KR20060073367A - Apparatus for organic matter treatment of cleaning room - Google Patents

Apparatus for organic matter treatment of cleaning room Download PDF

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Publication number
KR20060073367A
KR20060073367A KR1020040112572A KR20040112572A KR20060073367A KR 20060073367 A KR20060073367 A KR 20060073367A KR 1020040112572 A KR1020040112572 A KR 1020040112572A KR 20040112572 A KR20040112572 A KR 20040112572A KR 20060073367 A KR20060073367 A KR 20060073367A
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South Korea
Prior art keywords
dirt container
water
mulbun
cleaning room
organic
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KR1020040112572A
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Korean (ko)
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공혁준
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엘지전자 주식회사
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Priority to KR1020040112572A priority Critical patent/KR20060073367A/en
Publication of KR20060073367A publication Critical patent/KR20060073367A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/46Removing components of defined structure
    • B01D53/68Halogens or halogen compounds
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/1603Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation by filtering
    • F24F3/161Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/50Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED];
    • H01L51/56Processes or apparatus specially adapted for the manufacture or treatment of such devices or of parts thereof
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/1603Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation by filtering
    • F24F2003/1621Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation by filtering using chemical filtering methods

Abstract

본 발명은 전계발광(EL) 표시소자를 제작하는 클리닝룸에서 유기물이 포집된 더트 컨테이너 내부에 물을 분사하여 상기 유기물을 물과 함께 더트 컨테이너 하부로 흘러 내리게 한 후, 이를 외부로 배출하도록 구성된 클리닝룸의 유기물 처리장치에 관한 것이다. The invention electroluminescence (EL) and then let down by organic matter spraying water inside the collected dirt container flows through the organic matter as dirt container bottom with water in the cleaning room of manufacturing a display device, configured to discharge it to the outside cleaning It relates to an organic material processing apparatus of the room.
본 발명의 클리닝룸의 유기물 처리장치는 더트 컨테이너의 내주연 상단에 설치된 물분사체와, 상기 물분사체에 연결되어 상기 더트 컨테이너 내부로 물을 공급하는 급수수단과, 상기 더트 컨테이너의 하부에 연결설치되어 물에 희석된 상기 유해 유기물을 배출하는 배수수단과, 상기 물분사체와 배수수단 사이에 설치되어 일정 크기 이상의 유해 유기물을 걸르는 걸름망을 더 포함하는 것을 특징으로 한다. Cleaning room organic processing apparatus of the present invention is provided connected to the lower portion of the water supply means, said dirt container for supplying water is connected to mulbun member and the mulbun member provided on the inner peripheral upper end of the dirt container to the interior of the dirt container drain for discharging the said harmful organic substances diluted in the water and means, provided between the transfer member and mulbun drainage means is characterized in that it further comprises flowing geolreummang something harmful organic matter above a certain size.

Description

클리닝룸의 유기물 처리장치{APPARATUS FOR ORGANIC MATTER TREATMENT OF CLEANING ROOM} Organic substance treatment device for cleaning room {APPARATUS FOR ORGANIC MATTER TREATMENT OF CLEANING ROOM}

도 1은 종래 클리닝룸의 유기물 처리장치의 분해 사시도이다. 1 is an exploded perspective view of the organic material processing apparatus of the prior art cleaning room.

도 2는 본 발명의 일실시예에 따른 클리닝룸의 유기물 처리장치에 있어서의 더트 컨테이너의 개략 사시도이다. Figure 2 is a schematic perspective view of the dirt container in the cleaning room organic material processing apparatus in accordance with one embodiment of the present invention.

도 3은 도 2에 도시된 더트 컨테이너에 있어서의 물분사체 및 급수수단의 분리 사시도이다. 3 is an exploded perspective view of mulbun member and the water supply means in the dirt container shown in Fig.

