KR20070014474A - Mass slit assembly - Google Patents

Abstract

A mass slit assembly is provided to prevent malfunction of a mass slit caused by a leak of a coolant circulation line for cooling the mass slit by detecting and avoiding a leak phenomenon of the coolant circulation line. A mass slit part(110) avoids distribution of ion beams to concentrate the ion beam on a wafer. A coolant circulation line(130) supplies/collects coolant to/from the mass slit part so as to reduce the temperature of the heat generated from the mass slit part. At least one water leak line(140) is connected to the coolant circulation line. Coolant leaking from the coolant circulation line flows in the at least one water leak line when the pressure of the coolant circulation line exceeds a predetermined pressure. When the coolant leaking from the coolant circulation line flows in the water leak line, a detection part(150) detects whether leaking coolant exists. The detection part is installed in a case(152) for the detection part wherein the leaking coolant is introduced to the case, so that the detection part detects the leaking coolant introduced into the case for the detection part.

Description

Mass Slit Assembly {MASS SLIT ASSEMBLY}

1 is a configuration diagram schematically showing the configuration of a mass slit assembly according to an embodiment of the present invention.

2 is a view for explaining the operation and operation of the mass slit assembly shown in FIG.

Explanation of symbols on the main parts of the drawings

100: mass slit assembly

110, 112, 114: mass slit portion, first mass slit, second mass slit

116, 116a, 116b: shaft portion, first shaft, second shaft

118: bracket

120: cooling water source

130, 132: cooling water circulation line, cooling water supply line

133, 134: coolant connection line, coolant return line

140, 142, 144: leaking line, 1st leaking line, 2nd leaking line

150, 152: detector, detector case

The present invention relates to an ion implantation apparatus, and more particularly, to a mass slit assembly provided in the ion implantation apparatus.

Electrical conductivity, one of the most important properties in semiconductor materials, is controlled by the addition of impurities. As a method of adding impurities to a semiconductor, there are a method by diffusion and a method by ion implantation.

The ion implantation method is a technique of forcibly implanting impurity atoms of high kinetic energy onto the wafer surface by ionizing and accelerating an impurity material to be doped. The ion implantation, which is such a forced physical implantation method, is widely used as an impurity implantation method because it has little particle movement in the horizontal direction compared to the thermal diffusion method, and thus greatly benefits the unit cell density.

An ion implanter that plays this role includes an ion source head that generates an ion beam, a classifier that allows only an ion beam of the desired mass to pass through, and an accelerator that accelerates the energy enough to inject the selected ions from the classifier into the wafer to the desired depth. It includes a concentrator that prevents the ion beam from being spread by the repulsive force, a syringe for moving the direction of the ion beam up, down, left, and right to uniformly distribute the ion beam on the wafer, and an end station on which the wafer is loaded.

Typically, the rotating mass slit of ion implanters that are widely used in ion implantation devices suppress particle generation due to ion beams and prevent dispersion of the ion beams for effective resolution of the ion beams to the wafer. It has the function of concentrating the ion beam.

The mass slit is usually the first and second mass slit to rotate at approximately 1200rpm in the direction opposite to the traveling direction of the ion beam, the first and second shafts provided in the first and second mass slit to rotate, the first And a bracket for supporting the second shaft, and a cooling water circulation line for connecting with the mass slit.

The coolant circulation line is connected to the first and second mass slits to supply coolant from a coolant source to the first and second mass slits, the coolant being provided to the first and second mass slits. Cooling heat generated when the first and second mass slits concentrate the ion beam while circulating the section.

However, the coolant circulation line leaks due to various factors. For example, since the first and second mass slits have a motor therein, an oil supply line for supplying oil to the motor is provided to drive the motor. The oil supply line is subjected to a predetermined pressure to supply oil to the first and second mass slit, so if an abnormality occurs in the motor or the oil supply line, the pressure provided to the oil supply line may be above a certain pressure. If exceeded, the oil flowing in the oil supply line flows out and contaminates the first and second mass slits. At this time, the cooling water circulation line also leaks due to the excess pressure in the oil supply line.

When the leakage of the cooling water circulation line occurs, an electric leakage may occur in the ion implantation facility by the leaked cooling water, and the first and second mass slits are heated due to the lack of cooling water, thereby causing the first and second mass slits. Phenomenon such as malfunction and suspension of operation occurs. Therefore, it takes a considerable time to maintain it, and because of the nature of the ion implantation facility, a high-voltage current is applied inside, which can pose a great danger to the operator.

However, since there is no means for detecting or preventing the leakage of the cooling water circulation line is to be improved.

An object of the present invention for solving the above problems is to provide a mass slit assembly that can detect the leak of the cooling water circulation line for providing the cooling water to cool the mass slit of the ion implantation device.

Another object of the present invention is to provide a mass slit assembly capable of preventing leakage of the cooling water circulation line in advance.

