KR20080051255A - Apparatus of forming a organic layer - Google Patents

Abstract

An apparatus for forming an organic layer is provided to analyze a thickness of the organic layer for each position of a substrate by mounting a deposition speed sensing unit for sensing deposition speed of an organic material according to a position of the substrate between a substrate fixing unit and an organic cell. An apparatus(1000) for forming an organic layer includes a vacuum chamber(100), an organic cell(200), a substrate fixing unit(300), a deposition speed sensing unit(400), and a thickness analyzing unit(500). The organic cell injects an organic material(10) in the vacuum chamber. The substrate fixing unit is installed in the vacuum chamber, which fixes a substrate(20) deposited with the organic layer by the organic material. The deposition speed sensing unit is installed around the substrate fixing unit between the organic cell and the substrate fixing unit, which senses the deposition speed of the organic material according to a position of the substrate. The thickness analyzing unit is connected to the deposition speed sensing unit which analyzes a thickness of the organic layer through the sensed deposition speed.

Description

Organic film forming apparatus {APPARATUS OF FORMING A ORGANIC LAYER}

1 is a side view schematically showing an organic film forming apparatus according to an embodiment of the present invention.

FIG. 2 is a plan view illustrating an embodiment of a deposition rate detecting unit illustrated in FIG. 1.

3 is a plan view illustrating another embodiment of the deposition rate detecting unit illustrated in FIG. 1.

4 is a plan view illustrating yet another embodiment of the deposition rate detecting unit illustrated in FIG. 1.

<Explanation of symbols for the main parts of the drawings>

10 organic matter 20 substrate

100: vacuum chamber 200: organic cell

300: substrate fixing part 400: deposition rate detection unit

410: first guide rail 420: second guide rail

430: deposition rate sensor 500: thickness analysis unit

600: injection speed detection unit 700: injection speed control unit

800: rotating device 900: chamber opening

1000: Organic Film Forming Device

The present invention relates to an organic film forming apparatus, and more particularly, to an organic film forming apparatus capable of analyzing the thickness of an organic film simply and accurately.

The organic light emitting display device is one of a thin display device that displays an image by using an organic light emitting material capable of generating light, and is widely used because it can be manufactured thinner than other thin display devices. In particular, the light supplied from the backlight assembly is attracting more attention because it passes through a liquid crystal having an electro-optic characteristic, thereby making it thinner than a liquid crystal display for displaying an image.

An organic light emitting display device has a structure in which first and second electrodes are formed on a thin transparent substrate, and an organic light emitting layer is formed therebetween. The organic light emitting layer is a material capable of generating light by itself by an electric field applied from the first and second electrodes. That is, the organic light emitting display device may implement an image desired by a user by varying driving voltages applied to the first and second electrodes according to positions.

The organic light emitting layer has a structure in which a plurality of organic films are deposited on a transparent substrate to realize various colors. These organic films are formed through a separate organic film forming apparatus.

The substrate on which the organic film is formed is taken out of the organic film forming apparatus and analyzed for the thickness of each substrate by using a separate thickness measuring equipment. This is to confirm the thickness of the organic film for each position of the substrate, and then control the organic film forming apparatus again, and as a result, to form a uniform organic film.

However, the process of analyzing the thickness of such an organic film has the trouble of measuring after removing a board | substrate as mentioned above.

Accordingly, the present invention has been made in view of such a problem, and the present invention provides an organic film forming apparatus capable of simply and accurately analyzing the thickness of an organic film for each position of a substrate.

The organic film forming apparatus according to an aspect of the present invention described above includes a vacuum chamber, an organic cell, a substrate fixing unit, a deposition rate detecting unit, and a thickness analyzing unit. The organic cell injects organic substances from the vacuum chamber. The substrate fixing part is disposed in the vacuum chamber, and fixes the substrate on which the organic film is deposited by the organic material. The deposition rate detector is disposed between the organic cell and the substrate fixing portion to be adjacent to the substrate fixing portion, and detects a deposition rate of the organic material according to the position of the substrate. The thickness analyzer is connected to the deposition rate detector to analyze the thickness of the organic layer through the detected deposition rate.

The deposition rate detecting unit is coupled to both sides of the vacuum chamber to be moved along the x-axis direction, and is coupled to both sides of the vacuum chamber so as to be perpendicular to the first guide rail and coupled to both sides of the vacuum chamber and is perpendicular to the x-axis. And a deposition speed sensor disposed at an intersection area of the first and second guide rails moving along the second sensing rail and detecting the deposition rate.

