KR20080018314A - Apparatus for manufacturing flat panel display - Google Patents

Abstract

A device for fabrication of a flat panel display is provided to prevent attachment of a by-product at a substrate entrance by cracking the by-product attached to the substrate entrance by a protrusion type shutter. A door unit(110) cracks a by-product being attached to a substrate entrance(120) of a substrate of a chamber(100). The door unit includes a rotary shutter opening and closing the substrate entrance of the chamber and including a protrusion inside, and a rotary shaft(102) providing a rotary force to the shutter. The rotary shutter rotates along an outer circumferential surface of the rotary shaft. The protrusion of the rotary shutter is provided to face the outside of the entrance, so that the by-product attached to a body of the entrance is cracked.

Description

Equipment for manufacturing flat panel display {Apparatus for manufacturing flat panel display}

1 is a schematic diagram of equipment for manufacturing a flat panel display.

2 is a conceptual view of a door unit according to an embodiment of the present invention according to FIG. 1.

3 is a cross-sectional view showing the operation of the flat panel display manufacturing equipment according to FIG.

* Description of the symbols for the main parts of the drawings

100: load lock chamber 102: rotating shaft

104: shutter 104a: projection

106: shaft 110: door part

120: substrate entrance 200: first process chamber

300: second process chamber

The present invention relates to a flat panel display manufacturing equipment, and more particularly, to a flat panel display manufacturing equipment that can remove the by-products formed in the chamber substrate entrance.

Recently, information processing devices have been rapidly developed to have various types of functions and faster information processing speeds. Such an information processing apparatus has a display device for displaying information. Until now, a cathode ray tube monitor has been mainly used as a display device, but in recent years, with the rapid development of semiconductor technology, the use of a flat display device that is light and occupies a small space is rapidly increasing. There are various types of flat panel displays. Among them, liquid crystal displays, which are small in power consumption and small in volume, and low voltage driven, are widely used.

In order to manufacture the liquid crystal display, various processes such as a process of depositing a thin film and a metal film, a process of etching in a pattern shape, and a process of washing with water are performed. Each of these processes takes place in a chamber called a chamber that provides an environment that is isolated from the outside. Therefore, the chamber is provided with a shutter capable of opening and closing the entrance and exit of the substrate. The opening and closing operation of the shutter has a slide method or a rotation method depending on the implementation of the equipment.

On the other hand, in the chamber for each process is a space in which the process using the chemical liquid or gas, the by-product by the chemical liquid or gas may be attached to the body (body) or the substrate entrance in the chamber. In particular, when the by-products attached to the substrate entrance and exit on the substrate during substrate transfer, the by-products contaminate the substrate to create a stain pattern may cause a defect of the process. Alternatively, the stacked by-products may be in contact with the substrate during substrate transfer, causing cracking or scratching of the substrate.

An object of the present invention to provide a flat panel display manufacturing equipment that can remove the by-product formed in the chamber substrate entrance.

The technical problem to be achieved by the present invention is not limited to the above-mentioned problem, and other problems not mentioned will be clearly understood by those skilled in the art from the following description.

In order to achieve the above technical problem, the flat panel display manufacturing equipment according to an embodiment of the present invention, the flat panel display manufacturing equipment includes a chamber, a door portion that can break the attached by-products of the substrate exit of the chamber.

Specific details of other embodiments are included in the detailed description and the drawings. Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various different forms, and only the embodiments make the disclosure of the present invention complete, and the general knowledge in the art to which the present invention belongs. It is provided to fully inform the person having the scope of the invention, which is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

Hereinafter, with reference to the accompanying drawings for a preferred embodiment of the present invention will be described in more detail.

1 is a schematic diagram of equipment for manufacturing a flat panel display.

Referring to FIG. 1, an apparatus for manufacturing a flat panel display includes a load lock chamber 100, a first process chamber 200, and a second process chamber 300.

