KR100589647B1 - Micromachined moving stage and method of operation thereof - Google Patents

Abstract

According to the present invention, the ultra-compact drive stage is capable of uniaxial driving and has a rod-shaped driven body supported by a first elastic means which is elastic at an end thereof; A movable member installed on both sides of the driven member and being biaxially driven to fix the driven member forward, backward and displacement, and provided on both sides of the driven member and movable in two axes, and to both sides of the movable member. A first driving electrode having a first extension part extending respectively and a second extension part extending from both ends of the first extension part, and a first fixed electrode part corresponding to both sides of the first driving electrode and the first extension part; And first and second driving means having a second fixed electrode part corresponding to the second extension part and having first fixed electrodes forming a dovetail groove in which the first driving electrode is mounted, and on both sides of the driven body. And first and second fixing means installed and axially driven to maintain displacement of the driven member moved forward or backward by the first and second driving means.

Compact drive stage, torsional drive

Description

Micromachined moving stage and method of operation

1 is a plan view of a micro drive stage according to the present invention,

2 to 6 is a plan view showing an operating state of the ultra-compact drive stage,

7 is a plan view showing another embodiment of the ultra-compact drive stage according to the present invention;

8 to 12 are plan views showing the operating state of the ultra-compact drive stage shown in FIG.

Figure 13 is a plan view showing another embodiment of the ultra-compact drive stage according to the present invention.

<Explanation of symbols for the main parts of the drawings>

10; Ultra compact drive stage.

20; Driven

30, 40; Driver

50,60; Fixture

The present invention relates to a driving stage, and more particularly, to a micro-drive stage capable of ultra-precision control for the movement of a minute object, and a driving method thereof (micromachined moving stage and method of operation).

Recently, Information Technology (IT), Bio Technology (BT), and Nano Technology (NT) have been attracting attention as the next generation industrial technology. In addition, the discovery of new phenomena at various atomic levels using atomic force microscopy (scanning probe microscopic), or the development of data storage (satorage) using them is being facilitated.

Among these next-generation technologies, nanotechnology is a technology for analyzing, manipulating, or controlling the structure and characteristics of minute materials with atomic or molecular size, and is expected to be a bridgehead for future industrial development.

In order to evaluate the properties of materials or devices fabricated by such nanotechnology, manipulation technology for precise nanometry and transfer is essential. In nano measurement, the development of various types of microscopes capable of measuring various physical quantities using a method of scanning a probe is collectively referred to as a scanning probe microscope (SPM).

The basic structure of the SPM consists of a probe with a very sharp tip (with a radius of curvature of less than 10 nm), a scanner that can scan it onto a sample, and a control and information processing system that controls and receives and processes them. do. SPMs have evolved in various forms, and the principle of how a probe works depends on the physical quantity to be measured.STM (scanning tunneling microscope) using current flowing due to the voltage difference between the tip and the sample AFM (atomic force microscope) using force, magnetic force microscope (MFM) using force between the magnetic field of the sample and the magnetized tip, scanning near-field optical microscope that improves the limitation of resolution due to visible wavelength ), An electrostatic force microscope (EMF) using the electrostatic force between the sample and the tip has been developed.

Piezoelectric elements are mainly used to drive the measuring stages required for such probe applications, but in order to prepare for the wider application range, precise operation, and position control in the future, the miniaturization and high performance of the driving stage must be preceded. . To this end, micronized and refined micrometers have been further developed in MEMS (Micro Electro Mechanical System), and super-type driving technology having nano resolution has been studied.

U.S. Patent No. 5,025,346 discloses a constant power drive type driver.

The disclosed constant power driver has a disadvantage in that accurate positioning is difficult due to electrical signal noise.

As a new attempt, a parallel plate constant power motor driven by an inchworm has been developed, but this also has the problem that the gear-like structure cannot determine the nano-unit position due to the manufacturing limitations of the exposure process.

Korean Unexamined Patent Publication No. 2003-0027435 discloses an example of a micro driver.

In the disclosed driver, two interlocking bars having a predetermined width and length are rotatably connected to the center of the rotatable neck joint, and one driving amplifying bar is rotatable to the rotating shoulder joint at the other end of each interlocking bar. The two driving amplifier bars are arranged side by side with a predetermined distance so that each free end is rotatably fixed to the substrate by a rotational joint. Have

The micro-driver configured as described above may exert a relatively large force and thus may be suitable for transporting micro-objects. However, the micro-driver may have disadvantages such as high thermal noise and destruction of the device due to high heat.

