMP in the menu screen displayed on the terminal 12 as shown in FIG. 5, the host computer 10 transmits the menu screen data to the terminal 12 to display the screen as shown in FIG. 6. In the menu screen displayed on the terminal 12 as shown in FIG. 6, the engineer enters the serial number (S / N) of the pump, the work request date and the work request information, and clicks the save icon (application completion key). Stores this work request information in the database. When the application for the circulator is completed, the engineer calls the person in charge to determine whether the circulator is in stock and makes an application for the desired circulator.

 As described above, if a failure occurs in the process equipment during the process, the faulty part of the process equipment and the supply equipment is checked, and the base equipment installed in the failed component is recorded, the serial number is recorded on paper, and the terminal 12 is again underground. ) Up to the installed FAB has to apply for a work request through the terminal 12, so there was a problem that the productivity is significantly reduced because unnecessary time is required.

The object of the present invention for solving the conventional problems as described above, in the process equipment, if a failure occurs during the process, go to the location installed on the failed component to read the failed barcode through the PDA to immediately apply for a work request The present invention provides a circulation product management system of a semiconductor manufacturing facility and a method for applying for a failure part that can improve productivity.

In the circulating product management system of the semiconductor manufacturing equipment of the present invention for achieving the above object, there is provided a bar code reader for reading the bar code attached to the component, PDA for enabling the application of the failed component, the PDA and wireless A mobile application server for connecting the Internet network, receiving data on parts information transmitted from the PDA, transmitting data to the facility maintenance management server through the Internet network, and transmitting the information received from the facility maintenance management server to the PDA; And a facility maintenance management server connected to the Internet network to control inventory management and work request application information for integrated parts and to store inventory management and work request application information for integrated parts. It features.

The facility maintenance management server is characterized by having a database for storing inventory management and work request application information for the integrated parts.

In order to achieve the above object, the method for requesting a work request for a faulty component for a semiconductor manufacturing apparatus according to the present invention comprises the steps of: displaying a WRS recycling product management menu when connecting to a facility maintenance management server through a wireless Internet through a PDA; And displaying a circulating product type selection menu on the PDA when selecting a WRS circulating product request menu on the WRS circulating product management menu displayed on the PDA, and a barcode when selecting a circulating product type on the circulating product type selection menu. Displaying an input request message on the PDA and storing the failed part request information in a database when a barcode for a defective part is input through a barcode reader provided in the PAD in response to the barcode request input request message; Characterized in that it consists of a step of completing the work request application.

When inputting a bar code for the faulty part is characterized in that it further comprises displaying the current inventory status of the part corresponding to the bar code.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings. The present invention is not limited to the embodiments disclosed below, but can be implemented in various other forms without departing from the scope of the present invention, the present embodiment only to make the disclosure of the present invention complete, common knowledge It is provided to fully inform the person of the scope of the invention.

7 is a block diagram of an integrated parts management system according to an embodiment of the present invention.

A bar code 50 attached to the parts of the facility,

A PDA (Personal Digital Assistants) 52 provided with a barcode reader for reading the barcode 50 so as to request a work request for a component having a failure;

The Internet network 56 is wirelessly connected to the PDA 52 and receives data on parts information transmitted from the PDA 52 and transmitted to the facility maintenance management server 58 through the Internet network 56. A mobile application server 54 for transmitting the information received from the facility maintenance management server 58 to the PDA 52;

A facility maintenance management server 58 connected to the Internet network 54 and controlling to receive inventory management and work request application information for integrated parts;

Is connected to the facility maintenance management server 58 is composed of a database 60 for storing inventory management and work request application information for the integrated parts

8 is a control flowchart for requesting a work request application for a broken component by reading a barcode using a PDA 52 according to an embodiment of the present invention.

7 to 8, the operation of the preferred embodiment of the present invention will be described in detail.

