JP2003215594A - Device and method for producing liquid crystal device and liquid crystal device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To achieve a uniform and reliable rubbing processing. <P>SOLUTION: A friction sensor 80 detects a vertical resisting force and a friction force in a rubbing roll 102. A friction value measuring part 81 measures the friction coefficient in the rubbing roll and its change based on the detection result of the sensor 80. A control circuit 82 discriminates the characteristic of the roll 102 based on the friction detecting result, obtains an optimum rubbing condition based on the detection result and sets a push-in amount. Then the rubbing roll 102 rubs a liquid crystal board 101 on an optimum rubbing condition corresponding to the friction state, a torque characteristic and a dispersion, etc. Thus, an orientation defect is prevented and an electro-optic characteristic is enhanced. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal device manufacturing apparatus, a manufacturing method, and a liquid crystal device suitable for rubbing an alignment film on a liquid crystal substrate.

[0002]

2. Description of the Related Art A liquid crystal device such as a liquid crystal light valve is constructed by enclosing a liquid crystal between two substrates such as a glass substrate and a quartz substrate. In a liquid crystal light valve, for example, a thin film transistor (hereinafter, referred to as T
(Referred to as FT) are arranged in a matrix, the counter electrode is arranged on the other substrate, and the optical characteristics of the liquid crystal layer sealed between both substrates are changed according to the image signal, thereby enabling image display. To do.

The TFT substrate on which the TFTs are arranged and the counter substrate opposed to the TFT substrate are manufactured separately.
After both substrates are bonded with high precision in the panel assembly process, liquid crystal is sealed.

In the panel assembling process, first, an alignment film is formed on the facing surfaces of the TFT substrate and the counter substrate manufactured in each substrate process, that is, on the surfaces of the counter substrate and the liquid crystal layer of the TFT substrate in contact with each other. Then, a rubbing process is performed. Next, a seal portion serving as an adhesive is formed on the edge of one of the substrates. The TFT substrate and the counter substrate are attached to each other using the seal portion, and pressure-bonded and cured while performing alignment. A notch is provided in a part of the seal portion, and the liquid crystal is sealed through this notch.

By forming an alignment film and performing rubbing treatment, the alignment of liquid crystal molecules when no voltage is applied is determined. The alignment film is formed by applying, for example, polyimide (PI) with a thickness of about several tens of nanometers. By forming the alignment films on the surfaces of both substrates facing the liquid crystal layer, the liquid crystal molecules can be aligned along the surfaces of the substrates. The rubbing treatment is to form fine grooves on the surface of the alignment film to form an anisotropic film, and the alignment film can be rubbed in a certain direction to define the alignment of liquid crystal molecules.

FIG. 9 is a schematic view showing a rubbing device.

A liquid crystal substrate 101 is placed on the stage 100. The stage 100 moves in the horizontal direction and carries the substrate 101. A rubbing roll 102 is arranged above the transport path of the stage 100. The rubbing roll 102 has a velvet-like cloth, for example, a rayon rubbing cloth 103, attached to its peripheral surface. The stage 100 is conveyed while rotating the rubbing roll 102 to rotate the rubbing roll 102 and the stage 10.
With the conveyance of 0, the entire surface of the substrate is rubbed while being pushed by the rubbing cloth 103 with a predetermined pushing amount, and rubbing is performed.

[0008]

By the way, the rubbing cloth 103 is formed by weaving rayon filaments 104 on the cloth surface. The filament 104 extends upward from the cloth surface, and the tips of the filaments 104 are provided evenly over the cloth surface.
The tips of the filaments 104 are cut into a predetermined length during manufacturing.

However, variations in the weaving density of the filament 104 may cause variations in the filament elastic force. When the elastic force of the filament changes, the contact pressure (rubbing pressure) of the rubbing roll on the substrate surface changes, and proper rubbing cannot be performed. Then, alignment defects may occur and the electro-optical characteristics of the panel may deteriorate.

