KR20060057637A - Liquid crystal aberration correcting element, and production method therefore - Google Patents

Liquid crystal aberration correcting element, and production method therefore Download PDF

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KR20060057637A
KR20060057637A KR1020067006257A KR20067006257A KR20060057637A KR 20060057637 A KR20060057637 A KR 20060057637A KR 1020067006257 A KR1020067006257 A KR 1020067006257A KR 20067006257 A KR20067006257 A KR 20067006257A KR 20060057637 A KR20060057637 A KR 20060057637A
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liquid crystal
aberration correction
substrate
substrates
electrode
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KR100761951B1 (en
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노부요시 나카가와
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가부시키가이샤 비니도
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1365—Separate or integrated refractive elements, e.g. wave plates
    • G11B7/1369—Active plates, e.g. liquid crystal panels or electrostrictive elements
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1392—Means for controlling the beam wavefront, e.g. for correction of aberration
    • G11B7/13925—Means for controlling the beam wavefront, e.g. for correction of aberration active, e.g. controlled by electrical or mechanical means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133351—Manufacturing of individual cells out of a plurality of cells, e.g. by dicing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/134309—Electrodes characterised by their geometrical arrangement
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1392—Means for controlling the beam wavefront, e.g. for correction of aberration
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/18—Function characteristic adaptive optics, e.g. wavefront correction

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)
  • Geometry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)

Abstract

A novel liquid crystal aberration correcting element capable of being reduced in size and weight compared to a conventional element. The liquid crystal aberration correcting element comprises a plurality of substrates formed with electrodes and liquid crystal held between the plurality of substrates, wherein thickness-direction holes (30A, 30B, 30C) are drilled in at least one of the plurality of substrates, terminals (31A, 31B, 31C) for connection the electrodes are provided to the holes, and an injection port (32) for injecting liquid crystal is also provided in the substrates.

Description

액정수차보정소자 및 그 제조방법{Liquid crystal aberration correcting element, and production method therefore}Liquid crystal aberration correcting element and manufacturing method thereof

본 발명은 광디스크 장치에 있어서 광픽업에서의 기록재생시에 생기는 수차(收差)를 보정하기 위해서 사용되는 액정수차보정소자, 및 그 제조방법의 기술분야에 속한다.The present invention belongs to the technical field of a liquid crystal aberration correcting element used for correcting aberration generated during recording and reproduction in an optical pickup, and a manufacturing method thereof.

종래, 정보기록 매체로서 CD, DVD 등의 각종 광디스크가 알려져 있다. 이것들의 광디스크는, 회전하는 것에 의한 두께 차이나 휘어짐 등에 의해 수차(집광 스폿의 왜곡)를 생기게 하기 때문에, 이 수차를 보정해서 기록·재생의 정밀도를 올리는 것이 요구된다.Conventionally, various optical discs, such as CD and DVD, are known as an information recording medium. Since these optical discs cause aberrations (distortion of condensation spots) due to thickness differences, warpage, etc. due to rotation, it is required to correct this aberration to increase the accuracy of recording and reproduction.

상기 수차를 보정하는 기술로서, 콜리메이터 렌즈를 액추에이터에서 구동시키는 방식과, 액정수차보정소자를 이용하는 방식이 알려져 있다.As a technique for correcting the aberration, a method of driving a collimator lens with an actuator and a method of using a liquid crystal aberration correction element are known.

전자의 방식은, 액추에이터가 필요하기 때문에 광픽업이 복잡해지고, 또 고정밀도의 보정에는 완전히 대응되지 않는다고 하는 문제가 있었다.In the former method, since an actuator is required, the optical pickup becomes complicated, and there is a problem that it does not completely cope with high-precision correction.

이에 대하여 액정수차보정소자는, 액정 패널의 전극을 동심원의 링 모양으로 형성하고, 이에 의해 광속(光束)의 중앙부와 가장자리부에서 다른 위상제어를 행하는 것이다. 이 액정수차보정소자는 광픽업에 있어서 대물렌즈와 함께 동일광축 위 에 배치되기 때문에 양호한 구동이 얻어지도록 소형화·경량화하는 것이 요망되고 있었다.In contrast, the liquid crystal aberration correction element forms the electrodes of the liquid crystal panel in a concentric ring shape, thereby performing different phase control at the center portion and the edge portion of the light beam. Since the liquid crystal aberration correction element is disposed on the same optical axis together with the objective lens in the optical pickup, it has been desired to miniaturize and reduce the weight so that good driving can be obtained.

