KR20060074383A - Apparatus for a coating layer for shielding electro magnetic interference and its method - Google Patents

Abstract

The present invention relates to an apparatus and a method for shielding a wireless terminal from electromagnetic waves by surface modification of the case of the wireless terminal with hydrophilicity using ion beams and depositing a metal thin film for shielding electromagnetic waves thereon. The support parts are formed in a cylindrical shape connected to each other and rotatable along the outer circumferential surface of the cylinder, provided on one side of the vacuum chamber, a reactive gas inlet for supplying a reactive gas to the surface of the polymer case, and arranged in the longitudinal direction of the cylinder The surface of the case is provided with an ion gun irradiating an ion beam to modify the surface of the polymer case hydrophilic, and the vacuum is deposited on the polymer case is disposed in the longitudinal direction of the cylinder and the surface is modified Metal foil for coating thin film And a film deposition unit.

Wireless terminal, electromagnetic wave, shielding, hydrophilicity, ion beam

Description

Electromagnetic shielding film coating apparatus and its method {APPARATUS FOR A COATING LAYER FOR SHIELDING ELECTRO MAGNETIC INTERFERENCE AND ITS METHOD}

1 is a cross-sectional view of an electromagnetic shielding film coating apparatus according to the prior art

2 is a longitudinal cross-sectional view of a chamber of the electromagnetic wave shielding film coating apparatus of FIG.

Figure 3 is a perspective view showing a first embodiment of the electromagnetic wave shielding film coating apparatus according to the present invention

4 is a longitudinal cross-sectional view of FIG.

5 is a perspective view of the case mounting portion according to the present invention

Figure 6 is a side view showing a second embodiment of the electromagnetic wave shielding film coating apparatus according to the present invention

Figure 7 is a side view showing a third embodiment of the electromagnetic wave shielding film coating apparatus according to the present invention

※ Explanation of code about main part of drawing ※

S polymer case 10 vacuum chamber

11 Rotary Drive 20 Case Mount

21 rim 22 support

23 Support 30 Ion Gun

40 sputtering gun 44 sputtering target

50 Case mount transport means

The present invention relates to an apparatus and method for coating a metal thin film on a case of a polymer material, and more particularly, to surface-modify the case of a wireless terminal with hydrophilicity using an ion beam and to deposit a metal thin film for shielding electromagnetic waves thereon. An apparatus and method are provided.

Recently, as the spread of wireless terminals such as mobile phones and PDAs increases exponentially, electromagnetic waves generated from such communication terminals are exposed to users indiscriminately. Electromagnetic waves not only adversely affect the human body, but also affect the operation of precision instruments such as aircraft, medical devices, especially artificial heart, and cause malfunctions.

Therefore, various efforts have been made to solve such a problem, and one of the methods is to coat the inner surface of the wireless terminal case with a metal film capable of shielding electromagnetic waves. Korean Laid-Open Patent Publication No. 2000-32426 Is disclosed.

1 is a cross-sectional view of an electromagnetic shielding film coating apparatus according to the prior art disclosed in Korean Patent Laid-Open No. 2000-32426, and FIG. 2 is a longitudinal cross-sectional view of a chamber of the electromagnetic shielding film coating apparatus.

As shown, the conventional electromagnetic shielding film coating apparatus is a cylindrical chamber (1), a cylindrical rotary jig (2) that can be installed inside the chamber to mount a plurality of synthetic resin (S), and the rear of the rotary jig Jig rotation means (3) is installed in the jig rotation means for rotating the rotary jig at a constant speed, and jig movement means (4a) for placing or removing the rotary jig (2) to the inner side of the chamber is installed below the rotary jig (2) And a plurality of targets 5a and 5b which are disposed inside the chamber and are electrically cathodes, and a jig feeder 4b that is installed outside the chamber and on which the rotary jig 2 is placed. The front of the chamber 1 is provided so that the door 6 can be opened and closed.

The rotary jig 2 is provided with a plurality of movable clamps 7 for receiving and supporting the state in which the synthetic resin S is mounted between the two rims facing each other. Jig rotation means (3) is to drive the rotary jig (2) in the chamber, the motor 3a is installed on the outside of the rear of the chamber, the drive is connected to the motor and rotatably disposed inside the chamber In addition to being geared to the gear 3b and the drive gear, the inner circumferential surface is supported by the support roller 3c.

Referring to the method of forming a thin film for electromagnetic shielding using such a conventional device as follows. First, injection molding inspection and ultrasonic cleaning are performed on a synthetic resin such as a wireless terminal case, dried with an oven hot air, and the surface is plasma-etched using oxygen plasma. The synthetic resin, which has undergone such a process, is mounted on a jig and placed in a rotating jig to be placed in a chamber, the door is closed, and a copper and stainless film is coated by a sputtering method.