Also, variations may occur when the tips of the filaments 104 are cut. Although accuracy of the order of several μm is required to perform proper rubbing, the length of the filament 104 or the thickness of the rubbing cloth 103 may not be sufficiently accurate. Even in this case, the rubbing pressure changes and proper rubbing cannot be performed.

It is also conceivable that the raising direction of the filament 104 varies. Even in this case, proper rubbing is not performed and the rubbing characteristics change.

These variations in the production of the rubbing material can be dealt with to some extent by obtaining the rubbing material in advance and checking the torque characteristics and the like in advance.
For example, as for the in-plane variation of the rubbing material, the variation of the rubbing pressure can be absorbed by setting the pushing amount of the rubbing material in the area capable of absorbing the variation.
Also, for example, the rubbing pressure can be set to an appropriate value by adjusting the pushing amount according to the roll rotation torque characteristic during rubbing.

However, since the variation of the rubbing material greatly differs among the manufacturing rods, the characteristics are also reviewed for each manufacturing lot. Moreover, there is a problem that it is necessary to confirm the characteristics in advance, workability is extremely poor, and it may take a relatively long period to detect a defect.

If the number of times of use of the filament 104 constituting the rubbing material is increased, the elastic force is reduced and the surface is worn. For defects due to a decrease in elastic force, the rubbing roll rotation torque, roll temperature, etc. are measured at predetermined intervals, and for example, the use of the rubbing material is stopped when the torque decrease becomes larger than a predetermined value. It is supposed to be dealt with.

Even in this case, it may take a relatively long period to detect a defect. Moreover, there is a problem that abrasion of the filament surface cannot be detected.

The present invention has been made in view of the above problems. By detecting the characteristics of the rubbing material by a friction sensor, it is possible to easily detect whether the rubbing material is good or bad, and always perform proper rubbing. An object of the present invention is to provide a liquid crystal device manufacturing apparatus, a manufacturing method, and a liquid crystal device that can prevent uneven alignment and deterioration of electro-optical characteristics by carrying out the method.

[0017]

A liquid crystal device manufacturing apparatus according to the present invention comprises a friction characteristic detecting means for detecting a friction characteristic of a rubbing roll, and a characteristic of the rubbing roll based on a detection result of the friction characteristic detecting means. And a control means for acquiring

According to this structure, the frictional characteristic detecting means detects the frictional characteristic of the rubbing roll. For example, when the elastic force of the rubbing roll is large, that is, when the rubbing pressure is large, the frictional force of the rubbing roll is large. The control means acquires such a characteristic of the rubbing roll from the detection result of the friction characteristic.

Further, the control means rubs the liquid crystal substrate placed on the rubbing stage by the rubbing roll according to the characteristics of the rubbing roll obtained based on the detection result of the frictional characteristic detecting means. It is characterized by setting the pushing amount of the rubbing roll.

According to this structure, the control means sets the pushing amount of the rubbing roll in accordance with the characteristic of the rubbing roll obtained from the detection result of the frictional characteristic.
As a result, it is possible to set the optimum rubbing strength according to the characteristics of the rubbing roll, for example, the abrasion of the rubbing roll and the variation in the characteristics.

Further, the control means is characterized in that the setting of the pushing amount of the rubbing roll is feedback-controlled based on the detection result of the friction characteristic detecting means.

With such a structure, even if the characteristics of the rubbing roll are changed by the rubbing process, the optimum pushing amount can be set by the feedback control, and the good rubbing characteristics can always be obtained.

Further, the frictional characteristic detecting means is arranged at a position where the detecting portion for detecting the frictional characteristic is brought into contact with the rubbing roll with the same pushing amount as the pushing amount with respect to the surface of the liquid crystal substrate on the rubbing stage. It is characterized by

With such a configuration, it is possible to easily set the pushing amount when the rubbing process is actually performed on the liquid crystal substrate to the optimum value.

Further, the control means determines the life of the rubbing roll based on the detection result of the frictional characteristic detection means.