In the process equipment, if a failure occurs during the process, the fault is displayed on the monitor as shown in FIG. The engineer checks the location of the fault and, for example, if the underground pump fails, it moves underground to find the faulty pump location. In step 101, a menu for connecting the facility maintenance management server 58 by operating the key input unit of the PDA 52, for example, Aegis Start Center is selected, and proceeds to step 102. In step 102, the PDA 52 is connected to the facility maintenance management server 58 through the wireless Internet network. In step 103, the facility maintenance management server 58 displays the menu screen for facility maintenance management to the PDA 52 through the Internet network 54 and the mobile application server 54 as shown in FIG. When a menu as shown in Fig. 2 is displayed on the PDA 52, the engineer clicks on the WRS icon. Then, in step 104, the facility maintenance management server 58 checks whether the WRS icon is clicked, and proceeds to step 105 when the WRS icon is clicked. In step 105, the facility maintenance management server 58 displays a menu such as a WRS recirculation component request, a WRS request, a circular specification registration, a circular product code management, a circular product specification management, and the like on the PDA 52 as shown in FIG. When the engineer selects the WRS circular parts request icon on the screen of FIG. 3, in step 106, the facility maintenance management server 58 checks whether the WRS circular parts request icon is clicked, and proceeds to step 107 when the WRS circular parts request icon is clicked. . In step 107, the facility maintenance management server 58 displays on the PDA 52 a menu for selecting a circulating product type. The engineer then selects the circulatory product TYPE displayed on the PDA 52. Recycling product type selection, for example, the engineer selects PUMP. Thereafter, in step 108, the facility maintenance management server 58 checks whether the circulatory product type is selected, and proceeds to step 109 when the circulatory product TYPE is selected. When the selection of the circulating product type is completed, the facility maintenance management server 58 displays the barcode read request message on the PDA 52 in step 109. At this time, the engineer reads the bar code attached to the pump by using the barcode reader provided in the PDA 52. The facility maintenance management server 58 then checks whether the barcode is read in step 110 and proceeds to step 111 when the barcode is read. In step 111, the facility maintenance management server 58 to display the current inventory status information on the PDA 52, the engineer can check the inventory status information for this pump. The engineer who confirms the stock status information in this way clicks the application completed icon shown in FIG. Then, in step 112, the facility maintenance management server 58 checks whether the application completion key is input and proceeds to step 113 if the application completion key is input. In step 113, the facility maintenance management server 58 stores the circulating product work request information in the database 60.

As described above, according to the present invention, if a failure occurs during the process of the process, check the failure site of the process equipment and supply equipment, go to the basement installed in the failed component and record the serial number on paper and then the terminal again in the basement Since the bar code attached to the broken parts is read through the PDA directly to the site without moving to the installed FAB, it can be processed quickly and conveniently without wasting unnecessary time in order to improve productivity. There is an advantage to this.

Claims (4)

In the parts management system, A PDA with a barcode reader for reading barcodes attached to the components, and a PDA for requesting a work request for a component having a failure; The Internet network is wirelessly connected to the PDA, receives data on parts information transmitted from the PDA, transmits the data to the facility maintenance management server through the Internet network, and transmits the information received from the facility maintenance management server to the PDA. Mobile application server, It is connected to the Internet network and controls to receive the inventory management and work request application information for the integrated parts and at the same time includes a facility maintenance management server for controlling to store the inventory management and work request information for the integrated parts Parts management system. The method of claim 1, The facility maintenance management server is a parts management system, characterized in that it has a database for storing the inventory management and work request application information for the integrated parts. In the request method for requesting work of a faulty part for a semiconductor manufacturing facility, Displaying on the PDA displaying the WRS recycling product management menu when connecting to the facility maintenance management server via the wireless Internet through a PDA; Displaying a circulating product type selection menu on the PDA when the WRS circulating product request menu is selected in the WRS circulating product management menu displayed on the PDA; Displaying a barcode input request message on the PDA when selecting a recycled product type from the recycled product type selection menu; In response to the barcode request input request message, when the barcode for the defective part is input through the barcode reader provided in the PAD, storing the failed part work request information in a database and completing a work request application; To apply for a defective component in a semiconductor manufacturing facility. The method of claim 3, When the bar code for the defective part is input, the method for requesting a failed part, characterized in that it further comprises displaying the current inventory status of the part corresponding to the barcode.

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