Etching with oxygen plasma during the above process removes contaminants adsorbed on the surface of the coating and increases the microsurface roughness, which not only increases the surface energy but also increases the area in contact with the coating, resulting in a copper coating during coating of the copper film. It will increase the adsorption power of the.

However, according to the related art, physical etching of the surface of the coated object does not increase the adhesive strength as desired. Accordingly, a method of changing the bonding state of the surface by chemical treatment of the surface of the coated material has been studied, but in the case of chemical treatment, the material itself is often harmful and causes a complicated increase in the process steps.

Accordingly, the present invention has been made to solve the problems of the prior art as described above, the object of which is to irradiate an ion beam in an atmosphere containing a reactive gas to surface-modify the case of the wireless terminal hydrophilically and shield the electromagnetic wave thereon The present invention provides a device and method for shielding a wireless terminal from electromagnetic waves for depositing a metal thin film.

Another object of the present invention is to provide an apparatus and method for more efficient use and space utilization of the process by performing a metal thin film deposition process for surface modification and electromagnetic shielding in one device.

Electromagnetic shielding film coating apparatus according to an embodiment of the present invention for achieving the above object, a hollow cylindrical vacuum chamber, at least one door for sealing the inlet of the vacuum chamber, and a plurality of polymer cases The support parts are formed in a cylindrical shape connected to each other and rotatable along the outer circumferential surface of the cylinder, provided on one side of the vacuum chamber, a reactive gas inlet for supplying a reactive gas to the surface of the polymer case, and arranged in the longitudinal direction of the cylinder The surface of the case is provided with an ion gun irradiating an ion beam to modify the surface of the polymer case hydrophilic, and the vacuum is deposited on the polymer case is disposed in the longitudinal direction of the cylinder and the surface is modified Including a metal thin film deposition unit for coating a thin film It features.

Electromagnetic shielding film coating apparatus according to another embodiment of the present invention is fixedly disposed in one vacuum chamber, a hollow cylindrical vacuum chamber, at least one door for sealing the inlet of the vacuum chamber, and a plurality of polymer cases A case mounting portion configured to have a cylindrical portion connected to each other for mounting, and rotatable along an outer circumferential surface of the cylinder; It is provided on one side of the vacuum chamber to supply a reactive gas inlet for supplying a reactive gas to the surface of the polymer case, and an ion gun disposed in the longitudinal direction of the cylinder and irradiating an ion beam on the surface of the polymer case to make the surface of the polymer case hydrophilic Surface modification for modifying the surface; And a metal thin film deposition unit disposed in the longitudinal direction of the cylinder and coating the thin film by vacuum depositing a metal material on a polymer case having a modified surface. The ion gun is disposed outside the cylinder, and the metal thin film deposition unit is disposed at the inner center of the cylinder.

Electromagnetic shielding film coating apparatus according to another embodiment of the present invention, the hollow cylindrical vacuum chamber; At least one door sealing an inlet of the vacuum chamber; A case mounting part configured to have a cylindrical shape in which support parts for mounting a plurality of polymer cases are connected to each other and rotatable along an outer circumference of the cylinder; A reactive gas inlet provided at one side of the vacuum chamber to supply a reactive gas to the surface of the polymer case, and an ion gun disposed in the longitudinal direction of the cylinder and irradiating an ion beam to the surface of the polymer case to provide a surface of the polymer case. A surface modification portion for modifying hydrophilicity; A metal thin film deposition unit for coating a thin film by vacuum depositing a metal material on a polymer case having a surface modified in a longitudinal direction of the cylinder; The ion gun and the metal thin film deposition unit are disposed in the center of the respective vacuum chambers, and are installed between the vacuum chamber of the ion gun and the vacuum chamber of the metal thin film deposition unit so that the case mount can reciprocate between the surface modification unit and the metal thin film deposition unit. It is characterized by comprising a transfer unit.

Electromagnetic shielding film coating apparatus according to another embodiment of the present invention, the hollow cylindrical vacuum chamber; At least one door sealing an inlet of the vacuum chamber; A case mounting portion fixedly disposed in one vacuum chamber, the support portion for mounting a plurality of polymer cases being configured in a cylindrical shape and rotatable along an outer circumferential surface of the cylinder; A reactive gas inlet provided at one side of the vacuum chamber to supply a reactive gas to the surface of the polymer case, and an ion gun disposed in the longitudinal direction of the cylinder and irradiating an ion beam to the surface of the polymer case to provide a surface of the polymer case. A surface modification portion for modifying hydrophilicity; A metal thin film deposition unit for coating a thin film by vacuum depositing a metal material on a polymer case having a surface modified in a longitudinal direction of the cylinder; A first transfer part which transfers the ion gun from one side of the case mounting part and is arranged in the longitudinal direction of the cylinder at the inner center of the case mounting part; And a second transfer part configured to transfer the metal thin film deposition part from the other side of the case mounting part to be disposed in the longitudinal direction of the cylinder at the inner center of the case mounting part.

