KR20080018322A - Cleaning apparatus for substrate - Google Patents

Abstract

A substrate cleaning apparatus is provided to prevent corrosion of a brush by using the brush composed of a fabric and plural cleaning hair inserted and fixed to the fabric. A brush(110) is composed of a flexible fabric(112) enclosing a rotation shaft(120) and cleaning hair(114) inserted and fixed to the fabric. The fabric is densely woven in a lattice type. The fabric and the cleaning hair are made of a material which is not deformed by a cleaning solution used when a substrate is cleaned. Since the cleaning hair are inserted and fixed to the fabric, an interval of the cleaning hair is reduced to further improve the cleaning force of the substrate. The brush composed of the fabric and the cleaning hair is detachably engaged to the rotation shaft.

Description

Cleaning apparatus for substrate

1 and 2 are cross-sectional views of a substrate cleaning apparatus according to an embodiment of the present invention.

3 to 5 are cross-sectional views and perspective views of brushes included in a substrate cleaning apparatus according to an embodiment of the present invention.

* Description of the main parts of the drawings *

100: process chamber 110a: upper brush

110b: lower brush 112: fabric

114: washing hair 120: rotating shaft

130a: upper bracket 130b: lower bracket

140: motor

The present invention relates to a substrate cleaning device, and more particularly, to a substrate cleaning device having a brush that can be used semi-permanently, which is excellent in removing and cleaning foreign substances.

In general, a flat panel display device refers to a liquid crystal display, a plasma display panel, an organic light emitting diode, and the like. Such flat panel display devices are manufactured by repeating processes such as photo, diffusion, deposition, etching, ion implantation, and cleaning on a substrate.

Among these, the cleaning process is performed to remove dust, organic matters and the like stuck on the substrate. The washing process includes a washing process for washing the substrate using deionized water or a washing process using a brush, and a drying process for removing deionized water attached to the substrate by injecting air.

Among these processes, the cleaning process using a brush passes the substrate between the brushes facing each other up and down and each rotating brush, so that foreign matter on the surface of the substrate is removed by a simulated brushing action.

However, if the brush consists of a plurality of hairs of steel wire, the screw type steel wire should be welded to the rotation shaft. Accordingly, the weight of the brush increases, the brush hairs may not be uniformly arranged according to the arrangement of the steel wires, and the hairs of the steel wires may fall off the rotation axis. In addition, since the hair is made of steel wire and welded to the shaft, it may be corroded when used for a long time.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a substrate cleaning apparatus including a brush that is excellent in removing and cleaning foreign substances and can be used semi-permanently.

The objects of the present invention are not limited to the above-mentioned objects, and other objects that are not mentioned will be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, the substrate cleaning apparatus according to the present invention includes a rotating shaft installed opposite the substrate passing through the chamber, a fabric surrounding the rotating shaft, and a brush having a plurality of cleaning caps inserted into and fixed to the fabric and contacting the substrate. do.

Specific details of other embodiments are included in the detailed description and the drawings. Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various different forms, and only the embodiments make the disclosure of the present invention complete, and the general knowledge in the art to which the present invention belongs. It is provided to fully inform the person having the scope of the invention, which is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 and 2 are cross-sectional views of a substrate cleaning apparatus according to an embodiment of the present invention.

As shown in Figure 1 and 2, the substrate cleaning apparatus according to an embodiment of the present invention includes a process chamber 100, the inlet and outlet are formed on both sides of the process chamber 100 to correspond to each other . In addition, a conveyor 10 is installed inside the process chamber 100 from the inlet to the outlet to transfer the substrate G in one direction. Such a conveyor 10 is operated in one direction by a plurality of rollers 20 installed at regular intervals below.

In addition, upper and lower brushes 110a and 110b are disposed in the process chamber 100 to face the upper and lower surfaces of the substrate G, which are transferred through the conveyor 10, to remove foreign substances.