Alternatively, the deposition rate detecting unit may include a guide rail and a plurality of deposition rate sensors disposed at regular intervals at regular intervals on the guide rail to detect the deposition rate. In this case, the guide rail may be coupled to both sides of the vacuum chamber facing each other and move along a direction perpendicular to the longitudinal direction. The substrate fixing part may include a mask frame for fixing a mask for determining the shape of the organic layer. Thus, the guide rail may be coupled to opposite sides of the mask frame to move in a direction perpendicular to the longitudinal direction.

On the other hand, the organic film forming apparatus is disposed adjacent to the organic cell and having an injection speed sensor having an injection speed sensor for detecting the injection speed of the organic material and connected to the injection speed detection unit and the organic cell to control the injection speed It may further include an injection speed control unit. Here, the deposition rate sensor may be the same as the injection rate sensor.

The organic film forming apparatus may further include a rotating device that rotates the substrate fixing part to uniformly deposit the organic film on the substrate.

According to the organic film forming apparatus, a deposition rate detecting unit for detecting the deposition rate of the organic material according to the position of the substrate between the substrate fixing portion and the organic cell is disposed, and by analyzing the thickness of the organic film for each position of the substrate, The process can be done in real time, simply and accurately.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a side view schematically showing an organic film forming apparatus according to an embodiment of the present invention, Figure 2 is a plan view showing an embodiment of a deposition rate detecting unit shown in FIG.

1 and 2, the organic film forming apparatus 1000 according to an exemplary embodiment of the present invention may include a vacuum chamber 100, an organic cell 200, a substrate fixing part 300, and a deposition rate detecting part 400. ) And a thickness analyzer 500.

The vacuum chamber 100 has a vacuum pressure of about 3 x 10 ^-7 torr is formed therein. That is, the vacuum chamber 100 is connected to a vacuum pump having a capacity capable of forming the vacuum pressure. In the vacuum chamber 100, all regions may be sealed to prevent the vacuum pressure from dropping. In addition, the vacuum chamber 100 may be made of a stainless material having excellent strength and excellent oxidation resistance in order to prevent the vacuum pressure from dropping due to an external impact.

The organic cell 200 is disposed in the vacuum chamber 100 to inject the organic material 10. The organic cell 200 may include a heating device. The heating apparatus may increase the vapor pressure of the organic material 10, and consequently, increase the injection speed of the organic material 10. In addition, the organic cell 200 may include a cooling device. The cooling apparatus can lower the vapor pressure of the organic material 10 and consequently reduce the spraying speed of the organic material 10. That is, in the organic cell 200, the injection speed of the organic material 10 may be easily controlled by controlling the heating device and the cooling device. The organic material 10 may be a material that generates light by an electric field applied from the outside in the organic light emitting display device.

Meanwhile, the organic cell 200 may be disposed on the outer surface of the vacuum chamber 100 to spray the organic material 10. This is to facilitate the coupling and separation of the organic cell 200 and the vacuum chamber 100 when the organic material 10 filled in the organic cell 200 is replenished. Of course, even when the organic cell 200 is in the vacuum chamber 100, it is preferable to form a separate door so that the organic cell 200 can be separated to the outside.

 Here, the organic film forming apparatus 1000 is disposed close to the organic cell 200 to detect the spraying speed of the organic material 10, the spraying speed detecting unit 600, the spraying speed detecting unit 600, and the organic cell 200. It may further include an injection speed control unit 700 is connected to the same to adjust the injection speed. The injection speed adjusting unit 700 may adjust the injection speed of the organic material 10 according to various methods, but when the heating device and the cooling device are included in the organic cell 200, it may be adjusted using the same.

The injection speed detection unit 600 substantially includes an injection speed sensor 610 that detects the injection speed. The injection speed sensor 610 generally corresponds to one organic cell 200. That is, since the organic film is substantially composed of multiple layers, a plurality of organic cells 200 may be formed, and accordingly, a plurality of injection speed sensors 610 may be formed.

The spray rate is defined as the thickness at which the organic film can be formed in the organic material 10 per second. That is, the injection speed may be expressed as Å / S as an example. The spraying speed of the organic material 10 may influence the thickness of the organic film.

Here, if the injection speed sensor 610 briefly describes the principle of measuring the injection speed, the injection speed sensor 610 itself vibrates at a constant speed. Thus, when the organic material 10 is sprayed and buried, the vibration is weakened according to the degree. That is, the injection speed is sensed through a weak degree of vibration. This principle represents one example, and the injection speed sensor 610 may detect the injection speed in various other ways.

The substrate fixing part 300 is disposed in the vacuum chamber 100 and serves to fix the substrate 20. Here, the organic film is substantially formed on the substrate 20 by the organic material 10. The substrate 20 may be made of a transparent glass material.