Electromagnetic shielding film coating method according to another embodiment of the present invention, the ion beam irradiation step of modifying the surface hydrophilic by irradiating an ion beam to the surface of the polymer case while supplying a reactive gas to the surface of the polymer case; It characterized in that it comprises a metal thin film coating step for coating a thin film by vacuum depositing a metal material on the case where the surface is modified.

The ion beam irradiation step and the metal thin film coating step may be performed in different vacuum chambers, respectively, during which the case mounting portion is transferred from the vacuum chamber for irradiating the ion beam to the vacuum chamber for coating the metal thin film.

The ion beam irradiation step and the metal thin film coating step may be performed in the same vacuum chamber; Before the ion beam irradiation step, the ion gun for irradiating the ion beam is transferred from one side of the case mounting portion to be disposed in the longitudinal direction of the cylinder in the inner center of the case mounting portion, and before the metal thin film coating step, the ion gun is the case mounting portion The sputtering gun for transferring to one side of and depositing the metal thin film is transferred from the other side of the case mounting portion to be disposed in the longitudinal direction of the cylinder at the inner center of the case mounting portion.

Aspects of the present invention described above will become more apparent through preferred embodiments described with reference to the accompanying drawings. Hereinafter, the present invention will be described in detail so that those skilled in the art can easily understand and reproduce the present invention.

3 is a perspective view showing a first embodiment of the electromagnetic wave shielding film coating apparatus according to the present invention, Figure 4 is a cross-sectional view of FIG.

As shown, the electromagnetic wave shielding film coating apparatus 100 according to the first embodiment, the case mounting portion 20, the ion gun 30 and the sputtering gun 40 are all provided in one vacuum chamber 10 will be.

The case mount 20 is composed of a pair of circular rims 21 arranged at the front and rear, and at least one support 22 connecting the rims, as shown in FIG. It has a shape. In addition, between the pair of circular rims, along the longitudinal direction of the cylinder, a support 23 for mounting the polymer case S is arranged to be detachable. The support 23 is configured to be rotatable 180 ° by the drive of the drive gear 21a installed on the rim 21, so that one surface of the polymer case mounted on the support can be turned over to the opposite side thereof.

On the other hand, the inner side of the hollow vacuum chamber 10 is provided with a rotation driving unit 11 for rotatable along the outer circumferential surface of the case mounting portion 20 to the axis. This is because only some polymer cases are exposed to the ion gun and the sputtering gun because the ion gun and the sputtering gun, which will be described later, are fixedly disposed on one side of the vacuum chamber, so that all the polymer cases can be exposed to them.

The ion gun 30 is installed along the longitudinal direction on the inner circumferential surface of the hollow vacuum chamber 10, and a reactive gas injection tube (not shown) is connected to another side of the vacuum chamber. Accordingly, while the reactive gas is blown into the surface of the polymer case in a vacuum, the state of the polymer surface is modified by irradiating the surface of the polymer case with ion particles having high energy generated from the ion gun.

Reactive gases are suitably gases which can make hydrophilic functional groups, and are oxygen, hydrogen, nitrogen, ammonia, carbon monoxide and mixtures thereof. On the other hand, the atoms constituting the particles are sufficient to form ions, and preferably argon, oxygen, krypton, nitrogen, and a mixed gas thereof. The energy of the ion particles is in the range of 0.5 to 2.5 KeV, preferably about 1 KeV. If the energy is too high, components on the surface of the polymer may fall off or the connection between the polymers may be broken more than necessary.

The ion gun is equipped with a plurality of ion sources facing the cylindrical case mount, and the ion source is Kaufman, Cold Hallow Cathode, Electron Cyclotron Resonance , Radio frequency, etc. are used.

As a result, the contact surface of the polymer surface is reduced, and the bonding state of the polymer surface is changed to hydrophilicity due to the enrichment of hydroxyl groups (OH), thereby allowing the metal thin film to be deposited to be adhered with stronger adhesion.