In view of the above points, the present applicant has filed a Korean Patent Application No. 2003-0043557 for a very small stage and a driving method thereof, which are easy to transport a micro object.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems, and an object thereof is to provide a micro stage and a method of driving the micro stage having a nano resolution using a frictional force and easily carrying a micro object.

Another object of the present invention is to provide a micro-drive stage and a driving method thereof capable of fine driving of a driven body by using a torsional force of a movable member and relatively increasing a transfer displacement width of the driven body.

Another object of the present invention is to provide an ultra compact drive stage capable of forward and backward driving of a driven body with a small potential difference.

In order to achieve the above object, the micro stage driving method of the present invention,

A torsional movement of the first and second drivers is held by a movable member of the first and second drivers provided on both sides of the driven member elastically supported by the substrate and capable of forward and backward transfer in one axial direction. A first step of advancing or reversing the driven member by causing a;

 A second step of displacing and fixing the driven member by using the fixing members of the first and second fixing devices installed on both sides of the driven member, and the gripping force is released by the first and second drivers while the driven member is fixed; And a third step in which the movable members of the first and second drivers are returned to their original positions, and the first and second drivers are gripped and moved, and the displacement of the driven members is fixed by the first and second fasteners. The fourth step of terminating the.

Miniature stage of the present invention for achieving the above object is

 A driven member on the rod which is supported by the first elastic means so as to be movable forward and backward and is uniaxially driven;

A movable member installed on both sides of the driven member and being biaxially driven to fix the driven member forward, backward and displacement, and provided on both sides of the driven member and movable in two axes, and to both sides of the movable member. A first driving electrode having a first extension part extending each and a second extension part extending from both ends of the first extension part, respectively;

A first fixed electrode part corresponding to both sides of the first driving electrode, the first extension part, and a second fixed electrode part corresponding to the second extension part form a dovetail groove in which the first driving electrode is mounted. First and second driving means having a first fixed electrode,

First and second fixing means which are installed at both sides of the driven body and are uniaxially driven to maintain displacement of the driven body forward or backward by the first and second driving means; It is characterized by that provided with.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The method of driving the ultra-precision stage according to the present invention is to transfer micro-objects in micro units with nano resolution. A first step of holding by the movable members of the first and second drivers installed on both sides thereof and moving the driven member forward or backward by inducing a torsional movement to the movable members of the first and second drivers while maintaining the gripped state; A second step of displacement-fixing the driven member transferred using the fixing members of the first and second fixing devices installed on both sides of the driven member, and the holding force is released by the first and second drivers in a state where the driven member is fixed; And the third step of returning the movable members of the first and second drivers to their original positions, and gripping and moving the driven member by the first and second driving means. And a fourth step of releasing the displacement fixing of the driven member driven in the axial direction by the first and second fixing means.

In the first step, the movable members move the driven member by the torsional movement caused by the first and second drivers, thereby enabling fine movement of the driven member and enabling precise control of the driven member. In particular, compared with advancing the driven body by two-axis driving, fine driving and control thereof are easier.

And in the second step of fixing the displacement of the driven member, an inlet portion is formed in a region corresponding to the fixed member to release the fixed member initially by the fixing member and to support the fixing member when the driven member is moved. By gripping the driven member may be made.

Figure 1 shows an embodiment of a very small drive stage for implementing such a method.

Referring to the drawings, the ultra-compact drive stage 10 is formed on the substrate 11, the rod-like support that is supported by the first elastic means 21 that can be moved forward, backward and uniaxial drive and stretchable at the end. First and second actuators 30 and 40 installed on both sides of the driven body 20 and the driven body 20 and torsionally driven to move forward, backward, and fix the driven body 20, and the driven First and second stoppers 50 installed on both sides of the fuselage 20 to maintain the displacement of the driven body 20 forward or backward by the first and second drivers 30 and 40 are axially driven. (60).

Referring to the drive stage 10 according to the present invention configured as described above in more detail for each component as follows.