According to this structure, the life of the rubbing roll can be determined from the abrasion of the rubbing roll or the like based on the detection result of the frictional characteristics. Thus, it is possible to know when to change the rubbing roll.

The method of manufacturing a liquid crystal device according to the present invention comprises a friction characteristic detecting step of detecting the friction characteristic of the rubbing roll, and a step of acquiring the characteristic of the rubbing roll based on the detection result of the friction characteristic. It is characterized by

According to this structure, first, the frictional characteristics of the rubbing roll are detected. Friction characteristics change according to the abrasion and elastic force of the rubbing roll. This allows
The characteristics of the rubbing roll can be acquired based on the detection result of the friction characteristics.

Further, in the method for manufacturing a liquid crystal device according to the present invention, a friction characteristic detecting step of detecting a friction characteristic of the rubbing roll, a step of acquiring the characteristic of the rubbing roll based on the detection result of the friction characteristic, Depending on the characteristic of the rubbing roll obtained based on the detection result of the frictional characteristic, a step of setting the pushing amount of the rubbing roll when rubbing the liquid crystal substrate placed on the rubbing stage by the rubbing roll, It is characterized by having.

According to such a structure, according to the characteristics of the rubbing roll obtained from the detection result of the friction characteristics,
The pushing amount of the rubbing roll is set. As a result, the optimum rubbing strength is set according to the characteristics of the rubbing roll.

A rubbing process is performed by the manufacturing apparatus of the liquid crystal device or the manufacturing method of the liquid crystal device.

According to such a structure, since rubbing is performed under the optimum rubbing conditions according to the characteristics of the rubbing roll, it is possible to display a high quality image with good alignment characteristics.

[0033]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 shows the first of the present invention.
FIG. 3 is an explanatory diagram schematically showing a rubbing device and a rubbing roll adopted in the liquid crystal device manufacturing apparatus according to the embodiment of the present invention. FIG. 2 is an equivalent circuit diagram of various elements, wirings, and the like in a plurality of pixels forming a pixel region of a liquid crystal device. FIG. 3 is a plan view of an element substrate such as a TFT substrate as viewed from the counter substrate side together with the constituent elements formed thereon, and FIG. 4 is an assembly process for bonding the element substrate and the counter substrate to enclose liquid crystal. It is sectional drawing which cuts and shows the liquid crystal device after completion | finish in the position of the HH 'line of FIG. FIG. 5 is a sectional view showing the liquid crystal device in detail. FIG. 6 is a flowchart showing the panel assembly process.

In this embodiment, the state of the rubbing roll 102 and the filament 104 is detected by obtaining the frictional characteristics of the filament, and the optimum rubbing condition is set.

First, the structure of the liquid crystal panel will be described with reference to FIGS.

As shown in FIGS. 3 and 4, the liquid crystal panel is constructed by enclosing the liquid crystal 50 between the element substrate 10 such as a TFT substrate and the counter substrate 20. Pixel electrodes that form pixels are arranged in a matrix on the element substrate 10. FIG. 2 shows an equivalent circuit of the elements on the element substrate 10 which form the pixels.

As shown in FIG. 2, in the pixel area,
The plurality of scanning lines 3a and the plurality of data lines 6a are arranged so as to intersect with each other, and the pixel electrodes 9a are arranged in a matrix in a region partitioned by the scanning lines 3a and the data lines 6a. A TFT 30 is provided corresponding to each intersection of the scanning line 3a and the data line 6a, and the pixel electrode 9a is connected to this TFT 30.

The TFT 30 is turned on by the ON signal of the scanning line 3a, whereby the image signal supplied to the data line 6a is supplied to the pixel electrode 9a. This pixel electrode 9
A voltage between a and the counter electrode 21 provided on the counter substrate 20 is applied to the liquid crystal 50. Further, a storage capacitor 70 is provided in parallel with the pixel electrode 9a, and the storage capacitor 70 enables the voltage of the pixel electrode 9a to be retained for a time that is, for example, three digits longer than the time when the source voltage is applied. The storage capacitor 70 improves the voltage holding characteristic and enables image display with a high contrast ratio.