< 도면의 주요 부분에 대한 부호의 간단한 설명 > <Brief Description of the Related Art>

20 : 더트컨테이너 30 : 물분사체 20: 30 Dirt container: mulbun bodies

31 : 유체흐름관 32 : 노즐 31: Fluid flow pipe 32: nozzle

40 : 급수배관 42,52 : 러버 실링 40: 42,52 water pipe: Rubber seals

43 : 'T'자형 연결관 50 : 배출관 43: 'T' shaped connection pipe 50: exhaust pipe

53 : 배수배관 60 : 걸름망 53: drain pipe 60: geolreummang

본 발명은 유기물 처리장치에 관한 것으로, 특히 전계발광 표시소자를 제작하는 클리닝룸에서 유기물이 포집된 더트 컨테이너 내부에 물을 분사하여 상기 유기물을 물과 함께 더트 컨테이너 하부로 흘러 내리게 한 후, 이를 외부로 배출하도록 구성된 클리닝룸의 유기물 처리장치에 관한 것이다. After the present invention relates to an organic material processing apparatus, in particular to the electro-luminescence display device the water jet inside the organic matter trapped dirt container in the cleaning room for making let down flowing the organic with dirt container bottom with water, outside it It relates to a cleaning room organic processing apparatus configured to draw in the.

일반적으로 개인용 컴퓨터(Personal Computer)에 사용되는 일반적인 형태의 음극선관(CRT;Cathode Ray Tube)은 근래들어 현저하게 대중화되고 있다. In general, the general form of a cathode ray tube used for a personal computer (Personal Computer) (CRT; Cathode Ray Tube) has been remarkably popularized recently example. 또한, 개인용 컴퓨터를 위한 휴대용 단말기의 요구 역시 근래들어 증대되고 있다. In addition, the requirements of the mobile terminal for a personal computer is also increased in recent years example.

상기 휴대용 단말기의 사용을 위해서는 무겁고 넓은 공간을 요구하는 일반적인 형태의 CRT는 적합하지 않고, 대신에 큰 용량의 디스플레이를 할 수 있는 얇고 가벼운 평면평 디스플레이가 주목을 받고 있다. For the use of the portable terminal common form of CRT that requires a heavy, large space is not suitable, there is a thin and light flat-flat display capable of displaying a large capacity instead of the spotlight.

상기 평면평 디스플레이는 PDP(plasma display panel), LCD(liquid crystal display), VFD(vacuum fluorescent character display tube) 및 EL(electroluminescent) 디스플레이등의 많은 형태들을 포함하며, 각 특성에 따라 여러 가지로 개발되고 있다. The plane of flat display includes a number of forms such as PDP (plasma display panel), LCD (liquid crystal display), VFD (vacuum fluorescent character display tube) and EL (electroluminescent) displays, for each characteristic being developed in a number of have. 무엇보다도 최근에 EL 장치는 이동단말기인 휴대전화를 위해 그 개발이 활발히 이루어지고 있다. Above all, in recent years EL devices have been made that are active for the development of a mobile phone MS.

상기 EL장치는 투명전극 및 후면전극 사이에 유기발광층을 개재시켜 형성된다. The EL device is formed by interposing an organic light-emitting layer between the transparent electrode and the back electrode. 정공 및 전자는 양 전극들간에 전압을 인가하므로써, 유기발광층으로 주입된다. By a voltage is applied between the electrodes holes and electrons, it is injected into the organic light-emitting layer. 이후, 유기발광층의 형광물질은 정공 및 전자의 재결합시에 발생된 에너지에 의해 여기되고, 여기된 형광물질이 접지상태로 회귀할 때 방출된 빛이 이용된다. Then, the fluorescent substance of the organic light emitting layer is excited by energy generated at the time of holes and electrons recombine, light is emitted when the fluorescent material is here to return to the ground state is used.

위에서 언급된 이러한 EL장치의 투명을 위해서 인듐주석산화물과 같은 투명 전도성 박막이 유기발광층으로부터의 발광을 전달하기 위해 사용된다. The transparent conductive thin film such as indium tin oxide is used to pass the light emitted from the organic light-emitting layer to the transparent these EL devices mentioned above. EL장치의 유기발광층에서 수분에 의한 특성의 저하는 현저한데, 예를 들어 유기발광층이 공기중의 수분과 닿게될 때 화학적 변화가 발생하고, 디스플레이의 화질이 저하되며, 발광수명이 줄게 된다. Lowering of the characteristics due to the moisture in the organic light emitting layer of the EL device is markedly together, for example when the organic light-emitting layer into contact with water in the air and the chemical changes occur, and the image quality of the display is lowered, in reduced emission life.

