KR100784155B1 - A jig and a substrate-supporting structure with the same - Google Patents

Abstract

The present invention provides a plurality of jigs having a substrate mounting portion on which the substrate is mounted; A plurality of jig support shafts for supporting the plurality of jigs through a jig hole formed in the jig; A jig support shaft moving groove arranged to face each other and formed along at least a portion on the circumference of an opposing face and a jig support shaft moving groove for entering and exiting the jig support shaft into the jig support shaft moving groove at the same position on the outer circumference; Fixed frame; And one or more fixing frame holders, each end of which is mounted to each of the fixing frames, to support the fixing frame.

The substrate supporting apparatus according to the present invention has a structure of collectively mounting a plurality of jigs that can accommodate the substrate through the jig hole, thereby maximizing the ease of operation and maximizing the yield of substrate processing, It is possible to process substrates of various sizes.

Description

JIG AND A SUBSTRATE SUPPORT APPARATUS WITH THE SAME {A JIG AND A SUBSTRATE-SUPPORTING STRUCTURE WITH THE SAME}

1A and 1B are side and front schematic views showing a state of being mounted in a sputtering deposition vacuum chamber of a substrate supporting apparatus according to the present invention.

1C is a perspective view of a substrate supporting apparatus according to an embodiment of the present invention.

FIG. 1D is a perspective view of the substrate support apparatus illustrating a state in which the jig support shaft is removed in FIG. 1C.

2A is a schematic perspective view of a jig of a substrate supporting apparatus according to an embodiment of the present invention.

FIG. 2B is a schematic cross-sectional view taken along the line I-I of FIG. 2A.

FIG. 2C is a schematic exploded perspective view of the jig of FIG. 2A. FIG.

Figure 2d is a schematic perspective view showing a state in which a plurality of jig is mounted on the jig support shaft according to an embodiment of the present invention.

2E is a schematic perspective view of an example of a jig stopper according to the present invention.

Figure 2f is a schematic perspective view of another example of the jig stopper according to the present invention.

2G and 2H are schematic cross-sectional state views taken along the line II-II of FIG. 2F.

3 is a schematic partial cross-sectional view of the portion taken along the line III-III of FIG. 1C.

4A is a partial perspective view of another example of the substrate supporting apparatus of the present invention.

4B is a schematic partial exploded cross-sectional view taken along line IV-IV of FIG. 4A.

Figure 5a is a schematic exploded perspective view of the jig support shaft locking device according to the present invention.

Figure 5b is a schematic partial perspective view showing a state in which the jig support shaft locking device according to the present invention is mounted on the fixing frame.

FIG. 5C is a partial cross-sectional view taken along the line VV of FIG. 5B.

6A is a schematic perspective view of a locking device fixture having another form.

6B and 6C are partial perspective views showing an operating state of the locking device fixing portion indicated by reference numeral “B” of FIG. 6A.

6d is a schematic perspective view showing still another example of the locking device according to the present invention.

Figure 7a is a schematic partial perspective view of a jig support shaft locking device having a locking device inner shaft in accordance with the present invention mounted on a fixed frame.

FIG. 7B is a cross-sectional view taken along the line VI-VI of FIG. 7A.

8A is a schematic exploded perspective view of a jig according to another embodiment of the present invention.

8B and 8C are schematic cross-sectional views of a front view and a coupling state of a portion of a jig according to another embodiment of the present invention.

9A to 9B are schematic exploded and combined perspective views of an embodiment of a jig according to another embodiment of the present invention.

9C is a schematic partially exploded perspective view showing another embodiment of a jig according to the present invention.

10A and 10B are schematic exploded and combined perspective views of a jig having a modification of the jig body fastening unit according to the present invention.

10C and 10D are schematic cross-sectional views of the jig according to FIGS. 10A and 10B.

* Description of the symbols for the main parts of the drawings *

100 ... jig 200 ... jig support shaft

300 ... Fixing frame 400 ... Fixing frame support

500 ... Jig Support Shaft Lock

The present invention relates to a substrate support apparatus and a jig, and more particularly, to a substrate support apparatus and a jig that can increase the processing process yield for the substrate.

Chemical vapor deposition (Physical Vapor Deposition) and physical vapor deposition (Physical Vapor Deposition) are mainly used as a method of depositing a thin film on a substrate, and vacuum vapor deposition and sputtering are mainly used for physical vapor deposition.

The thin film formed by such a vapor deposition method is used as various functional layers in addition to the conventional semiconductor element layer. For example, in the case of a mobile communication terminal, electromagnetic waves are used as a thin film layer having a specific function such as an electromagnetic shielding layer for shielding electromagnetic waves. That is, a radio wave shielding layer is formed in a uniform thickness of about 1 μm in a region of the mobile communication terminal to shield electromagnetic waves.

However, in the related art, in the process of forming a thin film layer for a substrate such as a case of a mobile communication terminal, the individual boards have to be mounted on the thin film forming apparatus one by one. It became. In addition, this accompanied a problem that the production yield of the substrate on which the thin film layer is formed is significantly reduced.

An object of the present invention is to provide a jig and a substrate supporting apparatus for solving the above problems.

The present invention for achieving the above object, a plurality of jig having a substrate mounting portion on which the substrate is seated; A plurality of jig support shafts for supporting the plurality of jigs through a jig hole formed in the jig; A jig support shaft moving groove disposed to face each other and formed along at least a portion on the circumference of an opposing face and a jig support shaft moving groove for entering and exiting the jig support shaft into the jig support shaft moving groove at the same position on the outer periphery; Fixed frame; And one or more fixing frame holders, each end of which is mounted to each of the fixing frames, to support the fixing frame.

In the substrate supporting apparatus, the substrate seating portion may be provided on both sides of the jig.

In the substrate supporting apparatus, one or more jig stoppers may be further provided to limit the movement of the jig on the jig support shaft.

