KR20070098414A - 광발광성 다공성 실리콘을 이용한 니트로 방향족 폭발물탐지용 화학센서 - Google Patents
광발광성 다공성 실리콘을 이용한 니트로 방향족 폭발물탐지용 화학센서 Download PDFInfo
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- KR20070098414A KR20070098414A KR1020060078524A KR20060078524A KR20070098414A KR 20070098414 A KR20070098414 A KR 20070098414A KR 1020060078524 A KR1020060078524 A KR 1020060078524A KR 20060078524 A KR20060078524 A KR 20060078524A KR 20070098414 A KR20070098414 A KR 20070098414A
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- porous silicon
- prepared
- organometallic compound
- compound
- chemical sensor
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- 229910021426 porous silicon Inorganic materials 0.000 title claims abstract description 171
- 239000000126 substance Substances 0.000 title claims abstract description 36
- 150000001875 compounds Chemical class 0.000 title claims abstract description 24
- 239000002360 explosive Substances 0.000 claims abstract description 46
- 238000004519 manufacturing process Methods 0.000 claims abstract description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 15
- 238000005530 etching Methods 0.000 claims abstract description 14
- 238000006459 hydrosilylation reaction Methods 0.000 claims abstract description 12
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 8
- 239000010703 silicon Substances 0.000 claims abstract description 8
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims abstract description 7
- 150000002902 organometallic compounds Chemical class 0.000 claims description 60
- 238000001514 detection method Methods 0.000 claims description 30
- LQNUZADURLCDLV-UHFFFAOYSA-N nitrobenzene Chemical compound [O-][N+](=O)C1=CC=CC=C1 LQNUZADURLCDLV-UHFFFAOYSA-N 0.000 claims description 28
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 claims description 21
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims description 18
- 238000006243 chemical reaction Methods 0.000 claims description 18
- SPSSULHKWOKEEL-UHFFFAOYSA-N 2,4,6-trinitrotoluene Chemical compound CC1=C([N+]([O-])=O)C=C([N+]([O-])=O)C=C1[N+]([O-])=O SPSSULHKWOKEEL-UHFFFAOYSA-N 0.000 claims description 12
- RMBFBMJGBANMMK-UHFFFAOYSA-N 2,4-dinitrotoluene Chemical compound CC1=CC=C([N+]([O-])=O)C=C1[N+]([O-])=O RMBFBMJGBANMMK-UHFFFAOYSA-N 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 9
- 238000002848 electrochemical method Methods 0.000 claims description 8
- 229920001296 polysiloxane Polymers 0.000 claims description 8
- 239000003960 organic solvent Substances 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims 1
- 150000002736 metal compounds Chemical class 0.000 abstract description 4
- 239000011148 porous material Substances 0.000 description 24
- FSXVNQVKELERGF-UHFFFAOYSA-N C=CC1=CC=CC(C([SiH2]C(C2=CC=CC=C2)=C2C3=CC=CC=C3)=C2C2=CC=CC=C2)=C1C=C Chemical compound C=CC1=CC=CC(C([SiH2]C(C2=CC=CC=C2)=C2C3=CC=CC=C3)=C2C2=CC=CC=C2)=C1C=C FSXVNQVKELERGF-UHFFFAOYSA-N 0.000 description 23
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 18
- 238000005424 photoluminescence Methods 0.000 description 13
- OXNIZHLAWKMVMX-UHFFFAOYSA-N picric acid Chemical compound OC1=C([N+]([O-])=O)C=C([N+]([O-])=O)C=C1[N+]([O-])=O OXNIZHLAWKMVMX-UHFFFAOYSA-N 0.000 description 13
- AGBFPIUTYIRJFF-UHFFFAOYSA-N 2,3,4,5-tetraphenyl-1-prop-1-enyl-1H-silole Chemical compound CC=C[SiH]1C(=C(C(=C1C1=CC=CC=C1)C1=CC=CC=C1)C1=CC=CC=C1)C1=CC=CC=C1 AGBFPIUTYIRJFF-UHFFFAOYSA-N 0.000 description 12
- 238000000445 field-emission scanning electron microscopy Methods 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 8
- -1 nitro aromatic compounds Chemical class 0.000 description 8
- 239000013078 crystal Substances 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 6
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000007664 blowing Methods 0.000 description 6