The mass slit assembly of the ion implantation apparatus according to the present invention is a mass slit portion for concentrating the ion beam on a wafer to prevent dispersion of ion beams, and cooling water to / from the mass slit portion for cooling heat generated in the mass slit portion. Cooling water circulation line for supplying and recovering the water, connected to the cooling water circulation line, when the pressure of the cooling water circulation line exceeds a predetermined pressure to at least one leaking line flowing out of the cooling water from the cooling water circulation line, and the leakage line When the coolant flows out of the coolant circulation line flows, the detection unit for detecting the presence or absence of the leaked coolant.

In one embodiment of the present invention, the mass slit assembly further includes a sensing unit case having the sensing unit therein, and the leaked coolant flows, the sensing unit introduced into the sensing unit case Be sure to detect leaked coolant.

In one embodiment of the present invention, the cooling water circulation line includes a cooling water supply line for supplying the cooling water from the cooling water supply source to the mass slit, and a cooling water recovery line for recovering the cooling water from the mass slit to the cooling water supply source. .

In one embodiment of the present invention, the mass slit portion includes first and second mass slits, and the cooling water circulation line includes a cooling water supply line for supplying the cooling water from the cooling water supply source to the first mass slit, and the first mass slit. A cooling water connection line for transferring cooling water from the mass slit to the second mass slit, and a cooling water recovery line for recovering the cooling water from the second mass slit to the cooling water supply source.

In one embodiment of the present invention described above, a plurality of leaking lines may be provided and connected to each of the cooling water supply line and the cooling water recovery line.

Hereinafter, with reference to the accompanying drawings will be described in detail a mass slit assembly of the ion implantation apparatus according to an embodiment of the present invention. The embodiments of the present invention may be modified in various forms, and the scope of the present invention should not be construed as being limited by the embodiments described below. This embodiment is provided to more completely explain the present invention to those skilled in the art. Accordingly, the shape of elements in the figures is exaggerated to emphasize clear explanation.

(Example)

1 is a configuration diagram schematically showing the configuration of a mass slit assembly according to an embodiment of the present invention. Referring to FIG. 1, the mass slit assembly 100 according to an embodiment of the present invention may include a mass slit 110, a coolant supply source 120, a coolant circulation line 130, a leak line 140, and a detection unit ( 150, and a detector case 152.

The mass slit 110 includes first and second mass slits 112 and 114 and first and second shafts 116a and 116b respectively provided at the first and second mass slits to rotate at a predetermined speed. The shaft portion 116, and the bracket 118 for supporting the shaft portion 116.

Each of the first and second mass slits 112 and 114 has a drive (not shown) such as a motor therein. The drive unit is combined with an oil supply line (not shown) to receive oil for operation of the drive unit. In addition, the driver is provided with a power supply line (not shown) to supply power to the driver. The first and second mass slits 112 and 114 suppress particles generated by the ion beam current when ion implantation is performed, and perform resolution for ion beams of a mass other than the ion beam required in the process. do. To this end, the shaft portion 115 of the first and second mass slits 112 and 114 rotates in the direction opposite to the traveling direction of the ion beam.

In addition, inside the first and second mass slits 112 and 114, a coolant circulation section (not shown) through which coolant may be circulated is provided. Cooling water is circulated along the cooling water circulation section to cool heat generated in the first and second mass slits 112 and 114.

The coolant source 120 stores coolant for cooling the first and second mass slits 112 and 114. Cooling water source 120 is connected to a cooling water circulation line 130 that supplies and recovers cooling water to and from the first and second mass slits 112 and 114.

Cooling water circulation line 130 is a cooling water supply line 132 for supplying the cooling water from the cooling water source 120 to the first mass slit 112, the cooling water from the first mass slit 112 to the second mass slit 114. A moving coolant connection line 133 and a coolant recovery line 134 for recovering the coolant from the second mass slit 114 to the coolant source 120. The coolant circulation line 130 may include lines of various diameters and materials. In one embodiment, the coolant circulation line 130 may be a 3/8 "transparent tube made of Teflon.

At least one leak line 140 is provided, and this embodiment describes a configuration including first and second leak lines 142 and 144. One end of the first leak line 142 is connected to the coolant supply line 132. In this case, one end of the first leak line 142 and the cooling water supply line 132 are connected by the first union 136. The first union 136 is a means for connecting the coolant supply line 132 and the first leak line 142. In particular, the first union 136 has a first opening and closing member 136a, such as an O-ring, therein. When the pressure of the cooling water supply line 132 is lower than or equal to a predetermined pressure, the cooling water is prevented from flowing into the first leaking line 142, and if the pressure exceeds the predetermined pressure, the cooling water flows into the first leaking line 142.

In the same way, one end of the second leak line 142 is connected with the coolant return line 134, and one end of the second leak line 142 and the coolant return line 134 are connected by the second union 138. do. The second union 138 is also provided with an opening / closing member 138a including the above-described O-ring or the three-phase valve, and the second leaking line 144 when the pressure of the cooling water recovery line 134 is below a predetermined pressure. The cooling water is prevented from flowing, and if the predetermined pressure is exceeded, the cooling water flows to the second leakage line 144.

