KR20080006346A - Apparatus for inspecting lcd large-size panel with the function of ito inspection - Google Patents

Abstract

An LCD panel tester having an ITO film formation function is provided to enhance inspection efficiency with a simple structure by installing contact-type probe pins and LEDs at vacuum pad units respectively, supplying an electrical signal to an LCD panel through the probe pins, and confirming whether or not ITO film formation has been done on the LCD panel. An ITO film formation detection part(100) in an LCD panel tester having an ITO film formation function is comprised of a case(160), a probe pin(110), a receiving part(120), an insulation part(130), a fixing member(170), a power supply part and an LED(150). The receiving part(120) accepts the probe pin(110), and the insulation part(130) insulates the case(160) from an electrical contact. The fixing member(170) fixes the receiving part(120) to the case(160). The power supply part supplies power to the probe pin(110). The LED(150) detects whether or not an ITO film exists on an LCD panel. In case the ITO film exists on the LCD panel, the LED(150) emits light.

Description

Apparatus for inspecting LCD large-size panel with the function of ITO inspection}

1 is a side view schematically showing a conventional substrate inspector;

FIG. 2 is a view for explaining a vacuum pad unit to which the present invention provided in an LCD panel large size inspector having an ITO film forming inspection function is applied;

FIG. 3 is a block diagram illustrating an ITO film formation detecting means applied to FIG. 2.

*** Explanation of symbols on main parts of drawing ***

100: ITO film formation detector

110: probe pin

120: storage

130: insulation

140: power supply

150: LED

160: case

The present invention relates to an LCD panel large size inspection machine having an ITO film forming inspection function.

More specifically, by providing a contact probe pin and an LED on the vacuum pad unit for fixing the LCD panel, and applying an electrical signal to the LCD panel through the contact probe, forming an ITO film on the LCD panel by emitting LEDs. The present invention relates to an LCD panel large size inspector having an ITO deposition inspection function for checking the presence or absence.

In general, when producing large substrates such as semiconductor wafers, LCDs, PDPs, and OLEDs, visual inspection, or visual inspection of the inspector, inspects the defects to detect defects such as foreign substances or stains remaining on the substrates. At this time, in order to facilitate the detection of defects, a substrate inspector which inspects the entire appearance of the substrate by irradiating light uniformly over the entire substrate.

Such a board | substrate tester is comprised from a top illumination part, a back illumination part, and a board chuck.

The upper lighting unit is installed above the substrate chuck, and serves to irradiate light on the surface of the substrate in order to inspect whether there is a defect on the surface of the substrate, and the rear lighting unit is located at the rear of the substrate position unit to check whether the substrate has an internal defect. It serves to illuminate the transmitted light from the back of the substrate for inspection.

Here, the reason for driving the illumination unit in the front and rear direction is as follows. As the substrate to be inspected becomes larger, the back illumination portion should be spaced at least a considerable distance from the substrate position in order to secure the radius of rotation of the substrate. However, when the rear illumination unit is separated from the substrate position by a considerable distance, there is a problem that the illuminance becomes weak during the inspection of the internal defect of the substrate. Therefore, it is necessary to approach the illumination unit toward the substrate position during the inspection of the internal defect of the substrate. Therefore, it is necessary to provide the lighting unit to be movable in the front-back direction.

At this time, the moving part is provided with a linear guide of a predetermined length in the front-rear direction, and is composed of a linear block moving along the linear guide in combination with the linear guide, the linear block is coupled to the lighting unit Take a structure formed integrally with the structure or the lighting unit.

Accordingly, when the linear block is moved along the linear guide, the lighting unit coupled to the linear block moves together in the front and rear directions.

The conventional substrate inspector has a base 10, an extension 20 provided in a state upright on both sides of the base 10, and an upper end of the extension 20 as shown in FIG. The space between the substrate chuck 30 which rotates by a hinge and adsorbs the substrate S at a vacuum pressure, and a plurality of substrate chucks 30 arranged on the substrate chuck 30 and seated on the upper side are vacuum pumps ( Light is applied to the substrate S from above and behind the vacuum pad unit 36 and the substrate chuck 30 which are arranged to provide a suction force to the substrate S in a vacuum state (not shown in the drawing). It consists of an illumination part (not shown in figure) provided with the lamp to irradiate.

