KR20070120777A - Apparatus for controlling fluid flow in conduit line - Google Patents

Abstract

A fluid flow control union is provided to control a fluid by installing a fluid controller including an opening for transmitting the fluid within the union to control a diameter of the aperture. A fluid control union comprises a first socket for connecting pipe lines(100), a second socket for connecting the pipe lines(200), an assembly cap(300) and a fluid controller(500). The cap is provided to combine the first socket and the second socket. An opening controlling the fluid amount is formed in the fluid controller. The fluid controller is combined to the first socket and/or the second socket.

Description

Flow Control Union {Apparatus for controlling fluid flow in conduit line}

1 is an exploded perspective view of a flow control union according to a first embodiment of the present invention.

2 is a perspective view of the flow control union of FIG.

3 is a cross-sectional view taken along line AA ′ of the flow control union of FIG. 2.

4 is a plan view of the chemical liquid injection device is installed the flow control union of FIG.

5 is a cross-sectional view taken along line BB ′ of the chemical liquid injection device of FIG. 4.

6 is a cross-sectional view of a flow control union according to a second embodiment of the present invention.

(Explanation of symbols for the main parts of the drawing)

10, 20: flow control union 30: liquid injection device

100: first pipe connection socket 110: protrusion

200: socket for second pipe connection 220: thread

300: assembly cap 320: screw groove

400: sealing member 420: first contact groove

430: second contact groove 500: flow control unit

510: fluid passage opening 520: first step

530: second step 600: first pipe

610: second pipe 630: nozzle

640: chemical liquid 650: substrate

The present invention relates to a flow control union, and more particularly to a device including a flow control unit including a fluid passage opening to enable flow control in the union of the fluid conduit.

In general, manufacturing equipment for semiconductors and flat panel displays is manufactured by forming a predetermined film on a substrate and forming the film in a constant pattern. The pattern is formed by sequential or repeated performance of various processes such as chemical vapor deposition, photography, diffusion, etching, and cleaning.

The etching process is a process of removing a portion of the film according to the photoresist pattern formed on the upper surface of the substrate. The etching process is divided into dry etching and wet etching. Dry etching uses plasma, ion beams, reactive ions, and the like, and wet etching uses a chemical liquid having a necessary concentration. Among them, wet etching is widely used in the production process as the most economical and productive etching method.

After cleaning various chemicals, ELD (Electroluminescent Display), LCD (Liquid Crystal Display), PDP (Plasma Display Panel) and VFD (Vacuum Fluorescent Display), particles adsorbed on FPD surface, organic contaminants, metal impurities It is the process of removing the termination of the back (contamination). The washing process is divided into dry washing and wet washing. Dry washing uses ultraviolet rays or air, and wet washing uses a chemical liquid having a necessary concentration. Among them, wet cleaning is widely used as a cleaning method for removing organic contaminants and metal impurities.

Here, although the wet etching process and the wet cleaning process have differences in the purpose of the process, the processing of the substrate in each process is similar to the process of providing a chemical liquid or the like on a substrate seated on a rotating chuck. The chemical liquid provided to the substrate is supplied by a nozzle or the like, and the nozzle includes a tube through which the chemical liquid is supplied. Even if the same pressure and the same flow rate is sent to a conduit line through which multiple unions pass, the chemical liquid injection from the nozzles connected to each union may not be uniform. The inner diameter of the conventional union is fixed and is not suitable for the piping configuration that requires the control of the flow rate.

The technical problem to be achieved by the present invention is to control the flow rate through the pipe by adjusting the diameter of the fluid passage opening of the flow rate control unit via the flow rate control unit including a fluid passage opening in the union.

Technical problems of the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the following description.

Flow control union according to an embodiment of the present invention for achieving the above technical problem is assembled to combine the first pipe connection socket, the second pipe connection socket, the first pipe connection socket and the second pipe connection socket. And a flow rate adjusting portion having a fluid passage opening for controlling a flow rate of the fluid and the fluid, wherein the flow rate adjusting portion includes coupling to the first pipe connection socket and / or the second pipe connection socket.

Specific details of other embodiments are included in the detailed description and the drawings.

Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various forms. It is provided to fully convey the scope of the invention to those skilled in the art, and the present invention is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

Hereinafter, an embodiment according to the present invention will be described in detail with reference to the accompanying drawings in order to describe the present invention in more detail.

1 is an exploded perspective view of a flow control union according to a first embodiment of the present invention,

2 is a perspective view of the flow control union of FIG. 3 is a cross-sectional view taken along line AA ′ of the flow control union of FIG. 2.

1 to 3, a flow regulating union 10 according to a first embodiment of the present invention will be described.

The flow rate control union 10 according to the first embodiment of the present invention includes a socket for connecting a first pipe 100, a socket for connecting a second pipe 200, a socket for connecting a first pipe 100, and a second pipe. A fluid passage opening coupled to the cap 300 for assembling the connection socket 200 and the socket for the first pipe connection 100 and / or the socket for the second pipe connection 200, and adjusting the flow rate of the fluid. It includes a flow control unit 500 is formed 510.

Pipes used as fluid passageways are typically manufactured and marketed in various forms of unit specifications to have standardized diameters and lengths. Such a unit standard pipe is typically used by connecting a plurality of unit pipes in communication with each other so as to secure a sufficiently extended passage length for use as a passage of a specific fluid. The flow rate control union 10 is a device used when joining pipes of the same diameter in a straight line.

