KR20060075651A - Precision actuating device of 3 degree of freedom - Google Patents

Abstract

The present invention relates to a three-degree-of-freedom microdisplacement drive device, wherein the three-degrees-of-freedom microdisplacement drive device (1) includes a first micro-movement means (2) made of piezoelectric ceramic and a first working medium (3) made of magnet. A fan moving part 6 consisting of a fan drive rotating plate 4 and a fan drive base 5, a second working medium 8 formed of a piezoelectric ceramic, a second working medium 8 formed of a magnet, and a tilt drive rotating plate ( 9) and the tilt movement unit 11 formed of the tilt drive base 10, the third micro-movement means 13 made of the linear drive jig 12 and the piezoelectric ceramic, and the third working medium 14 made of the magnet and the straight line. It comprises a linear motion portion 16 consisting of a drive shaft 15, the three degrees of freedom micro-displacement drive device is a series of drive devices are installed in conjunction with each other to reduce the backlash, and accordingly nanometer precision To 3 DOF it can also perform the operation, and to which the drive source can be made up of a piezoelectric ceramic, and can be a precise drive of the apparatus, ensure a suitable working area than a continuous drive of the drive device through the piezoelectric ceramic.

3 degrees of freedom, micro, displacement, pan, tilt, straight, piezoceramic, magnet

Description

Precise actuating device of 3 degree of freedom

1 is a perspective view showing a three-degree of freedom microdisplacement drive device according to the present invention;

Figure 2 is a state diagram showing the operating state of the fan movement unit according to the present invention,

Figure 3 is a state diagram showing the operating state of the tilt movement unit according to the present invention,

Figure 4 is a state diagram showing the operating state of the linear motion portion according to the present invention.

Explanation of symbols on the main parts of the drawings

1: 3 degrees of freedom microdisplacement drive device 2: First micro movement means

3: first working medium 4: fan drive rotary plate

5: fan drive base 6: fan drive

7: second micro moving means 8: second working medium

9: tilt drive rotary plate 10: tilt drive base

11: tilt movement part 12: linear drive jig

13: third micro moving means 14: third working medium

15 linear drive shaft 16 linear motion portion

17: fixing member

The present invention relates to a three-degree-of-freedom microdisplacement drive device capable of obtaining a large pushing force with a small voltage. In particular, by using a piezoelectric ceramic as a driving source for precise driving of the device, three-degree-of-freedom fine displacement drive can be performed. The present invention relates to a three-degree-of-freedom microdisplacement drive device capable of securing a wider working space through continuous driving through piezoelectric ceramics.

Recently, new industries such as information technology (IT), biotechnology (BT), or nanotechnology (NT) are moving toward the trend of miniaturization and super precision, and as the new industrial market is formed, ultra precision that can produce and process these products The use of a production system is becoming a key factor in securing competitiveness. Especially in the BT field, which is attracting attention along with the genome project, the size of DNA is 3nm-4nm, ribosomal less than 100nm, and the largest general cells are as small as 10㎛. Ultra precision instruments are needed to handle and manipulate them, and the need for ultra precision instruments for handling and measuring nanoscale structures is increasing in the NT industry.

Therefore, a micro robot is required for assembling micro parts required for ultra-precision devices related to NT, BT, IT, and the like. There are three degrees of freedom microdisplacement driving devices such as manipulators as core components of the micro robot.

The three-degree-of-freedom microdisplacement drive device, such as the manipulator, is a device capable of precisely controlling the position of a micro gripper such as a micrometer that picks up a very small object, and is used as a core component for handling micro components.

In particular, the three-degree-of-freedom microdisplacement drive device that needs to be controlled at the nanoscale level is not only optical switches and planar devices, but also bio- and nano-scale materials, which have recently been gaining attention. It is emerging as an essential device for handling.

However, the three-degree-of-freedom microdisplacement drive device, such as the manipulator developed until recently, has a precision of only a few micrometers (μm). It is necessary.

In addition, the conventional three-degree of freedom microdisplacement drive device has a disadvantage in that the drive source causes a reduction in the precision of the drive device due to the occurrence of backlash by using a device for converting the rotational motion of the DC motor into a linear motion.