One side of the extension part 20 is further provided with a driving unit (not shown in the drawing) for rotating the substrate chuck 30, the substrate to which the substrate S is fixed by providing power to the substrate chuck 30 by the driving unit. It serves to rotate the chuck 30.

The vacuum pad unit as described above does not have a separate function except for fixing a substrate.

On the other hand, LCD manufactures a liquid crystal drive board | substrate and the opposing board | substrate with which the counter electrode is formed separately, combines them in substantially parallel at predetermined intervals, injects a liquid crystal into these gaps, and seals liquid crystal What is necessary is just to form a layer.

However, not all LCDs manufactured as described above are good LCDs without pixel defects, so it is necessary to check whether there are pixel defects in the LCD. As a method of performing pixel defect inspection of an LCD of an active matrix system after liquid crystal injection, a method of actually driving the LCD, analyzing the image with an image processing apparatus, performing defect detection, or detecting a defect by eye is adopted. . As a method of performing pixel defect inspection of an active matrix LCD after liquid crystal injection, for example, a method as disclosed in Japanese Patent Laid-Open No. 63 (1988) -123093 is known.

However, in such a method, since the inspection is performed only after the image is actually displayed on the LCD, the measurement takes a long time and there is a problem that productivity cannot be expected.

The present invention has been made to solve the above problems of the prior art, an object of the present invention is to provide a contact probe pin and LED in the vacuum pad unit for fixing the LCD panel and to the LCD panel through the contact probe The present invention provides a large LCD panel inspection machine having an ITO deposition inspection function for checking whether or not ITO deposition is formed on the LCD panel by applying an electric signal and then emitting LEDs.

One embodiment of the present invention proposed to solve the technical problem as described above, the base 10, the extension portion 20 is provided in a state upright on both sides of the base 10, the extension portion The substrate chuck 30 which rotates by a hinge at the upper end of the 20 and adsorbs the LCD panel 40 at a vacuum pressure, and a plurality of substrate chucks 30 are arranged in the substrate chuck 30 and seated on the upper side. In the LCD panel large size inspector comprising a vacuum pad unit 36 arranged so as to provide a suction force to the LCD panel 40 in a vacuum state by a vacuum pump, the vacuum pad unit 36 Is coupled to the left or right side of the by the coupling member is characterized in that it comprises an ITO film-forming detection unit 100 for detecting the presence or absence of ITO film-forming of the LCD panel 40.

The ITO deposition detecting unit 100 insulates the case 160, the probe pin 110, the accommodating unit 120 that can accommodate the probe pin 110, and the case 160 from electrical contact. Insulation unit 130, the fixing member 170 for fixing the housing 120, the probe pin 110 is accommodated in the case 160, and supplying power to the probe pin 110 It is characterized in that it comprises a power supply unit 140, and a film forming detection unit 150 for detecting whether the ITO film forming on the LCD panel 40.

The film forming unit 150 is preferably an LED.

The LED is energized when the ITO deposition is present in the LCD panel 40, the light is emitted, and is turned on when there is no ITO deposition.

Hereinafter, with reference to the accompanying drawings will be described in detail an LCD panel large size inspection machine having an ITO film forming test function.

LCD panel large size inspection machine having an ITO film forming inspection function according to the present invention, as shown in Figure 2 and 3 of the accompanying drawings, the base 10, and the extended portion provided in the upright state on both sides of the base 10 20 and a substrate chuck 30 which rotates by a hinge on an upper end of the extension portion 20 and sucks the LCD panel 40 at a vacuum pressure, and a plurality of substrate chucks 30 are arranged in an array. A vacuum pad unit 36 arranged to provide a suction force to the LCD panel 40 in a vacuum state by a vacuum pump with a space between the LCD panel 40 seated on the upper side, and the vacuum pad unit 36. It is composed of an ITO film-forming detection unit 100 is coupled to the left or right side of the by detecting the presence or absence of ITO film-forming of the LCD panel.

The substrate chuck 30 includes a body 32, a fixed bar 34, the vacuum pad unit 36, and the ITO film forming detector 100 as shown in FIG. 2.

The body part 32 is formed in a frame shape through which the central part penetrates into a plate shape larger than the area of the LCD panel 40 to be seated, and is connected to an extension part (not shown) on both opposite side walls to transmit power. Rotating shafts are formed so that each can be

In addition, the fixing bar 34 is arranged at a predetermined interval in the center of the body portion 32 so that the vacuum pad unit 36 can be supported.