In the substrate support apparatus, a plurality of jig stopper mounting holes for accommodating the jig stopper may be provided on the jig support shaft.

In the substrate supporting apparatus, a jig stopper movement line is provided on one surface of the jig support shaft, and the jig stopper includes: a jig stopper connection portion disposed inside the jig stopper movement line, and a jig stopper disposed at both ends of the jig stopper connection portion. When a preload is applied to the jig stopper connection part and no external force is applied, the jig stopper connection part may contact the inner surface of the jig stopper moving line.

In the substrate support apparatus, a jig support shaft shock alleviation layer may be further provided on an inner surface of the jig support shaft moving groove parallel to the longitudinal direction of the jig support shaft.

In the substrate supporting apparatus, at least one fixing frame through hole formed on the side opposite to the side of the jig supporting shaft moving groove of the fixing frame, a fastening member disposed through the fixing frame through hole, and the fastening member can be accommodated. It may further include a fastening member engaging portion formed at one end of the jig support shaft. In addition, the fastening member and the fastening member engaging portion may be screwed.

In the substrate supporting apparatus, a jig supporting shaft locking device may be further provided outside the fixing frame to limit the movement of the jig supporting shaft. The jig support shaft locking device may further include: a lock body part surrounding a part of an outer surface of the jig support shaft, a lock device hinge part mounted to one end of the lock device body part, and one end rotated through the lock device hinge part. It is also possible to include a locking device rotating portion rotatably mounted to the locking device main body portion, and a locking device fixing portion for fixing the other end of the locking device rotating portion to the locking device main body. The locking device fixing portion may include: a locking rotation latch that is rotatably mounted to one end of any one of the locking device body portion and the locking device rotation portion, and one end of the other of the locking device body portion and the locking device rotation portion. It may be formed, and provided with a lock rotation latch receiving groove for receiving the lock rotation latch. The locking device fixing part may include: a locking through hole formed at the other end of the locking device body part and the other end of the locking device rotation part engaged with the locking device body part, and penetrated when the other ends of the locking device body part and the locking device rotation part are engaged with each other. It may be provided with a lock rod detachably disposed in the lock through hole. The jig supporting shaft locking device may further include a locking device inner shaft mounted on one surface of the locking device main body toward the jig supporting shaft so as to be inserted into the jig supporting shaft moving groove. The locking device inner shaft may include: an inner shaft center portion mounted vertically from the locking device body portion and an inner shaft surface relief portion formed outside the inner shaft center portion to mitigate a collision with the jig support shaft. It may be.

In the substrate supporting apparatus, a locking protrusion may be formed on an inner surface of the jig supporting shaft locking device, and one or more locking protrusion receiving grooves may be provided on one surface of the fixing frame facing the locking protrusion.

In the substrate supporting apparatus, the jig includes: a first jig main body and a second jig main body having the substrate mounting portion on each one surface, and opposite surfaces of the one surface of the first jig main body and the second jig main body; A jig main body having a jig hole formed by being disposed to face each other, and a jig main body fastening portion for fastening the first jig main body and the second jig main body; And a mask unit including a first mask and a second mask disposed on the substrate mounting portion of each of the first and second jig bodies.

In the substrate supporting apparatus, the jig main body fastening part may include a male fastening protrusion and a female fastening recess which are disposed to correspond to each other on opposite surfaces of the one surface of the first jig main body and the second jig main body and engage with each other. .

In the substrate supporting apparatus, the first jig main body and the second jig main body may be the same. In addition, the jig main body fastening portion: parallel to the jig hole, respectively formed at one end of the first jig main body and the second jig main body to enable a rotational movement between the first jig main body and the second jig main body A fastening hinge portion and a fastening protrusion and a fastening protrusion groove formed in the other ends of the first jig body and the second jig body, respectively, may be provided in parallel with the jig hole.

In the substrate supporting apparatus, the jig includes: an inner surface of the jig hole and an opposite surface of the first jig body and the second jig body, and the jig supporting shaft passing through the jig hole, the first jig engaged with each other. A jig guide and a jig guide guide groove for guiding the jig main body and the second jig main body in the longitudinal direction of the jig support shaft may be provided, respectively, and the first and second masks may have openings that are fully open.

Wherein said at least one of said first and second masks comprises: a mask frame; A mask line disposed within the mask frame and defining an opening; One or more mask support frames connecting the mask line and the mask frame may be provided, and the mask support frame may further include an interference prevention tool formed in an area intersecting the opening.

According to another aspect of the present invention, a jig penetrated by a first jig main body and a second jig main body having a substrate mounting portion on each surface thereof, and one surface of the first jig main body and the second jig main body facing each other. A jig main body having a hole and a jig main body fastening portion for fastening the first jig main body and the second jig main body; A jig may be provided that includes a mask portion having a first mask and a second mask disposed on the substrate seating portions of the first and second jig bodies, respectively.

Hereinafter, a substrate supporting apparatus and a jig according to the present invention will be described with reference to the drawings.

1A and 1B show side and front schematic views showing a state in which the substrate support apparatus 10 according to the present invention is mounted in a sputtering deposition vacuum chamber 1 having sputter guns 2, 3. According to the present invention, a plurality of jig support shafts provided with a plurality of jigs, which are arranged in a fixing frame (see FIG. 1C), are placed in parallel, and substrates are disposed on both sides of the jig, respectively. Thus, the substrates disposed on both sides of the jig are sputter deposited by the first sputter gun 2 and the second stuffer gun 3 disposed in the sputtering deposition container. Although not shown here, various configurations are possible, such as an apparatus for rotating the substrate support apparatus 10 during the sputter deposition process in conjunction with the substrate support apparatus 10 in the sputter deposition deposition vacuum chamber 1. Do.