The driven member 20 provides a displacement amount for transferring the micro-objects and is suspended in the first elastic means 21 on the substrate 11 and has a rod shape having a predetermined length. The first elastic means 21 is formed integrally with them between the substrate 11 and the driven body 20, and may be made of a zigzag or corrugated spring as shown in FIG. The first elastic means 21 is not limited to the above-described embodiment and may be any structure that supports the driven body 20 and can provide elastic force when displacement occurs in the forward and backward directions in one axial direction. Do.

The first and second drivers 30 and 40 may be torsionally driven to grip, move forward and backward the driven body 20, respectively, to the second elastic means 31 and 41 on the substrate 11. A driving driving electrode unit for driving the movable members 33 and 43 and the movable members 33 and 43 and the substrate which are twistable in the forward and backward directions to drive the movable members 33 and 43 in a torsional manner. (driving sensing electrode unit, 35, 45).

The second elastic means 31 and 41 support the movable members 33 and 43 with respect to the substrate 11 and provide elastic force when displacement of the movable member occurs. Springs 31a and 41a connecting the movable members 33 and 43 and the substrate 11 with one axis of freedom in the longitudinal direction thereof, and movable with the substrate in a direction perpendicular to the movable members 33 and 34. It consists of the spring 31b, 41b which connects a member.

Each driving driving unit 35 or 45 of the first and second drivers 30 and 40 extends from both sides of the movable members 33 and 43, as shown in FIGS. 1, 3, and 5. At least one driving electrode (35a, 35b, 45a, 45b) and the first fixing electrode in a direction parallel to the driving electrodes (35a, 35b, 45a, 45b) 35c) 35d, 45c, 45d and the second fixed electrode extending from the fixed electrode in parallel with the movable members 33, 34 and opposed to the ends of the movable electrodes 33, 34; 35e, 35f, 45e, 45f are provided. The first fixed electrode may be formed in plural, and the distance B between the first driving electrode and the first fixed electrode positioned at the side of the driven body 20 is the distance B between the first fixed electrode located at the rear side. It is preferable to form narrower than). The driving driving unit is not limited to the above embodiment and may be formed in plural in an asymmetrical comb-tooth shape.

On the other hand, the first and second fixtures 50 and 60 are for fixing the displacement of the driven body 20 transferred by the first and second drivers, as shown in FIG. The fixed members 52 and 62 supported by the third elastic means 51 and 61 and capable of advancing back and forth in the axial direction with respect to the displacement of the 20, and the fixed members 52 and 62 are driven. (20) side, i.e., a fixed driving electrode unit 55, 65 of asymmetric parallel plate type for driving the fixed member using the electrostatic force in the first axial direction.

The fixed driving electrode units 55 and 65 may include the driving electrodes 55a and 65a and the first and second fixed electrodes 55c, 55d, 65c and 65d. Since the structure of the fixed driving units 55 and 56 may have the same structure as the driving units of the first and second drivers, it will not be described again.

Figure 7 shows another embodiment of a drive stage according to the present invention.

Referring to the drawings, the ultra-compact drive stage 100 is a rod-shaped driven body 20 supported by the first elastic means 21 that can be moved forward and backward in a single axis drive and is stretchable at an end thereof, and the driven body. Each of the first and second drivers 110 installed on both sides of the 20 and driven in two axes to fix the driven body 20 forward, backward, and displacement, and installed on both sides of the driven body and movable in two axes. 120 and the first and second fasteners 130 and 140 which are movable in one axial direction by fixing the displacement of the driven member 20 moved by the first and second drivers 110 and 120. ).

The first and second actuators 110 and 120 installed on both sides of the driven body 20 include first and second movable members 111 and 121 and the first and second movable members 111 and 121. And first and second driving units 115 and 125 for moving the motor in two axial directions.

Each of the first and second driving units 115 and 125 may include first extension parts 112a and 122a extending to both sides of the first and second movable members 111 and 121, and the first extension part ( First driving electrodes 112 and 122 having second extension portions 112b and 122b extending from the ends of 112a and 122a and corresponding sides of the first extension portions 112a and 122a. First fixed electrodes 113 and 123 including first fixed electrode parts 113a and 123a and second fixed electrode parts 113b and 123b corresponding to the second extension parts 112b and 122b. ). The first driving electrodes 112 and 122 formed of the first and second extension parts 112a, 122a, and 112a and 122b are formed in a T or dovetail shape, and the first fixed electrode part ( The first and second fixed electrodes 113 and 123 including 113a and 123a and the second fixed electrode portions 113b and 123b respectively define a driving region of the first driving electrodes 112 and 122. It is made up of a groove or a dovetail shape. The shape of the first driving electrode and the first fixed electrode is not limited to the above-described embodiment, and may be any structure as long as the first driving electrode can be biaxially driven.