도 1은 종래 클리닝룸의 유기물 처리장치의 분해 사시도도서, 클리닝룸 내부의 각종 유해 유기물이 포함된 공기는 본체(18)의 상부를 통해 유입된 후, 필터 백(12)을 거치면서 유해 유기물은 필터링되어 더트 컨테이너(8)에 수납되며, 유해 유기물이 필터링된 공기는 클리닝룸으로 재유입된다. Figure 1 after the conventional air containing the exploded perspective view of books, various harmful organic substances within the cleaning room in the cleaning room organic material processing apparatus of the inlet through the top of body 18, while passing through the filter bag 12 is hazardous organics is filtered and stored in the dirt container (8), the toxic organic matter is filtered air is introduced again into the cleaning room.

그리고, 유기물 처리 작업이 완료되면, 컨테이너 도어(17)를 열고 상기 더트 컨테이너(8)를 본체(18)로부터 빼낸 후, 상부의 커버(도시되지 않음)를 열고 내부의 유기물을 처리하고 있다. Then, when the organic matter treatment operation is complete, opening the container door 17. After removing the dirt container (8) from the main body 18, the opening of the top cover (not shown) and processes the internal organisms.

이때, 종래의 더트 컨테이너(8)는 내부에 상기 유해한 유기물을 정화시키기 위한 별도의 장치를 구비하고 있지 않으므로 작업자가 유기물을 처리하는 과정에서 상기 유기물에 그대로 노출되므로써 작업 환경이 크게 오염되는 것은 물론, 작업자에게도 악영향을 미치게 된다. At this time, it is conventional dirt container (8) is provided with a separate device for purifying the harmful organisms therein and the operator to process the work environment doemeurosseo exposed to the organic matter greatly contamination from handling the organic materials do not, of course, workers are also adversely affected.

따라서, 본 발명의 목적은 인체에 유해한 유기물을 물과 함께 희석시켜 이를 외부로 배출하므로써, 작업 환경을 개선할 수 있는 클리닝룸의 유기물 처리장치를 제공함에 있다. Accordingly, it is an object of the present invention to provide the organic substance treatment device for cleaning rooms for improving By diluted harmful organisms in the human body with a water discharge it to the outside environment.

상기의 목적을 달성하기 위하여 본 발명의 클리닝룸의 유기물 처리장치는 클리닝 룸의 공기 중에 포함된 유해 유기물이 필터링되어 수납되는 더트 컨테이너와, 상기 더트 컨테이너의 내주연 상단에 설치된 물분사체와, 상기 물분사체에 연결되어 상기 더트 컨테이너 내부로 물을 공급하는 급수수단과, 상기 더트 컨테이너의 하부에 연결설치되어 물에 희석된 상기 유해 유기물을 배출하는 배수수단과, 상기 물분사체와 배수수단 사이에 설치되어 일정 크기 이상의 유해 유기물을 걸르는 걸름망을 더 포함하는 것을 특징으로 한다. Organic substance treatment device for cleaning of the present invention room in order to achieve the above object are as mulbun provided on the inner peripheral upper end of the dirt container and a dirt container, which is hazardous organic matter is filtered housing containing the air in the cleaning room transfer member, the mulbun is provided between the connection to the body water supply means for supplying water into the dirt container and, with the drainage means is provided connected to the lower portion of the dirt container discharging the said harmful organic substances diluted in the water, the mulbun member with drainage means It characterized in that it further comprises flowing geolreummang something harmful organic matter above a certain size.

상기 물분사체는 일단부에 상기 더트 컨테이너를 관통하는 돌출부가 형성된 중공의 유체흐름관과, 상기 유체흐름관의 외측 둘레를 따라 다수개 설치된 물분사노즐을 포함하는 것을 특징으로 한다. The mulbun member is characterized in that it comprises a water spray nozzle installed in a plurality of the hollow end portion of a fluid flow tube with a projection which passes through the dirt container is formed in and along the outer periphery of the flow tube.

상기 물분사체는 중공의 링(ring)형상 또는 일자(一字) 형상을 갖는 것을 특징으로 한다. The mulbun member is characterized in that it has a ring (ring) shape, or the date (一字) of the hollow shape.

상기 급수수단은 급수배관과, 상기 급수배관에 플랜지결합되는 'T'자형 연결관과, 상기 급수배관과 'T'자형 연결관 사이에 개재되는 러버 실링을 포함하는 것을 특징으로 한다. The water supply means is characterized in that it comprises a rubber seal is located between the supply pipe and a 'T' shaped connecting flange which is coupled to the water supply pipe and the pipe, the water supply pipe and a 'T' shaped connector.

