KR20070000854A - Pedestal and floor system of clean room using thereof - Google Patents

Abstract

A pedestal and a floor system of a clean room using the pedestal are provided to reduce the time and cost required by controlling the step coverage of access floors supported to one pedestal easily and excluding the necessity of additional maintenance or readjustment works. A pedestal(110) contains: a base unit(120) composed of a base flange(121) fixed on a foundation floor tightly using bolts or adhesives and four base pipes(122,124,126,128) erected from the base flange; and a support unit(130) coupled to the top of the base unit to be adjustable in height and composed of four screw shafts(132,134,138) inserted to each base pipe of the base unit, nuts(142,144,146,148) coupled to each screw shaft and four support heads(152,154,156,158) coupled to the top of each screw shaft to support each corner of four access floors(160). The floor system of a clean room using the pedestal is formed by arranging the pedestals regularly and arranging the access floors continuously in all directions.

Description

Pedestal and floor system of clean room using the same

1 is a side view of the floor system of a typical clean room.

2 is a perspective view of a typical pedestal.

Figure 3 is a side view showing a damaged state of the general floor system.

Figure 4 is a side view of the floor system of the clean room according to the present invention.

5 is a perspective view of a pedestal according to the present invention.

Figure 6 is a side view of the step compensation state of the floor system using the access floor pedestal according to the present invention.

7 is a perspective view of a modification of the pedestal according to the present invention.

<Description of the symbols for the main parts of the drawings>

110: pedestal 120: base portion

121: base flange 122,124,126,128: base pipe

130: support part 132, 134, 136, 138: screw shaft

142,144,146,148 Nut member 152,154,156,158 Support head

160: access floor

The present invention relates to a pedestal (floor system) of the clean room (clean room) using the same, and more particularly, to access a number of access upright from the base floor, such as steel frame to implement the floor of the clean room The present invention relates to a pedestal supporting a floor horizontally and a floor system of a clean room using the same.

In line with the recent full-scale informatization era, the display field for visually displaying various electrical signal information has been rapidly developed.In response, a liquid crystal display device (LCD) and a plasma display panel have been developed. device: PDP), Field Emission Display Device (FED), Electroluminescence Display Device (ELD), etc. The device (FPD) is introduced to quickly replace the existing cathode ray tube (CRT).

These flat panel display devices have a flat display panel, which is commonly bonded between a pair of substrates facing each other via a unique layer of fluorescent or polarizing material, and in recent years, particularly, such a flat panel display panel. The active matrix type, in which pixels, which are the basic units of image expression, is arranged in a matrix and individually controlled by switching elements such as thin film transistors (TFTs), has been shown in terms of moving picture performance and color reproducibility. Excellent and widely used.

Meanwhile, a general flat panel display manufacturing process includes a thin film deposition process for forming a thin film of a predetermined material on a substrate surface, a photolithography process for exposing selected portions of the thin film, and removing the exposed portions of the thin film. Thus, the etching (patterning) process of patterning in the desired form is included several times, in addition to this involves a number of processes such as cleaning and cutting.

In addition, various manufacturing processes of these flat panel display devices are generally performed in a clean room, which is a clean space, which is environmentally controlled by various factors such as temperature, humidity, illuminance, air flow, and air pressure, including suspended particles in the air. Means a closed space, and is equipped with an air conditioning system that can be created and maintained. For example, fan filters are installed on the ceiling and the floor of the clean room for manufacturing a flat panel display device, through which air is circulated so that the airflow in the clean room is directed downward, as well as the internal temperature and humidity. At the same time, it maintains high cleanliness through dust collection.

In addition, the general clean room should be provided with a high-precision horizontal floor for the moving surface of the substrate conveying means, such as AGV, etc., in the presence of various process equipments. A floor system that doubles as a role is built.

Referring to the drawings, the attached FIG. 1 is a side view of a floor system of a general clean room, in which a pedestal 10 of a predetermined height is regularly standing upright on a foundation floor 2 provided from a building for floor separation. In this pedestal 10, an access floor 40 is mounted to implement a horizontal floor.

At this time, the base bottom surface (2) may be made of concrete, but in order to reinforce the bearing capacity of the pedestal 10 is usually made of H beam or square beam, etc., each pedestal 10 is upright from the upper surface of the beam (4).

In addition, the pedestal 10 is divided into a base portion 20 at the bottom and a support portion 30 at the top as shown in FIG. 2, and the double base portion 20 is fixed to the horizontal support surface (see 2 in FIG. 1). A base flange 22 and a base pipe 24 upright therefrom, and the support part 30 includes a screw shaft 32 inserted into the base pipe 24 and a nut member 34 fastened thereto. It is coupled to the top of the screw shaft 32 includes a support head 36 on which the access flow 40 is seated.

In this case, one support head 36 may be supported by one corner of each of the four edges toward the center portion of the four access flows 40 arranged in the top, bottom, left and right on the plane, the nut member 34 of the support portion 30 is a base pipe (24) Since the outer diameter is larger than the inner diameter, the overall height of the pedestal 10 can be adjusted by rotating the nut member 34 fastened to the screw shaft 32 to adjust the insertion length of the screw shaft 32. This allows horizontal control of the four access flows 40 seated on the support head 36.

However, the floor system of the clean room using the general pedestal 10 having the above-described structure exhibits some problems. Among them, the most seriously pointed out are four access flows 40 mounted on one support head 36. If a step occurs between), there is practically no way to solve it.

That is, referring to FIG. 3, the bending and localization of the localized part of the access flow 40 due to various factors such as the difference in the standard of the access flow 40 or the uneven weight of the process equipment or AGV. When accompanied by deviations, a phenomenon often found in actual clean room operation, a step occurs between four access flows 40 seated on one support head 36, which is particularly detrimental to AGV operation. This is a major detrimental to overall process reliability. In other words, the most important part in the transfer of the substrate using AGV is to provide the horizontal floor as continuous as possible by eliminating the step between the access floor 40, but as described above, the step between the access floor 40 is generated. In this case, stable substrate transport of AGV is seriously threatened and causes particles to be generated by scratching.

However, as described above, the general pedestal 10 has four access floors 40 at one edge thereof supported by one support head 36, and thus it is practically impossible to individually adjust the height of each pedestal 10.

At this time, when a step is generated between the access plugs 40, a method of reducing the level of the step by inserting a pad or the like between a relatively lower edge of the access plug 40 and the support head 36 is used. It is only a temporary measure to the last, it can not be the ultimate solution such as re-adjustment by the wear of the pad, which is causing the unnecessary time and waste of manpower.

Accordingly, the present invention has been made to solve the above problems, it is possible to flexibly cope with the generation of the step between the plurality of access plugs supported on one pedestal, furthermore, no additional maintenance or reconditioning work The goal is to present specific strategies that can save significant time and money. In addition, the present invention is to achieve the above object to suppress the stable substrate transfer and particle generation of AGV and to help improve the reliability of the manufacturing process of the flat panel display device.

In order to achieve the above object, the present invention provides a pedestal upright from the base bottom surface to support one corner of the adjacent at least two access floors in close contact with each other, the base portion fixed to the base bottom surface; At least two or more are coupled to the top of the base to enable individual height adjustment to provide an access floor pedestal comprising a support for supporting at least one of the respective one edges.

At this time, the base portion and the base flange closely fixed to the base bottom surface; A screw shaft provided in the same number as the support portion and upright from the base flange, wherein the support portion has a screw shaft inserted one-to-one corresponding to the base pipes; Nut members fastened to the respective screw shafts; It characterized in that it comprises a support head for supporting at least one of the one close contact with each other of the at least two access floor is fixed one-to-one corresponding to the upper end of each screw shaft.

Or a base flange fixed to the base bottom surface closely; A screw shaft which is equal to the support portion and includes a base support rod erected from the base flange in a state formed in the longitudinal direction from an upper surface thereof, wherein the support portion has a one-to-one correspondence inserted into each of the mounting holes; Nut members fastened to the respective screw shafts; It characterized in that it comprises a support head for supporting at least one of the one close contact with each other of the at least two access floor is fixed one-to-one corresponding to the upper end of each screw shaft.

In each of these cases, the support head and the access floor are four, and each of the support heads supports one corner of each of the access floors. The base bottom is an H beam or a square beam of steel beams. Characterized in that consisting of.

In addition, the present invention is a floor system using the access floor pedestal according to the above description, the pedestal is arranged regularly, the access floor is provided in a continuous room arranged in all directions to provide a floor system of the clean room.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

First, FIG. 4 is a side view of the floor system according to the present invention. A plurality of pedestals 110 according to the present invention are standing upright on the base bottom surface 102, and an access floor 160 is seated therein. The continuous arrangement in all directions provides a floor of a clean room for manufacturing flat panel display devices and the like.

Looking at each, first, the foundation floor surface 102 may be part of a building that separates the floors, and concrete may be used as an example, but the H beam or the square beam as shown for reinforcing the bearing capacity of the pedestal 110 is shown. It is preferable that the same iron beam 104 is formed.

And on the premise that the access floor 160 is rectangular, the number of access floors 160 that can be supported by one pedestal 110 according to the present invention may be at least one up to four, but for the purposes of the present invention, In view of the case of supporting one access floor 160, since the characteristic contents of the technical idea are not well revealed, the description thereof is omitted, and for convenience, one corner of the four access floors 160 is supported. The pedestal 110 according to the present invention is characterized in that the four height adjustments for the four access floors 160 are possible.

Referring to FIG. 5, which is a perspective view of the pedestal according to the present invention in conjunction with FIG. 4, the pedestal 110 according to the present invention has a base portion 120 and a top thereof fixed to a base bottom surface 102. It includes a support 130 is coupled to the height adjustment is possible, the double support 130 is divided into a plurality of supporting a corner of each of the access floor 160 is made to enable individual height adjustment.

More specifically, first, the base 120 is a portion that allows the entire pedestal 110 according to the present invention to be closely fixed and upright to the base bottom surface 102, and the base flange closely fixed to the base bottom surface 102. (121) and four base pipes (122, 124, 126, 128) upright therefrom. At this time, the base flange 121 may be fixed to the base bottom surface 102 with a bolt or adhesive.

Next, the support unit 130 has four screw shafts 132, 134, 136, 138 and 136, which are not shown. The same is described below. The nut members fastened to each of the base pipes 122, 124, 126 and 128 of the base 120 are not shown. 142, 144, 146, 18 and four support heads 152, 154, 156, 158 fixedly coupled to the top of each screw shaft 132, 134, 136, 138.

For convenience of description, if four base pipes 122, 124, 126, and 128 are optionally divided into first to fourth base pipes, the support 130 may include a first screw shaft 132 inserted into the first base pipe 122, and A first support head 152 coupled to the first nut member 142 and an upper end of the first screw shaft 132, a second screw shaft 134 inserted into the second base pipe 124, and an excitation A second support head 154 coupled to the second nut member 144 fastened to the second screw shaft 134, a third screw shaft 136 inserted into the third base pipe 126, and The third nut member 146 fastened thereto and the third support head 156 coupled to the upper end of the third screw shaft 136 and the fourth screw shaft 138 inserted into the fourth base pipe 128. And an upper end of the fourth nut member 148 and the fourth screw shaft 138 fastened thereto. Hapdoen comprises a fourth support head (158).

At this time, the outer diameters of the first to fourth nut members 142, 144, 146 and 148 are larger than the inner diameters of the first to fourth base pipes 122, 124, 126 and 128, respectively, and four access floors 160 are respectively provided to the first to fourth support heads 152, 154, 156 and 158. The edge is supported. For reference, the shape of the first to fourth support heads 152, 154, 156, and 158 may be free depending on the purpose, but it is advantageous to represent an appropriately expanded form for stable support of the access floor 160.

Accordingly, the first to fourth screw shafts 132, 134, 136, 138 to the first to fourth base pipes 122, 124, 126, and 128 by appropriately rotating the first to fourth nut members 142, 144, 146, and 148 fastened to the first to fourth screw shafts 132, 134, 136, and 138, respectively. The heights of the first to fourth support heads 152, 154, 156, 158 can be adjusted individually with the degree of insertion, and as a result, four corners of the four access floors 160 seated on each of the first to fourth support heads 152, 154, 156, 158. Individual height adjustment is possible between.