종래의 액정수차보정소자로서 일본 공개특허공보 제2002-237077호에는 광디스크에서 생기는 구면수차의 분포에 대응하게 된 동심원 모양의 다수의 전극부를 가지는 제1전극층과, 상기 제1전극층에 대향하는 제2전극층과, 상기 제1 및 제2전극층에 협지되어, 상기 제1 및 제2전극층에의 인가전압에 따른 위상변화를 통과하는 광빔에 발생케 하는 액정을 가지는 수차보정소자가 기재되어 있다. 또, 제1 및 제2전극층은 투명한 글래스기판상에 각각 형성되어 있다.As a conventional liquid crystal aberration correction device, Japanese Laid-Open Patent Publication No. 2002-237077 has a first electrode layer having a plurality of concentric circular electrode portions corresponding to the distribution of spherical aberration generated in an optical disc, and a second opposing the first electrode layer. An aberration correction element is described which has an electrode layer and a liquid crystal which is sandwiched between the first and second electrode layers and is generated in a light beam passing through a phase change according to the voltage applied to the first and second electrode layers. Further, the first and second electrode layers are formed on transparent glass substrates, respectively.

상기 종래의 액정수차보정소자에서는 일본 공개특허공보 제2002-237077호의 도4에 나타나 있는 바와 같이 각 전극부에 리드선을 접속하고, 소자의 측면에서 끌어내고 있었다. 끌어내어진 리드선은, 일반적으로는 일방의 글래스기판을 타방보다도 길게 형성하고, 그 긴 부분에 마련되어진 단자에 집약시켜, 거기에서 플렉시블 프린트기판에 의해 전압을 제어하기 위한 회로부에 접속시켜져 있었다.In the conventional liquid crystal aberration correction element, as shown in Fig. 4 of Japanese Patent Laid-Open No. 2002-237077, a lead wire is connected to each electrode portion and pulled out from the side of the element. The lead wire drawn out generally forms one glass substrate longer than the other, concentrates the terminal provided in the long portion, and connects it to the circuit portion for controlling the voltage by the flexible printed circuit board.

이 경우, 글래스기판상의 단자의 주변부에 힘이 가해지기 때문에, 글래스기판을 얇게 하려고 하면 깨짐· 빠짐불량을 보일 우려가 있고, 그러므로 두께에는 강도에서 한계(0.3mm정도)가 있었다. 따라서, 소자의 충분한 경량화를 꾀할 수 없었다.In this case, since a force is applied to the periphery of the terminal on the glass substrate, attempting to thin the glass substrate may result in cracking and falling off, and therefore the thickness has a limit (about 0.3 mm) in strength. Therefore, sufficient weight reduction of the device could not be achieved.

또한 전술한 바와 같이, 일방의 기판을 타방보다 길게 형성하고 있기 때문에, 그 만큼 소자가 커지고, 또한 소자 자체의 중량 밸런스가 무너짐으로써 고정밀도의 구동이 어렵게 된다고 하는 문제도 있었다.Moreover, as mentioned above, since one board | substrate is formed longer than the other, there also existed a problem that drive of high precision became difficult because the element became large by that much and the weight balance of the element itself fell.

또한, 종래의 소자를 제조할 때에는 전극을 형성한 다수의 기판을 대향시키고 그 측면의 기판간의 틈으로부터 액정을 주입·봉지하고 있었다. 그 때문에 크기가 수 mm정도로 가공된 작은 기판의 조합을 모두 제작하고, 각각에 대하여 액정의 주입밀봉을 행할 필요가 있어, 생산 효율이 나쁘고 비용도 높다고 하는 문제가 있었다.Moreover, when manufacturing the conventional element, many board | substrates with which the electrode was formed were made to oppose, and liquid crystal was injected and sealed from the gap between the board | substrates of the side surface. Therefore, it is necessary to make all combinations of small substrates processed to a few mm in size, and to perform injection sealing of liquid crystals for each, resulting in a problem of poor production efficiency and high cost.