상기 배수수단은 배출관과, 상기 배출관에 플랜지결합되는 배수배관과, 상기 배출관과 배수배관 사이에 개재되는 러버 실링과, 상기 배수배관에 설치된 개폐밸브를 포함하는 것을 특징으로 한다. The drainage means is characterized in that it comprises an on-off valve provided on the rubber seal and the drainage pipe is located between the discharge pipe and the drainage pipe which is flange coupled to the discharge pipe, the discharge pipe and the drainage pipe.

이하, 도 2 및 도 3을 참조하여 본 발명의 바람직한 실시예에 대하여 설명하기로 한다. Hereinafter, there will be described a preferred embodiment of the present invention will be described with Fig. 2 and 3.

도 2는 본 발명에 따른 클리닝룸의 유기물 처리장치에 있어서의 더트 컨테이너의 개략 사시도이고, 도 3은 도 2에 도시된 더트 컨테이너에 있어서의 물분사체 및 급수수단의 분리 사시도이다. 2 is a schematic perspective view of the dirt container in the cleaning room in the organic substance treatment device according to the invention, Figure 3 is a perspective view of mulbun separation member and the water supply means in the dirt container shown in Fig.

이를 참조하면, 본 발명의 실시예에 따른 클리닝룸의 유기물 처리장치는 크게 더트 컨테이너의 내주연 상단에 설치된 물분사체와, 물분사체에 연결되어 상기 더트 컨테이너 내부로 물을 공급하는 급수수단과, 상기 더트 컨테이너의 하부에 연결설치되어 유해 유기물을 배출하는 배수수단과, 상기 물분사체와 배수수단 사이에 설치된 걸름망으로 구성된다. Referring to this, the cleaning room organic material processing apparatus according to the embodiment of the present invention includes a water supply means for increasing the supply of water is connected to the mulbun member provided on the inner peripheral upper end of the dirt container, mulbun member into the dirt container and the are provided connected to the lower portion of the dirt container consists of geolreummang provided between the drainage means for discharging the toxic organic matter and the mulbun member with drainage means.

상기 물분사체(30)는 외주연 일측에 상기 더트 컨테이너(20)를 관통하는 중공의 돌출부(33)가 일체로 형성된 중공의 링(ring)형상 또는 일자(一字) 형상(미도시)을 갖는 유체흐름관(31)이 더트 컨테이너(20)의 내주연 상단에 설치되어지되, 상기 유체흐름관(31)의 외측 둘레를 따라 상기 돌출부(33)와 연통되는 물분사노즐(32)이 다수개 설치되어 있다. Having the mulbun member 30 (not shown), the ring (ring) shape, or the date (一字) the shape of the formed hollow protrusion (33) of the hollow penetrating to the dirt container 20 to the outer peripheral side is integrally fluid flow tube 31 is an inner periphery is installed on the top jidoe, the projecting portion 33 and the water injection nozzle (32) in fluid communication along the outer circumference of the fluid flow pipe (31) of the dirt container 20, a plurality of there is installed.

상기 급수수단은 중공의 'T'자형 연결관(43) 몸통부에 상기 유체흐름관(31)의 돌출부(33)가 압입되고, 급수배관(40)이 상기 'T'자형 연결관(43)에 볼트(45) 및 너트(46)를 통해 플랜지(41,44)결합되며, 상기 급수배관(40)과 'T'자형 연결관 (43) 사이에는 누수방지용 러버(rubber) 실링(42)이 개재된다. The water supply means includes protrusions (33) of the flow pipe 31 to the 'T' shaped connector 43 the body portion of the hollow fiber is being press-fitted, the water supply pipe 40 is the 'T' shaped connection pipe 43 the bolt 45 and the nut 46 through the flange (41,44) combination is provided between the water supply pipe 40 and the 'T' shaped connection pipe 43 for preventing water leakage rubber (rubber) sealing ring (42) It is interposed.

상기 배수수단은 더트 컨테이너(20)의 저부 일측에 'ㄴ'자형 배출관(50)이 고정설치되고, 배수배관(53)이 상기 배출관(50)에 볼트(55) 및 너트(56)를 통해 플랜지(51,54)결합되며, 상기 배출관(50)과 배수배관(53) 사이에 누수방지용 러버 실링(52)이 개재된다. Said drainage means includes a flange through and "b" shaped discharge pipe 50 is fixed to one side of the bottom, the drain pipe 53, a bolt 55 and a nut 56 to the discharge pipe 50 of the dirt container 20 (51,54) are coupled, between the discharge pipe 50 and drain pipe 53 is interposed a leak-proof rubber sealing ring (52).

