KR20070056092A - 유량계의 교정 시스템 및 방법 - Google Patents

유량계의 교정 시스템 및 방법 Download PDF

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Publication number
KR20070056092A
KR20070056092A KR1020077005744A KR20077005744A KR20070056092A KR 20070056092 A KR20070056092 A KR 20070056092A KR 1020077005744 A KR1020077005744 A KR 1020077005744A KR 20077005744 A KR20077005744 A KR 20077005744A KR 20070056092 A KR20070056092 A KR 20070056092A
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KR
South Korea
Prior art keywords
flow
coefficient
viscosity
coefficients
fluid
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KR1020077005744A
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English (en)
Korean (ko)
Inventor
마크 라버디어
로버트 맥로린
제이 칼 니어메이어
Original Assignee
엔테그리스, 아이엔씨.
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Application filed by 엔테그리스, 아이엔씨. filed Critical 엔테그리스, 아이엔씨.
Publication of KR20070056092A publication Critical patent/KR20070056092A/ko
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0205—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system
    • G05B13/024—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system in which a parameter or coefficient is automatically adjusted to optimise the performance

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Artificial Intelligence (AREA)
  • Health & Medical Sciences (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Monitoring And Testing Of Nuclear Reactors (AREA)
  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)
KR1020077005744A 2004-08-13 2005-08-12 유량계의 교정 시스템 및 방법 Withdrawn KR20070056092A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US60142404P 2004-08-13 2004-08-13
US60/601,424 2004-08-13

Publications (1)

Publication Number Publication Date
KR20070056092A true KR20070056092A (ko) 2007-05-31

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ID=35907756

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077005744A Withdrawn KR20070056092A (ko) 2004-08-13 2005-08-12 유량계의 교정 시스템 및 방법

Country Status (7)

Country Link
US (1) US20080221822A1 (enExample)
EP (1) EP1779073A4 (enExample)
JP (1) JP2008510147A (enExample)
KR (1) KR20070056092A (enExample)
CN (1) CN101048645A (enExample)
TW (1) TW200626879A (enExample)
WO (1) WO2006020870A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140135185A (ko) * 2012-03-07 2014-11-25 일리노이즈 툴 워크스 인코포레이티드 감쇠율 측정에서 열적으로 유도되는 에러를 최소화하도록 열 모델을 이용함으로써 질량 유량 제어기 또는 질량 유량계에서 실시간 정정을 위해 감쇠율 측정의 정확도를 개선하기 위한 시스템 및 방법