In addition, the vacuum pad unit 36 is arranged on the upper surface of the fixing bar 34 at an appropriate interval to adsorb the LCD panel 40 on the surface by a vacuum pressure, each of which is a vacuum pump (not shown in the figure). ).

The ITO deposition detecting unit 100 insulates the case 160, the probe pin 110, the accommodating unit 120 that can accommodate the probe pin 110, and the case 110 from electrical contact. Insulating part 130 to be fixed, a fixing member 170 for fixing the housing 120 in which the probe pin 110 is accommodated in the case 110, and supplying power to the probe pin 110 The power supply unit 140 and the LCD panel 40 includes a film forming unit 150 for detecting whether ITO film is present.

In particular, the deposition detection unit 150 is preferably an LED.

The LED 150 is energized when ITO deposition is present on the LCD panel, and is turned on when there is no ITO deposition.

Referring to the operation of the LCD panel large inspection machine having the ITO film forming inspection function having the above structure is as follows.

2, when the LCD panel to be inspected is moved and placed on the substrate chuck 30, the vacuum pad unit 36 provided on the substrate chuck 30 moves the LCD panel. Adsorbed by pneumatic pressure to be fixed to the body portion 32 of the substrate chuck (30).

Then, the probe pin 110 of the ITO deposition detector 100, which is fixed and coupled to the vacuum pad unit 36, comes into contact with the LCD panel 40, and the power supply unit 140 passes through the probe pin 110. The supplied electrical signal is output to the LCD panel 40.

In this case, when the ITO deposition is present in the LCD panel 40, the LED, which is the film forming detection unit 150, is energized and emitted, so that the inspector determines that the ITO deposition is normally present in the LCD panel 40. A good decision will be made for.

If the ITO deposition is not present on the LCD panel 40, the LED of the film formation detecting unit 150 is not energized and thus maintains a flickering state. Therefore, the inspector contacts the probe pin 110 on the LCD panel 40. Determination of defective products is performed on the inspected LCD panel 40 by judging that ITO film formation does not exist or does not operate normally.

The present invention is not limited to the above embodiments, and various modifications and changes can be made by those skilled in the art, which are included in the spirit and scope of the present invention included in the appended claims.

The present invention having the above-described configuration, operation, and preferred embodiments provides a contact probe pin and an LED on a vacuum pad unit for fixing the LCD panel, and then applies an electrical signal to the LCD panel through the contact probe. It is possible to confirm the presence or absence of ITO film formation on the LCD panel by emitting light, thereby improving the inspection efficiency with a simple structure.

Claims (4)

The base 10, the extension part 20 provided in an upright state at both centers of the base 10, and rotated by a hinge on the upper end of the extension part 20, the LCD panel 40 A suction force is applied to the LCD panel 40 in a vacuum state by a vacuum pump to space between the substrate chuck 30 to be sucked by pneumatically and the LCD panel 40 mounted on the substrate chuck 30. In the LCD panel large size inspector comprising a vacuum pad unit 36 arranged to be provided to provide, An ITO deposition detector 100 coupled to the left or right side of the vacuum pad unit 36 by a coupling member to detect the presence or absence of ITO deposition on the LCD panel. LCD panel large size inspector having an ITO deposition inspection function, characterized in that is provided, including. The method of claim 1, wherein the ITO film forming unit 100, A case 160, a probe pin 110, an accommodating part 120 for accommodating the probe pin 110, an insulating part 130 for insulating the case 160 from electrical contact, A fixing member 170 for fixing the housing 130 in which the probe pin 110 is accommodated to the case 160, a power supply unit 140 for supplying power to the probe pin 110, and the LCD. Deposition detection unit 150 for detecting whether the ITO deposition on the panel 40, LCD panel large size inspector having an ITO deposition inspection function, characterized in that is provided, including. The method of claim 2, wherein the film forming unit 150, LCD panel large size inspector with ITO film-forming inspection characterized by LED. The method of claim 3, wherein the LED, When the ITO film-forming on the LCD panel is present, it is energized and emits light, and when the ITO film-forming does not exist, the LCD panel large size inspector having an ITO film-forming function.

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