As a result, this can be easily solved when a step occurs between the access floors 160. Referring to the accompanying FIG. 6 with the previous drawings, any access floor 160 seated on the pedestal 110 according to the present invention. When each one edge has a different thickness, the support head supporting the relatively low access floor 160 is adjusted higher to overcome the step difference between these two access floors 160. You can check it.

Therefore, the step between the access floor 160 can be eliminated in the above manner.

On the other hand, the pedestal 110 according to the present invention can be modified somewhat in its form, Figure 7 is a perspective view showing an example thereof.

In this case, the same parts having the same role as the above-described contents are given the same reference numerals, and description thereof has been omitted. Looking at only the different parts, one base support rod 129 is formed from the base flange 121 in the base part 120. It is upright and has four mounting holes (not shown) through which the screw shafts 132, 134, 136 and 138 can be inserted.

Accordingly, the screw shafts 132, 134, 136, and 138 are inserted into the mounting holes in a one-to-one correspondence, thereby substantially performing the same functions as those described with reference to FIGS. 4 to 6, and thereby access floors 160 seated on the support heads 152, 154, 156, and 158. The step between them can be eliminated.

Based on this, the pedestal 110 according to the present invention can be seen that the specific shape or configuration can be modified as much as the purpose, the base pipe 122, 124, 126, 128 of the base portion 120 in the above description is a total of four Although the same number of support heads 152, 154, 156, 158 is described as supporting one corner of each of the four access floors 160, two pedestals 110 are provided on the premise that the access floor 160 is rectangular. Of course, one or three access floors 160 may be supported, and one edge of each of the at least two access floors 160 may be supported by one support head 152, 154, 156 or 158 depending on the purpose. It is possible.

Therefore, the above description is only one aspect of the present invention, and the present invention is not limited thereto, and all modifications within the technical spirit of the present invention should fall within the scope of the present invention. If you can easily understand.

As described above, the pedestal according to the present invention can flexibly cope with the generation of the step between the access floors, and there is an advantage that a significant time and cost can be greatly reduced because no additional maintenance or readjustment is required.

In addition, the pedestal according to the present invention can more stably implement the floor of the clean room with high precision control, thereby reducing the stable substrate transfer and particle generation of AGV and improving the reliability of the manufacturing process of the flat panel display device. .

Claims (7)

A pedestal upright from the base surface to support one adjacent edge of at least two neighboring access floors, A base part fixed to the base bottom surface; Support for supporting at least one of the one corner at least two are coupled to the top of the base to enable individual height adjustment Access floor pedestal comprising a. The method of claim 1, The base portion and the base flange closely fixed to the base bottom surface; A base pipe provided equal to the support part and erected from the base flange, The support portion includes a screw shaft inserted into the base pipe in a one-to-one correspondence; Nut members fastened to the respective screw shafts; An access floor pedestal comprising a support head fixed to one end on each of the screw shafts to support at least one of the one corner. The method of claim 1, The base portion and the base flange closely fixed to the base bottom surface; And a base support rod erected from the base flange in a state in which mounting holes equated with the support portion are formed in a longitudinal direction from an upper surface thereof, The support portion and the screw shaft is inserted one-to-one corresponding to each of the mounting holes; Nut members fastened to the respective screw shafts; An access floor pedestal comprising a support head fixed to one end on each of the screw shafts to support at least one of the one corner. The method of claim 2, And four support heads and four access floors, each supporting head supporting one corner of each of the access floors. The method of claim 3, wherein And four support heads and four access floors, each supporting head supporting one corner of each of the access floors. The method of claim 1 The base bottom is an access floor pedestal consisting of a steel beam of H beam or square beam. A floor system of a clean room using an access floor pedestal according to any one of claims 1 to 6, The pedestal is arranged regularly, and the access floor is arranged in all directions in a continuous floor system of the clean room.

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