1C is a perspective view of a substrate support apparatus 10 according to an embodiment of the present invention. The substrate supporting apparatus 10 according to the embodiment of the present invention includes a plurality of jigs 100, one or more jig supporting shafts 200, a fixing frame 300 on which the jig supporting shafts 200 are mounted, and a fixing frame 300. It is provided with a support frame support 400 for supporting. A plurality of jigs 100 are disposed on the jig support shaft 200, and both ends of the plurality of jig support shafts 200 are stacked in a jig support shaft moving groove 310 formed in the fixing frame 300. Entry of the jig support shaft 200 into the jig support shaft moving groove 310 is made through the jig support shaft entry groove 320.

FIG. 2A shows a schematic perspective view of one jig 100 of a plurality of jigs according to one embodiment of the invention, and FIG. 2B shows a schematic cross section taken along line I-I of FIG. 2A. 2c shows a schematic exploded perspective view of the jig of FIG. 2a. As shown in FIG. 2A, the jig 100 includes a jig main body 110 and a mask 120. The jig holes 111 are provided at both side surfaces of the jig main body 110. The jig holes 111 formed on both side surfaces of the jig main body 110 are arranged on the same line, and the jig supporting shafts to be described later are formed to penetrate the jig main body 110. The substrate seating part 112 is provided on both surfaces of the jig main body part 110. For example, each substrate 11, such as a mobile communication terminal, may be seated on the substrate seating part 112, and stably positioned on the jig main body part 110 by the mask 120. Here, although not shown in detail, the mask and the jig body portion may be combined, but may have a magnetic coupling structure using magnetic force, and may be configured in a fitting type to be fitted with protrusions and receiving portions, respectively. Do.

On the other hand, the mask disposed on the jig main body portion has an opening having a predetermined shape, thereby selectively selecting a region to be deposited on the substrate. That is, when the opening of the mask has a structure that is entirely open so as to include the entire area except for the area engaging with the jig main body portion of the mask, the substrate supported on the jig main body portion is not limited to the deposition area, and the entire area of the substrate. 2A to 2C, but when the opening of the mask 120 is an opening 121 having a constant shape, the deposition region A of the substrate 11 also has the shape (arrow) of the opening 121. Is limited to. Therefore, it is also possible to selectively form a thin film layer such as an electromagnetic shielding layer formed in the case of the mobile communication terminal by appropriately selecting the shape and position of the opening of the mask. 2A to 2C, the mask having the opening is shown as being integrally formed, but according to the design specification of the mask for accommodating the mask function, a portion for jointly supporting the substrate on the jig main body portion and a portion where the opening is formed are shown. Various modifications are possible, such as may be made separately.

2d is a schematic perspective view illustrating a state in which a plurality of jigs 100 are mounted on the jig support shaft 200 according to an embodiment of the present invention. The jig support shaft 200 is disposed through the jig holes 111 formed on both side surfaces of the jig main body 110 of the jig 100, so that a plurality of jig 100 is mounted on one jig support shaft 200. To be deployed.

Meanwhile, a jig stopper may be further provided on the jig support shaft according to the present invention to prevent unwanted movement of the jig. FIG. 2E illustrates an example of the jig stopper. In FIG. 2E, two jig stoppers 210a are provided. A plurality of jig stoppers 210a are disposed between the two jig stoppers 210a and a plurality of jig (not shown) are disposed on the jig support shaft 200a. A plurality of jig stopper mounting holes 201a are provided on the jig support shaft 200a. Each jig stopper 210a is arranged in a fitting manner to the jig stopper mounting hole 201a formed on the jig support shaft 200a, thereby restraining the jig disposed on the jig support shaft 200a. The jig stopper 210a and the jig stopper mounting hole 201a are loose so that their size must be appropriately selected so that their combination is not released at an unwanted moment. Here, the jig stopper mounting hole 201a is formed to penetrate the horizontal plane of the jig support shaft 200a, but is not limited thereto, and may be made to be perpendicular to the horizontal plane.

2F-2H show another variant of the jig stopper. The jig stopper 210b includes a jig stopper contact portion 211b and a jig stopper connection portion 212b, and a jig stopper movement line 201b on which the jig stopper 210b is mounted is provided on the jig support shaft 200b. The jig stopper movement line 201b is formed on one surface of the jig support shaft 200b such that the jig stopper 210b is movable along it. The jig stopper connection portion 212b of the jig stopper 201b is disposed inside the support stopper movement line 201b, and jig stopper contact portions 211b are respectively connected to both ends of the jig stopper connection portion 212b, which are integrally formed. It is preferable to be. The jig stopper connection portion 212b of the jig stopper 210b disposed on the jig stopper movement line 201b is subjected to a constant preload so that the jig stopper connection portion 212b comes into contact with the inner surface of the jig stopper movement line 201b. As such, by being supported by the friction force generated between the jig stopper movement line 201b and the jig stopper 210b, unwanted movement of the jig is constrained. When the operator wants to move the jig stopper 210b, the jig stopper contact portion 211b of the symmetrically arranged jig stopper contact portion 211b is forced to approach each other so that the jig stopper connection portion 212b of the jig stopper movement line 201b is moved. By being spaced apart from the surface, the friction force between the jig stopper connection portion 212b and the jig stopper movement line 201b surface is reduced or eliminated, so that the jig stopper 210b can move smoothly along the jig stopper movement line 201b. When the operator removes the force applied to the jig stopper contact portion 211b, the respective parts of the jig stopper 210b are repositioned by the restoring force of the jig stopper 210b, so that the jig stopper connection portion of the jig stopper 210b is positioned. 212b comes back into contact with the inner surface of the jig stopper movement line 201b.

On the other hand, the substrate support apparatus according to an embodiment of the present invention includes a fixing frame disposed to face each other, and one or more fixing frame supports for supporting the fixing frame, as shown in Figure 1c and 1d, two fixing frame ( 300 is disposed to face each other, and between them is fixed frame support 400, each end is mounted to each fixed frame. The fixing frame 300 and the fixing frame support 400 may be integrally formed by welding or the like, or may be connected by a separate fastening element such as a bolt as a separate component. Can be taken. In this embodiment, SUS has been applied as a constituent material of the fixing frame 300 and the fixing frame support 400, but the present invention is not limited thereto, and various materials may be used in a range suitable for an environment for substrate coating.