In more detail, the load lock chamber 100 is an enclosed space in an environment similar to the environment in which the manufacturing process of the flat panel display device is performed. Although not shown, it may include a cassette mount and a transfer unit. The load lock chamber 100 is a space that temporarily waits for a substrate before being transferred to the first process chamber 200. The load lock chamber 100 has a means for transferring the substrate to transfer the substrate to the first process chamber 200. The movement path of the substrate, that is, the entrance and exit 120 of the substrate is formed between the load lock chamber 100 and the first process chamber 200.

In addition, the substrate in which the process is completed in the first process chamber 200 is transferred to the second process chamber 300, which is a space for the next process. An entrance and exit 230 of a substrate that can be transferred between the first process chamber 200 and the second process chamber 300 is provided.

The first process chamber 200 and the second process chamber 300 are maintained at a predetermined pressure, that is, high vacuum, so that a smooth process of the substrate may proceed. Therefore, the pressure in the first and second process chambers 200 and 300 must be sealed to maintain a predetermined pressure. Thus, a door part for opening and closing the entrance and exit of each of the process chambers 200 and 300 is provided in each chamber to maintain pressure in the first and second process chambers 200 and 300, and also to maintain the pressure in the first and second process chambers 200. , 300) gas and chemicals should not be spread to the outside.

In particular, the door part 110 according to an embodiment of the present invention is a door part 110 in which protrusions are formed to fracture the by-products when there are by-products formed at the entrance and exit of the first process chamber 200. For convenience of description, the door unit 110 is illustrated and described only in the load lock chamber 100, but is not limited thereto. Of course, it can be formed in the entrance between the first process chamber 200 and the second process chamber 300.

The door unit 110 will be described in detail with reference to the following drawings.

2 is a conceptual diagram of the door unit 110 according to FIG. 1.

The load lock chamber 100 includes a door part 110 on one side and a substrate entrance 120 in a body of the load lock chamber 100.

The door part 110 includes a rotation shaft 102, a shutter 104, and a protrusion 104a.

One side of the rotating shaft 102 is formed in contact with the shutter 104. The rotation shaft 102 is a drive shaft that imparts a rotational force capable of rotating the shutter 104.

The shutter 104 is a door that can selectively open and close the substrate entrance 120. The shutter 104 may be made of SUS material and is opened during the transfer of the substrate, and is closed while the process is in progress to maintain the pressure of the first process chamber 200. The shutter 104 may be sliding according to the implementation of the equipment, but the present invention will be described with respect to the rotary shutter.

The shutter 104 is connected to the rotating shaft 102 by the shaft 106. The shaft 106 may be connected to the rotating shaft 102 by a connecting member (not shown).

In addition, although not shown, the rotating shaft 102 is formed by connecting a drive means for transmitting power. Therefore, when the rotating shaft 102 is rotated by the driving means, the shutter 104 may be rotated along the outer circumferential surface of the rotating shaft 102 by the rotation driving force to seal the substrate entrance 120.

According to the exemplary embodiment of the present invention, the protrusion 104a is formed at one side of the shutter 104. In the closing operation of the substrate entrance 120, the protrusion 104a is provided to face outward of the substrate entrance 120. Therefore, the protrusion 104a may crush by-products attached to the substrate entrance 120 when the substrate entrance 120 is closed. The shape of the protrusion 104a may be conical or may be polygonal with cusps. However, the shape of the protrusion 104a may be a shape that can be broken when it comes into contact with a by-product in the form of a point. In addition, although the protrusion 104a is formed in the upper portion of the shutter 104 in one embodiment, it is a matter of course that the protrusion 104a may be formed under the shutter 104. Furthermore, by forming the upper and lower sides of the shutter 104 can be more effectively by-product shredding function.

Referring to Figures 1 to 3 will be described in the flat panel manufacturing equipment according to an embodiment of the present invention.