The sputtering gun 40 is transported from one side of the hollow cylindrical vacuum chamber of which the both ends are open, and is installed along the longitudinal direction in the inner center of the hollow vacuum chamber 10. The other side of the vacuum chamber is provided with a door 12 for sealing the inlet of the vacuum chamber to maintain the vacuum state in the process. On the other hand, a feed roller 41 for transferring or discharging the sputtering gun to one side of the vacuum chamber, a feed table 42 for guiding the feed roller, and a power supply unit 43 for supplying power to the sputtering gun is provided.

The sputtering gun is provided with a plurality of sputtering targets 44 facing the cylindrical case mount, and uses an ECR (Electron Cyclotron Resonance) source as an ion source for the ion beam sputter. If necessary, magnetron sputtering or DC sputtering may be used, and since these are well known technologies, detailed descriptions thereof will be omitted.

In this first embodiment, the ion gun is described as being installed outside the case mounting unit and the sputtering gun is installed inside, but the present invention is not limited thereto and vice versa. That is, the sputtering gun is installed on the inner circumferential surface of the hollow vacuum chamber 10 along its longitudinal direction, and the ion gun is transferred from one side of the hollow cylindrical vacuum chamber of which the both ends are open to open the hollow vacuum chamber ( 10) is installed along its longitudinal direction in the inner center. To this end, a door 12 is provided to seal the inlet of the vacuum chamber to the side where the ion gun is transferred to maintain the vacuum state in the process. Although the door shown in the drawing is opened and closed to rotate up and down, a method of opening and closing in the left and right directions of the vacuum chamber is also possible, and is not necessarily configured only as shown in the drawing. On the other hand, a feed roller for transferring or discharging the ion gun to one side of the vacuum chamber and a feed table for guiding the feed roller are provided.

Figure 6 is a side view showing a second embodiment of the electromagnetic wave shielding film coating apparatus according to the present invention.

As shown, the electromagnetic shielding film coating apparatus 200 according to the second embodiment, the ion gun 30 and the sputtering gun 40 is provided in each of the vacuum chamber (10a, 10b), the case mounting portion these two Located between the vacuum chamber of the, the case mounting portion to enable the reciprocating transfer between the surface modification and the metal thin film deposition portion.

Similarly to the first embodiment, the ion gun 30 is fixedly installed at the inner central part of the hollow vacuum chamber, and the sputtering gun is also fixedly installed at the inner central part of another vacuum chamber.

The case mounting portion transfer means 50 includes a pair of pedestals 51 capable of supporting the rim and the support on both sides of the case mounting portion 20, a feed roller 52 attached to the pedestal and conveyed thereto, and a feed roller. It consists of a pair of rails (53) for guiding. On the other hand, the other edge of each of the vacuum chamber is provided with another pair of rails (53a, 53b), so that the transfer roller is transferred to the vacuum chamber to move in the vacuum chamber.

Accordingly, the case mount may be transported reciprocally between the vacuum chamber of the ion gun and the vacuum chamber of the sputtering gun as required by the process step. That is, after the polymer case is mounted in the case mounting portion 20, the polymer case is loaded into the vacuum chamber 10a of the ion gun by driving the case mounting portion transfer means, thereby performing surface modification by irradiation of the ion beam. Thereafter, the case mounting portion is loaded into the vacuum chamber 10b of the sputtering gun by driving the case mounting portion transfer means to coat the metal thin film.

Figure 7 is a side view showing a third embodiment of the electromagnetic wave shielding film coating apparatus according to the present invention.

As shown, in the electromagnetic shielding film coating apparatus 300 according to the third embodiment, a case mounting unit (not shown) is fixedly installed in one vacuum chamber 10, and the ion gun 30 and the sputtering gun ( 40) are respectively transported from both sides of the vacuum chamber. That is, the configuration of the case mounting portion and the sputtering gun is the same as in the first embodiment, and the ion gun 30 is transformed into a structure that can be transferred. A feed roller 41 for transferring or discharging the sputtering gun to one side of the vacuum chamber, a feed table 42 for guiding the feeding roller, a feed roller 31 for transferring or discharging the ion gun to one side of the vacuum chamber, and a feed A transfer table 32 for guiding the roller is provided.

Accordingly, the ion gun and the sputtering gun can be transferred to the vacuum chamber in which the case mount is fixed as required by the process step. That is, the polymer case is mounted on the case mounting portion 20, and then the ion gun is transferred to the vacuum chamber to modify the surface by irradiation of the ion beam. Thereafter, the ion gun is discharged from the vacuum chamber and the sputtering gun is transferred to the vacuum chamber to coat the metal thin film.