또한 전술한 바와 같이, 리드선이 집약하는 단자는 소자의 옆쪽에 마련되어져 있었기 때문에, 제품의 검사를 최종적으로 가공된 개개의 소자마다 행할 필요가 있어 효율이 나쁘다고 하는 문제도 있었다.In addition, as described above, since the terminals in which the lead wires are concentrated are provided on the side of the element, there is a problem that the inspection of the product needs to be performed for each of the finally processed elements, resulting in poor efficiency.

거기에서 본 발명은, 종래의 소자와 비교해서 소형화, 경량화를 꾀할 수 있는 신규한 액정수차보정소자를 제공하는 것을 목적으로 한다.It is an object of the present invention to provide a novel liquid crystal aberration correction element which can be miniaturized and reduced in weight as compared with a conventional element.

또한 본 발명은, 생산 효율에서 우수하고 저비용의 액정수차보정소자의 제조 방법을 제공하는 것을 목적으로 한다.Moreover, an object of this invention is to provide the manufacturing method of the liquid crystal aberration correction element excellent in production efficiency and low cost.

상기 과제를 해결하기 위해서, 본 발명의 액정수차보정소자는, 전극이 형성된 다수의 기판과, 상기 다수의 기판 사이에 끼워진 액정을 가지는 액정수차보정소자에 있어서, 상기 다수의 기판의 적어도 하나에는 두께 방향으로 구멍이 뚫어져, 상기 구멍에는 상기 전극에 접속하기 위한 단자가 설치되는 것을 특징으로 한다.In order to solve the above problems, the liquid crystal aberration correction device of the present invention is a liquid crystal aberration correction device having a plurality of substrates on which electrodes are formed and a liquid crystal sandwiched between the plurality of substrates, wherein at least one of the plurality of substrates has a thickness. A hole is drilled in the direction, and the hole is provided with a terminal for connecting to the electrode.

또한 본 발명의 액정수차보정소자의 제조방법은, 모재(母材)가 되는 기판에, 다수 개의 액정수차보정소자에 대응시킨 단자 및 주입구를 형성하는 공정과, 전극을 형성하는 공정과, 상기의 단자, 주입구, 및 전극을 형성한 기판에 대하여 전극을 형성한 별도의 기판을 조합시키는 공정과, 조합시킨 후에 주입구로부터 액정을 주입하는 공정과, 개개의 액정수차보정소자로 잘라서 나누는 공정을 포함하고 있는 것을 특징으로 한다.In addition, the manufacturing method of the liquid crystal aberration correction element of the present invention comprises the steps of forming a terminal and an injection hole corresponding to a plurality of liquid crystal aberration correction elements on a substrate serving as a base material, forming a electrode, and A process of combining a separate substrate on which an electrode is formed with respect to a substrate on which a terminal, an injection hole, and an electrode is formed; a step of injecting liquid crystal from the injection hole after the combination; and dividing the liquid crystal aberration correction element into individual liquid crystal aberration correction elements; It is characterized by being.

본 발명의 액정수차보정소자는, 기판의 표면에 구멍을 뚫고, 그 구멍의 부분을 단자로 하기 때문에, 단자를 옆쪽에 마련한 종래의 소자와 비교해서 기판에 무리한 힘이 가해질 일이 없다. 따라서, 보다 엷은 기판을 채용할 수 있어 결과적으로 소자의 경량화를 달성할 수 있다.Since the liquid crystal aberration correction element of the present invention drills a hole in the surface of the substrate and uses a portion of the hole as a terminal, an excessive force is not applied to the substrate as compared with a conventional element having the terminal on the side. Therefore, a thinner substrate can be employed, and as a result, weight reduction of the device can be achieved.

또한 기판의 표면에 단자를 배치함으로써, 그 만큼 소자의 소형화를 꾀할 수 있다. 또한 소자 자체의 중량 밸런스도 뛰어나기 때문에 광픽업의 고정밀도의 구동이 가능해진다.In addition, by disposing the terminal on the surface of the substrate, the device can be miniaturized by that amount. In addition, the weight balance of the device itself is also excellent, enabling high-precision driving of optical pickup.