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7295934B2 (en) * 2006-02-15 2007-11-13 Dresser, Inc. Flow meter performance monitoring system
EP1975576A1 (en) * 2007-03-30 2008-10-01 Dresser Wayne AB Flow meter system calibration
US8639464B2 (en) * 2008-01-18 2014-01-28 Dresser, Inc. Flow meter diagnostic processing
US7856335B2 (en) * 2008-01-25 2010-12-21 Micromed Technology, Inc. Device, method, and system for calibration of a flow meter used in conjunction with a ventricular assist device
RU2464536C2 (ru) * 2008-05-23 2012-10-20 Роузмаунт, Инк. Улучшенная конфигурация многопараметрического расходомера технологического флюида
US7769557B2 (en) * 2008-07-01 2010-08-03 Honeywell International Inc. Multi-gas flow sensor with gas specific calibration capability
WO2010114408A1 (en) 2009-03-31 2010-10-07 Rosemount Inc. Field device configuration system
JP2011031679A (ja) * 2009-07-30 2011-02-17 Sanden Corp 車両用空調装置
CN101995315A (zh) * 2009-08-18 2011-03-30 华东电力试验研究院有限公司 差压变送器精度现场检测方法
WO2011029182A1 (en) * 2009-09-08 2011-03-17 Microbridge Technologies Canada Inc. Sensor response calibration for linearization
JP5255660B2 (ja) * 2011-01-18 2013-08-07 東京エレクトロン株式会社 薬液供給方法及び薬液供給システム
CN103748391B (zh) * 2011-06-02 2016-04-27 高级阀私人有限公司 手动平衡阀
CN103162771B (zh) * 2011-12-19 2017-11-07 新奥科技发展有限公司 流体计量装置的标定方法
US9057636B2 (en) 2012-09-21 2015-06-16 Horiba Stec, Co. Ltd. Self-calibrating mechanism and self-calibrating method for flow rate sensor, and diagnostic mechanism and diagnostic method for fluid sensor
TWI587115B (zh) * 2013-08-27 2017-06-11 盛美半導體設備（上海）有限公司 Cleaning fluid flow control system and control method
US20150088321A1 (en) * 2013-09-24 2015-03-26 Bray International, Inc. Self-Learning Closed-Loop Control Valve System
US20160085241A1 (en) * 2014-09-18 2016-03-24 Chin-Tsung Lee Flow detection device and numerical modeling method
CN104990605A (zh) * 2015-07-13 2015-10-21 成都国光电子仪表有限责任公司 一种天然气流量修正仪
JP6781758B2 (ja) * 2015-08-31 2020-11-04 エム ケー エス インストルメンツ インコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 圧力式流量測定のためのシステム、非一時的な機械読取り可能媒体及び圧力式流量制御の方法
US10684159B2 (en) * 2016-06-27 2020-06-16 Applied Materials, Inc. Methods, systems, and apparatus for mass flow verification based on choked flow
IT201700006901A1 (it) * 2017-01-23 2018-07-23 Pietro Fiorentini Spa Metodo per il monitoraggio di un dispositivo di regolazione del flusso di un gas e sistema di regolazione impiegante tale metodo
CN110392586B (zh) * 2017-02-23 2022-05-06 普林斯顿大学 用于监测注射部位的压力的系统和方法
CN106969812A (zh) * 2017-04-05 2017-07-21 深圳市美好创亿医疗科技有限公司 流量传感器校准方法及系统
US10935407B2 (en) * 2017-07-25 2021-03-02 Ecolab Usa Inc. Fluid flow meter with viscosity correction
CN110058054A (zh) * 2018-01-18 2019-07-26 张晨光 一种呼吸测量设备的校准装置和方法
CN113029261A (zh) * 2018-03-28 2021-06-25 株式会社木幡计器制作所 流量计测装置
US11105512B2 (en) 2018-03-30 2021-08-31 Midea Group Co., Ltd Method and system for controlling a flow curve of an electromechanical gas valve
US10476549B1 (en) * 2018-05-04 2019-11-12 Futurewei Technologies, Inc. Transmitter linearity built-in-self-test
DE102018126230A1 (de) 2018-10-22 2020-04-23 Truedyne Sensors AG Verfahren zum Verifizieren eines Dichte- und/oder Viskositätsmessgerätes in einer Messstelle
CN110823323B (zh) * 2019-09-17 2021-01-19 中国航发沈阳发动机研究所 一种涡轮转子叶片水流量测量值的修正方法
CN110617057B (zh) * 2019-09-17 2023-05-02 中海艾普油气测试（天津）有限公司 一种全管式井下测试管柱及其测试方法
US11262069B2 (en) 2020-06-25 2022-03-01 Midea Group Co., Ltd. Method and system for auto-adjusting an active range of a gas cooking appliance
EP3995791B1 (de) * 2020-11-04 2024-05-29 Focus-On V.O.F. Computerimplementiertes verfahren zum betreiben eines fluid-absperrorgans und entsprechendes fluid-absperrorgan
FR3118662A1 (fr) * 2021-01-04 2022-07-08 Sagemcom Energy & Telecom Sas Correction des mesures en fonction de l’orientation du compteur
CN112781693A (zh) * 2021-01-29 2021-05-11 核工业理化工程研究院 利用已知孔板进行孔板流量系数校准的方法和装置
CN113778141B (zh) * 2021-08-05 2023-10-13 浙江省机电设计研究院有限公司 一种分段pid控制的流体管道流量控制系统
CN114235111B (zh) * 2022-02-24 2022-07-15 青岛鼎信通讯股份有限公司 一种基于模型优化的超声波水表流量校准方法
CN114459554B (zh) * 2022-04-11 2022-07-15 杭州先锋电子技术股份有限公司 基于压力数据提高超声波燃气表瞬时流量计量精度的方法
CN114910134A (zh) * 2022-04-19 2022-08-16 佛山市川东磁电股份有限公司 一种流量传感器及流量传感器校准方法
CN114942060B (zh) * 2022-05-26 2025-01-28 国家石油天然气管网集团有限公司 一种天然气计量标准装置在线核查的方法
CA3257843A1 (en) * 2022-06-03 2023-12-07 Univ Wyoming DEVICES FOR CHARACTERIZING THE RESPONSE OF PRESSURE MEASUREMENT SYSTEMS
FR3140163B1 (fr) * 2022-09-22 2024-11-29 Vitesco Technologies Procédé de détermination d’un débit de fluide dans un système de motorisation de véhicule
CN116067464A (zh) * 2023-02-17 2023-05-05 广东拓奇电力技术发展有限公司 一种多根浮筒液位计的校验方法、装置、设备及存储介质
US20250109873A1 (en) * 2023-09-28 2025-04-03 Siemens Industry, Inc. Controller and method for managing a flow unit
CN119023037B (zh) * 2024-08-20 2025-10-10 深圳市智能派科技有限公司 基于动态校准的挤出流量数据处理方法与系统

