KR20080012067A - Jig for calibrating camera - Google Patents

Abstract

A jig for correcting a camera is provided to inspect and correct twist of an E2 camera regardless of the experience of an operator by eliminating the need of irregular elements like a hand or a touch pen. A body is mounted on a chuck, reciprocating in the X and Y directions and rotating with respect to the chuck. An arm(29) is extended to an outward direction of the body by a predetermined interval, fixed to the body. A target is formed at the end of the arm positioned outside the body. A base plate(21) is mounted on the chuck. A first transfer plate(23) reciprocates in one of the Y or X direction with respect to the base plate, coupled to the base plate. A second transfer plate(25) reciprocates in the other one of the Y or X direction with respect to the base plate, coupled to the upper portion of the first transfer plate. A rotation plate(27) rotates with respect to the center portion of the second transfer plate, coupled to the upper portion of the second transfer plate.

Description

Jig for calibrating camera}

1 is a plan view illustrating a conventional camera calibration jig mounted on a chuck.

FIG. 2 is a side view illustrating a state in which the jig of FIG. 1 is mounted on the chuck. FIG.

3 is a perspective view showing an embodiment of a camera calibration jig according to the present invention.

4 is a plan view of the jig illustrated in FIG. 3.

** Description of the symbols for the main parts of the drawings **

20: camera calibration jig

21: base plate

23: first moving plate

25: second moving plate

27: rotating plate

29: cancer

The present invention relates to a jig, and more particularly, to a jig for calibrating a camera used in a wafer test.

In general, a fabrication process of a highly integrated semiconductor device includes a fabrication (FAB) process in which a specific pattern is repeatedly formed on a wafer to form an integrated circuit, and an assembly that cuts and packages a wafer composed of integrated circuits into unit chips ( assembly) process.

In addition, an electronic die sorting (EDS) process for inspecting electrical characteristics of each chip formed on the wafer is further included between the fab process and the assembly process. Therefore, by testing the chips constituting the wafer by such an ID process, and then identifying the good / bad chips among the tested chips, the repair cost and inspection in the subsequent assembly process by repairing or removing the bad chip Saving money

Meanwhile, in the DS process, a card in which a thin needle is fixed to a printed circuit board, that is, a probe card, is used to test a wafer. The needle of the probe card is in contact with a pad of each chip formed on the wafer so as to transmit a predetermined electrical signal to a circuit inside the chip.

However, since the pad of each chip formed on the wafer is very fine, if the needle of the probe card is not aligned correctly, the needle of the probe card does not contact the pad of each chip formed on the wafer, Can be contacted.

Therefore, in order to prevent such a problem, the needle of the probe card must be accurately aligned before testing the wafer, and for this purpose, a camera (hereinafter referred to as an "E2 camera") installed to face the needle of the probe card is called the needle of the probe card. It must be installed so as not to be misaligned. Therefore, recently, the camera has been checked and corrected for misalignment using the camera calibration jig.

1 is a plan view illustrating a conventional camera calibration jig mounted on a chuck, and FIG. 2 is a side view illustrating a jig of FIG. 1 mounted on a chuck.

1 and 2, the conventional camera calibration jig 10 is a circular plate-shaped body 12, such as a wafer, and is fixed to the upper portion of the body 12 and the outer one side from the body 12 It consists of an arm (16) extending a predetermined length in the direction. In this case, a cross-shaped target 14 is formed at the end of the arm 16 located outside the body 12 among the ends of the arm 16. Therefore, the operator checks and corrects the misalignment of the E2 camera 15 by using the target 14 of the jig 10.

Hereinafter, a method of confirming and correcting the distortion of the E2 camera 15 using the conventional camera calibration jig 10 will be described.

First, the body 12 of the camera calibration jig 10 is seated on an upper portion of the chuck 11 on which a wafer is seated. At this time, the E2 camera 15 is already installed on one side of the chuck 11.

Thereafter, the operator may cross the targets 14 formed on the arm 16 of the camera calibration jig 10 to the target of the lens 17 of the E2 camera 15 installed on one side of the chuck 11. The body 12 of the jig 10 is roughly moved by hand.

Then, when the camera calibration jig 10 is moved approximately, the operator taps the body 12 of the jig 10 by using a touch pen (not shown) or the like. By moving the body 12 little by little, the target 14 formed in the arm 16 of the jig 10 is crossed with the target of the lens 17 of the E2 camera 15.

