KR20070072109A - Rack master of stocker - Google Patents

Abstract

A rack master of a stocker is provided to maximize power transfer efficiency and improve productivity by simplifying a power transfer path. A speed reducer(242) is installed at a motor(241). A driving wheel receives power output through the speed reducer and is moved by the received power. A shaft(247) is installed between two shafts. A ball joint(295) is installed between the speed reducer and the shaft. A roller bearing(290) is provided outside the shaft. The shaft maintains balance by confining torque between the two shafts. The ball joint compensates for eccentricity between the two shafts. The speed reducer decreases a speed of high-speed rotation of the motor. The roller berating prevents vertical and horizontal movements of the shaft.

Description

Rack master of the stocker {RACK MASTER OF STOCKER}

1 is a cross-sectional view schematically showing the structure of a typical stocker.

FIG. 2 is a perspective view schematically showing a driving unit of the rack master in the stocker shown in FIG. 1; FIG.

Figure 3 is a perspective view schematically showing a drive unit of the rack master according to the first embodiment of the present invention.

4 is an exemplary diagram for explaining a phenomenon in which a shaft and a shaft coupler are damaged in the driving unit of the rack master shown in FIG. 3.

5 is a perspective view schematically showing a drive unit of a rack master according to a second embodiment of the present invention;

6 is an exemplary view schematically showing a shaft flow prevention and eccentricity correction structure in the drive unit of the rack master shown in FIG.

** Description of symbols for the main parts of the drawing **

140,240: rack master drive unit 141,241: motor

142,242: Reducer 146,246: Wheel

147A, 147B, 247: Shaft 180A, 180B: Shaft Coupler

290: roller bearing 295: ball joint

The present invention relates to a rack master of a stocker, and more particularly, to a rack master of a stocker capable of simplifying the power transmission path while preventing the flow of the shaft and correcting the eccentricity.

Recently, with increasing interest in information display and increasing demand for using a portable information carrier, a lightweight flat panel display (FPD), which replaces a conventional display device, a cathode ray tube (CRT), is used. The research and commercialization of Korea is focused on. In particular, the liquid crystal display (LCD) of the flat panel display device is an image representing the image using the optical anisotropy of the liquid crystal, is excellent in resolution, color display and image quality, and is actively applied to notebooks or desktop monitors have.

Hereinafter, the liquid crystal display device will be described in detail.

A general liquid crystal display device includes a liquid crystal display panel including a driving circuit unit, a backlight unit disposed under the liquid crystal display panel to emit light to the liquid crystal display panel, and the backlight unit and the liquid crystal display panel. It consists of a mold frame (case) and the case (bond) to be bonded.

The liquid crystal display panel is largely composed of a color filter substrate and an array substrate, and a liquid crystal layer formed between the color filter substrate and the array substrate.

In this case, the color filter substrate is composed of a sub-color filter of red, green, and blue to distinguish between a color filter that implements color and the sub-color filter, and a black matrix to block light passing through the liquid crystal layer. And a transparent common electrode applying a voltage to the liquid crystal layer.

In addition, the array substrate is a thin film transistor (TFT) which is a switching element formed in a cross region of the gate line and the data line, the plurality of gate lines and data lines arranged vertically and horizontally on the substrate to define a plurality of pixel areas. ) And a pixel electrode formed on the pixel region.

The array substrate and the color filter substrate configured as described above are joined to face each other by sealants formed on the outer side of the image display area to form a liquid crystal display panel, and the bonding of the two substrates is formed on the array substrate or the color filter substrate. Is done through the key.

The manufacturing process of the liquid crystal display panel can be largely divided into an array process of forming a switching element on an array substrate, a substrate manufacturing process of a color filter process of forming a color filter on a color filter substrate, a cell manufacturing process, and a module process. In this case, the place where the liquid crystal display panel is manufactured should be kept in a very clean state. To this end, the substrates for manufacturing the liquid crystal display panel are stored in a cassette, and the stocker for inter-process or temporary storage is stored. stored inside the stocker).