The first and second fixtures 130 and 140 are for fixing the displacement of the driven body 20 transferred by the first and second drivers 110 and 120. As shown in FIG. 7, the first and second fixing members 132 capable of moving forward and backward in one axial direction with respect to the displacement of the driven body 20 and supported by the third elastic means 131 and 141, respectively. 142 and the third and fourth driving electrode units of the asymmetric parallel plate type for driving the fixing members 132 and 142 to the driven body 20, that is, the fixing member using the electrostatic force in the first axial direction. (driving sensing electrode unit 135, 145).

The third and fourth driving electrode units 135 and 145 include the third and fourth driving electrodes 135 and 146 and the third and fourth fixed electrodes 137 and 147. The third and fourth driving units 136 and 146 may have substantially the same structure as the first and second driving units 115 and 125 of the first and second drivers 110 and 120.

Meanwhile, as shown in FIG. 13, the first and second fixing units 130 ′ and 140 ′ are fixed members 52 (supported by elastic means 51 and 61, as in the above-described embodiment). 62 and a non-symmetrical parallel plate-type driving sensing electrode unit for driving the fixing members 52 and 62 to the driven body 20, that is, the fixing member using the electrostatic force in the first axial direction. , 55, 65).

In order to drive the micro-drive stage 10 according to the present invention configured as described above, first and second drivers 30 and 40 and first and second fixing devices as shown in FIGS. 1 and 2 to 6. The driving electrode to the first and second drivers 30 and 40 in the initial state (see FIG. 4) in which the driving electrode units 35 and 45 and 55 and 65 of the driving electrodes of the 50 and 60 are not generated. By applying a predetermined voltage to each electrode of the unit 35, 45, 55, 65, a constant electric power is generated to move the movable members 32, 42 to gripping the driven body 20. When twisted to the front side and finely advanced the driven body 20 in the longitudinal direction, as shown in FIG. Here, when the same voltage is applied to the first driving electrodes 35a and 45a positioned above the movable members 32 and 42 and the first driving electrodes 35b and 45b positioned below, the movable members move forward. Gripping the driven body 20 is applied to the first driving electrodes 35b and 45b while applying a voltage input of the upper first driving electrode to a voltage higher than that of the lower first driving electrode. When the voltage is differentially guided, the movable members 33 and 43 are twisted to advance the driven member 20 in the upper direction of the drawing. As described above, the driven member 20 can be freely moved forward and backward by torsionally moving the movable members through voltage control in the opposite directions to the first driving electrodes 35a, 45a, 35b, and 45b.

As described above, the driving electrode units 55 and 65 of the first and second stators 50 and 60 are driven by being gripped by the first actuators 30 and 40. By advancing the fixing members 52 and 62, the driven body 20 is held and its displacement is maintained. (See FIG. 5) At this time, the driven body 20 and the fixing member 52 and 62 are held. The inlet portion 25 is formed on the side opposite to) so that the driven body 20 is not gripped at the beginning, and a potential is applied to the first and second stators 50 and 60 when the driven body moves. Since the driven member can be held even when no voltage is input to 55) and 65), even if there is noise generated by an electrical signal, the effect thereof can be minimized.

 Thereafter, the electrostatic force is removed from the driving electrode units of the first and second drivers 30 and 40 so that the movable members 32 and 42 are returned to their original positions (see FIGS. 5 and 6). The driven member 20 is gripped by the movable members 32 and 42 of the first and second actuators 30 and 40, and the fixing members of the first and second fasteners 50 and 60 are in the original position. By returning to the driven member 20 is reversed. Then, the movable member is moved forward and backward while repeating the above-described operation.

Meanwhile, as illustrated in FIG. 7, the first and second driving electrodes 112 and 122 and the second and second driving electrodes 136 and 146 of the first and second actuators 110 and 120 may be dovetails. When formed in the shape of the T-shape the operating state is shown in Figures 7 and 8 to 12. Referring to the drawings, the electrostatic force is not generated in the first and second driving electrode units 115 and 125 of the first and second drivers 110 and 120 and the first and second fixing devices 130 and 140. In a non-initial state (see FIG. 8), by applying a predetermined voltage to each electrode to the first and second drivers 110 and 120, electrostatic power is generated to move the first and second movable members 111 and 121. When the driven body 20 is gripping and finely advanced to the front side, as shown in FIG. 10, a micro displacement as much as a unit stroke distance L is generated.