The fixing frame 300 includes a jig supporting shaft moving groove 310 and a jig supporting shaft moving groove 320. The jig support shaft moving groove 310 is formed along at least a portion on the circumference thereof on one surface of the fixing frame facing the other fixing frame. The jig support shaft entry and exit groove 320 is formed on the outer circumferential side of the fixing frame 300, the jig support shaft entry and exit groove 320 is the outer circumferential side of each fixing frame 300 to allow entry and exit of the jig support shaft 200 It is formed to correspond to each other in the phase. In FIG. 1D, three jig support shaft moving grooves 310 are formed on one surface of the fixing frame 300, and each of the jig support shaft moving grooves 310 is disposed in an equally divided form, which is not limited thereto. Do. That is, one jig support shaft moving groove which completely connects the circumference of the fixing frame may be formed on one surface of the fixing frame, or may be arranged in plural numbers other than three.

On the other hand, Figure 3 is a schematic partial cross-sectional view of the portion taken along the line III-III of Figure 1c, the jig support shaft moving groove 310 of the fixing frame 300 having a cross-section "c" shaped It is formed inside. Both ends of the jig support shaft 200 introduced through the jig support shaft entry and exit groove 320 (refer to FIG. 1C) are disposed on each jig support shaft moving groove 310 such that the jig support shaft 200 is fixed to the fixing frame 300. Deviation from) is prevented.

In some cases, as shown in FIG. 3, the inner surface of the jig support shaft moving groove 310 of the fixing frame 300 may further include a jig support shaft shock absorbing layer 330. The jig support shaft impact mitigating layer 330 reduces the gap between the end of the jig support shaft 200 disposed in the jig support shaft moving groove 310 and the inner surface of the jig support shaft moving groove 310, thereby reducing the jig support shaft. An end portion of the 200 may remove or mitigate noise and dust generation due to the collision with the jig support shaft moving groove 310. The jig support shaft shock absorbing layer 330 may be continuously or intermittently formed on the inner surface of the jig support shaft moving groove 310. In addition, although the jig support shaft impact mitigating layer 330 of FIG. 3 is formed of silicon, the jig support shaft impact relief layer 330 is not limited thereto. Various materials can be selected within a range that does not affect.

On the other hand, in the coating process of the board | substrate attached to the jig on a jig support shaft, the board | substrate support apparatus of this invention can make a rotary motion. In this case, the coating of the substrate may not be made uniformly due to the movement of the jig support shaft. The present invention further includes a means for fixing the position of the jig support shaft in order to prevent non-uniform coating caused by the movement of the substrate. can do.

FIG. 4A shows a partial perspective view of another example of the substrate support apparatus of the present invention for fixing the jig support shaft, and FIG. 4B is a schematic partial exploded cross-sectional view taken along the line IV-IV of FIG. 4A. Here, one jig support shaft 200c is illustrated, but this is not limited thereto. A fixing frame through hole 340c is formed on the outer side of the fixing frame 300c, that is, the side opposite to the side where the jig support shaft moving groove (not shown in FIG. 1C) of the fixing frame 300c is formed, and is provided in the fixing frame through hole 340c. Adjacent fastening member seating surfaces 341c are formed. A fastening member accommodating portion 220c is provided at an end of the jig supporting shaft 200c, and the fastening member 350c such as a bolt passes through the fixing frame through hole 340c through the bush 351c to move the jig supporting shaft moving groove 310c. ) Is fastened to the fastening member accommodating portion 220c of the jig support shaft 200c. Therefore, the jig supporting shaft 200c is firmly positioned in the jig supporting shaft moving groove 310c by the combination of the fastening member 320c and the fastening member accommodating portion 220c, and the jig supporting shaft 200c. A smooth and uniform deposition can be achieved on a substrate supported by a plurality of jigs (not shown) disposed thereon. Meanwhile, in the example shown in FIGS. 4A and 4B, a fastening member 350c such as a bolt is used as a means for fixing the position of the jig support shaft, and the fastening position is a jig support shaft entry / exit groove in the jig support shaft moving groove 310c. Although made with respect to the jig support shaft 200c disposed closest to 320c, the present invention is not limited thereto. That is, the fastening member and the fastening member accommodating portion may have a structure in which each outer circumferential surface and the inner circumferential surface are forcibly fitted to each other by a simple fastening member which is not threaded. Various modifications are possible depending on design specifications, such as may be taken.

As another example for fixing the position of the jig support shaft relative to the fixing frame, the substrate support apparatus of the present invention may further include a jig support shaft locking device. FIG. 5A is a schematic exploded perspective view of the jig support shaft locking device 500. The jig support shaft locking device 500 includes a locking device body 510, a locking device hinge 520, and a locking device. And a rotation part 530 and a locking device fixing part 540. The lock body 510 is formed in a “c” shape and surrounds at least a part of the jig support shaft 200, that is, three surfaces. The locking device rotating part 530 is rotatably mounted to the locking device main body 510 through the locking device hinge part 520. That is, one end of the locking device main body 510 and one end of the locking device rotating part 530 are provided with a first main body protruding end 511 and a first rotating part accommodating part 531 so as to mesh with each other. The main projecting end 511 and the first rotating part accommodating part 531 are provided with respective projecting end through holes 512 and accommodating part through holes 532 which coincide with each other when disposed to engage with each other. The branch portion 520 is disposed through these protruding end through holes 512 and the receiving part through holes 532. In addition, second ends of the locking device main body 510 and the locking device rotating part 530 are also formed with a second main body protruding end 513 and a second rotating part accommodating part 533 which are similar to each one end thereof. Each of the locking protrusion 541 and the locking protrusion receiving portion 542 are provided. FIG. 5B is a schematic partial perspective view of a state in which the jig support shaft locking device 500 is mounted on the fixing frame 300, and FIG. 5C is a partial cross-sectional view taken along the line VV of FIG. 5B. As the locking protrusion 541 of the locking device body 510 and the locking protrusion accommodating portion 542 of the locking device rotation part 530 are engaged with each other, the jig support shaft locking device 500 is provided on the outer circumferential surface of the fixing frame 300. Wraps.