Accordingly, the present invention has been made in view of the above-described circumstances, and by using a piezoelectric ceramic as a driving source for precise driving of the device, it is possible to perform three degrees of freedom microdisplacement driving and also to continuous driving through piezoelectric ceramics. The purpose is to provide a three-degree-of-freedom microdisplacement drive device that can secure a large work space.

The present invention for achieving the above object, the first micro-moving means of the cylindrical to be moved forward and backward by the expansion or contraction of the tip in accordance with the voltage applied from the outside, and the tip of the first micro-movement means A first working medium connected to the first moving medium and moved in accordance with the operation of the first micro-moving means, and a disc-shaped fan-driven rotating plate installed in a rotatable state below the first working medium and rotating in accordance with the movement of the first working medium. And a fan driving unit comprising a fan driving base horizontally fixed to the lower part of the fan driving rotating plate by a bearing, and the front end of which is expanded or contracted according to a voltage applied from an outside of the fan driving unit. The second micro-moving means of cylindrical shape, which is configured to perform a true operation, and the tip of the second micro-movement means, A second actuating medium which is movable, a disc-shaped tilt drive rotating plate which is rotatably installed on one side of the second working medium, and rotates according to the movement of the second working medium, and a bearing is provided on one side of the tilt driving rotating plate. A tilt drive unit comprising a tilt drive base fixedly installed vertically with a straight line; a linear drive jig fixed to various parts installed on one side of the tilt drive and fixed in a linear motion; and a voltage applied to the rear of the linear drive jig and applied from the outside. And a third micro-moving means of cylindrical shape, the tip of which is expanded or contracted so as to move forward and backward, and a third working medium which is connected to the tip of the third micro-movement means and moves in accordance with the operation of the third micro-movement means. And a linear moving part connected to the third working medium, the linear driving shaft configured to move back and forth according to the movement of the third working medium. It is configured to include.

The first micro-movement means of the fan movement portion, the second micro-movement means of the tilt movement portion, and the third micro-movement means of the linear movement portion are piezoelectric ceramics.                         

In addition, the first operating medium of the pan moving part, the second operating medium of the tilt moving part, and the third operating medium of the linear moving part are made of a magnet.

On the other hand, a fixing member is installed in a state perpendicular to one side of the fan driving base of the fan moving part, and the first micro-moving means is inserted and installed in an upper portion of the fixing member, and in a state of being horizontal to the tilt driving base of the tilt moving part. The fixing member is installed so that the second micro-moving means is inserted into one end of the fixing member.

Here, a voltage is applied to the first micromoving means of the fan moving part to rotate the fan drive rotating plate while the first working medium connected to the distal end of the first micromoving means moves, and the voltage is applied to the first micromoving means. If the abrupt decrease is inertial force to act on the fan drive rotating plate.

A voltage is applied to the second micromovement means of the tilt movement part to rotate the tilt drive rotating plate while the second working medium connected to the distal end of the second micromovement means moves, and the voltage is rapidly reduced on the second micromovement means. When the inertial force is to act on the inertia of the tilt-driven rotating plate.

A voltage is applied to the third minute moving means of the linear motion part to move the linear drive shaft while the third working medium connected to the distal end of the third minute moving means moves slowly, and the voltage is suddenly applied to the third minute moving means. If it decreases, the inertia force can act on the linear drive shaft.

That is, the three-degree-of-freedom microdisplacement drive device having the above structure is composed of a pan movement part for converting linear motion into rotational motion, a tilt motion part, and a linear movement for linear motion, and the plurality of micro movement means are piezoelectric ceramics. It is made of, it is characterized in that the plurality of working medium is made of a magnet.

Therefore, using a plurality of micro-movement means that can obtain a large pushing force even with a small voltage as a fan drive source, a tilt drive source and a linear drive source, respectively, and a series of drive devices are interlocked with each other to reduce the backlash, accordingly It is possible to perform three degrees of freedom driving as precise as nanometers, the drive source is made of a piezoceramic to enable precise driving of the device, it is possible to secure a wider working space by the continuous drive of the device through the piezoceramic.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view showing a three-degree-of-freedom microdisplacement drive device according to the present invention, Figure 2 is a state diagram showing the operating state of the fan movement unit according to the present invention, Figure 3 is an operating state of the tilt movement unit according to the present invention 4 is a state diagram illustrating an operating state of the linear motion unit according to the present invention.