The organic film forming apparatus 1000 may further include a rotating device 800 that may rotate the substrate fixing part 300 to uniformly deposit the organic film on the substrate 20. In the substrate fixing part 300, the thickness of the organic layer may be changed for each location according to the rotation speed of the rotating device 800.

The rotating device 800 may have a drive motor formed therein. The drive motor may be a servo motor capable of precise control. Alternatively, the drive motor may be an index motor that is step driven.

In addition, the organic film forming apparatus 1000 further includes a chamber opening and closing unit 900 for applying and blocking the movement of the organic material 10 while distinguishing between the substrate fixing part 300 and the organic cell 200. That is, the chamber opening and closing portion 900 serves to block the organic material 10 until the spraying speed is higher than or equal to a predetermined value so that the organic film is uniformly deposited on the substrate 20. The chamber opening and closing unit 900 forms an organic region OA on the organic cell 200 side, and forms a deposition region DA on the substrate fixing unit 300 side. Thus, the injection speed detection unit 600 is disposed in the organic region OA.

The deposition rate detector 400 is disposed in the vacuum chamber 100. In detail, the deposition rate detecting unit 400 is disposed adjacent to the substrate fixing unit 300 between the organic cell 200 and the substrate fixing unit 300. That is, the deposition rate detecting unit 400 is disposed in the deposition area DA. The deposition rate detector 400 detects a deposition rate at which the organic material 10 is deposited on the substrate 20.

The deposition rate detecting unit 400 includes a first guide rail 410, a second guide rail 420, and a deposition rate sensor 430. The first guide rail 410 is long coupled to both ends of the vacuum chamber 100 facing each other. The first guide rail 410 moves along the first direction x.

To this end, the first guide rail 410 may be coupled to the vacuum chamber 100 using an LM guide and an LM guide block to facilitate linear motion. At this time, the LM guide is coupled to the vacuum chamber 100, the LM guide block is preferably coupled to the first guide rail 410.

In contrast, the first guide rail 410 may be coupled to the vacuum chamber 100 using a pinion gear and a rack gear. At this time, the pinion gear is preferably coupled to the first guide rail 410, the rack gear is coupled to the vacuum chamber 100.

The second guide rail 420 is long and coupled to both ends of the vacuum chamber 100 so as to vertically intersect the first guide rail 410. That is, the first and second guide rails 410 and 420 meet each other at one position. In this description, this is called an intersection area CA. Since the second guide rail 420 has the same structure as the first guide rail 410, a detailed description thereof will be omitted.

The deposition rate sensor 430 is disposed in the crossing area CA. The deposition rate sensor 430 is coupled to a bracket surrounding the first and second guide rails 410 and 420 at the crossing area CA so as to move together with the movement of the first and second guide rails 410 and 420. Can be. A plurality of moving balls may be formed in the bracket in order to minimize friction in contact with the first and second guide rails 410 and 420.

Deposition rate sensor 430 is characterized in that the same as the injection rate sensor 610. That is, when a plurality of injection speed sensor 610 is made, it is possible to replace the unnecessary injection speed sensor 610 among these deposition rate sensor 430. As a result, the material cost for installing the deposition rate sensor 430 may be reduced. Meanwhile, the deposition rate is also recognized in the same concept as the injection rate.

The deposition rate detecting unit 400 may have the substrate 20 that the user wants the intersection area CA along the first and second guide rails 410 and 420 along the first and second directions x and y, respectively. By moving to correspond to the position of, in real time, it is possible to detect the deposition rate at the position. In this case, by connecting the first and second guide rails 410 and 420 with a separate moving device more precisely, the deposition speed at the corresponding position can be detected more reliably.

The thickness analyzer 500 is connected to the deposition rate detector 400. The thickness analyzer 500 analyzes the thickness of the organic layer through the deposition rate. The analyzed thickness allows the user to determine the degree of uniformity of the organic film. Thus, the user again controls the rotating device 800 or the spraying speed adjusting unit 700 for the uniformity of the organic film so that the organic film is formed uniformly. Alternatively, a system can be constructed that can automate the above process.

Therefore, the deposition rate detector 400 for detecting the deposition rate of the organic material 10 is disposed between the substrate fixing part 300 and the organic cell 200 according to the position of the substrate 20. By arranging the thickness analyzer 500 that analyzes the thickness of the organic film for each position of), such a process can be performed simply and accurately in real time.

3 is a plan view illustrating another embodiment of the deposition rate detecting unit illustrated in FIG. 1.