FIG. 5 is a schematic sectional view of a liquid crystal panel focusing on one pixel.

The groove 1 is formed in the element substrate 10 such as glass or quartz.
1 is formed. A TFT 30 having an LDD structure is formed on the groove 11 via a light shielding film 12 and a first interlayer insulating film 13.
Are formed. The groove 11 flattens the boundary surface of the TFT substrate with the liquid crystal 50.

The TFT 30 comprises a scanning line 3a forming a gate electrode via an insulating film 2 in a semiconductor layer in which a channel region 1a, a source region 1d and a drain region 1e are formed. The light shielding film 12 is formed in a region corresponding to the formation region of the TFT 30, a formation region of the data lines 6a and the scanning lines 3a described later, that is, a region corresponding to the non-display region of each pixel. The light-shielding film 12 causes the incident light to reach T
Incident on the channel region 1a, the source region 1d, and the drain region 1e of the FT 30 is prevented.

A second interlayer insulating film 14 is laminated on the TFT 30, and an intermediate conductive layer 15 is formed on the second interlayer insulating film 14. Capacitor lines 18 are arranged on the intermediate conductive layer 15 with a dielectric film 17 interposed therebetween. The capacitance line 18 is
It is composed of a capacitance layer and a light-shielding layer, constitutes a storage capacitor with the intermediate conductive layer 15, and has a light-shielding function of preventing internal reflection of light. Since the intermediate conductive layer 15 is formed at a position relatively close to the semiconductor layer, diffused reflection of light can be efficiently prevented.

A third interlayer insulating film 19 is arranged on the capacitance line 18, and a data line 6a is laminated on the third interlayer insulating film 19. The data line 6a is connected to the third and second interlayer insulating films 1
It is electrically connected to the source region 1d through the contact holes 24a and 24b penetrating through 8 and 14. A pixel electrode 9a is stacked on the data line 6a with a fourth interlayer insulating film 25 interposed therebetween. The pixel electrode 9a has a contact hole 26 penetrating the fourth to second interlayer insulating films 25, 19, and 14.
a, 26b through the capacitance line 18 to the drain region 1e
Electrically connected to. An alignment film 16 made of a polyimide-based polymer resin is laminated on the pixel electrode 9a, and is rubbed in a predetermined direction by using the rubbing device shown in FIG.

By supplying the ON signal to the scanning line 3a (gate electrode), the channel region 1a becomes conductive,
The source region 1d and the drain region 1e are connected to each other, and the image signal supplied to the data line 6a is applied to the pixel electrode 9a.

On the other hand, on the counter substrate 20, a counter electrode (common electrode) 21 is formed over the entire surface of the substrate 20. An alignment film 22 made of a polyimide-based polymer resin is laminated on the counter electrode 21, and is rubbed in a predetermined direction by using the rubbing device shown in FIG.

Liquid crystal 50 is sealed between the element substrate 10 and the counter substrate 20. As a result, the TFT3
0 writes the image signal supplied from the data line 6a to the pixel electrode 9a at a predetermined timing. Depending on the written potential difference between the pixel electrode 9a and the counter electrode 21, the orientation or order of the molecular assembly of the liquid crystal 50 is changed to modulate light and enable gradation display.

As shown in FIGS. 3 and 4, the counter substrate 20
Is provided with a light shielding film 42 as a frame that divides the display area. The light shielding film 42 is made of, for example, the same or different light shielding material as the light shielding film 23.