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61204521A (ja) * 1985-03-08 1986-09-10 Hitachi Ltd 電磁流量計
GB2195448B (en) * 1986-09-19 1990-07-25 Spirax Sarco Ltd Flowmeter calibration
US4961348A (en) * 1988-12-16 1990-10-09 Ulrich Bonne Flowmeter fluid composition correction
US5479812A (en) * 1994-07-15 1996-01-02 Honeywell Inc. On-site calibration device and method for nonlinearity correction for flow sensor/transmitter
US5710370A (en) * 1996-05-17 1998-01-20 Dieterich Technology Holding Corp. Method for calibrating a differential pressure fluid flow measuring system
US5911238A (en) * 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
WO2000043130A1 (en) * 1999-01-20 2000-07-27 Mykrolis Corporation Flow controller
JP3627564B2 (ja) * 1999-03-15 2005-03-09 株式会社日立製作所 吸入空気流量計測装置
TW421710B (en) * 1999-04-13 2001-02-11 Inst Of Nuclear Energy Res Roc Method and device for bi-directional low-velocity flow measurement
US6449571B1 (en) * 1999-07-09 2002-09-10 Mykrolis Corporation System and method for sensor response linearization
CN1188669C (zh) * 1999-10-29 2005-02-09 三井金属矿业株式会社 流量计
CA2417657A1 (en) * 2000-07-31 2003-01-29 Mitsui Mining & Smelting Co., Ltd. Flow metering method and flowmeter
JP2002054964A (ja) * 2000-08-10 2002-02-20 Mitsui Mining & Smelting Co Ltd 流量測定方法及び流量計
JP2005537464A (ja) * 2002-07-19 2005-12-08 マイクロリス コーポレイション 流体フロー測定および比例流体フロー制御デバイス
US6973375B2 (en) * 2004-02-12 2005-12-06 Mykrolis Corporation System and method for flow monitoring and control
US7740024B2 (en) * 2004-02-12 2010-06-22 Entegris, Inc. System and method for flow monitoring and control
US7107128B2 (en) * 2004-02-13 2006-09-12 Entegris, Inc. System for controlling fluid flow
TW200834275A (en) * 2006-09-05 2008-08-16 Celerity Inc Multi-gas flow device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140135185A (ko) * 2012-03-07 2014-11-25 일리노이즈 툴 워크스 인코포레이티드 감쇠율 측정에서 열적으로 유도되는 에러를 최소화하도록 열 모델을 이용함으로써 질량 유량 제어기 또는 질량 유량계에서 실시간 정정을 위해 감쇠율 측정의 정확도를 개선하기 위한 시스템 및 방법

Also Published As

Publication number Publication date
WO2006020870A1 (en) 2006-02-23
JP2008510147A (ja) 2008-04-03
US20080221822A1 (en) 2008-09-11
TW200626879A (en) 2006-08-01
EP1779073A4 (en) 2008-05-07
CN101048645A (zh) 2007-10-03
EP1779073A1 (en) 2007-05-02

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PA0105 International application

Patent event date: 20070312

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid