KR20070054458A - Manipulator aligner - Google Patents

Abstract

The present invention relates to a manipulator aligner of a semiconductor ion implantation apparatus. According to the present invention, a manipulator including an extraction electrode and a ground electrode arranged in parallel with each other and having a hole in which cations are extracted are aligned in each center. A manipulator aligner, comprising a driver for adjusting the position of the manipulator, and a control device for controlling the driver, wherein the driver includes gears of sus material that rotate in cooperation with each other. The drive unit includes a first gear for moving the manipulator up and down, wherein the first gear has a thread pitch of 0.67 mm or more. Thus, at least one gear installed for moving the manipulator up and down is prevented from being worn, and precise alignment of the manipulator is performed.

Ion Implantation, Manipulator, Manipulator Aligner, Ground Electrode, Extraction Electrode, Alignment, Gear

Description

Manipulator Aligner {MANIPULATOR ALIGNER}

1 is a block diagram showing a general ion source unit provided with a manipulator.

2 is a perspective view showing a schematic configuration of a manipulator aligner according to an embodiment of the present invention.

3 is a view showing in detail the configuration of the manipulator aligner shown in FIG.

4 is a view showing the first gear shown in FIG.

Explanation of symbols on the main parts of the drawings

100: manipulator aligner 132: first gear

110 electrode 134 second gear

112: extraction electrode 136: third gear

114: ground electrode 138: motor

120: drive shaft 140: control device

130: drive unit

The present invention relates to a semiconductor manufacturing apparatus, and more particularly to a manipulator aligner of a semiconductor ion implantation apparatus.

Ion implantation technology is a technique used to implant impurity ions into the wafer for semiconductor manufacturing together with the thermal diffusion technology. The field of ion implantation technology requires more precise control of impurity introduction, improvement of reproducibility, and improvement of processing capability in response to high integration and high density of semiconductor devices, which cannot be realized by heat diffusion technology, or low concentration impurity introduction. However, the area is gradually expanded in that the doping through the insulating film is possible, in particular, the number of ions injected into the wafer can be controlled by the current, and the depth of implantation of ions can be arbitrarily controlled by the control of the acceleration voltage. .

The principle of ion implantation technology is a method of physically embedding high-energy ions on a wafer as a substrate and boron (B), phosphorus (P), or arsenic (As) of group 3 or 5 on a group 4 silicon wafer. ) And impurity ions such as antimony (Sb) are implanted.

An ion implanter that plays this role includes an ion source that generates an ion beam, a classifier that allows only an ion beam of a desired mass to pass through, and an accelerator that accelerates to the energy enough to inject ions selected from the classifier into the wafer to a desired depth. It is composed of a concentrator which prevents the ion beam from being spread by the repulsive force, a syringe for moving the direction of the ion beam up, down, left, and right to uniformly distribute the ion beam on the wafer, and an end station where the wafer is loaded.

 Here, the ion source portion of the ion implanter is an arc chamber, which is an ion reaction chamber that serves to generate ions, and an extraction that controls the amount, shape, and direction of the ion beam generated from the arc chamber. A manipulator having an Suppression Electrode and a Ground Electrode is provided.

1 is a block diagram showing a conventional ion source unit provided with a manipulator. Referring to FIG. 1, the structure of a conventional ion source unit 10 will be described. An arc chamber 12 generating ions, an extraction electrode 24 sequentially formed in a direction in which ions exit the arc chamber 12, and The ground electrode 26 and the drive part 28 which adjusts the angle of these electrodes are comprised. The manipulator 20 including the extraction electrode 24 and the ground electrode 26 is moved or moved up, down, left or right by the driving unit 28. In this case, the driving unit 28 and the manipulator 20 are coupled to each other by the connecting member 22.

In the manipulator 20, it is important to accurately align each axis of the extraction electrode 24 and the ground electrode 26 in order to adjust the amount, shape and direction of the ion beam generated from the arc chamber 12. Thus, a driver 28 for aligning the manipulator 20 is provided, and the general manipulator 20 uses an extractor electrode using a manipulator aligner (not shown) provided by an operator outside the manipulator 20. The ion beam is guided while moving the 24 and the ground electrode 26 in the directions of the X, Y, and Z axes. At this time, the operator can check the position of each axis in the display such as a microcomputer or a screen provided outside the facility.