The three-degree-of-freedom microdisplacement drive device 1 according to the present invention is moved according to the operation of the first micro-movement means 2 and its first micro-movement means 2 whose front end portions are moved forward and backward according to an external voltage. A first operating medium 3 to be rotated, a fan driving rotary plate 4 installed in a rotatable state below the first operating medium 3, and a lower portion of the fan driving rotary plate 4 in a horizontal manner via a bearing. A fan moving part (6) consisting of a fixed fan drive base (5); and a second micro-moving means (7) installed at one side of the fan moving part (6), the tip of which moves forward and backward according to an external voltage; And a second working medium 8 which is moved in accordance with the operation of the second micro-moving means 7, a tilt drive rotating plate 9 which is rotatably installed on one side of the second working medium 8, and Tilt drive consisting of a tilt drive base 10 fixedly installed vertically via a bearing on one side of the tilt drive rotary plate 9. Part 11; and a linear drive jig 12, which is installed on one side of the tilt movement unit 11 is fixed to the linear drive jig 12 is fixed to, and the rear of the linear drive jig 12 is inserted in accordance with the external voltage A third micro-movement means 13 whose front end portion is to be moved forward and backward, a third working medium 14 which is moved in accordance with the operation of the third micro-movement means 13, and the third working medium 14 It is configured to include; linear motion portion 16 is made of a linear drive shaft 15 is connected to the third operation medium 14 to move forward and backward in accordance with the movement of the third working medium (14).

Here, the three-degree-of-freedom small displacement drive device 1 having the above structure is characterized in that the first micro-movement means 2 of the fan movement part 6 and the second micro-movement means 7 of the tilt movement part 11. ) And the third micro-movement means 13 of the linear motion part 16 are made of piezoelectric ceramic, and the first working medium 3 of the fan motion part 6 and the second working medium of the tilt motion part 11. (8) and the third working medium 14 of the linear motion unit 16 are made of a magnet.

That is, the structure of the three degrees of freedom microdisplacement drive device 1 is as shown in Figure 1, the fan movement portion 6 for converting the linear motion to the rotational motion in the horizontal direction is the first end of the front and rear 1 The fan which is connected to the micro-movement means 2 and the tip of the first micro-movement means 2 and rotates forward and backward of the first working medium 3 and the first working medium 3, which operate forward and backward. It consists of a drive rotary plate 4 and a fan drive base 5 for supporting the fan drive rotary plate 4 from the bottom, and is installed in a direction perpendicular to the fan moving part 6 to rotate the linear motion in the vertical direction as the rotary motion. The tilt movement part 11 to be converted has a second micro-movement means 7 whose front end is moved forward and backward and a second working medium 8 which is connected to the front end of the second micro-movement means 7 forward and backward. And the tilt drive rotating plate 9 and the tilt sphere which are rotated forward and backward of the second working medium 8. It is composed of a tilting movement base 10 for supporting the rotary plate (9) at the bottom.

In addition, the fixing member 17 is installed in a state perpendicular to one side of the fan driving base 5 of the fan moving part 6, and the first micro-moving means 2 is inserted into and installed on the fixing member 17. In addition, the fixing member 17 is installed in a horizontal state on one side of the tilt driving base 10 of the tilt movement part 11 so that the second micro-movement means 7 is inserted into one end of the fixing member 17. It is installed.

In addition, the linear movement unit 16 connected to one side of the tilt movement unit 11 and performing linear movement in the horizontal direction has the third micro-movement means 13, the third working medium 14, and the linear drive shaft 15. ), The third micro-movement means 13 and the third micro-movement means 13 inserted into the rear of the linear drive jig 12, the front end portion of which is fixed forward and backward. A third drive medium 14 connected forward and backward and connected to the front end of the third drive medium 14 and a linear drive shaft 15 connected forward and backward according to the movement of the third operation medium 14. It is done.

Therefore, the three degrees of freedom microdisplacement drive device 1 according to the present invention performs three degrees of freedom driving of rotational drive, tilting drive and linear drive by using three micromovement means made of piezoelectric ceramics, and the three micromovements The means are connected to three working media each consisting of a magnet.