 In this case, when the same voltage is applied to the first driving electrodes 112 and 122 positioned above the first and second movable members 111 and 121 and the first driving electrodes 111 and 122 positioned below, the operation is performed. The member is advanced to gripping the driven object 20, and the voltage input of the upper first driving electrode is higher than the voltage input of the lower first driving electrode, and the first driving electrodes 112 and 122. When the voltage is applied to the first and second movable members 111 and 121, the driven member 20 is advanced in the upper direction of the drawing in the upper axial direction. As described above, the third and fourth driving electrode units 135 and 145 of the first and second stators 130 and 140 are held in the state where the driven body 20 is held by the first movers 110 and 120. ) To hold the driven body 20 by advancing the first and second fixing members 132 and 142 to maintain the displacement thereof (see FIGS. 11 and 12).

And the reverse of the driven body 20 is the first and second movable members 110 and 120 of the first and second movable members 111 and 121 of the first and second fixing devices 130 and 140, respectively. The first and second fixing members 132 and 142 are sequentially returned to their original positions, and are then returned to their original positions by the first elastic means 21 supporting the driven member 20.

As described above, the first and second driving electrodes 112 and 122 and the first and second fixed electrodes 113 and 123 are formed in a dovetail shape or a T-shape, so that a uniform electrostatic force is applied when a voltage is applied. It can generate stable driving.

As described above, the ultra-compact drive stage of the present invention and the driving method thereof have nano resolution through a movement of an inch worm which moves the driven object minutely using at least two pairs of drivers capable of 2-axis driving and a fixed driver capable of driving 1-axis. It can produce displacements of up to tens of micro-units in micro-driving.

In addition, the micro-drive stage according to the present invention can be utilized in the planar drive stage of the multi-axis drive stage by integrating the nano-drive measurement system.

Although the present invention has been described with reference to one embodiment shown in the drawings, this is merely exemplary, and it will be understood by those skilled in the art that various modifications and equivalent embodiments are possible.

Therefore, the true scope of protection of the present invention should be defined only by the appended claims.

Claims (4)

The driven member is elastically supported by the first elastic means installed on the substrate and installed to be able to move forward and backward in the axial direction by the second elastic means on the substrate by the drive driving electrode units of the first and second drivers provided on both sides thereof. A first step of advancing and holding the supported movable members, and causing the first and second actuators to move forward or backward while maintaining the gripped state;  A second step of displacing and fixing the transferred driven member by advancing the fixing members of the first and second fixing devices installed on both sides of the driven member, and canceling the holding force by the first and second drivers in a state where the driven member is fixed; And a third step in which the movable members of the first and second drivers are returned to their original positions, and the first and second drivers are gripped and moved, and the displacement of the driven members is fixed by the first and second fasteners. And a fourth step of releasing the micro stage. A rod-shaped driven body capable of uniaxial driving and supported by a first elastic means which is extensible at an end thereof; A movable member installed on both sides of the driven member and being biaxially driven to fix the driven member forward, backward and displacement, and provided on both sides of the driven member and movable in two axes, and to both sides of the movable member. A first driving electrode having a first extension part extending each and a second extension part extending from both ends of the first extension part, respectively; A first fixed electrode part corresponding to both sides of the first driving electrode and the first extension part, and a second fixed electrode part corresponding to the second extension part to form a dovetail groove in which the first driving electrode is mounted; First and second driving means having a fixed electrode, First and second fixing means which are installed at both sides of the driven body and are uniaxially driven to maintain displacement of the driven body forward or backward by the first and second driving means; Ultra-compact stage characterized in that it has been provided. The method of claim 2, The first driving electrode having the first and second extensions is formed in a T-shaped or dovetail shape, and the first fixed electrode surrounding the first driving electrode is formed in a shape of a T-shaped or dovetail groove. stage. The method of claim 2, Miniature driving stage characterized in that the interval between the first fixed electrode and the first fixed electrode positioned in the driven body is smaller than the distance between the first and first fixed electrode positioned on the side away from the first driven body. .

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