On the other hand, the locking device fixing portion may take a variety of structures in addition to the protrusion structure. Fig. 6A shows a schematic perspective view of a locking device fixing part having another form, and Figs. 6B and 6C show an operating state of the locking device fixing indicated by the symbol “B” of Fig. 6A. . The locking device fixing part 540a includes a locking rotary latch 541a and a locking rotary latch receiving groove 542a. The lock rotation latch 541a is rotatably mounted about one end to a lock device fixing part mounting groove 543a formed on the other end of the lock body 510a and the other end of the lock device rotator 530a. The locking device fixing portion mounting groove 543a is provided with a lock rotating latch receiving groove 542a. When the lock rotation latch 541a is rotated about one end to be seated in the lock device fixing groove 543a, the lock rotation latch 541a is engaged with and fixed to the lock rotation latch receiving groove 542a, thereby supporting the jig. The shaft locking device 500a is disposed to surround the outer circumferential surface of the fixing frame 300 such that the jig supporting shaft is fixed without moving along the jig supporting shaft moving groove of the fixing frame 300.

As another example of the locking device fixing portion, as shown in FIG. 6D, the locking device fixing portion 540b includes a locking rod 541b and a locking through hole 542b for receiving the locking rod 541b. You may. The lock through hole 542b is formed at each other end of the lock body 510b and the lock rotator 530b, and the lock body 510b and the lock rotator 530b are arranged to engage with each other. The through hole 542b is arranged on the same line. The lock rod 542b and the lock rod 541b mounted to the lock penetrating hole 542b may be screwed and screwed together, but may have a structure that is forcibly fitted. By such a configuration, even when the substrate supporting apparatus according to the present invention is rotated, it is possible to prevent the lock rod 541b from being separated from the lock through hole 542b at an undesired moment.

Meanwhile, the jig support shaft locking device may further include a locking device inner shaft to smoothly and firmly engage the fixing frame. FIG. 7A shows a schematic partial perspective view of the jig support shaft locking device having the locking device inner shaft mounted on the fixing frame, and FIG. 7B shows a cross section taken along the line VI-VI of FIG. 7A. Like the other examples, the jig support shaft locking device 500c is rotatably mounted about one end of the locking device body 510c through the locking device body 510c and the locking device hinge 520c. A locking device rotating part 530c. The locking device inner shaft 550c is further provided on one surface of the locking device main body 510c facing the jig supporting shaft moving groove 210c. When the locking device 500c is mounted to the fixing frame 300c, the locking device inner shaft 550c is inserted into the jig support shaft moving groove 210c. Although the locking device inner shaft 550c may be formed integrally with the locking device body 510c, in the example illustrated in FIGS. 7A and 7B, the locking device inner shaft 550c may include an inner shaft center portion 551c and an inner shaft. The surface softening part 552c is provided. The inner shaft center portion 551c is a fastening element such as a bolt mounted to the inner side of the lock body portion 510c, but is not limited thereto. On the surface of the inner shaft center portion 551c, an inner shaft surface relaxation portion 552c is provided, and the inner shaft surface relaxation portion 552c includes a jig support shaft 200c and an inner shaft center portion (c) including a shock absorbing material such as Teflon. It is possible to further reduce or eliminate the risk of noise and dust generated by direct collision of 551c). The jig support shaft can be more stably supported by the inner shaft of the locking device.

Meanwhile, the locking device rotating part and the fixing frame may further include a means for fixing the position. That is, as shown in Figure 7a and 7b, the inner surface of the locking device rotating portion 530c is provided with a rotating projection (531c), the opposite of the surface on which the jig support shaft moving groove 310c of the fixing frame 300c is formed The surface is provided with one or more rotating protrusion receiving holes 360c for receiving the rotating protrusion 531c. In FIG. 7A, the rotation protrusion receiving hole 360c is formed in the vicinity of the jig support shaft entry / exit groove 320c, but is not limited thereto. In addition, the rotatable protrusion and the rotatable protrusion receiving hole may be respectively formed in the fixing frame and the locking device.

When the locking device rotating part 530c is engaged with the locking device main body part 510c, the rotating part protrusion 531c on the side of the locking device rotating part 530c may include the rotating part protrusion receiving hole 360c formed on one surface of the fixing frame 300c. To engage, the rotation projection 531c has a larger dimension than the rotation projection projection hole (360c), to prevent the engagement of the rotation projection (531c) and the rotation projection projection hole (360c) is easily separated.

Meanwhile, in the above embodiments, the jig is described with respect to the integrated jig, but the present invention is not limited thereto.

8A is a schematic exploded perspective view of a jig according to another embodiment of the present invention, and FIGS. 8B and 8C are schematic views of a front view and a coupling state of a part of a jig according to another embodiment of the present invention. A cross section is shown.

The jig 100a includes a jig main body part 110a and a mask part 120a. The jig main body part 110a includes a first jig main body 110a-1, a second jig main body 110a-2, and a jig hole. 111a and the jig body fastening portion 130a.

On one surface of each of the first jig main body 110a-1 and the second jig main body 110-2a, a substrate seating portion 112a for seating the substrate 11 is disposed, and the first jig main body 110a-1. And the other surface of the second jig main body (110a-2), that is, the opposite surface of the one surface on which the substrate mounting portion is arranged to face each other, specifically, they are arranged to abut each other jig hole 111a is formed. In addition, the other surface of the first jig main body 110a-1 and the second jig main body 110a-2 is provided with a jig main body fastening portion 130a, so that the first jig main body 110a-1 and the second jig main body ( Fasten 110a-2).

 8A to 8C, the jig body fastening unit 130a is disposed to correspond to each other on one surface opposite to the first surface of the first jig body 110a-1 and the second jig body 110a-2, that is, to engage with each other. The male fastening protrusion 135a and the female fastening recess 133a are included. In order to prevent a gap between the first and second jig bodies 110a-1 and 110a-2 due to the fastening between the male fastening protrusion 135a and the female fastening recess 133a, the jig body fastening part ( 130a further includes a jig main body fastening seating recess 131a formed on the other surfaces of the first and second jig main bodies 110a-1 and 110a-2, and includes a male fastening protrusion 135a and a female fastening recess 133a. ) May be disposed on one surface of the fastening portion mounting groove (131a). However, the present invention is not limited to such a configuration.

As shown in FIG. 8B, the male fastening protrusion 135a and the female fastening recess 133a according to the present exemplary embodiment have respective other surfaces of the first and second jig bodies 110a-1 and 110a-2. On the one side of the fastening portion seating groove 131a is taken a structure arranged to cross each other to correspond to each other in an "X" shape (dotted line display), the male fastening protrusion 135a is disposed on the line Ⅶ-Ⅶ, The female fastening recess 133a is disposed on the VIII-VIII. Accordingly, the female fastening recess 133a has a space for accommodating the male fastening protrusion 135a, so that the first and second jig bodies 110a-1 and 110a-2 are each jig support shaft 200 (FIG. 1C). The jig support shaft is disposed in the jig hole 111a formed by the first and second jig main bodies 110a-1 and 110a-2 contacting each other, and the male fastening protrusion 135a and the female fastening are disposed. The recess 133a is engaged with each other so that the first and second jig bodies are coupled to each other. It is preferable that the outer diameter of the male fastening protrusion 135a and the inner diameter of the female fastening recess 133a are set so that they can be loosened so that they cannot be easily separated when they are engaged.

In the above embodiment, the male fastening protrusion 135a and the female fastening recess 133a are each shown to form an “X” shaped arrangement, respectively, but the configuration of the male fastening protrusion and the female fastening recess of the present invention is not limited thereto. Instead, the first and second jig bodies can be firmly fastened and various selections of the number and position are possible regardless of whether the first and second jig bodies are the same in a range arranged to correspond to each other.

In addition, the first jig main body 110a-1 and the second jig main body 110a-2 shown in FIGS. 8A to 8C may have the same structure. When the first jig main body 110a-1 and the second jig main body 110a-2 have the same structure, the first jig main body 110a-1 and the second jig main body 110a-2 are separated. Since the mold mold is not required and the mold can be manufactured using the same mold mold, the manufacturing cost for manufacturing the first jig main body 110a-1 and the second jig main body 110a-2 can be significantly reduced. However, the present invention is not limited thereto, such that the first jig body and the second jig body may have different shapes from each other.

9A and 9B show schematic exploded and combined perspective views of a jig body part as a specific embodiment of the jig according to the embodiment of the present invention, in which case each article included in the jig body part 100b is shown. Although the first jig main body 110b-1 and the second jig main body 110b-2 are illustrated as being the same, the present invention is not limited thereto.

Each substrate seating portion 112b is provided on one surface of the first and second jig main body portions 110b-1 and 110b-2, and the first and second masks 120b of the mask portion are respectively the first and second jig. It is arranged outside the main body.

Meanwhile, respective substrates 11b are disposed between the first and second jig body parts 110b-1 and 110b-2 and the first and second masks 120b, where the mobile communication terminal is a substrate 11b. Although the cover of is used, this is not limited to this as an example of the present invention. The deposition area Ab on one surface of the substrate 11b facing the first and second masks 120b is defined by the openings 121b formed in the first and second masks 120b.

In addition, a mask frame part 122b is provided outside the first and second masks 120b, and the first and second jig body parts 110b-1 and 110b-2 are disposed inside the mask frame part 122b. A mask accommodating part 124b for accommodating is provided. The outer portions of the first and second jig body portions 110b-1 and 110b-2 engage with the mask receiving portions 124b of the first and second masks 120b, the combination thereof being a substrate disposed therebetween. It is preferable to be coupled by an interference fit so as not to loosely separate so that the movement of (11b) can be excluded.

The opening 121b is provided in the first and second masks 120b. The opening 121b is defined by the mask line 125b disposed in the mask frame portion 122b of the first and second masks 120b. In order to support the mask line 125b and to prevent deformation of the first and second masks 120b that may occur during the deposition process on the substrate, the first and second masks are formed on one surface of the first and second masks 120b. A mask support frame 126b connected to the mask line 125b may be further provided on the surface opposite to the surface facing the jig main body. In addition, in some cases, in order to prevent the deposition made through the opening 121b defined by the mask line 125b from being interfered by the mask support frame 126b and not being smoothly deposited on one surface of the substrate, the mask An interference prevention tool 127b may be further provided at a portion crossing the opening 121b of the support frame 126b. Although not shown, the first and second masks 120b may be easily engaged with the first and second jig body parts 110b-1 and 110b-2 and the first and second masks 120b. By forming protrusions (not shown) on the outer surface of the mask frame portion 122b of the < RTI ID = 0.0 >), the operator first and second jig body portions 110b-1, 110b-2 and the first and second mask 120b. In this case, the first and second masks 120b may be prevented from slipping.

The other surfaces of the first and second jig body parts 110b-1 and 110b-2 are provided to correspond to each other, and the male fastening protrusion 135b and the female fastening recess 133b that are engaged with each other are provided. In order to prevent a gap between the first and second jig bodies 110b-1 and 110b-2 due to the fastening between the male fastening protrusion 135b and the female fastening recess 133b, the jig main body fastening portion 130b ) Is further provided with a jig main body fastening portion mounting groove 131b formed on the other surface of the first and second jig main body (110b-1, 110b-2), the male fastening protrusion 135b and the female fastening recess 133b. Is disposed on one surface of the fastening portion mounting groove (131b). The combined state of these components is shown in FIG. 9B.

On one surface of the first and second jig body parts 110b-1 and 110b-2 facing each other, a jig body fastening part 130b is provided, and the first and second jig main body 130b is provided by the jig body fastening part 130b. The parts 110b-1 and 110b-2 are coupled to each other by arranging jig support shafts (not shown) in the jig holes 111b formed by the first and second jig main body parts 110b-1 and 110b-2 (FIG. 9b).

On the other hand, Fig. 9c shows another modification of the above embodiments. That is, the jig 100c is one surface of the first and second jig main body parts 110c-1 and 110c-2, and is formed by fastening between the first and second jig main body parts through the jig main body fastening part 130c. A jig guide 114c extending in a direction penetrating the jig hole 111c may be further provided on the inner surface of the jig hole 111c. In addition, a jig guide guide groove 220c that is engaged with the jig guide 114c formed on the inner surface of the jig hole 111c is further provided in the jig support shaft 200c corresponding to and passing through the jig hole 111c. May be Therefore, when the fastening of the 1st and 2nd jig main body parts 110c-1 and 110c-2 through the jig main body fastening part 130c is carried out with the jig support shaft 200c interposed, the inside of the jig hole 111c may be carried out. By the engagement of the jig guide 114c and the jig guide guide groove 220c of the jig support shaft 200c formed on the side surface, the jig can be smoothly moved on the jig support shaft, and a plurality of jig is mounted on the jig support shaft. If so, the mounting process can be made easier.

In the above embodiments, the jig body fastening part 130c has a configuration including a male fastening protrusion and a female fastening recess, but the jig body fastening part according to the present invention may be implemented in various shapes. 10A and 10B show schematic exploded and combined perspective views of a jig having a variant of the jig body fastening portion, and FIGS. 10C and 10D show schematic cross-sectional views thereof.

As shown in FIGS. 10A and 10B, the jig main body fastening part 130d includes a fastening hinge part 131d and a fastening engagement part 137d. The fastening hinge portion 131d enables a relative rotational movement between the first and second jig bodies about the line Ⅸ-Ⅸ between the first and second jig bodies 110d-1 and 110d-2. 131d has a fastening hinge receiving portion 132d, a fastening hinge protrusion 133d accommodated in the fastening hinge receiving portion 132d, and a fastening hinge receiving portion 132d and a fastening hinge protrusion 133d engaged with each other. A fastening hinge shaft 134d as a central axis for rotating the fastening hole 135d forming a single through hole and the fastening hinge protrusion 133d and the fastening hinge receiving portion 132d through the fastening hole 135d. ) May be provided. Here, the fastening hinge portion 131d is a fastening hinge protrusion 133d at one end of the second jig body 110d-2, and the fastening hinge receiving portion 132d is at one end of the first jig body 110d-1. Although the structure is disposed in the form of a recess corresponding to the fastening hinge protrusion 133d to the outside, both the fastening hinge accommodation portion and the fastening hinge protrusion may have a structure that protrudes outward from one end of the first and second jig bodies. As such, the fastening hinge of the present invention is not limited thereto, and various modifications are possible.

10A to 10D, the fastening engagement portion 137d includes a fastening protrusion 138d and a fastening protrusion groove 139d. The fastening protrusion 138d is attached to the first jig main body 110d-1, and the rotation of the fastening hinge part 131d on one surface of the first jig main body 110d-1 toward the second jig main body 110d-2. It is disposed at the other end portion in the radial direction from the center, the fastening projection groove 136d is a position corresponding to the fastening projection 138d on one surface facing the first jig main body 110d-1 of the second jig main body 110d-2. Is formed. The configuration of the fastening protrusion 138d and the fastening protrusion groove 139d can be separated / joined by an external force around the rotation axis of the fastening hinge portion, but can be easily removed in an undesired situation such as when the jig is mounted on the jig support shaft to rotate. It is preferable to be configured to have a bonding force that does not separate. In the present embodiment, the fastening protrusion and the fastening protrusion groove have a structure of a groove for accommodating the simple protrusion and the protrusion which are integral with the first and / or second jig main body, but have a separate configuration from the first and second jig main body. First and second jig bodies configured to be relatively rotatable about a fastening hinge, such as a fastening protrusion / spring and a fastening protrusion groove structure for enabling smooth operation in the fastening process and for securing a fastening force. Various modifications are possible in the range to prevent relative movement of the liver.

The above embodiments are examples for describing the present invention, but the present invention is not limited thereto. That is, in the above embodiments, the jig has been described as being able to accommodate the substrate on both sides, but may have a structure disposed only on one surface, and when the jig is mounted on the jig support shaft through the jig hole, An impact mitigating layer may be further provided to alleviate the possibility of dust generation due to abutment impact of the inner surface of the jig hole and the jig support shaft. In addition, although not specifically shown in the present invention, when the substrate support apparatus according to the present invention is disposed in the vacuum chamber of the deposition apparatus is further provided with engagement means for rotating by the substrate support apparatus rotation means on the deposition apparatus side Various modifications are possible in a range including a plurality of jig support shafts on which a plurality of jigs capable of accommodating a substrate may be mounted, and a fixing frame having jig support shaft entry and exit grooves and jig support shaft movement grooves. .

The substrate supporting apparatus according to the present invention having the configuration as described above has the following effects.

First, the substrate supporting apparatus according to the present invention can maximize the ease of operation by taking a structure for collectively mounting a plurality of jig that can accommodate the substrate through the jig hole.

Second, the substrate supporting apparatus according to the present invention can maximize the substrate processing production yield by adopting a structure capable of simultaneously mounting a plurality of jig support shafts on which a plurality of jigs can be mounted.

Third, the jig support shaft can take a structure that can move along the jig support shaft moving groove of the fixing frame, thereby processing substrates of various sizes.