In general, the manipulator aligner includes gears interlocked with each other to move the manipulator 20 in the directions of the X, Y, and Z axes or rotate at an angle, and a driving device to rotate the gears. However, as the gears progress, wear progresses on threads formed on the outer circumferential surface of the gears. When abrasion occurs in the gear, the manipulator 20 cannot be precisely controlled, and precise positioning of the extraction electrode 24 and the ground electrode 26 of the manipulator 20 cannot be performed.

The present invention is to solve the above conventional problems, an object of the present invention to provide a manipulator aligner that can prevent the wear of the gears for adjusting the position of the manipulator 20.

According to the present invention for achieving the above object, in the manipulator aligner for arranging a manipulator including an extraction electrode and a ground electrode disposed in parallel to each other and formed with a hole in which the cation is extracted at each center, A driving unit for adjusting the position of the manipulator, and a control device for controlling the driving unit, wherein the driving unit includes a sus (gear) gears that rotate in conjunction with each other.

According to the present invention, the driving part includes a gear for moving the manipulator up and down, wherein the gear has a pitch of a thread of 0.67 mm or more. Here, according to the embodiment of the present invention, the gear is the first gear.

Hereinafter, a manipulator aligner according to an exemplary embodiment of the present invention will be described in detail with reference to the accompanying drawings. The embodiments of the present invention may be modified in various forms, and the scope of the present invention should not be construed as being limited by the embodiments described below. This embodiment is provided to more completely explain the present invention to those skilled in the art. Accordingly, the shape of elements in the figures is exaggerated to emphasize clear explanation.

(Example)

2 is a perspective view showing the configuration of the manipulator aligner according to the present invention, Figure 3 is a configuration diagram showing the configuration of the manipulator aligner shown in FIG.

2 and 3, the manipulator aligner 100 according to the present invention includes a manipulator 110, a drive shaft 120, and a drive member ( 130, and a controller 140.

The manipulator 110 includes a Extraction Electrode 112 and a Ground Electrode 114 facing each other and positioned to face each other and spaced apart from each other by a predetermined distance. Each of the extraction electrode 112 and the ground electrode 114 has holes 112a and 114a through which cations are extracted. The ions generated in the arc chamber (not shown) pass through the slit (not shown) into an ion beam, which passes through the holes 112a and 114a formed in each of the extraction electrode 112 and the ground electrode 114. do. In this case, the ground electrode 114 extracts positive ions toward the extraction electrode 112, and the extraction electrode 112 functions to neutralize electrons of negative potentials extracted together with the positive ions so as not to pass.

The drive shaft 120 has a shaft shape, one end of which is connected to the manipulator 110 and the other end of which is connected to the driving unit 120. The driving shaft 120 is moved up, down, front, and rear by the driving unit 130, and the manipulator 110 is aligned by the operation of the driving shaft 120. That is, when the driving unit 130 is driven, the driving shaft 120 is operated by the driving unit 130, and the extraction electrode 112 of the manipulator 110 connected to the driving shaft 120 by the operation of the driving shaft 120 is connected with the extraction electrode 112. The position of the ground electrode 114 may be aligned. Here, the alignment of the manipulator 110 is for adjusting the focus of the ion beam generated from the ion source unit (not shown) and passing through the manipulator 110.

The drive shaft 132 is inserted into the center of the first gear 132 to be described later. Here, a predetermined thread is formed on the outer circumferential surface of the drive shaft 132, and an inner circumferential surface of the center of the first gear 132 is formed to correspond to the thread. For example, a predetermined male thread is formed on the outer circumferential surface of the drive shaft 132, and a female screw corresponding to the male screw is formed on the inner circumferential surface of the center of the first gear 132 into which the driving shaft 132 is inserted. Thus, when the first gear 132 rotates, the drive shaft 132 is rotated by engaging the female screw formed in the first gear 132 and the male screw formed in the drive shaft 132 so that the drive shaft 132 moves up and down.

The driver 130 includes first to third gears 132, 134, and 136 and a motor 138. The first to third gears 132, 134, and 136 rotate in cooperation with each other. As described above, the first gear 132 is inserted into the drive shaft 132, the drive shaft 132 is moved up and down by the rotation of the first gear 132. The first gear 132 meshes with the second gear 134 to rotate. The third gear 136 is engaged with the shaft 138a of the motor 138 to rotate by the rotation of the motor 138. That is, when the motor 138 rotates, the third gear 136 coupled with the shaft 138a of the motor 138 rotates, and the second gear 134 and the first gear are rotated by the rotation of the third gear 136. The first gear 132 is rotated in conjunction with each other, the drive shaft 120 is moved up and down by the rotation of the first gear 132, the manipulator 110 is adjusted up and down.