또한 본 발명의 액정수차보정소자의 제조방법에 의하면, 단자를 형성하는 공정이나, 액정을 주입하는 공정 등이, 모두 개개의 소자로 잘라 나누기 전의 모재(母材)의 상태에서 이루어지기 때문에, 생산 효율이 향상되고, 비용을 대폭 줄일 수 있다.In addition, according to the manufacturing method of the liquid crystal aberration correction element of the present invention, the process of forming the terminal, the process of injecting the liquid crystal, and the like are all made in the state of the base metal before dividing into individual elements. Efficiency can be improved and costs can be greatly reduced.

또한 각 소자를 검사할 때에도 모재의 상태로 행할 수 있기 때문에 높은 효율을 달성할 수 있다.Moreover, since it can carry out in a state of a base material also in inspecting each element, high efficiency can be achieved.

도1은 제1실시예에 따른 액정수차보정소자를 나타내는 평면도이다.1 is a plan view showing a liquid crystal aberration correction element according to the first embodiment.

도2는 도1의 A-A단면도이다.2 is a cross-sectional view taken along the line A-A of FIG.

도3은 제2실시예에 따른 액정수차보정소자를 나타내는 평면도이다.3 is a plan view showing a liquid crystal aberration correcting element according to the second embodiment.

도4는 액정수차보정소자의 제조공정을 나타내는 흐름도이다.4 is a flowchart showing a manufacturing process of the liquid crystal aberration correction element.

도5는 액정수차보정소자의 제조공정을 나타내는 흐름도이다.5 is a flowchart showing a manufacturing process of the liquid crystal aberration correction element.

도6은 도4에 있어서의 S1O2의 상태를 도시한 도면이다.FIG. 6 is a diagram showing a state of S10 in FIG.

도7은 도4에 있어서의 S1O2의 상태를 도시한 도면이다.FIG. 7 is a diagram showing a state of S10 in FIG.

도8은 도4에 있어서의 S1O4의 상태를 도시한 도면이다.FIG. 8 is a diagram showing a state of S10 4 in FIG.

도9는 도4에 있어서의 S1O6의 상태를 도시한 도면이다.FIG. 9 is a diagram showing a state of S10 6 in FIG.

도10은 도5에 있어서의 S306의 상태를 도시한 도면이다.FIG. 10 is a diagram showing a state of S306 in FIG.

*도면의 주요부분에 대한 부호의 설명** Description of the symbols for the main parts of the drawings *

1 : 액정수차보정소자 1: Liquid Crystal Aberration Correction Element

10, 11 : 기판10, 11: substrate

101 : 모서리부101: corner

20, 21, 22, 23, 24, 25 : 전극20, 21, 22, 23, 24, 25: electrode

30A, 30B, 30C, 30D : 구멍30A, 30B, 30C, 30D: Hole

31A, 31B, 31C, 31D : 단자31A, 31B, 31C, 31D: Terminal

32 : 주입구32: injection hole

40 : 액정40: liquid crystal

50 : 밀봉재50: sealing material

51 : 봉지부51: encapsulation

60 : 도통재(導通材)60: conductive material

70 : 마스크70: mask

100 : 모재로 되는 기판100: substrate

본 발명은, 전극이 형성된 다수의 기판과, 상기 다수의 기판 사이에 끼워진 액정을 가지는 액정수차보정소자에 있어서, 상기 다수의 기판의 적어도 하나에는 두께방향으로 구멍이 뚫어지고, 상기 구멍에는 상기 전극에 접속하기 위한 단자가 마련되어지는 액정수차보정소자를 제공한다(제1발명).According to an aspect of the present invention, there is provided a liquid crystal aberration correction device having a plurality of substrates on which electrodes are formed and a liquid crystal sandwiched between the plurality of substrates, wherein at least one of the plurality of substrates is punched in a thickness direction, and the hole is formed in the electrode There is provided a liquid crystal aberration correction element provided with a terminal for connecting to (first invention).

또한 본 발명은, 전극이 형성된 다수의 기판과, 상기 다수의 기판 사이에 끼워진 액정을 가지는 액정수차보정소자에 있어서, 상기 다수의 기판 중 하나의 기판에는 두께방향으로 구멍이 뚫어지고, 상기 구멍에는 상기 전극에 접속하기 위한 단자가 마련되어지는 액정수차보정소자를 제공한다(제2발명).The present invention also provides a liquid crystal aberration correction device having a plurality of substrates on which electrodes are formed, and a liquid crystal sandwiched between the plurality of substrates, wherein one of the plurality of substrates is punched in a thickness direction. There is provided a liquid crystal aberration correction element provided with a terminal for connecting to the electrode (second invention).

이들 구성에 의하면, 전극에 접속하기 위한 단자가 구멍을 통해서 기판의 표면에 배치된다.According to these structures, the terminal for connecting to an electrode is arrange | positioned at the surface of a board | substrate through a hole.

또한 본 발명은, 상기 제2발명에 따른 액정수차보정소자에 있어서, 하나의 기판에 액정을 주입하기 위한 주입구를 형성한 것을 특징으로 한다(제3발명).In addition, the present invention is characterized in that in the liquid crystal aberration correction device according to the second invention, an injection hole for injecting liquid crystal into one substrate is formed (third invention).

이 구성에 의하면, 전극에 접속되는 단자 및 액정의 주입구가 하나의 기판의 표면에 집약 배치된다.According to this structure, the terminal connected to an electrode and the injection hole of a liquid crystal are collectively arrange | positioned on the surface of one board | substrate.

또한 본 발명은, 상기 제1 또는 제2발명에 따른 액정수차보정소자에 있어서, 기판이 사각형 모양으로 형성되고, 상기 기판에 있어서 광속(光束)이 통과하는 원형영역 이외의 모서리부 부근에 구멍이 뚫어지는 것을 특징으로 한다(제4발명).Further, the present invention provides a liquid crystal aberration correction device according to the first or second invention, wherein the substrate is formed in a rectangular shape, and holes are formed near the corners of the substrate other than the circular region through which the luminous flux passes. It is characterized by being drilled (fourth invention).

이 구성에 의하면, 기판의 모서리부 부근이, 구멍을 형성하는 공간으로서 유 효하게 이용된다.According to this structure, the vicinity of the edge part of a board | substrate is used effectively as a space which forms a hole.

또한 본 발명에서는, 상기 제3발명에 따른 액정수차보정소자의 제조방법에 있어서, 모재로 되는 기판에, 다수 개의 액정수차보정소자에 대응시킨 단자 및 주입구를 형성하는 공정과, 전극을 형성하는 공정과, 상기의 단자, 주입구, 및 전극을 형성한 기판에 대하여 전극을 형성한 별도의 기판을 조합시키는 공정과, 조합시킨 후에 주입구로부터 액정을 주입하는 공정과, 개개의 액정수차보정소자로 잘라 나누는 공정을 포함하여 이루어지는 액정수차보정소자의 제조방법을 제공한다(제5발명).In the present invention, in the method for manufacturing a liquid crystal aberration correction element according to the third invention, a step of forming a terminal and an injection hole corresponding to a plurality of liquid crystal aberration correction elements on a substrate serving as a base material, and a step of forming an electrode And a step of combining a separate substrate on which the electrode is formed with respect to the terminal, the injection hole, and the substrate on which the electrode is formed, the step of injecting liquid crystal from the injection hole after combining, and dividing into individual liquid crystal aberration correction elements. Provided is a method of manufacturing a liquid crystal aberration correction element, including a step (fifth invention).

이 구성에 의하면 액정수차보정소자의 제조가 최종공정까지 모재로 되는 기판의 상태 그대로 진행된다.According to this structure, manufacture of a liquid crystal aberration correction element advances to the state of the board | substrate used as a base material until a final process.

이하, 본 발명을 실시하기 위한 최선의 형태에 관하여 설명한다.EMBODIMENT OF THE INVENTION Hereinafter, the best form for implementing this invention is demonstrated.

우선, 본 발명의 제1실시예에 관하여 설명한다. 도1은 액정수차보정소자의 평면도, 도2는 도1의 A-A단면도이다. 도1 및 도2에 나타나 있는 바와 같이 액정수차보정소자(1)는, 동심원 모양으로 분할된 전극(20, 21)(세그먼트 전극)이 형성된 기판(10)과, 전극(22)(공통전극)이 형성된 기판(11)에서 액정(40)을 사이에 끼움으로써 개략적으로 구성되어 있다. 또, 도2에서는, 전극(20, 21)과 액정(40)의 사이, 및 전극(22)과 액정(40)의 사이에 일반적으로 마련되어지는 액정배향막, 투명절연층이나, 기판(10, 11) 상에 마련되어지는 반사방지막 등은 도면에 나타내는 것을 생략하고 있다. 또한 액정(40)은 밀봉재(50)에 의해 내측에 봉입되어 있다.First, a first embodiment of the present invention will be described. 1 is a plan view of a liquid crystal aberration correction element, and FIG. 2 is a sectional view taken along line A-A of FIG. As shown in Figs. 1 and 2, the liquid crystal aberration correction element 1 includes a substrate 10 having electrodes 20 and 21 (segment electrodes) formed in concentric circles, and an electrode 22 (common electrode). In the formed board | substrate 11, it is comprised roughly by sandwiching the liquid crystal 40 between them. In Fig. 2, a liquid crystal alignment film, a transparent insulating layer or a substrate 10, 11 which are generally provided between the electrodes 20, 21 and the liquid crystal 40, and between the electrode 22 and the liquid crystal 40. The antireflection film or the like provided on the top face) is omitted in the drawings. In addition, the liquid crystal 40 is sealed inside by the sealing material 50.

이 액정수차보정소자(1)는 액정(40)이 마련되어진 영역 내에 광속을 통과시 키고, 그 때에 전극(20)과 전극(21)에 다른 전압을 인가함으로써 전극(20)의 위치와 전극(21)의 위치에 다른 액정의 배향상태, 즉 위상차를 주고 이에 의해 빛의 구면수차를 보정하는 것이다.The liquid crystal aberration correcting element 1 passes a light beam in an area in which the liquid crystal 40 is provided, and at that time, different voltages are applied to the electrode 20 and the electrode 21 so that the position of the electrode 20 and the electrode ( The orientation of other liquid crystals, that is, the phase difference, is given to the position of 21), thereby correcting spherical aberration of light.

기판(10, 11)으로서는 글래스기판 등의 투명기판을 쓸 수 있다. 또한 전극(20, 21), 및 전극(22)으로서는, 인듐주석산화막을 형성한 ITO 등의 투명전극이 적당하게 채용된다.As the substrates 10 and 11, transparent substrates such as glass substrates can be used. As the electrodes 20 and 21 and the electrode 22, a transparent electrode such as ITO in which an indium tin oxide film is formed is appropriately employed.

그리고, 이 제1실시예에서는, 기판(10)의 두께방향으로 구멍(30A, 30B, 30C)이 뚫어지고, 그것들의 구멍에는 전극(20, 21, 22)에 접속하기 위한 단자(31A, 31B, 31C)가 각각 마련되어져 있다. 기판(11)측에 형성된 전극(22)(공통전극)에 대해서는, 도통재(60)를 사이에 끼움으로써 기판(10)측의 단자(31A)와 접속되어 있다. 또, 각 단자는, 구멍 내주면을 따라 Ni-Au 등의 금속이 도금 등으로 형성된다.In this first embodiment, holes 30A, 30B, and 30C are drilled in the thickness direction of the substrate 10, and terminals 31A and 31B for connecting to the electrodes 20, 21, and 22 are connected to these holes. , 31C) are provided respectively. The electrode 22 (common electrode) formed on the substrate 11 side is connected to the terminal 31A on the substrate 10 side by sandwiching the conductive material 60 therebetween. In each terminal, metal such as Ni-Au is formed by plating or the like along the inner circumferential surface of the hole.

상기한 바와 같이 각 단자를 기판(10)의 면 위에 배치함으로써, 기판의 옆쪽에 단자를 집약 배치하였던 종래 소자에 비해서 소자에 편중된 힘이 가해지지 않고, 깨짐빠짐 불량이 생기기 어렵게 된다. 따라서, 기판(10, 11)을 보다 얇게(예를 들면, 0.2mm) 하는 것이 가능해 지고, 소자를 경량화할 수 있다. 구체적으로는, 종래에 비해서 40％이상(종래의 단자로부터 면상 배치의 단자로 변경한 효과가 약 10％, 기판두께를 0.3mm에서 0.2mm로 변경한 효과가 약 33％) 경량화 된다.By arranging each terminal on the surface of the board | substrate as mentioned above, compared with the conventional element which has arrange | positioned the terminal by the side of a board | substrate, the force unbiased to an element is not applied, and it becomes difficult to produce a cracking defect. Therefore, it becomes possible to make board | substrates 10 and 11 thinner (for example, 0.2 mm), and can reduce an element weight. Specifically, the weight is reduced by 40% or more (about 10% in the effect of changing from a conventional terminal to a planar arrangement of terminals and about 33% in an effect of changing the substrate thickness from 0.3mm to 0.2mm).

또한 이 제1실시예에서는, 기판(10, 11) 사이에 액정(40)을 주입하기 위한 주입구(32)가, 기판(10)의 면 상에 형성되어 있다. 주입구(32)의 형상은 원형, 타원형 등이며, 액정(40)을 주입한 후에 봉지재에 의해 적당하게 봉지된다.In the first embodiment, an injection hole 32 for injecting the liquid crystal 40 between the substrates 10 and 11 is formed on the surface of the substrate 10. The shape of the injection hole 32 is circular, elliptical, etc., and after sealing the liquid crystal 40, it is suitably sealed by the sealing material.

특히, 도1의 예에서는, 단자(31A, 31B, 31C), 및 액정의 주입구(32)의 모두가, 대향하는 기판 중 일방의 기판(10)에 배치되어 있기 때문에, 후술하는 바와 같이 소자의 생산효율을 높일 수 있다.In particular, in the example of FIG. 1, since all of the terminals 31A, 31B, and 31C and the injection holes 32 of the liquid crystal are disposed on one of the substrates 10 opposite to each other, The production efficiency can be improved.

또한, 도1의 예에서는, 구멍(30A, 30B, 30C), 및 액정의 주입구(32)를, 광속이 통과하는 원형영역(전극(20, 21)이 형성된 영역)이외의, 사각형 모양으로 형성된 기판(10)상의 모서리부(101) 부근에 형성하고 있다. 이렇게 하면, 광속이 통과하지 않는 기판(10)상의 잉여부분을 단자 등의 위치로서 유효하게 이용할 수 있기 때문에 소자를 보다 소형화할 수 있다. 또한 단자 등을 모서리부(101)에 배치함으로써 소자의 중량 밸런스를 최적화할 수 있다. In addition, in the example of FIG. 1, the holes 30A, 30B and 30C and the injection holes 32 of the liquid crystal are formed in a rectangular shape other than the circular region (region where the electrodes 20 and 21 are formed) through which the light flux passes. It is formed in the vicinity of the corner portion 101 on the substrate 10. In this case, the surplus portion on the substrate 10 through which the luminous flux does not pass can be effectively used as the position of the terminal or the like, so that the device can be further miniaturized. In addition, by disposing the terminal and the like on the corner portion 101, the weight balance of the device can be optimized.

또, 종래의 일반적인 액정을 이용하는 소자(액정표시소자 등)에 있어서는, 표시 영역의 확대에 수반하여 액연(額緣)부분(기판의 잉여부분)을 가능한 한 좁게 하는 것이 요구되고 있다. 또한 고분할 구동방식 등에 대응해서 단자수도 증대하는 경향에 있기 때문에, 기판의 모서리 부분을 유효하게 이용한다고 하는 발상은 없고 본 발명에서 독자적인 것이라고 할 수 있다.Moreover, in the element (liquid crystal display element etc.) which uses the conventional general liquid crystal, it is calculated | required to make the liquid lead part (excess part of a board | substrate) as narrow as possible with the expansion of a display area. In addition, since the number of terminals tends to increase in correspondence with a high division driving method and the like, there is no idea that the edge portion of the substrate is effectively used, and it can be said to be original in the present invention.

또, 상기 제1실시예에서는, 동심원 모양으로 2개의 전극(20, 21)을 형성한 경우에 관하여 설명했지만, 보다 다계조(多階調)로 분할해서 형성해도 좋다. 또 전극의 배치패턴은 동심원 모양에 한정되는 것이 아니고, 예를 들면 좌우로 분할한 전극으로 구성할 수도 있다. 이 경우에는, 광디스크의 휘어짐 등에 의해 발생하는 코마수차를 양호하게 보정할 수 있다.In the first embodiment, the case where the two electrodes 20, 21 are formed in a concentric manner has been described, but may be formed by dividing into multiple gradations. In addition, the arrangement pattern of electrodes is not limited to concentric circles, For example, it can also be comprised by the electrode divided left and right. In this case, coma aberration caused by warping or the like of the optical disk can be corrected well.