한편, 상기 물분사체(30)와 배수수단 사이에는 원형 형상을 갖는 걸름망(60)이 재치되어 유기물 처리과정에서 일정 크기 이상의 유해 유기물을 걸르게 되며, 도면 중 미설명 부호 57은 배수배관 개폐밸브이다. On the other hand, the geolreummang 60 between mulbun member 30 and the drainage means, having a circular shape is mounted and properly place the hazardous organic matter above a certain size from the organic process, the drawing reference numeral 57 of is a drain pipe opening and closing valve .

이하에서는 상기와 같은 구성을 갖는 본 발명의 작용을 설명한다. The following describes the operation of the present invention having the configuration as described above.

클리닝룸 내부의 각종 유해 유기물은 도 1에 도시된 본체(18)와 필터 백(12)을 거쳐 도 2 및 도 3에 도시된 더트 컨테이너(20)에 수납되는 과정, 즉, 클리링룸 내부에 각종 유해 유기물이 포함된 공기는 본체의 상부를 통해 유입된 후, 필터 백(도 1 의 12)을 거치면서 유해 유기물은 필터링되어 더트 컨테이너(도 1의 8)에 수납되는 유기물 처리 작업이 완료되면, 컨테이너 도어(도 1의 17)를 열고 상기 더트 컨테이너(20)를 상기 본체(18)로부터 빼낸다. Cleaning room various harmful organic matter inside the process of being accommodated in the main body 18 and the filter bag with dirt container 20 shown in Figs. 2 and 3 through 12 shown in Figure 1, that is, various kinds of inside Cleveland ringrum air containing the toxic organic matter is when after flowing through the top of the body, the filter bag over the course (12 in Fig. 1) of hazardous organic matter is filtered organic material processing operations that are stored in the dirt container (8 in Fig. 1) is completed, opening the container door (Fig. 1) is withdrawn from the main body 18, the dirt container (20).

그리고, 도 2 및 도 3에 도시된 바와 같이, 상기 급수배관(40)과 'T'자형 연결관(43)을 통해 물을 공급하면, 이 물은 상기 돌출부(33) 및 유체흐름관(31)을 경유하여 상기 물분사노즐(32)을 통해 분사되면서 더트 컨테이너 (20)내부의 각종 유해 유기물을 희석한다. And, Figures 2 and 3, the if the supply of water through the water supply pipe 40 and the 'T' shaped connection pipe 43, the water is the protruding portion 33 and the fluid flow tube (31 ) to dilute the dirt container 20, various harmful organic material inside as injected through the water injection nozzle 32 via the.

상기와 같이 하여 유기물 희석 작업이 완료되면 물의 급수를 멈추고, 상기 개폐밸브(57)의 조작에 따라 유해 유기물이 물과 함께 상기 배출관(50)을 통해 배수배관(53)을 타고 더트 컨테이너(20) 외부로 배출되며, 이후 상부의 커버를 열고 상기 걸름망(60)을 들어내어 이에 걸러진 일정 크기 이상의 유기물을 배출한다. Stopping the supply of water when the organic substance dilution operation is complete, as described above, in accordance with an operation of hazardous organic materials, rides the drain pipe 53 through the discharge pipe 50 with the water dirt container 20 of the on-off valve 57 It is discharged to the outside, and after opening the top cover by lifting it out of the geolreummang 60 is discharged more than a predetermined size filtered organic material thereto.

상술한 바와 같이, 본 발명에 따른 클리닝룸의 유기물 처리장치는 더트 컨테이너의 상,하부에 설치된 물분사체와 급,배수수단을 통해 더트 컨테이너 내부의 유해 유기물을 정화한 후, 이를 물과 함께 외부로 배출하므로써 작업자가 유기물을 처리하는 과정에서 발생되는 안전사고를 줄이고, 작업 환경을 크게 개선시킬 수 있다. As described above, the cleaning room organic material processing apparatus according to the present invention, a phase of the dirt container, mulbun member installed on the bottom and the feed, and then purging the harmful organisms within the dirt container through drainage means, external with it and water reduce accidents that occur in the course of discharge by the operator to handle organics, it can greatly improve the working environment.

이상 설명한 내용을 통해 당업자라면 본 발명의 기술사상을 일탈하지 아니하는 범위에서 다양한 변경 및 수정이 가능함을 알 수 있을 것이다. Those skilled in the art what is described above will be appreciated that various changes and modifications within the range which does not depart from the spirit of the present invention are possible. 따라서, 본 발명의 기술적 범위는 명세서의 상세한 설명에 기재된 내용으로 한정되는 것이 아니라 특허청구의 범위에 의해 정하여 져야만 할 것이다. Accordingly, the technical scope of the present invention will have to be not limited to the contents described in the description of the specification appointed by the claims.

Claims (5)

  1. 클리닝 룸의 공기 중에 포함된 유해 유기물이 필터링되어 수납되는 더트 컨테이너와, And a dirt container is housed are hazardous organic matter contained in the air filter of the cleaning room,
    상기 더트 컨테이너의 내주연 상단에 설치된 물분사체와, And mulbun member provided on the inner peripheral upper end of the dirt container,
    상기 물분사체에 연결되어 상기 더트 컨테이너 내부로 물을 공급하는 급수수단과, Mulbun connected to said transfer member and water supply means for supplying water into the dirt container,
    상기 더트 컨테이너의 하부에 연결설치되어 물에 희석된 상기 유해 유기물을 배출하는 배수수단과, And drain means provided connected to the lower portion of the dirt container discharging the said harmful organic substances diluted in water,
    상기 물분사체와 배수수단 사이에 설치되어 일정 크기 이상의 유해 유기물을 걸르는 걸름망을 더 포함하는 것을 특징으로 하는 클리닝룸의 유기물 처리장치. Cleaning room organic substance treatment device further comprises a transfer member and the mulbun geolreummang is provided between the drainage means constant flowing make harmful organic matter or larger.
  2. 제 1항에 있어서, According to claim 1,
    상기 물분사체는, Mulbun the carcass,
    일단부에 상기 더트 컨테이너를 관통하는 돌출부가 형성된 중공의 유체흐름관; A fluid flow tube of the hollow end with a projection which passes through the dirt container in the part formed;
    상기 유체흐름관의 외측 둘레를 따라 다수개 설치된 물분사노즐을 포함하는 것을 특징으로 하는 클리닝룸의 유기물 처리장치. Organic substance treatment device for cleaning room, characterized in that it comprises a water spray nozzle installed in plurality along the outer periphery of the flow tube.
  3. 제 1항에 있어서, According to claim 1,
    상기 물분사체는, Mulbun the carcass,
    중공의 링(ring)형상 또는 일자(一字) 형상을 갖는 것을 특징으로 하는 클리닝룸의 유기물 처리장치. Of the hollow ring (ring) of the organic substance treatment device, it characterized in that the cleaning room has a shape or a date (一字) shape.
  4. 제 1항에 있어서, According to claim 1,
    상기 급수수단은, The water supply means comprises:
    급수배관; Water piping;
    상기 급수배관에 플랜지결합되는 'T'자형 연결관; 'T' shaped connecting pipe flanges to be joined to the water supply pipe;
    상기 급수배관과 'T'자형 연결관 사이에 개재되는 러버 실링을 포함하는 것을 특징으로 하는 클리닝룸의 유기물 처리장치. Organic substance treatment device for cleaning room, characterized in that it comprises a rubber seal is located between the water supply pipe and a 'T' shaped connector.
  5. 제 1항에 있어서, According to claim 1,
    상기 배수수단은, It said drainage means includes:
    배출관; discharge pipe;
    상기 배출관에 플랜지결합되는 배수배관; Drainage is flange coupled to the discharge pipe;
    상기 배출관과 배수배관 사이에 개재되는 러버 실링; Rubber seal is located between the discharge pipe and the drainage pipe;
    상기 배수배관에 설치된 개폐밸브를 포함하는 것을 특징으로 하는 클리닝룸의 유기물 처리장치. Organic substance treatment device for cleaning room, characterized in that it comprises an on-off valve provided in the drain pipe.
KR1020040112572A 2004-12-24 2004-12-24 Apparatus for organic matter treatment of cleaning room KR20060073367A (en)