A sealing material 41 for enclosing the liquid crystal in a region outside the light shielding film 42 is formed between the element substrate 10 and the counter substrate 20. The sealing material 41 is arranged so as to substantially match the contour shape of the counter substrate 20, and the element substrate 10 and the counter substrate 2 are arranged.
Stick 0 to each other. The sealing material 41 is missing in a part of one side of the element substrate 10, and a liquid crystal injection port 78 for injecting the liquid crystal 50 is formed in a gap between the element substrate 10 and the counter substrate 20 which are bonded to each other. It After the liquid crystal is injected from the liquid crystal injection port 78, the liquid crystal injection port 78 is sealed with a sealing material 79.

A data line driving circuit 61 and mounting terminals 62 are provided along one side of the element substrate 10 in a region outside the sealing material 41 of the element substrate 10, and along two sides adjacent to the one side. , A scanning line drive circuit 63 is provided. A plurality of wirings 64 for connecting the scanning line drive circuits 63 provided on both sides of the screen display area are provided on the remaining side of the element substrate 10. The element substrate 1 is provided at least at one corner of the counter substrate 20.
A conductive material 65 is provided to electrically connect 0 and the counter substrate 20.

Next, the panel assembling process will be described with reference to FIG. The element substrate 10 (TFT substrate) and the counter substrate 20 are manufactured separately. Polyimide (PI) to be the alignment films 16 and 22 is applied to the TFT substrate and the counter substrate 20 prepared in steps S1 and S6, respectively, in the next steps S2 and S7. Next, steps S3 and S
In 8, the rubbing process is performed on the alignment film 16 on the surface of the element substrate 10 and the alignment film 22 on the surface of the counter substrate 20. This rubbing process is performed using the rubbing apparatus shown in FIG.

Next, in steps S4 and S9, a cleaning process is performed. This cleaning step is for removing dust generated by the rubbing process. When the cleaning process is completed, the sealing material 41 (see FIG. 2) is formed in step S5. Next, in step S10, the element substrate 10
And the counter substrate 20 are attached to each other, and pressure is applied while performing alignment in step S11 to cure the sealing material 41. Finally, in step S12, the liquid crystal is sealed from the notch provided in a part of the sealing material 41, and the notch is closed to seal the liquid crystal.

In the present embodiment, the rubbing apparatus shown in FIG. 1 performs the rubbing processing in steps S3 and S8.

In FIG. 1, the rubbing apparatus has a rubbing stage 100 and a rubbing roll 102. A liquid crystal substrate 101 is placed on the rubbing stage 100. The substrate 101 is, for example, the element substrate 10 (see FIG. 5) after polyimide application before bonding. The rubbing stage 100 and the rubbing roll 102 are relatively movable, and in FIG. 1, for example, the rubbing stage 100 moves relative to the rubbing roll 102 in the horizontal direction indicated by the arrow. .

By moving the rubbing stage 100,
The liquid crystal substrate 101 is parallel to the surface of the rubbing roll 1.
It is movable in a direction substantially perpendicular to the rotation axis of 02. A rubbing roll 102 is provided above the transport path of the liquid crystal substrate 101.

The rubbing roll 102 is formed in a cylindrical shape and is rotatable in the circumferential direction about the center of the circle. On the peripheral surface of the rubbing roll 102, a velvet cloth, for example, a rubbing cloth 103 made of rayon is wound. From the surface of the rubbing cloth 103,
The filament 104 having a predetermined length woven into the filament is stretched.

At least one of the rubbing stage 100 and the rubbing roll 102 is also movable in the vertical direction. In the example of FIG. 1, the rubbing stage 100 is movable in the vertical direction.

The horizontal and vertical movements of the rubbing stage 100 are performed by a substrate surface direction movement motor 85 and a vertical movement motor 84, respectively. The board surface direction moving motor 85 is controlled by the control circuit 82,
The rubbing stage 100 is driven in the horizontal direction (substrate surface direction). The vertical movement motor 84 drives the rubbing stage 100 in the vertical direction under the control of the pushing amount control unit 83 described later. The pushing amount control unit 83 controls the vertical movement of the rubbing stage 100 so that a certain optimum pushing amount is obtained in order to stabilize the rubbing strength.