Here, referring to FIG. 4, the materials of the first to third gears 132, 134, and 136 are made of a material having high wear resistance. For example, the first to third gears 132, 134, and 136 are made of a sus material. In addition, the first gear 132 coupled to the drive shaft 132 may have a diameter of about 50 mm and a pitch of the threads may be about 0.67 mm. This is a shape of the first gear 132 that can prevent the thread of the first gear 132 from being worn and at the same time perform the operation of the manipulator 110 precisely. If the thread pitch of the first gear 132 is less than or equal to 0.67 mm, the threads formed on the outer circumferential surface of the first gear 132 are liable to wear as the process proceeds, and if it is greater than or equal to 0.67 mm, precise control of the manipulator 110 may be achieved. Difficult to do Therefore, the pitch of the first gear 132 is improved to 0.67 mm, and the diameter is approximately 50 mm to prevent the thread of the first gear 132 from being structurally worn out.

In addition, the driving unit 130 may include a potentiometer (not shown) capable of reading the movement of the X, Y, Z axes or the rotation of the extraction electrode 112 and the ground electrode 114. The electrometer moves along a flag of the manipulator 110 while a display member such as a microcomputer or a screen is provided outside the facility to allow a worker to recognize movement of the extraction electrode 112 and the ground electrode 114. ). Thus, the operator can recognize the position of the extraction electrode 112 and the ground electrode 114 in accordance with the movement of the electrometer shown on the display member.

Thus, the driving unit 130 functions to move the extraction electrode 112 and the ground electrode 114. That is, the driver 130 may focus on the desired focus and be extracted when the cations pass through the holes 112a and 114a formed at the center of each of the extraction electrode 112 and the ground electrode 114. It functions to align the focal angle of the cations by operating in the Y, Z axis or by performing a predetermined rotational movement. For the operation of the drive unit 130 is provided with a control device 140 that can be operated manually by the operator. The operator may adjust the extraction electrode 112 and the ground electrode 114 using the control device 140.

In the present exemplary embodiment, the driving unit 130 includes the first to third gears 132, 134, and 136 and the motor 138 to operate the manipulator 110 as an example. However, the driving unit 130 includes the manipulator ( Arranging 110 may be applied in various ways. For example, the driving unit 130 may operate the manipulator 110 by a gear and a lead screw, a chain, a wire, or the like interlocked with the gear.

The control device 140 is connected to the drive unit 130. The controller 140 controls the driver 130 to operate the manipulator 110. For example, the control device 140 is for the operator to manually operate the drive unit 130, the operator controls the control device 140, the extraction electrode 112 and the ground electrode 114 of the manipulator 110. Align it. In this case, in order to detect the correct position of the manipulator 110, a sensing unit (not shown) may be installed at one side of the manipulator aligner 100. The sensing unit detects a position required for the process of the manipulator 110. When the operator adjusts the manipulator 110 by controlling the control device 140, if the manipulator 110 is positioned in the correct position, the operator may detect it. Be aware. Thus, when the alignment state of the manipulator 110 is disturbed, the operator manipulates the control device 140 to move the manipulator 110 in the X, Y, and Z directions, or rotates the manipulator 110 at a predetermined angle. The focus of the ion beam passing through is adjusted.

The manipulator aligner 100 having the above-described configuration is made of a material having excellent abrasion resistance to the gear installed in the driving unit 130 to align the manipulator 110, and has excellent wear resistance to pitch of the formed thread of the gear. In order to prevent the wear of the gear for aligning the manipulator 110 to be worn, the alignment of the manipulator 110 may be precisely performed.

In the above, the configuration and operation of the manipulator aligner according to one or more embodiments of the present invention have been shown in accordance with the above description and drawings, which are merely examples and various changes without departing from the spirit of the present invention. And of course, it is possible to change.

 As described above, the manipulator aligner according to the present invention manufactures a gear installed to move the manipulator up and down by using a material having excellent abrasion resistance, and improves the pitch of the gear to prevent wear of the gear thread. Precise alignment of the manipulators can be performed.

Claims (2)

In the manipulator aligner disposed in parallel with each other, and aligning the manipulator including an extraction electrode and a ground electrode formed with a hole in which the cation is extracted at each center, A driving unit for adjusting the position of the manipulator; A control device for controlling the drive unit; The driving unit, Manipulator aligner comprising a gear of sus material that rotates in conjunction with each other. The method of claim 1, The driving unit, Including a gear used for the vertical movement of the manipulator, The gear is, Manipulator aligner characterized by a pitch of the threads of 0.67 mm or more.

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