However, in the case of the conventional camera calibration jig 10, since most of the movement is performed by using a hand or the like, the target 14 formed on the arm 16 of the jig 10 is mounted on the lens of the E2 camera 15. There is a problem that it takes a long time to completely cross the target of 17).

In addition, in the case of the conventional camera calibration jig 10, since most of the movement is performed using a hand, etc., there is a problem that the total time of the work and the precision thereof are largely influenced by the skill of the operator.

Accordingly, the present invention has been made in view of such a problem, and the technical problem to be achieved by the present invention is to provide a camera calibration jig that can quickly cross the target formed on the jig's arm to the target of the lens of the E2 camera. have.

In addition, another technical problem to be achieved by the present invention is to provide a camera calibration jig that can quickly check and correct the misalignment of the E2 camera regardless of the skill of the operator.

According to a first aspect of the present invention for realizing such a technical problem, the body is mounted to the chuck and reciprocated and rotated back and forth and left and right relative to the chuck, and fixed to the body and predetermined in one direction of the outer side of the body. There is provided a camera calibration jig comprising a distance extended arm and a target formed on the end of the arm located outside of the body.

In another embodiment, the body is a base plate mounted to the chuck, the first moving plate coupled to the upper portion of the base plate and reciprocating in either one of the front and rear or left and right directions relative to the base plate, A second moving plate coupled to an upper portion of the first moving plate and reciprocating to another one of front and rear directions or left and right directions relative to the base plate, and coupled to an upper portion of the second moving plate and It may include a rotating plate rotated based on the central portion.

On the other hand, according to a second aspect of the present invention, the base plate, the first moving plate coupled to the upper portion of the base plate and reciprocating in any one of the front and rear or left and right directions relative to the base plate, and the first A second moving plate coupled to an upper portion of the moving plate and reciprocating to the other side of the front and rear or left and right directions with respect to the base plate, and coupled to an upper portion of the second moving plate and referred to a center portion of the second moving plate; And a rotating plate which is rotated by the rotation plate, the arm which is fixed to the rotating plate and extends a predetermined distance in one direction toward the outside of the rotating plate, and a target formed at the end of the arm located outside of the rotating plate. Jig is provided.

In another embodiment, the upper portion of the base plate may be provided with a first rack extended in any one of the front and rear or left and right directions relative to the base plate, the first movable plate and the first rack A first pinion which is engaged and rotated, a first connecting shaft connected to the first pinion, and a first handle connected to the first connecting shaft to adjust the rotation of the first pinion may be provided.

In another exemplary embodiment, a second rack may be provided at an upper portion of the first movable plate and extended to the other side of the front and rear or left and right directions with respect to the base plate, and the second movable plate may be provided with the second rack. A second pinion rotated in engagement with the second rack, a second connecting shaft connected to the second pinion, and a second handle connected to the second connecting shaft to adjust the rotation of the second pinion may be provided.

In another embodiment, a rotation hole may be formed on an upper portion of the second moving plate, and the rotation plate may be inserted into the rotation hole by passing through the rotation plate, and the rotation shaft fixed to the rotation plate and the rotation shaft. It may be connected is provided with a third handle for adjusting the rotation of the rotating plate.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein and may be embodied in other forms. Rather, the embodiments introduced herein are provided to enable the disclosed contents to be thorough and complete, and to fully convey the spirit of the present invention to those skilled in the art. Like numbers refer to like elements throughout.

3 is a perspective view showing an embodiment of a camera calibration jig according to the present invention, Figure 4 is a plan view of the jig shown in FIG.

3 and 4, the camera calibration jig 20 according to an embodiment of the present invention is mounted on the chuck (see 11 of Figs. 1 and 2) and reciprocating back and forth and left and right with respect to the chuck and Rotating body 22 and the arm 29 is fixed to the body 22 and extends a predetermined distance in one direction of the outer side of the body 22 and formed in a rectangular bar shape, and the arm 29 of One of the ends includes a target 29a formed at the end of the arm 29 positioned outside the body 22 and having a cross mark shape.

At this time, the body 22 is coupled to an upper portion of the base plate 21 and the base plate 221 mounted to the chuck, and the one of the front and rear or left and right directions based on the base plate 21 For example, the first moving plate 23 reciprocated in the front and rear direction, coupled to the upper portion of the first moving plate 23 and the other one of the front and rear or left and right directions based on the base plate 21, for example , A second moving plate 25 reciprocating in the left and right directions, and a rotating plate 27 coupled to an upper portion of the second moving plate 25 and rotating based on a central portion of the second moving plate 25. Can be configured. Each plate 21, 23, 25, 27 constituting such a body 22 may be formed in a circular shape having a somewhat thin thickness, and may be formed of a material such as an aluminum alloy material.

More specifically, the upper part of the base plate 21 is provided with a first rack (21a) extending in the longitudinal direction, for example, one of the front and rear direction or the left and right, based on the base plate 21, for example. The first moving plate 23 coupled to the upper portion of the base plate 21 may be connected to the first pinion 23c and the first pinion 23c which are rotated in engagement with the first rack 21a. A first handle 23a connected to the first connecting shaft 23b so as to control rotation of the first connecting shaft 23b and the first pinion 23c and exposed to the outside of the first moving plate 23. It may be provided.

Therefore, when the worker rotates the first handle 23a exposed to the outside, the rotational force applied to the first handle 23a is transmitted to the first pinion 23c through the first connecting shaft 23b. The first pinion 23c is rotated in engagement with the first rack 21a by the transmitted rotational force. At this time, since the base plate 21 provided with the first rack 21a is mounted on the chuck and fixed to the chuck, the rotation of the first pinion 23c eventually results in the first moving plate 23. ) Causes the movement back and forth. As a result, when the operator rotates the first handle 23a, the first moving plate 23 is moved back and forth along the first rack 21a by the rotational force applied to the first handle 23a. At this time, a movement assisting means (not shown) may be further provided between the base plate 21 and the first moving plate 23 to smoothly move the first moving plate 23. For example, a plurality of ball bearings or the like may be further interposed between the base plate 21 and the first moving plate 23. In this case, the movement of the first moving plate 23 may be smoother by the function of the movement assisting means such as the ball bearing.

In addition, an upper portion of the first moving plate 23 may be provided with a second rack 23d extending longer in the front, rear, and left and right directions, for example, the left and right directions, based on the base plate 21. The second movable plate 25 coupled to the upper portion of the first movable plate 23 is connected to the second pinion 25c and the second pinion 25c which are rotated in engagement with the second rack 23d. A second handle 25a connected to the second connecting shaft 25b to adjust the rotation of the second connecting shaft 25b and the second pinion 25c and exposed to the outside of the second moving plate 25. It may be provided.

Therefore, when the worker rotates the second handle 25a exposed to the outside, the rotational force applied to the second handle 25a is transmitted to the second pinion 25c through the second connecting shaft 25b. The second pinion 25c is rotated in engagement with the second rack 23d by the transmitted rotational force. At this time, since the first movable plate 23 having the second rack 23d is difficult to move in the left and right directions due to the engagement of the first rack 21a and the first pinion 23c, Rotation of the second pinion 25c eventually causes left and right movement of the second moving plate 25. As a result, when the operator rotates the second handle 25a, the second moving plate 25 is moved left and right along the second rack 23d by the rotational force applied to the second handle 25a. . In this case, a movement assisting means (not shown) may be further provided between the first moving plate 23 and the second moving plate 25 to smoothly move the second moving plate 25. have. For example, a plurality of ball bearings and the like may be further interposed between the first moving plate 23 and the second moving plate 25. In this case, the movement of the second moving plate 25 may be smoother by the function of the movement assisting means such as the ball bearing.

Meanwhile, a rotation hole 27c may be formed at an upper center of the second moving plate 25, and the rotation plate 27 may be inserted into the rotation hole 27c by passing through the rotation plate 27. A third handle 27a connected to the rotating shaft 27b fixed to the rotating plate 27 and the rotating shaft 27b to control the rotation of the rotating plate 27 and exposed to the upper portion of the rotating plate 27. It may be provided.

Therefore, when the operator rotates the third handle 27a exposed to the outside, the third handle 27a functions as the rotation shaft 27b fitted to the rotation hole 27c and the rotation hole 27c. Due to the rotation on the upper portion of the second moving plate (25). At this time, since the rotation plate 27 is fixed to the rotation shaft 27b, the rotation plate 27 is rotated together along the rotation shaft 27b when the rotation shaft 27b is rotated. As a result, when the operator rotates the third handle 27a, the rotating plate 27 is rotated on the upper portion of the second moving plate 25 by the rotational force applied to the third handle 27a. Here, a rotational auxiliary means (not shown) may be further provided between the second moving plate 25 and the rotation plate 27 to smoothly rotate the rotation plate 27. For example, a plurality of ball bearings and the like may be further interposed between the second moving plate 25 and the rotating plate 27. In this case, the rotation of the rotation plate 27 may be more smoothly by the function of the rotational auxiliary means such as the ball bearing.

Hereinafter, a method of confirming and correcting a misalignment of an E2 camera (see 15 of FIG. 1 and FIG. 2) used in a wafer test apparatus using the camera calibration jig 20 of the present invention will be described.

First, the body 22 of the camera calibration jig 20 of the present invention is mounted on the upper portion of the chuck on which the wafer is seated. At this time, the E2 camera is already installed on one side of the chuck.

Thereafter, the operator arm 29 of the jig 20 of the present invention so that the target 29a formed on the arm 29 of the camera calibration jig 20 of the present invention crosses the target of the lens of the E2 camera installed on one side of the chuck. Move the position of. At this time, the worker rotates the handles 23a, 25a, and 27a of the body 22 without directly moving the position of the arm 29 of the jig 20 with a hand or a touch pen. 20 moves the position of the arm 29.

For example, when the arm 29 of the jig 20 is to be moved in the front-rear direction, the first handle 23a is rotated, and the arm 29 of the jig 20 is moved in the left-right direction. In order to move, the second handle 25a is rotated, and when the arm 29 of the jig 20 is rotated, the third handle 27a is rotated.

Therefore, when the position of the arm 29 of the jig 20 of the present invention is minutely moved using the handles 23a, 25a, and 27a, the target formed on the arm 29 of the jig 20 of the present invention. 29a crosses quickly and quickly to the target of the lens of the E2 camera.

As mentioned above, although the present invention has been described with reference to the illustrated embodiments, it is only an example, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the scope of the present invention should be defined by the appended claims and their equivalents.

As described above, according to the camera calibration jig of the present invention, by rotating the handles instead of crossing the target formed on the arm of the jig and the lens target of the E2 camera in an irregular manner using a hand or a touch pen as in the related art. By moving the arm of the jig back, forth, left and right, and rotation to cross the lens target of the E2 camera and the target formed on the arm of the jig, it is possible to cross more quickly. As a result, according to the present invention, since irregular elements, such as a hand or a touch pen, are alive, it is possible to quickly check and correct misalignment of the E2 camera regardless of the skill of the operator.

Claims (6)

A body mounted to the chuck, the body being reciprocated and rotated back and forth and left and right with respect to the chuck; An arm fixed to the body and extending a predetermined distance in an outer direction of the body; And, Camera calibration jig including a target formed on the end of the arm located outside the body. The method of claim 1, wherein the body is A base plate mounted to the chuck; A first moving plate coupled to an upper portion of the base plate and reciprocating in one of front and rear directions or left and right directions with respect to the base plate; A second moving plate coupled to an upper portion of the first moving plate and reciprocating to another one of the front and rear or left and right directions with respect to the base plate; And a rotating plate coupled to an upper portion of the second moving plate and rotating based on a central portion of the second moving plate. Base plate; A first moving plate coupled to an upper portion of the base plate and reciprocating in one of front and rear directions or left and right directions with respect to the base plate; A second moving plate coupled to an upper portion of the first moving plate and reciprocating to another one of the front and rear or left and right directions with respect to the base plate; A rotating plate coupled to an upper portion of the second moving plate and rotating based on a central portion of the second moving plate; An arm fixed to the rotation plate and extending a predetermined distance in an outer direction of the rotation plate; And, Camera calibration jig including a target formed on the end of the arm which is located outside the rotating plate. The method of claim 3, wherein The upper part of the base plate is provided with a first rack extended in any one of the front and rear or left and right directions relative to the base plate, The first movable plate is provided with a first pinion rotated in engagement with the first rack, a first connection shaft connected to the first pinion, and a first handle connected to the first connection shaft to adjust the rotation of the first pinion. Camera calibration jig, characterized in that the. The method of claim 3, wherein An upper portion of the first movable plate is provided with a second rack extended to the other side of the front and rear or left and right directions relative to the base plate, The second movable plate is provided with a second pinion rotated in engagement with the second rack, a second connection shaft connected to the second pinion, and a second handle connected to the second connection shaft to adjust the rotation of the second pinion. Camera calibration jig, characterized in that the. The method of claim 3, wherein The upper portion of the second moving plate is formed with a rotating hole, The rotating plate is inserted into the rotating hole through the rotating plate and is connected to the rotating shaft fixed to the rotating plate and the third handle for adjusting the rotation of the rotating plate is provided with the rotating shaft is provided with Jig.

Images