1 and 3, the deposition rate detecting unit 440 is a deposition rate sensor disposed at regular intervals on the guide rail 450 and the guide rail 450 coupled to both ends of the vacuum chamber 100 facing each other. 460. In this case, the deposition rate sensors 460 are formed to correspond to the substrate 20 of the substrate fixing part 300.

The guide rail 450 moves along a second direction y perpendicular to the longitudinal direction. That is, the longitudinal direction of the guide rail 450 is the same as the first direction x. Since the guide rail 450 has the same structure as that of the first and second guide rails 410 and 420 of FIG. 2, a detailed description thereof will be omitted.

As such, while the guide rail 450 moves along the second direction y, the entirety of the substrate 20 fixed to the substrate fixing part 300 by the deposition rate sensors 460 may be simply scanned. That is, the organic film thickness distribution of the entire organic film, rather than a specific position of the substrate 20, may be detected in real time and simply. In this case, the precision of the organic film thickness analysis may be further improved as the number of deposition rate sensors 460 increases.

4 is a plan view illustrating yet another embodiment of the deposition rate detecting unit illustrated in FIG. 1.

1 and 4, the substrate fixing part 300 includes a mask frame 310 that fixes the mask 30 that determines the shape of the organic layer. Accordingly, the deposition rate detecting unit 470 includes a guide rail 480 coupled to the opposite ends of the mask frame 310 and deposition rate sensors 490 disposed at regular intervals on the guide rail 480.

The center of the mask frame 310, which is an area where the organic layer is deposited, is opened on the substrate 20. The mask frame 310 may also serve to align the mask 30 and the substrate 20 in addition to fixing the mask 30. To this end, a separate moving device may be coupled to the mask frame 310 to align the mask 30 and the substrate 20.

Since the guide rail 480 has the same structure except that the guide rail 450 described with reference to FIG. 3 and the mask frame 310 are combined with each other, a detailed description thereof will be omitted.

As such, the guide rail 480 is coupled to the mask frame 310 of the substrate fixing part 300, thereby rotating together with the substrate fixing part 300, and the deposition rate of the organic material 10 according to the position of the substrate 20. Can be detected. That is, even when the substrate fixing part 300 rotates, the deposition rate of the organic material 10 at the correct position of the substrate 20 may be more accurately detected.

According to the organic film forming apparatus as described above, the deposition rate detecting unit for detecting the deposition rate of the organic material according to the position of the substrate between the substrate fixing portion and the organic cell is disposed, and by analyzing the thickness of the organic film for each position of the substrate, The same process can be done in real time, simply and accurately.

Although the detailed description of the present invention has been described with reference to the preferred embodiments of the present invention, those skilled in the art or those skilled in the art will have the idea of the present invention described in the claims to be described later. It will be understood that various modifications and variations can be made in the present invention without departing from the scope of the present invention.

Claims (7)

A vacuum chamber; An organic cell injecting an organic material from the vacuum chamber; A substrate fixing part disposed in the vacuum chamber and fixing a substrate on which an organic film is deposited by the organic material; A deposition rate detecting unit disposed between the organic cell and the substrate fixing unit adjacent to the substrate fixing unit, and configured to detect a deposition rate of the organic material according to a position of the substrate; And And a thickness analyzer connected to the deposition rate detector to analyze the thickness of the organic layer through the detected deposition rate. The method of claim 1, wherein the deposition rate detecting unit First guide rails coupled to both sides of the vacuum chamber and moved along an x-axis direction; A second guide rail coupled to both sides of the vacuum chamber so as to be perpendicular to the first guide rail and moving along a y-axis direction perpendicular to the x-axis; And And a deposition rate sensor disposed at an intersection area of the first and second guide rails to sense the deposition rate. The method of claim 2, An injection speed detector disposed adjacent to the organic cell to detect an injection speed of the organic material and having an injection speed sensor replaced with the deposition rate sensor; And And an injection speed controller connected to the injection speed detector and the organic cell to control the injection speed. The method of claim 1, wherein the deposition rate detecting unit Guide rails; And Organic film forming apparatus comprising a plurality of deposition rate sensors disposed on the guide rail at regular intervals for sensing the deposition rate. The organic film forming apparatus of claim 4, wherein the guide rails are coupled to both sides of the vacuum chamber and moved along a direction perpendicular to the longitudinal direction. The method of claim 4, wherein the substrate fixing portion comprises a mask frame for fixing a mask for determining the shape of the organic film, And the guide rail is coupled to opposite sides of the mask frame and moved along a direction perpendicular to the length direction. The method of claim 6, And a rotating device for rotating the substrate fixing part to uniformly deposit the organic film on the substrate.

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