3 is a cross-sectional view showing the operation of the flat panel display manufacturing equipment according to FIG.

First, when the substrate G is transferred from the load lock chamber 100 for the next process, the entrance 120 of the load lock chamber 100 is opened. The transferred substrate G is transferred to the first process chamber 200. Here, the first process chamber 200 is an example in which a wet etching process is performed. For convenience of description, one example of the process is a wet etching process, but is not limited thereto.

The doorway 120, which was opened at the time of transferring the substrate G, is sealed by the door part 110. More specifically, the rotation shaft 102 drives the shaft 106 by the rotation driving force by the drive means. In this case, the rotation driving direction is an arrow direction for closing the substrate entrance and exit 120. As the shaft 106 rotates, the shutter 104 with the protrusion 104a connected to the shaft 106 rotates. The direction of the protrusion 104a is provided to face in the outward direction of the substrate entrance and exit 120. Since the protrusion 104a has a pointed shape, particles and by-products attached to the body of the substrate entrance 120 may be crushed.

Particles and by-products attached to the body of the substrate entrance 120 may be generated by solidification or curing of the chemical liquid used in the process in the first process chamber 200. These by-products may contaminate the upper surface of the substrate (G) may cause a defective process, such as poor pattern. In addition, when the by-products are stacked and formed long, when the substrate G is transported, scratches may occur while being in contact with the upper surface of the substrate G, or in severe cases, cracks may occur.

However, according to the shutter unit 104 in which the door unit 110, that is, the protrusion 104a is formed, according to an embodiment of the present invention, the protrusion 104a may be in contact with and crushed by these by-products, so Unnecessary by-product attachment can be prevented.

Due to the operation of the shutter 104 every time the substrate G is transferred, the entrance and exit of the chamber can be managed without by-products, thereby stabilizing equipment.

Subsequently, a wet etching process is performed on the substrate G transferred to the first process chamber 200. The chemical liquid for wet etching is injected from the injection nozzle 210 onto the upper surface of the substrate G. When the desired process is completed on the substrate G, it is transferred to the second process chamber 300 by the plurality of rollers 220. The substrate G may be transferred to the substrate G entrance and exit 230 between the first process chamber 200 and the second process chamber 300.

Although not shown here, the substrate entrance 230 may also be provided with a shutter having the projections as described above.

Therefore, according to the flat panel display manufacturing equipment according to an embodiment of the present invention, even if the by-product is formed in the substrate entrance due to the chemical liquid or gas in the process chamber, the by-product is attached to the substrate entrance by the shutter 104 having the protrusion 104a. Can be prevented. Thus, the top surface of the substrate G may be contaminated or cracks may be prevented.

Although embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art to which the present invention pertains have various permutations, modifications, and modifications without departing from the spirit or essential features of the present invention. It is to be understood that modifications may be made and other embodiments may be embodied. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive.

As described above, the flat panel display manufacturing equipment of the present invention has one or more of the following effects.

First, by providing a projection-type shutter can be shredded by-products attached to the substrate entrance.

Second, since the by-products of the substrate entrance and exit are prevented, contamination and breakage of the substrate by the by-products can be prevented.

Third, since the by-products are prevented every time the substrate is transported, it is possible to reduce the regular preventive inspection time of the facility, thereby reducing the production cost.

Claims (4)

chamber; And Equipment for manufacturing a flat panel display comprising a door portion that can break the adhered by-products of the substrate outlet of the chamber. The method of claim 1, The door part A rotary shutter which opens and closes the substrate outlet of the chamber and has protrusions formed thereon; And Flat panel display manufacturing equipment comprising a rotation axis for imparting a rotational force to the shutter. The method of claim 1, And said rotatable shutter rotates along an outer circumferential surface of said rotating shaft. The method of claim 1, Equipment for manufacturing a flat panel display that breaks the by-product attached to the outlet body by being provided so that the projection of the rotary shutter toward the outside of the outlet.

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