In this embodiment, a friction sensor 80, a friction value measuring section 81 and a control circuit 82 are provided to detect the friction characteristics of the rubbing material, and the control circuit 8 is provided.
In No. 2, the characteristic of the rubbing material is grasped by the detection result of the friction characteristic of the rubbing material. In addition, the amount of pushing is controlled according to the detection result of the frictional characteristics of the rubbing material to enable rubbing with the optimum rubbing strength.

That is, a friction sensor 80 is provided on the tip side of the liquid crystal substrate 101 above the rubbing stage 100 during rubbing. The friction sensor 80 has a measurement surface flush with the surface of the liquid crystal substrate 101, and the material of the measurement surface is substantially the same as the surface of the liquid crystal substrate 101. The friction sensor 80 is arranged at a position where the filament 104 of the rubbing roll 102 can rub the measurement surface with the same pressing amount as the pressing amount with respect to the surface of the liquid crystal substrate 101 during rubbing.

If the filament portion of the rubbing roll 102 rubbing the surface of the liquid crystal substrate 101 at the time of rubbing can rub the measurement surface with the same pushing amount as the pushing amount with respect to the surface of the liquid crystal substrate 101, the friction sensor 80.
The installation location of is not limited. For example, the friction sensor 80
May be disposed on the rear end side of the liquid crystal substrate 101 above the rubbing stage 100, or may be provided on a plane different from the upper surface of the stage 100.

The friction sensor 80 detects the vertical drag force and the friction force when the filament 104 passes through the measurement surface, and outputs the detection result to the friction value measuring section 81. The friction value measuring unit 81 obtains a successive friction coefficient and the like from the normal force and the frictional force while the filament 104 passes through the measurement surface of the friction sensor 80, and the filament 10
The slipperiness and the degree of roughness of 4 are digitized as the average friction coefficient and the variation of the average friction coefficient, respectively, and the acquired friction characteristic information is used as a friction detection result in the control circuit 8.
It is designed to output to 2.

The control circuit 82 calculates the optimum rubbing condition based on the input friction detection result. Control circuit 8
2, the pushing amount according to the obtained optimum rubbing condition is set in the pushing amount control unit 83.

Next, the operation of the embodiment thus configured will be described with reference to FIG. FIG. 7 is a flowchart showing a specific flow of the "rubbing step" in FIG.

In the present embodiment, during the rubbing process, the friction value is first detected to determine the pushing amount. That is, in step S21 of FIG. 7, first, the substrate 101 corresponding to the element substrate 10 or the counter substrate 20 in a state where the polyimide serving as the alignment film is applied is placed on the stage 100.

In this state, the stage 100 is conveyed to the rubbing roll 102 side. Also, the rubbing roll 102
To rotate. The stage 100 is a rubbing roll 102
When the filament 104 of the rubbing cloth 103 reaches the vicinity of the bottom of the rubbing cloth 103, the filament 104 contacts the measurement surface of the friction sensor 80 before contacting the substrate 101. In the friction sensor 80, the measurement surface is rubbed by the filament 104,
The normal force and the frictional force when passing through the filament 104 are detected and the detection result is output to the friction value measuring unit 81.

The friction value measuring section 81 sequentially calculates the friction coefficient and the like based on the detection result of the friction sensor 80, and outputs it to the control circuit 82 as the friction detection result (step S22). In step S23, the control circuit 82 grasps the characteristics of the rubbing roll 102 based on the input friction detection result and determines the optimum rubbing condition.

The friction detection result of the friction value measuring section 81 reflects the torque characteristic of the filament 104. That is, the absolute values of the normal force and the frictional force among the friction detection results correspond to the elastic force of the filament 104, the wear of the tip of the filament 104, the raising direction of the filament 104, and the like. Further, changes in the normal force and the frictional force among the friction detection results correspond to variations in the length of the filament 104, variations in the thickness of the rubbing cloth 103, variations in the weaving density of the filament 104, and the like.