As described above, the substrate manufacturing process is divided into an array process and a color filter process, each of which manufactures a switching element and a color filter using the cleaned glass substrate, and a cell manufacturing process is performed on the lower substrate and the color filter process of which the array process is completed. The process of manufacturing a liquid crystal display panel cell by forming a spacer and bonding and injecting a liquid crystal so as to maintain a constant gap between the two substrates of the upper substrate is completed, the module process is to manufacture a circuit portion for signal processing and the liquid crystal display panel It is a process of manufacturing a module by connecting the signal processing circuit unit with.

As described above, the manufacturing process of the liquid crystal display device must be conveyed or transferred sequentially or in group form to the manufacturing equipment used in each process in order to go through the above-described substrate manufacturing process, cell manufacturing process, and module process. In addition, there is a need for a method of temporarily storing the substrate since it is not possible to stop all manufacturing process lines for failure or repair of some manufacturing apparatuses in the manufacturing process.

Accordingly, a plurality of the substrates can be stored and transported using a cassette, and when the quantity of the substrate increases and the manufacturing process of the substrate is repeatedly performed, a stocker for moving and storing the cassette is required. .

The stocker is a place where the glass substrate waits before proceeding to the next process. The stocker is provided with a plurality of shelves for storing the cassettes, and is multi-layered in a cell structure so that the cassettes are individually stored for each shelf.

Entry and exit of the cassette is automatically performed as the operator enters the stocker controller. At this time, a cassette conveying apparatus called a rack master is used as a means for receiving and releasing a cassette. The rack master is a transport device capable of lifting and driving, and performs a process of storing the cassettes which have been transferred to each shelf or to release the cassettes to proceed to the next process.

Hereinafter, the above stocker will be described in detail with reference to the drawings.

1 is a cross-sectional view schematically showing the structure of a general stocker.

As shown in the drawing, the stocker 10 has a box-shaped stocker body 15 having a passage 25 in a predetermined space in the front and rear directions of the stocker 10, and is provided at both sides of the passage 25. A plurality of shelves 16 are provided in which cassettes 30 containing substrates are accommodated.

In this case, a rack master 20 equipment is located in the passage 25 so that the cassette 30 may be worn by the shelf 16 or the cassette 30 stored in the shelf 16 may be shipped out. It is. The rack master 20 includes driving units 40 and 49 for driving the rack master 20 itself and transferring the cassette 30.

Reference numeral 70 in the drawing indicates an access floor of a clean room in which the stocker 10 is installed.

The inside of the stocker 20 in which the cassette 30 is temporarily stored should be kept extremely clean so that the substrate is not contaminated by particles such as fine dust or particles. The rack master 20 has a general structure. In this case, there was a problem that particles are generated in the driving unit 40 according to the driving of the rack master 20. Hereinafter, the driving unit 40 of the general rack master 20 will be described in detail with reference to the drawings.

FIG. 2 is a perspective view schematically showing a driving unit of the rack master in the stocker shown in FIG. 1, and partially shows a driving unit for running the rack master itself.

As shown in the figure, the drive unit 40 of the rack master is largely a power transmission source motor 41, a reducer (reducer 42) for reducing the rotation of the motor 41, coming out through the reducer 42 A motor pulley 43 for transmitting power, a timing belt 44 for restraining the motor pulley 43, and a wheel pulley for receiving torque through the timing belt 44 45, a drive wheel 46A that rotates through the torque of the wheel pulley 45, and a shaft 47 that fixes the drive wheel 46A.

The torque transmitted to the driving wheel (hereinafter referred to as the first wheel) 46A is transmitted to the other wheel (hereinafter referred to as the second wheel) 46B via the shaft 47.

The pulleys 43 and 45 are devices for changing the direction of the force or expanding the effect of the force by hanging a string, belt or chain on the wheel, and reference numeral 48 denotes a bearing.

In this case, the size of the equipment is increased due to an increase in the substrate size for manufacturing a large liquid crystal display panel. As a result, high torque is required for power transmission, and power due to slip generation occurs due to power transmission characteristics of the pulley and timing belt. The pulley and the timing belt are not used due to the decrease in the transfer efficiency and the impossibility of carrying the fixed position.