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Cited By (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8137466B2 (en) 2009-08-24 2012-03-20 Samsung Mobile Display Co., Ltd. Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
US8486737B2 (en) 2009-08-25 2013-07-16 Samsung Display Co., Ltd. Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
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US8802200B2 (en) 2009-06-09 2014-08-12 Samsung Display Co., Ltd. Method and apparatus for cleaning organic deposition materials
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US8882922B2 (en) 2010-11-01 2014-11-11 Samsung Display Co., Ltd. Organic layer deposition apparatus
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US8894458B2 (en) 2010-04-28 2014-11-25 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
US8907326B2 (en) 2009-06-24 2014-12-09 Samsung Display Co., Ltd. Organic light-emitting display device and thin film deposition apparatus for manufacturing the same
US8906731B2 (en) 2011-05-27 2014-12-09 Samsung Display Co., Ltd. Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus
US8916237B2 (en) 2009-05-22 2014-12-23 Samsung Display Co., Ltd. Thin film deposition apparatus and method of depositing thin film
US8921831B2 (en) 2009-08-24 2014-12-30 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
US8945974B2 (en) 2012-09-20 2015-02-03 Samsung Display Co., Ltd. Method of manufacturing organic light-emitting display device using an organic layer deposition apparatus
US8945979B2 (en) 2012-11-09 2015-02-03 Samsung Display Co., Ltd. Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus by using the same, and organic light-emitting display apparatus manufactured by the method
US8951610B2 (en) 2011-07-04 2015-02-10 Samsung Display Co., Ltd. Organic layer deposition apparatus
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US8993360B2 (en) 2013-03-29 2015-03-31 Samsung Display Co., Ltd. Deposition apparatus, method of manufacturing organic light emitting display apparatus, and organic light emitting display apparatus
US9012258B2 (en) 2012-09-24 2015-04-21 Samsung Display Co., Ltd. Method of manufacturing an organic light-emitting display apparatus using at least two deposition units
US9018647B2 (en) 2010-09-16 2015-04-28 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
US9040330B2 (en) 2013-04-18 2015-05-26 Samsung Display Co., Ltd. Method of manufacturing organic light-emitting display apparatus
US9051636B2 (en) 2011-12-16 2015-06-09 Samsung Display Co., Ltd. Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus
US9076982B2 (en) 2011-05-25 2015-07-07 Samsung Display Co., Ltd. Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus
US9121095B2 (en) 2009-05-22 2015-09-01 Samsung Display Co., Ltd. Thin film deposition apparatus
US9136476B2 (en) 2013-03-20 2015-09-15 Samsung Display Co., Ltd. Method of manufacturing organic light-emitting display apparatus, and organic light-emitting display apparatus manufactured by the method
US9150952B2 (en) 2011-07-19 2015-10-06 Samsung Display Co., Ltd. Deposition source and deposition apparatus including the same
US9174250B2 (en) 2009-06-09 2015-11-03 Samsung Display Co., Ltd. Method and apparatus for cleaning organic deposition materials
US9206501B2 (en) 2011-08-02 2015-12-08 Samsung Display Co., Ltd. Method of manufacturing organic light-emitting display apparatus by using an organic layer deposition apparatus having stacked deposition sources
US9234270B2 (en) 2011-05-11 2016-01-12 Samsung Display Co., Ltd. Electrostatic chuck, thin film deposition apparatus including the electrostatic chuck, and method of manufacturing organic light emitting display apparatus by using the thin film deposition apparatus
US9249493B2 (en) 2011-05-25 2016-02-02 Samsung Display Co., Ltd. Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus by using the same
US9257649B2 (en) 2012-07-10 2016-02-09 Samsung Display Co., Ltd. Method of manufacturing organic layer on a substrate while fixed to electrostatic chuck and charging carrier using contactless power supply module
US9260778B2 (en) 2012-06-22 2016-02-16 Samsung Display Co., Ltd. Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus manufactured using the method
US9279177B2 (en) 2010-07-07 2016-03-08 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
US9306191B2 (en) 2012-10-22 2016-04-05 Samsung Display Co., Ltd. Organic light-emitting display apparatus and method of manufacturing the same
US9347886B2 (en) 2013-06-24 2016-05-24 Samsung Display Co., Ltd. Apparatus for monitoring deposition rate, apparatus provided with the same for depositing organic layer, method of monitoring deposition rate, and method of manufacturing organic light emitting display apparatus using the same
US9388488B2 (en) 2010-10-22 2016-07-12 Samsung Display Co., Ltd. Organic film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
US9450140B2 (en) 2009-08-27 2016-09-20 Samsung Display Co., Ltd. Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same
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