The control circuit 82 controls, for example, the pushing amount of the rubbing roll 102 as a rubbing condition. In step S24, the pushing amount control unit 83 sets the pushing amount according to the rubbing condition set by the control circuit 82. As a result, the vertical movement motor 84 is driven,
The rubbing roll 102 is moved up and down.

Next, a rubbing process is performed in step S25. That is, as the rubbing roll 102 rotates and the stage 100 is further transported, the filament 104 (rubbing cloth 103) advances while rubbing the surface of the substrate 101. Thus, the substrate 1
The entire surface of 01 is rubbed.

As described above, in the present embodiment, in step S24, the pushing amount is set according to the friction detection result, and the rubbing cloth 103 and the filament 1
Rubbing with optimum rubbing strength is always possible regardless of secular changes such as 04 and variation between lots.

By the way, it is also possible to judge the quality of the rubbing material based on the friction detection result of the filament 104. For example, when the absolute value of the detected friction coefficient becomes smaller than a predetermined threshold value, it is possible to determine that the life of the rubbing material is reached. In this case,
The control circuit 82 may determine the life and display a warning to the operator.

Further, in FIG. 7, the friction measurement was performed after the liquid crystal substrate was charged, but the friction measurement inspection of the rubbing roll was carried out in advance without charging the liquid crystal substrate, and the pushing amount based on the inspection result was measured during the rubbing process. It may be set.

Further, by performing feedback control of the pushing amount so that the detected values of the normal force and the frictional force are within the predetermined setting range, it is possible to always perform rubbing with the optimum rubbing strength. Further, when it is determined that the optimum rubbing condition cannot be set only by controlling the pushing amount or the like depending on the life of the rubbing material,
The rubbing roll may be replaced automatically,
Also, a message for exchange may be output.

FIG. 8 is a flow chart showing the operation flow in this case.

In FIG. 8, when the liquid crystal substrate 101 is put in, first, the pushing amount initial value is set and the rubbing process is performed. By the rubbing process, the rubbing roll 102 rubs the surface of the liquid crystal substrate 101 and rubs the measurement surface of the friction sensor 80. As a result, the friction sensor 8
0 is a frictional value measuring unit 81 that detects the normal force and the frictional force.
Output to.

The friction value measuring section 81 obtains the friction coefficient and the like based on the detection result of the friction sensor 80, and outputs it as the friction measurement result to the control circuit 82. The control circuit 82 determines the optimum rubbing condition based on the input friction measurement result.

In this case, the control circuit 82 converts the obtained rubbing condition into, for example, the pushing amount of the rubbing roll 102, and determines whether it is within a settable range (step S36). When it is within the settable range, the control circuit 82 instructs the pushing amount control unit 83 to set the pushing amount. On the other hand, if the setting is not possible, the rubbing roll is replaced in step S38, and the processing from step S32 is repeated.

For example, when the decrease in elastic force and wear of the filament 104 of the rubbing roll 102 is small, and the variation in length, the variation in the weaving density, the variation in the raising direction, etc. are relatively small, the friction measurement results Of these, the frictional force is sufficiently large and its variation is relatively small.
In this case, the pushing amount obtained by the control circuit 82 is in a settable range, and rubbing is performed using the measured rubbing roll 102 as it is.

On the contrary, when the elastic force of the filament 104 is reduced and the wear thereof is increased, the frictional force may be decreased or the variation may be relatively increased. In this case, the pushing amount calculated by the control circuit 82 based on the friction measurement result may exceed the settable range. In this case, the control circuit 82 performs the process in step S
Move to 38 to prevent rubbing using a defective rubbing roll.

As a result, proper rubbing is always possible, and uneven alignment and deterioration of electro-optical characteristics are surely prevented.

An example in which the life of the rubbing material is judged depending on whether or not the pushing amount is within a settable range has been described. The friction coefficient is changed at a rate of change equal to or higher than a predetermined change rate with respect to the initial friction coefficient. When the coefficient changes, it may be determined that the life of the rubbing material is reached.