On the other hand, the operating state of the fan movement portion 6 is, as shown in Figure 2, the first micro-moving means in a state in which the fan drive base 5 and the fan drive rotary plate 4 is coupled to each other via a bearing When the voltage is slowly applied to (2), the first driving medium (3) connected to the distal end of the first micro-movement means (2) is slowly moved to rotate the fan drive rotating plate (4), and the first micro-movement means If the voltage decreases sharply at (2), the fan drive wheel 4 is in place due to the inertia of the fan drive wheel 4, and the first operating medium 3 fixed to the fan drive wheel 4 is originally To return to the position of, this principle is to generate a rotary motion.

In addition, as shown in Figure 3, the operating state of the tilt movement unit 11, the tilt drive base 10 and the tilt drive rotating plate 9 is coupled to each other via a bearing medium the second micro-movement means When voltage is slowly applied to (7), the second driving medium (8) connected to the distal end of the second micro-movement means (7) is slowly moved to rotate the tilt drive rotating plate (9), and the second micro-movement means If the voltage suddenly decreases at (7), the tilt drive tumbler 9 remains in place due to the inertia of the tilt drive tumbler 9, and the second working medium 8 fixed to the tilt drive tumbler 9 is originally Returning to the position of, this principle generates a tilting motion.

In addition, as shown in FIG. 4, the operating state of the linear movement unit 16 is the third micro-movement unit 13 in a state in which the third micro-movement unit 13 is fixed to the linear drive jig 12. When the voltage is slowly applied, the third working medium 14 connected to the distal end of the third micro shifting means 13 moves the linear drive shaft 15 while moving slowly, and the third micro shifting means 13 When the voltage decreases rapidly, the linear drive shaft 15 is in place due to the inertia of the linear drive shaft 15, and the third working medium 14 fixed to the linear drive shaft 15 returns to its original position. When it comes back, this principle generates a linear motion.

Therefore, the micro-displacement of three degrees of freedom is driven by using the above-described pan moving part, tilt moving part and linear moving part.

As described above, according to the three-degree-of-freedom microdisplacement drive apparatus according to the present invention, a plurality of micro-movement means capable of obtaining a large pushing force even with a small voltage are used as a fan drive, a tilt drive source, and a linear drive source, respectively. The driving devices are interlocked with each other to reduce backlash, and thus, three degrees of freedom driving can be performed with a precision of about nanometers, and the driving source is made of piezoelectric ceramics to enable precise driving of the device. The continuous operation of the device through the effect that can secure a larger working space.

Claims (5)

A first micro-moving means which moves forward and backward according to a voltage applied from the outside, a first working medium which is moved in accordance with the operation of the first micro-moving means, and is rotated according to the movement of the first working medium and an inertial force A fan moving part which rotates and consists of an actuating fan drive rotary plate and a fan drive base horizontally fixed to a lower portion of the fan drive rotary plate via a bearing; A second micro moving means installed on one side of the fan moving part and moving forward and backward according to a voltage applied from the outside, a second working medium moving according to the operation of the second micro moving means, and the second working medium A tilt driving part configured to rotate in accordance with the movement and the tilt driving part having an inertial force, and a tilt driving base fixedly installed on one side of the tilt driving part by means of a bearing; A linear drive jig provided on one side of the tilt movement part, a third micro movement means inserted into the rear of the linear drive jig and moving forward and backward according to a voltage applied from the outside, and moving in accordance with the operation of the third micro movement means And a third moving medium which is configured to be linearly moved by moving forward and backward and simultaneously with an inertial force according to the movement of the third working medium. The three-degree of freedom microdisplacement drive according to claim 1, wherein the first micro-movement means of the fan movement portion, the second micro-movement means of the tilt movement portion, and the third micro-movement means of the linear movement portion are made of piezoelectric ceramics. Device. The three-degree of freedom microdisplacement drive device according to claim 1, wherein the first working medium of the fan moving part, the second working medium of the tilt moving part and the third working medium of the linear moving part are made of a magnet. The three-degree of freedom microdisplacement drive device according to claim 1, wherein a fixing member is installed in a state perpendicular to one side of the fan driving base of the fan moving part, and the first micro-moving means is inserted in an upper portion of the fixing member. . The three-degree-of-freedom displacement drive according to claim 1, wherein a fixing member is installed in a state of being horizontal to one side of the tilt driving base of the tilt movement unit, and the second minute moving means is inserted into one end of the fixing member. Device.

Images