For this reason, a sprocket is used instead of the pulley and a chain device is used instead of the timing belt. However, the sprocket and the chain are made of a metal material of ferrous or nonferrous metal. There is a problem that a large amount of metallic particles are generated by the contact of the chain.

In addition, the driving of the general rack master configured as described above has a problem that the driving efficiency is lowered because power is transmitted through a plurality of mechanical elements.

That is, the conventional rack master drive adopts a method of indirectly driving a wheel through a speed reducer, a motor pulley (or a motor sprocket), a timing belt (or a chain), and a wheel pulley (or a wheel sprocket) using a motor as a power source. There is a problem that the efficiency of the power transmission path is complicated to fall.

In addition, when the motor torque transmission is different between the first wheel that receives torque directly through the chain and the second wheel that receives power through the shaft, the starting point between the first wheel and the second wheel and There is a problem that a position error occurs due to the difference of the end points.

An object of the present invention is to provide a rack master of a stocker which maximizes the power transmission efficiency by simplifying the torque transmission path.

Another object of the present invention is to provide a rack master of a stocker capable of preventing eccentricity caused by an axial load transmitted to a shaft for transmitting power and flow due to its own weight.

Further objects and features of the present invention will be described in the configuration and claims of the invention which will be described later.

In order to achieve the above object, the rack master of the stocker of the present invention is a motor; A speed reducer installed in the motor; A driving wheel that is moved by receiving power from the reducer; A shaft installed between the two axes; A ball joint installed between the reducer and the shaft; And it includes a roller bearing provided on the outside of the shaft.

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the rack master of the stocker according to the present invention.

FIG. 3 is a perspective view schematically showing a driving unit of a rack master according to the first embodiment of the present invention, and shows the driving unit for partially driving the rack master.

As shown in the figure, the drive unit 140 of the rack master of the first embodiment is a motor 141 which is a large power transmission source, a reducer 142 for reducing the rotation of the motor 141, through the reducer 142 Shaft couplers 180A and 180B for transmitting the power output and maintaining the coaxiality of the reducer 142 and the drive wheel 146, and a torque transfer shaft 147A for transmitting motor torque to the drive wheel 146. ), A drive wheel 146 rotating through the torque transfer shaft 147A, and a drive wheel shaft 147B for fixing the drive wheel 146.

A bearing 148 is provided between the drive wheel 146 and the drive wheel shaft 147B.

As such, power transmission from the motor 141 to the driving wheel 146 is made directly through the shaft couplers 180A and 180B and the shafts 147A and 147B without using a conventional metal chain and sprocket. It is possible to prevent the generation of metallic particles due to the progressive friction due to.

That is, the shaft couplers 180A and 180B are directly connected to both ends of the torque transmission shaft 147A, which is a torque transfer medium of the motor 141, and the shaft couplers 180A and 180B are hubs of a non-metallic material such as urethane. It is surrounded by a hub so that it is possible to fundamentally eliminate the generation of metallic particles due to progressive contact.

In addition, the reduction gear 142 according to the first embodiment is configured in a T-shape to transfer the torque transmitted from the motor 141 to the torque transmission shaft 147A through the first shaft coupler 180A located at both ends. . Thereafter, the torque transmission shaft 147A is connected to the drive wheel shaft 147B through the second shaft coupler 180B to directly transfer the torque received from the first shaft coupler 180A to the driving wheels 146 on both sides. Will be delivered.

As described above, in the present invention, the power transmission path is simplified by adopting the direct driving method through the reduction gear 142 and the shafts 147A and 147B using the motor 141 as the power source.

That is, the torque generated from the motor 141 through the controller (not shown) is sequentially transmitted to the reducer 142, the shaft couplers 180A and 180B, the shafts 147A and 147B, and the driving wheel 146 to be the rack master. Is moved in the front, rear direction on the moving rail (not shown) by the rotation of the drive wheel 146.

Here, the drive unit of the rack master of the first embodiment as shown in Figure 4 by the omission of the structure to prevent the up and down flow due to the eccentric load and self-weight due to the axial load transmitted to the torque transmission shaft during the rack master running, power transmission The first shaft coupler 180A or the torque transmission shaft 147A, which is one of the auxiliary devices, may be damaged.