[0082]

As described above, according to the present invention, by detecting the characteristics of the rubbing material by the friction sensor, it is possible to easily detect whether the rubbing material is good or bad, and always perform proper rubbing. This has the effect of preventing uneven alignment and deterioration of electro-optical characteristics.

[Brief description of drawings]

FIG. 1 is an explanatory view schematically showing a rubbing device and a rubbing roll adopted in a liquid crystal device manufacturing apparatus according to a first embodiment of the present invention.

FIG. 2 is an equivalent circuit diagram of various elements, wirings, and the like in a plurality of pixels forming a pixel region of a liquid crystal device.

FIG. 3 is a plan view of an element substrate such as a TFT substrate as viewed from the counter substrate side together with the constituent elements formed thereon.

FIG. 4 is a cross-sectional view showing the liquid crystal device after the assembly process in which the element substrate and the counter substrate are attached to each other and the liquid crystal is sealed, taken along line HH ′ in FIG. 4;

FIG. 5 is a cross-sectional view showing a liquid crystal device in detail.

FIG. 6 is a flowchart showing a panel assembly process.

FIG. 7 is a flowchart for explaining the operation of the first embodiment.

FIG. 8 is a flowchart for explaining the operation of the first embodiment.

FIG. 9 is a schematic view showing a rubbing device.

[Explanation of symbols]

80 ... Friction sensor 81 ... Friction value measuring unit 82 ... Control circuit 83 ... Push-in amount controller 84 ... Vertical movement motor 100 ... stage 101 ... Liquid crystal substrate 102 ... Rubbing roll 103 ... rubbing cloth 104 ... Filament

Claims (8)

[Claims] 1. A liquid crystal comprising: a friction characteristic detecting means for detecting a friction characteristic of a rubbing roll; and a control means for acquiring a characteristic of the rubbing roll based on a detection result of the friction characteristic detecting means. Equipment manufacturing equipment. 2. The rubbing roll rubbing a liquid crystal substrate placed on a rubbing stage according to the characteristics of the rubbing roll acquired based on the detection result of the frictional characteristic detecting means. The apparatus for manufacturing a liquid crystal device according to claim 1, wherein the pushing amount of the rubbing roll is set. 3. The apparatus for manufacturing a liquid crystal device according to claim 2, wherein the control means performs feedback control of setting the pushing amount of the rubbing roll based on the detection result of the friction characteristic detection means. 4. The frictional characteristic detecting means is arranged at a position where a detecting portion for detecting a frictional characteristic is in contact with the rubbing roll with the same pressing amount as the pressing amount with respect to the surface of the liquid crystal substrate on the rubbing stage. 4. The liquid crystal device manufacturing apparatus according to claim 2, wherein the manufacturing apparatus is a liquid crystal device manufacturing apparatus. 5. The apparatus for manufacturing a liquid crystal device according to claim 1, wherein the control unit determines the life of the rubbing roll based on the detection result of the frictional characteristic detection unit. 6. A liquid crystal device manufacturing method, comprising: a friction characteristic detecting step of detecting a friction characteristic of a rubbing roll; and a step of acquiring a characteristic of the rubbing roll based on a detection result of the friction characteristic. Method. 7. A friction characteristic detecting step of detecting a friction characteristic of a rubbing roll, a step of acquiring a characteristic of the rubbing roll based on a detection result of the friction characteristic, and a step of acquiring based on a detection result of the friction characteristic. According to the characteristics of the rubbing roll, a step of setting the pushing amount of the rubbing roll when rubbing the liquid crystal substrate placed on the rubbing stage by the rubbing roll, the manufacturing of a liquid crystal device characterized by the following. Method. 8. The method according to any one of claims 1 to 5.
9. A liquid crystal device that has been subjected to a rubbing treatment by the device for manufacturing a liquid crystal device according to claim 6 or the method for manufacturing a liquid crystal device according to claim 6 or 7.