In other embodiments, the opening and closing members 136a and 138a may be a three-way valve (not shown) operated by an electrical signal. For example, the three-phase valve is connected to the coolant supply line 132 and the first leak line 142, the coolant supply line 132 is a sensor (not shown) to measure the pressure of the coolant supply line 132 and the And a control unit (not shown) for controlling the three-phase valve by determining the pressure sensed by the sensor. When the pressure of the cooling water supply line 132 is lower than or equal to a predetermined pressure, the cooling water supply line 132 and the first leakage line ( Close the section to which the 142 is connected to prevent the cooling water from flowing, and when the pressure exceeds the predetermined pressure is opened to allow the cooling water to flow to the first leak line 142.

The other ends of the first and second leak lines 142 and 144 are connected to the detector case 152. The sensing unit case 152 is, for example, a container shape having an open top, and a sensing unit 150 for detecting the presence or absence of cooling water is installed at an inner bottom. Thus, the leaked coolant is moved to the detector case 152 along the first and second leak lines 142 and 144 so that the detector 150 detects the coolant.

Hereinafter, the operation and operation of the mass slit assembly 100 according to an embodiment of the present invention will be described with reference to FIG. Here, the same components as those shown in FIG. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

2 is a view for explaining the operation and operation of the mass slit assembly shown in FIG. Referring to FIG. 2, if an error occurs in the first or second mass slits 112 and 114, and the pressure in the cooling water circulation line 130 exceeds a predetermined pressure, the first and second opening and closing members 136a , 138a flows the coolant into the first or second leak lines 142 and 144. In this case, the leaked coolant is introduced into the detector case 152, and the detector 150 provided in the detector case 152 detects this and controls the ion implantation facility (not shown). Transmits whether it is detected. The controller displays whether or not the operator detects the leaked coolant detected by the detector 150.

Here, the predetermined pressure magnitudes set in the first and second opening and closing members 136a and 138a are designated by the operator, and the operator sets the pressures of the first and second opening and closing members 136a and 138a at various pressures. can do. Thus, the leak generation of the coolant supply line 130 may be sensed and the leak may be prevented.

For example, one of the reasons for the increase in the pressure of the cooling water supply line 130 is that the pressure of the oil supply line (not shown) for supplying oil to the first and second mass slits 112 and 114 is overloaded so that leakage occurs. This is because this affects the pressure of the cooling water supply line 130. Therefore, if the operator sets the pressure of the first and second opening / closing members 136a and 138a to a pressure before the oil supply line is overloaded and leaked, the first and second leaking lines (before the oil supply line is leaked) Since the detection unit 150 may detect the leaked coolant flowing to the 142 and 144, the coolant supply line 130 may be prevented from being damaged.

Although the mass slit assembly according to an embodiment of the present invention has been described in detail above, the scope of the present invention is not limited by the above-described embodiments, and simple modifications or variations of the above-described configuration are included in the scope of the present invention. do. For example, a simple change in the material and diameter of the leaking line and the number of water, a simple change in the connection method of the cooling water supply line and the leaking line, and a simple selection of the type and number of the sensing parts are naturally included in the scope of the present invention. .

The technical idea of the invention is to provide a mass slit assembly of an ion implantation device that detects and prevents leaks in the cooling water circulation line provided in the mass slit assembly.

As described above, according to the mass slit assembly according to the present invention, it is possible to detect and prevent the leakage phenomenon of the coolant circulation line provided for cooling the mass slit.

Therefore, there is an effect of preventing the malfunction of the mass slit due to leakage of the cooling water circulation line, and the problem of leakage of the ion implantation facility and shortening of the life of the ion implantation facility due to the error of the mass slit.

Claims (5)

In the mass slit assembly of the ion implantation device, A mass slit portion for preventing the ion beam from being dispersed and concentrating the ion beam on a wafer; A cooling water circulation line for supplying and recovering cooling water to / from the mass slit portion to cool heat generated in the mass slit portion; At least one leakage line connected to the cooling water circulation line and flowing coolant from the cooling water circulation line when the pressure of the cooling water circulation line exceeds a predetermined pressure; Mass slit assembly, characterized in that for detecting the presence of the leaked coolant when the coolant flows from the cooling water circulation line flows to the leak line. The method of claim 1, The mass slit assembly further includes a sensing unit case having the sensing unit therein and the leaked coolant flows therein so that the sensing unit senses the leaked coolant introduced into the sensing unit case. Mass slit assembly. The method according to claim 1 or 2, The cooling water circulation line includes a cooling water supply line for supplying the cooling water from the cooling water source to the mass slit, and a cooling water recovery line for recovering the cooling water from the mass slit to the cooling water supply source. The method of claim 1, The mass slit portion includes first and second mass slits, the cooling water circulation line includes a cooling water supply line for supplying the cooling water from the cooling water supply source to the first mass slit, and the second mass from the first mass slit. And a coolant connection line through which coolant is sent to a slit, and a coolant recovery line for recovering coolant from said second mass slit to said coolant supply source. The method of claim 2 or 3, The leakage line is provided with a plurality of mass slit assembly, characterized in that connected to each of the cooling water supply line and the cooling water recovery line.

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