The flow control union 10 has a structure in which the first pipe connection socket 100 and the second pipe connection socket 200 are coupled by an assembly cap 300. The assembly cap 300 is formed to surround the first pipe connection socket 100 and the second pipe connection socket 200, and one end of the assembly cap 300 is the first pipe connection socket 100. The screw groove 320 formed at the other end of the cap 300 for assembling is fixed to the protrusion 110 formed at the end of the screw thread with the screw thread 220 formed in the socket for the second pipe connection (200).

As the sealing member 400 which prevents leakage of fluid, an O-ring made of rubber and resin is representative, but is not limited thereto. In order for the sealing member 400 to be interposed in the union, the first contact groove 420 may be formed in the second pipe connection socket 200 of the union. More specifically, the first contact groove 420 is formed inside the second pipe connection socket 200 at a contact surface between the first pipe connection socket 100 and the second pipe connection socket 200.

As shown in FIG. 1, the flow rate control union 10 according to the first embodiment of the present invention has a flow rate in addition to the first pipe connection socket 100, the second pipe connection socket 200, and the assembly cap 300. And a flow rate regulator 500 including a fluid passage opening 510 for regulation.

As shown in FIG. 3, the flow rate control part 500 including the fluid passage opening 510 may be inserted into the first step 520 formed in the second pipe connection socket 200. The first step 520 may be formed at the center of the second pipe connection socket 200 than the contact groove 420 for the interposition of the sealing member.

The diameter of the fluid passage opening 510 of the flow control unit 500 including the fluid passage opening 510 may be changed as necessary for the corresponding union.

A method of adjusting the flow rate according to the change in the diameter of the fluid passage opening 510 of the flow rate controller including the fluid passage opening 510 will be described with reference to FIGS. 4 and 5.

Figure 4 is a plan view of the chemical liquid injection device is installed flow rate adjustment union according to a first embodiment of the present invention. 5 is a cross-sectional view taken along line B-B 'of the chemical liquid injection device of FIG.

In the wet etching process and the wet cleaning process, the processing of the substrate in each process is similar to the process of providing the chemical liquid 640 or the like on the substrate 650 seated on the rotating chuck. As shown in FIG. 5, the chemical liquid 640 provided to the substrate is supplied by the nozzle 630 or the like. Chemical liquid 640 at the nozzle 630 connected to each flow control union 10 even if the same pressure and the same flow rate are sent to the pipes 600, 610, conduit line through which the plurality of flow control unions 10 pass. ) The injection may not be uniform. This is because the inner diameter of the conventional union is fixed and is not suitable for the piping configuration that requires the control of the flow rate. Therefore, first, the average of the flow rates of a plurality of unions is experimentally obtained. Based on the result, the amount of flow rate is calculated so that a uniform chemical liquid is injected into the plurality of nozzles 30 connected to each union. By adjusting the diameter 510 of the flow passage opening of the flow adjusting part 500 according to the amount thereof, the flow adjusting union 10 is formed to substantially inject the uniform chemical liquid 640 from each nozzle 630. Will be.

6 is a cross-sectional view of a flow control union according to a second embodiment of the present invention.

Hereinafter, a flow regulating union 20 according to a second embodiment of the present invention will be described with reference to FIG. 6. For convenience of description, members having the same functions as the members shown in the drawings (FIGS. 1 to 5) of the first embodiment are denoted by the same reference numerals, and therefore description thereof is omitted.

The flow regulating union 20 of this embodiment has a structure basically the same as the flow regulating union of 1st Example except the following as shown to FIG.

As shown in FIG. 4, in order for the sealing member 400 to be interposed in the union, the second contact groove 430 is formed at a contact surface at which the first pipe connecting socket 100 and the second pipe connecting socket 200 of the union are coupled. This can be formed. As a result, a second contact groove 430 is formed in both the first pipe connection socket 100 and the second pipe connection socket 200.

The flow rate adjusting part 500 including the fluid passage opening 510 is formed in the second step 530 formed around the contact surface of the socket for connecting the first pipe 100 and the socket for the second pipe connection 200. Can be inserted. The second step 530 may be formed at the center of the first pipe connection socket 100 and the second pipe connection socket 200 than the contact groove 420 for interposing the sealing member.

Although embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art to which the present invention pertains may implement the present invention in other specific forms without changing the technical spirit or essential features thereof. I can understand that. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive.

As described above, according to the flow rate adjusting union according to the present invention, the flow rate passing through the union can be adjusted to substantially uniform the chemical liquid injected from the nozzle.

Claims (5)

A first pipe connection socket; A second pipe connection socket; An assembly cap for coupling the first pipe connection socket and the second pipe connection socket; And It includes a flow rate control portion formed with a fluid passage opening for adjusting the flow rate of the fluid,  The flow rate adjusting unit includes a flow control union comprising coupling to the first pipe connection socket and / or the second pipe connection socket. According to claim 1, The flow rate adjustment union is formed with a step that is inserted into the flow rate control portion to the first pipe connection socket and / or the second pipe connection socket. The method of claim 2, And a sealing member interposed between the first pipe connection socket and / or the second pipe connection socket to prevent leakage of fluid. And a contact groove in which the sealing member is inserted into the first pipe connection socket and / or the second pipe connection socket, wherein the step is closer to the fluid passage opening than the contact groove. According to claim 1, The assembly cap is formed to surround the first pipe connection socket and the second pipe connection socket, one end of the assembly cap is fixed to the projection formed on the end of the first pipe connection socket, The other end of the cap for the assembly is a flow rate adjustment union for screwing the second pipe connection socket. A first pipe for supplying a chemical liquid; A second pipe having a nozzle for discharging the chemical liquid; Chemical liquid injection device comprising the union of any one of claims 1 to 4 connecting the first pipe and the second pipe.

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