Fourth, the jig adopts a structure including a jig main body having a first and a second jig main body and a jig main body fastening portion having a structure that can be separated from each other, thereby making it easier to attach or detach a plurality of jig to the jig support shaft. By achieving quickly, manufacturing costs can be significantly reduced.

Although the present invention has been described with reference to one embodiment shown in the drawings, this is merely exemplary, and it will be understood by those skilled in the art that various modifications and equivalent other embodiments are possible. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

Claims (24)

A plurality of jigs having a substrate mounting portion on which the substrate is mounted; A plurality of jig support shafts for supporting the plurality of jigs through a jig hole formed in the jig; A jig support shaft moving groove arranged to face each other and formed along at least a portion on the circumference of an opposing face and a jig support shaft moving groove for entering and exiting the jig support shaft into the jig support shaft moving groove at the same position on the outer circumference; Fixed frame; And And one or more fixing frame holders, each end of which is mounted to the respective fixing frame, to support the fixing frame. The method of claim 1, The substrate support unit, characterized in that provided on both sides of the jig. The method of claim 1, And at least one jig stopper for limiting movement of the jig on the jig support shaft. The method of claim 3, wherein And a plurality of jig stopper mounting holes for accommodating the jig stopper on the jig support shaft. The method of claim 3, wherein A jig stopper moving line is provided on one surface of the jig support shaft, The jig stopper is: A jig stopper connection part disposed in the jig stopper moving line, and a jig stopper contact part disposed at both ends of the jig stopper connection part, And a jig stopper connection part is in contact with an inner surface of the jig stopper movement line when a preload is applied to the jig stopper connection part and no external force is applied. The method of claim 1, And a jig support shaft impact mitigating layer is further provided on an inner surface of the jig support shaft moving groove and parallel to the longitudinal direction of the jig support shaft. The method of claim 1, At least one fixing frame through-hole formed on the side opposite to the side on which the jig supporting shaft moving groove is formed of the fixing frame; A fastening member disposed through the fixing frame through hole, And a fastening member engaging portion formed at one end of the jig support shaft to accommodate the fastening member. The method of claim 7, wherein And said fastening member and said fastening member engaging portion are screwed together. The method of claim 1, And a jig support shaft lock device detachable from an outer side of the fixing frame to limit movement of the jig support shaft. The method of claim 9, The jig support shaft locking device is: A locking device body part surrounding a part of an outer surface of the jig support shaft; A locking device hinge part mounted to one end of the locking device body part; A locking device rotating part rotatably mounted to the locking device main body so that one end of the locking device hinge part is rotatable; And a locking device fixing portion for fixing the other end of the locking device rotation part to the locking device body portion. The method of claim 10, The locking device fixing portion: A lock rotation latch that is rotatably mounted to one end of the lock unit body and the lock unit rotation unit; And a locking rotation latch receiving groove formed at one end of the other of the locking device body portion and the locking device rotation portion to accommodate the locking rotation latch. The method of claim 10, The locking device fixing portion: A lock through hole formed at the other end of the locking device body part and the other end of the locking device rotation part engaged with the locking device body part, and penetrating when the other ends of the locking device body part and the locking device rotation part are engaged; And a lock rod detachably disposed in the lock through hole. The method of claim 10, The jig support shaft locking device is: And a locking device inner shaft mounted on one surface of the locking device body portion facing the jig supporting shaft so as to be inserted into the jig supporting shaft moving groove. The method of claim 13, The lock inner shaft is: An inner shaft center mounted vertically from the lock body; And an inner shaft surface relief portion that is formed outside the central portion of the inner shaft to mitigate a collision with the jig support shaft. The method of claim 9, Locking protrusions are formed on the inner surface of the jig support shaft locking device, At least one locking protrusion receiving groove is provided on one surface of the fixing frame facing the locking protrusion. The method of claim 1, The jig is: A first jig main body and a second jig main body including the substrate seating part on each one surface thereof, a jig hole formed by arranging opposite sides of the one surface of the first jig main body and the second jig main body to face each other; A jig main body part including a jig main body fastening part for fastening the first jig main body and the second jig main body; And And a mask portion including a first mask and a second mask disposed on an upper portion of the substrate seating portion of each of the first jig body and the second jig body. The method of claim 16, The jig body fastening portion: And a male fastening protrusion and a female fastening recess which are disposed to correspond to each other on opposite surfaces of the one surface of the first jig body and the second jig body and engage with each other. The method of claim 17, The said 1st jig main body and the 2nd jig main body are the same, The board | substrate support apparatus characterized by the above-mentioned. The method of claim 16, The jig body fastening portion: A fastening hinge portion formed at one end of each of the first and second jig bodies in parallel with the jig hole to enable rotational movement between the first and second jig bodies; And a fastening protrusion and a fastening protrusion groove formed at the other end of the first jig body and the second jig body, respectively, in parallel with the jig hole. The method of claim 16, The jig is: The jig supporting body of the first jig body and the second jig body are engaged with each other on opposite surfaces of the first jig body and the second jig main body to the inner side of the jig hole, and the jig support shaft penetrating the jig hole. Substrate support device, characterized in that provided with a jig guide and a jig guide guide groove for guiding in the longitudinal direction of the axis, respectively. The method of claim 16, And the first and second masks have openings that are fully open. The method of claim 21, At least one of the first and second masks is: Mask frame; A mask line disposed within the mask frame and defining the opening; And at least one mask support frame connecting the mask line and the mask frame. The method of claim 22, The mask support frame further comprises an interference prevention tool formed in an area intersecting the opening. A first jig main body and a second jig main body having a substrate mounting portion on each surface thereof, a jig hole formed through one surface of the first jig main body and the second jig main body facing each other, and the first jig main body And a jig main body part including a jig main body fastening part for fastening the second jig main body. And a mask unit having a first mask and a second mask disposed on the substrate seating portions of the first and second jig bodies, respectively.

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