- 229960004132 diethyl ether Drugs 0.000 description 6
- RMGJCSHZTFKPNO-UHFFFAOYSA-M magnesium;ethene;bromide Chemical compound [Mg+2].[Br-].[CH-]=C RMGJCSHZTFKPNO-UHFFFAOYSA-M 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052990 silicon hydride Inorganic materials 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 4
- JRXXLCKWQFKACW-UHFFFAOYSA-N biphenylacetylene Chemical group C1=CC=CC=C1C#CC1=CC=CC=C1 JRXXLCKWQFKACW-UHFFFAOYSA-N 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 229910052744 lithium Inorganic materials 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000002244 precipitate Substances 0.000 description 4
- 230000000171 quenching effect Effects 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000003786 synthesis reaction Methods 0.000 description 4
- JLKJZWGMBVQEOS-UHFFFAOYSA-N CC(C=CC=C1)=C1C([SiH](C(C1=CC=CC=C1)=C1C2=CC=CC=C2)Cl)=C1C1=CC=CC=C1 Chemical compound CC(C=CC=C1)=C1C([SiH](C(C1=CC=CC=C1)=C1C2=CC=CC=C2)Cl)=C1C1=CC=CC=C1 JLKJZWGMBVQEOS-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000006056 electrooxidation reaction Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 125000002524 organometallic group Chemical group 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical group C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- YQUNADBGHGGNFD-UHFFFAOYSA-N ClC=1C(=C(C=CC=1)C=1[SiH2]C(=C(C=1C1=CC=CC=C1)C1=CC=CC=C1)C1=CC=CC=C1)Cl Chemical compound ClC=1C(=C(C=CC=1)C=1[SiH2]C(=C(C=1C1=CC=CC=C1)C1=CC=CC=C1)C1=CC=CC=C1)Cl YQUNADBGHGGNFD-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- 230000008033 biological extinction Effects 0.000 description 2
- 239000011258 core-shell material Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000004020 luminiscence type Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000005055 methyl trichlorosilane Substances 0.000 description 2
- JLUFWMXJHAVVNN-UHFFFAOYSA-N methyltrichlorosilane Chemical compound C[Si](Cl)(Cl)Cl JLUFWMXJHAVVNN-UHFFFAOYSA-N 0.000 description 2
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 2
- 125000000962 organic group Chemical group 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 239000000015 trinitrotoluene Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000001644 13C nuclear magnetic resonance spectroscopy Methods 0.000 description 1
- 238000005160 1H NMR spectroscopy Methods 0.000 description 1
- PNOWDYSOQXGZCW-UHFFFAOYSA-N C(=C)[SiH]1C(=C(C(=C1C1=CC=CC=C1)C1=CC=CC=C1)C1=CC=CC=C1)C1=CC=CC=C1 Chemical compound C(=C)[SiH]1C(=C(C(=C1C1=CC=CC=C1)C1=CC=CC=C1)C1=CC=CC=C1)C1=CC=CC=C1 PNOWDYSOQXGZCW-UHFFFAOYSA-N 0.000 description 1
- NGPDMFMBHYVWSU-UHFFFAOYSA-N CC1=C(C=CC=C1)C=1[SiH](C(=C(C1C1=CC=CC=C1)C1=CC=CC=C1)C1=CC=CC=C1)C=CC Chemical compound CC1=C(C=CC=C1)C=1[SiH](C(=C(C1C1=CC=CC=C1)C1=CC=CC=C1)C1=CC=CC=C1)C=CC NGPDMFMBHYVWSU-UHFFFAOYSA-N 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000012491 analyte Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000012792 core layer Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011491 glass wool Substances 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 150000002605 large molecules Chemical class 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 238000010626 work up procedure Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6489—Photoluminescence of semiconductors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/22—Fuels; Explosives
- G01N33/227—Explosives, e.g. combustive properties thereof
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Combustion & Propulsion (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
Abstract
Description
Claims (12)
- 광발광성 다공성 실리콘; 또는상기 광발광성 다공성 실리콘의 표면에 유기금속화합물이 고착되어 제조된 다공성 실리콘;으로 이루어진 것을 특징으로 하는 니트로 방향족 폭발물 탐지용 화학센서.
- 제1항에 있어서, 상기 유기금속화합물이 다공성 실리콘 표면의 Si-H와 하이드로실릴 반응(hydrosilylation)으로 제조될 수 있는 비닐기를 갖는 화합물인 것을 특징으로 하는 상기 니트로 방향족 폭발물 탐지용 화학센서.