As described in detail above, according to the present invention, by shielding the surface of the wireless terminal with hydrophilicity by irradiating an ion beam in an atmosphere containing a reactive gas and depositing a metal thin film for shielding electromagnetic waves thereon, It can be deposited, and the metal thin film deposition process for surface modification treatment and electromagnetic shielding in one device, it is possible to simplify the process.

Embodiments of the present invention described above and illustrated in the drawings should not be construed as limiting the technical spirit of the present invention. Those skilled in the art of the present invention can change and change the technical spirit of the present invention in various forms, and the improvement and modification are within the protection scope of the present invention as long as it is obvious to those skilled in the art. Will belong.

Claims (12)

In the electromagnetic shielding film coating apparatus for coating a metal thin film for electromagnetic shielding on the surface of the polymer case, Hollow cylindrical vacuum chamber; At least one door sealing an inlet of the vacuum chamber; A support for mounting a plurality of polymer cases is configured in a cylindrical shape connected to each other, the case mounting portion rotatable along the outer peripheral surface of the cylinder; A reactive gas injection port provided at one side of the vacuum chamber to supply a reactive gas to a surface of the polymer case, and an ion gun disposed in the longitudinal direction of the cylinder and irradiating an ion beam to a surface of the polymer case; Surface modifications for modifying the surface to be hydrophilic; And Electromagnetic shielding film coating apparatus disposed in the longitudinal direction of the cylinder, characterized in that it comprises a metal thin film deposition unit for coating a thin film by vacuum deposition of a metal material on the polymer case is modified surface. The method of claim 1, The case mount is fixedly disposed in one vacuum chamber; The ion gun is disposed outside the cylinder, the metal thin film deposition unit is characterized in that the electromagnetic shielding film coating apparatus is disposed in the inner center of the cylinder. The method of claim 1, The ion gun and the metal thin film deposition unit are disposed in the center of each vacuum chamber; The electromagnetic shielding film coating apparatus further comprises a transfer unit installed between the vacuum chamber of the ion gun and the vacuum chamber of the metal thin film deposition unit to enable the case mounting unit to reciprocate between the surface modification unit and the metal thin film deposition unit. . The method of claim 1, The case mount is fixedly disposed in one vacuum chamber; A first transfer part configured to transfer the ion gun from one side of the case mount to be disposed in the longitudinal direction of the cylinder at an inner center of the case mount; And And a second transfer part configured to transfer the metal thin film deposition part from the other side of the case mounting part to be disposed in the longitudinal direction of the cylinder in the inner center of the case mounting part. The method according to any one of claims 1 to 4, Electromagnetic shielding film coating apparatus further comprises a rotary driving unit for rotating the support so that the front and rear surfaces of the case is reversed. The method according to any one of claims 1 to 4, The reactive gas is an electromagnetic shielding film coating apparatus, characterized in that any one selected from oxygen, nitrogen, ammonia, carbon monoxide and a mixture thereof. The method of claim 6, Particles constituting the ion beam is an electromagnetic shielding film coating apparatus, characterized in that the ion particles having an energy in the range of 0.5 to 2.5 KeV. In the electromagnetic shielding film coating method for coating a metal thin film for electromagnetic shielding on the surface of the polymer case, An ion beam irradiation step of modifying the surface to be hydrophilic by irradiating an ion beam to the surface of the polymer case while supplying a reactive gas to the surface of the polymer case; And And a metal thin film coating step of coating a thin film by vacuum depositing a metal material on the case where the surface is modified. The method of claim 8, The ion beam irradiation step and the metal thin film coating step are performed in different vacuum chambers; Between these steps, further comprising the step of transferring the case mounting portion from the vacuum chamber for irradiating the ion beam to the vacuum chamber for coating the metal thin film. The method of claim 8, The ion beam irradiation step and the metal thin film coating step are performed in the same vacuum chamber; Transfer the ion gun for irradiating the ion beam from one side of the case mounting portion before the ion beam irradiation step to be disposed in the longitudinal direction of the cylinder in the inner center of the case mounting portion, and the ion gun before the metal film coating step And transferring a sputtering gun for transferring to one side of the case mounting portion and depositing a metal thin film from the other side of the case mounting portion so that the sputtering gun is disposed in the longitudinal direction of the cylinder at the inner center of the case mounting portion. Coating method. The method according to any one of claims 8 to 10, The reactive gas is an electromagnetic shielding film coating method, characterized in that any one selected from oxygen, nitrogen, ammonia, carbon monoxide and a mixture thereof. The method according to any one of claims 8 to 10, Particles constituting the ion beam is an electromagnetic shielding film coating method, characterized in that the ion particles having an energy in the range of 0.5 to 2.5 KeV.

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