The upper and lower brushes 110a and 110b have elastic hairs formed on the outer circumferential surface of the cylinder and are formed to have a length greater than or equal to the length of the substrate G so as to brush the entire surface of the moving substrate G. The upper and lower brushes 110a and 110b are mounted on the rotation shafts 120a and 120b, respectively, to clean the surface of the substrate G that moves while rotating by the rotation of the rotation shafts 120a and 120b. The upper and lower brushes 110a and 110b will be described in more detail with reference to FIGS. 3 to 5.

In addition, an injection nozzle 200 for spraying the cleaning liquid is installed in the process chamber 100 to spray the cleaning liquid onto the substrate G surface moving through the conveyor 10. At this time, the cleaning liquid serves as a lubricant between the substrate G and the brushes 110a and 110b and removes foreign substances on the substrate G. And in the process chamber 100, the air knife 300 which blows air to the upper and lower parts of the board | substrate G which completed the washing | cleaning process, and dries the surface of the board | substrate G is provided.

The upper and lower rotary shafts 120a and 120b penetrate the centers of the upper and lower brushes 110a and 110b, respectively, and are installed to rotate the brushes 110a and 110b, respectively. In detail, both ends of the upper and lower rotary shafts 120a and 120b are fixed to the process chamber 100 by the upper and lower brackets 130a and 130b, and the rotary shafts (the upper and lower brackets 130a and 130b) are fixed to the process chamber 100. Bearings may be installed so that 120a and 120b may rotate. One end of the upper and lower rotary shafts 120a and 120b extends outward from the upper and lower brackets 130a and 130b and is connected to an actuator 140 such as a motor.

Therefore, when the substrate G is transferred between the upper and lower brushes 110a and 110b, the brush is brushed while passing through the upper and lower brushes 110a and 110b rotated by the actuator 140 and the rotation shafts 120a and 120b. The surface of the substrate G is cleaned by the action.

Hereinafter, a brush of the substrate cleaning apparatus according to an embodiment of the present invention will be described in detail with reference to FIGS. 3 to 5. 2 to 4 are cross-sectional views and perspective views of the brush included in the substrate cleaning apparatus according to an embodiment of the present invention.

As shown in FIGS. 3 to 5, the brush 110 includes a flexible fabric 112 surrounding a circular rotating shaft 120 and a plurality of cleaning caps 114 inserted into and fixed to the fabric 112. Here, the fabric 112 may be a tightly woven cloth in the form of a regular grid. The fabric 112 and the cleaning hair 114 are made of a material that is not deformed by the cleaning liquid used to clean the substrate G.

In addition, since the plurality of cleaning hairs 114 inserted into and fixed to the fabric 112 are fixed to the fabric 112 in the form of a dense lattice, the spacing between the cleaning hairs 114 may be reduced to further improve the cleaning power of the substrate. have.

As such, the brush 110 made of the fabric 112 and the plurality of cleaning hairs 114 may be attached to or detached from the rotating shaft 120. Therefore, it is easy to replace when the cleaning cap 114 is worn out due to the cleaning liquid or long-term use.

Although embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art to which the present invention pertains have various permutations, modifications, and modifications without departing from the spirit or essential features of the present invention. It is to be understood that modifications may be made and other embodiments may be embodied. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive.

According to the present invention, by using a brush composed of a plurality of cleaning hairs inserted into and fixed to the fabric, it is possible to prevent the brush from being corroded and to reduce the weight to prevent the brush from damaging the substrate.

And since the hair can be densely arranged on the fabric, it is possible to improve the removal and cleaning power of foreign substances when cleaning the substrate. In addition, since the brush is light and flexible, it is easy to replace the brush due to long-term use or wear of the cleaning hair.

Claims (3)

A rotating shaft provided opposite the substrate passing through the chamber; And a brush including a fabric surrounding the rotating shaft and a plurality of cleaning caps inserted into and fixed to the fabric and in contact with the substrate. The method of claim 1, And the rotating shaft is disposed above and below the substrate. The method of claim 1, And the brush is detachable from the rotating shaft.

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