Hereinafter, the driving unit of the rack master of the second embodiment having the shaft flow prevention and eccentricity correction structure will be described in detail with reference to the drawings.

FIG. 5 is a perspective view schematically illustrating a driving unit of a rack master according to a second embodiment of the present invention, in which the driving unit for driving the rack master is partially cut.

As shown in the figure, the drive unit 240 of the rack master of the second embodiment is a motor 241 which is a large power transmission source, a reducer 242 for decelerating the high-speed rotation of the motor 241, the reducer 242 Drive wheel 246 to move by receiving the power transmitted through the ball joint (ball joint) (295) for correcting the eccentricity between the two axes, the shaft 247 to maintain the balance by restraining the torque between the two axes And a roller bearing 290 which prevents the up, down, left and right flow of the shaft 247.

The shaft 247 is a rod-shaped mechanical component that transmits power to serve to transfer the power away from the rotational movement or linear reciprocating motion.

Here, the ball joint 295 includes a universal ball joint and allows axial eccentricity within 0 to 23 °, and the roller bearing 290 includes a self align roller bearing.

Conventional eccentricity correction is allowed within 1 °, but in the present embodiment, as shown in FIG. 6, the eccentricity correction between the axes is possible up to 23 °, so that the rack master drive unit 240 is processed, assembled, It is possible to smooth the gap compensation between axes occurring in installation and operation.

In addition, in the second embodiment, by installing the roller bearing 290 outside the shaft 247, it is possible to prevent the vertical flow due to the weight of the shaft 247 or the horizontal flow due to the axial load.

As such, the improvement of the axial eccentricity correction device can minimize the down time of the equipment, thereby maximizing productivity.

In addition, power transmission from the motor 241 to the drive wheel 246 is directly transmitted to the motor 241 without using a chain and sprocket of the existing metal material, so that the generation of metallic particles due to the progressive friction due to contact Can be prevented.

As described above, in the present invention, the power transmission path is simplified by adopting the direct driving method through the reduction gear 242 using the motor 241 as the power source. Accordingly, the power transmission efficiency is maximized to provide an effect of improving productivity.

That is, the torque generated from the motor 241 through the controller (not shown) is transmitted to the drive wheel 246 directly through the reducer 242, whereby the rack master is moved by the rotation of the drive wheel 246. It moves in the front and rear directions on the rail (not shown).

This simplification of the torque transmission system allows for maximum power transmission efficiency compared to conventional rack masters.

Although many details are set forth in the foregoing description, it should be construed as an illustration of preferred embodiments rather than to limit the scope of the invention. Therefore, the invention should not be defined by the described embodiments, but should be defined by the claims and their equivalents.

As described above, the rack master of the stocker according to the present invention can prevent damage to the power assist transmission device by improving the eccentricity correction device between the two axes. As a result, the downtime of the equipment is minimized, which increases productivity.

In addition, the rack master of the stocker according to the present invention provides the effect of maximizing the power transmission efficiency according to the simplification of the power transmission path to improve productivity.

Claims (8)

motor; A speed reducer installed in the motor; A driving wheel that is moved by receiving power from the reducer; A shaft installed between the two axes; A ball joint installed between the reducer and the shaft; And Cassette conveying apparatus comprising a roller bearing provided on the outside of the shaft. 2. A cassette transport apparatus according to claim 1, wherein the shaft restrains the torque between the two shafts to maintain a balance. The cassette transport apparatus according to claim 1, wherein the ball joint corrects an eccentricity between the two axes. The cassette transport apparatus according to claim 1, wherein the speed reducer slows down the high speed rotation of the motor. The cassette conveying apparatus of claim 1, wherein the roller bearing prevents the up, down, left, and right flow of the shaft. 2. A cassette transport apparatus according to claim 1, wherein the ball joint comprises a constant velocity ball joint. The cassette transport apparatus according to claim 1, wherein the ball joint corrects the axial eccentricity within 0 to 23 degrees. 2. A cassette transport apparatus according to claim 1, wherein the roller bearing comprises a self-aligning roller bearing.

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