- 제1항에 있어서, 상기 니트로 방향족 폭발물이 2,4,6-트리니트로톨루엔, 2,4-디니트로톨루엔, 피크르산 및 니트로벤젠으로 이루어진 군에서 선택되는 어느 하나인 것을 특징으로 하는 상기 니트로 방향족 폭발물 탐지용 화학센서.
- 실리콘웨이퍼를 전기화학적 방법으로 에칭하여 제조되는 다공성 실리콘의 제조방법에 있어서, 상기 전기화학적 방법이 전류세기 50∼300 ㎃/㎠ 및 에칭 시간 5∼10분 동안 수행되는 것을 특징으로 하는 제1항의 다공성 실리콘의 제조방법.
- 제5항에 있어서, 상기 전기화학적 방법이 전류세기 200∼300 ㎃/㎠으로 수행되는 것을 특징으로 하는 상기 다공성 실리콘의 제조방법.
- 제5항의 제조방법으로 제조된 다공성 실리콘을유기금속화합물이 헥산, 톨루엔 및 하이드로테트라퓨란으로 이루어진 군에서 선택되는 어느 하나의 유기용매에 용해되어 준비된 용액에 혼합한 후, 하이드로실릴 반응으로 제조되는 것을 특징으로 하는 제1항의 다공성 실리콘의 표면에 유기금속화 합물이 고착된 다공성 실리콘의 제조방법.
- 제7항에 있어서, 상기 하이드로실릴 반응이 광반응 또는 열반응으로 수행되는 것을 특징으로 하는 상기 제조방법.
- 제7항에 있어서, 상기 유기금속화합물이 다공성 실리콘 표면의 Si-H와 하이드로실릴 반응으로 제조될 수 있는 비닐기를 갖는 화합물인 것을 특징으로 하는 상기 제조방법.
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KR20060029368 | 2006-03-31 | ||
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KR20070098414A true KR20070098414A (ko) | 2007-10-05 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010075333A3 (en) * | 2008-12-23 | 2010-09-16 | 3M Innovative Properties Company | Organic chemical sensor with microporous organosilicate material |
US8647884B2 (en) | 2008-12-23 | 2014-02-11 | 3M Innovative Properties Company | Organic chemical sensor with microporous organosilicate material |
US8820208B2 (en) | 2012-03-21 | 2014-09-02 | Defense Agency For Technology And Quality | Mine detector detachably attached to combat boot |
KR20200042189A (ko) * | 2018-10-15 | 2020-04-23 | 국방과학연구소 | 루게이트 다공질 실리콘 양자점의 제조방법 및 루게이트 다공질 실리콘 양자점 기반 폭발물 탐지용 화학센서 |
KR20200042190A (ko) * | 2018-10-15 | 2020-04-23 | 국방과학연구소 | 분포 브래그 반사 다공질 실리콘 필름의 제조 방법 및 분포 브래그 반사 다공질 실리콘 필름 기반 폭발물 탐지용 화학센서 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7482168B2 (en) * | 2001-09-15 | 2009-01-27 | The Regents Of The University Of California | Photoluminescent polymetalloles as chemical sensors |
KR20030043264A (ko) * | 2001-11-27 | 2003-06-02 | 박철홍 | 전자결핍성화합물과 특이반응하는 폴리치환된 실롤-저몰나노와이어 및 그 제조방법 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010075333A3 (en) * | 2008-12-23 | 2010-09-16 | 3M Innovative Properties Company | Organic chemical sensor with microporous organosilicate material |
US8409511B2 (en) | 2008-12-23 | 2013-04-02 | 3M Innovative Properties Company | Organic chemical sensor with microporous organisilicate material |
US8647884B2 (en) | 2008-12-23 | 2014-02-11 | 3M Innovative Properties Company | Organic chemical sensor with microporous organosilicate material |
US8820208B2 (en) | 2012-03-21 | 2014-09-02 | Defense Agency For Technology And Quality | Mine detector detachably attached to combat boot |
KR20200042189A (ko) * | 2018-10-15 | 2020-04-23 | 국방과학연구소 | 루게이트 다공질 실리콘 양자점의 제조방법 및 루게이트 다공질 실리콘 양자점 기반 폭발물 탐지용 화학센서 |
KR20200042190A (ko) * | 2018-10-15 | 2020-04-23 | 국방과학연구소 | 분포 브래그 반사 다공질 실리콘 필름의 제조 방법 및 분포 브래그 반사 다공질 실리콘 필름 기반 폭발물 탐지용 화학센서 |
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