또한 대향하는 기판은, 상기한 바와 같이 한 쌍에 한하지 않고, 그 이상의 기판이 액정을 사이에 두면서 적층하여 있어도 된다.In addition, the opposing board | substrates are not limited to a pair as mentioned above, More than one board | substrate may be laminated | stacked, sandwiching a liquid crystal.

전술한 바와 같이, 각 단자, 및 액정의 주입구는, 일방의 기판(10)에 집중해서 마련하는 것이 바람직하지만, 기판(10)과 기판(11)에 나누어서 형성해도 된다. 예를 들면 공통전극인 전극(22)에 접속하는 단자를 기판(11)측에 마련하는 것도 가능하다.As mentioned above, although each terminal and the injection hole of a liquid crystal are provided and concentrated in one board | substrate 10, you may divide and form in the board | substrate 10 and the board | substrate 11, respectively. For example, it is also possible to provide the terminal connected to the electrode 22 which is a common electrode on the board | substrate 11 side.

또한 도1의 예에서는, 서로 접촉하지 않는 전극(20) 및 전극(21)의 패턴을 각 단자에 직접 접속하도록 형성하고 있지만, 그 외에도 예를 들면 닫힌 원형영역으로 되는 각 전극패턴을 형성한 후에 각각의 전극과 각 단자를 리드선 등에서 접속해도 좋다.In addition, in the example of FIG. 1, the patterns of the electrodes 20 and 21 which are not in contact with each other are formed to be directly connected to the respective terminals. Each electrode and each terminal may be connected by a lead wire or the like.

계속해서, 본 발명의 제2실시예를 도3에 의거하여 설명한다.Subsequently, a second embodiment of the present invention will be described with reference to FIG.

도3에 나타나 있는 바와 같이 기판(10)의 두께방향에는 구멍(30A, 30B, 30C, 30D)이 뚫어지고, 그것들의 구멍에는 도면에 나타나 있지 않은 공통전극과, 전극(23, 24, 25)에 접속하기 위한 단자(31A, 31B, 31C, 31D)가 각각 마련되어져 있다. 또한 액정은, 소자 측면의 기판간의 틈으로 주입되고, 주입구는 봉지부(51)에 의해 봉지되어 있다.As shown in Fig. 3, holes 30A, 30B, 30C, and 30D are drilled in the thickness direction of the substrate 10, and common holes and electrodes 23, 24, and 25 are not shown in the holes. Terminals 31A, 31B, 31C, and 31D for connecting to are provided. Further, the liquid crystal is injected into the gap between the substrates on the side of the element, and the injection port is sealed by the sealing portion 51.

이 예에서는, 각 단자가, 기판(10)에 있어서의 4개의 모서리부분(101)에 배치되어 있기 때문에 소자 자체의 중량 밸런스가 가장 뛰어나다.In this example, since each terminal is arrange | positioned at the four corner parts 101 in the board | substrate 10, the weight balance of the element itself is the best.

그 밖의 구성은, 상기 제1실시예와 같다.The rest of the configuration is the same as in the first embodiment.

이상과 같은 액정수차보정소자(1)는, 예를 들면 레이저광원, 편광자, 1/2파장판, 1/4파장판, 대물렌즈, 수광소자 등과 함께 광픽업을 구성하고, 광디스크 장 치에 조합되어 사용할 수 있다.The liquid crystal aberration correction element 1 as described above forms an optical pickup together with, for example, a laser light source, a polarizer, a half-wave plate, a quarter-wave plate, an objective lens, a light-receiving element, and the like and is combined with an optical disk device. It can be used.

본 발명의 액정수차보정소자는, 소형경량이기 때문에, 고정밀도의 제어가 요구되는 차세대BD(Blu-ray Disc)나, 다층 디스크 등의 고밀도 광디스크에도 적합하게 사용할 수 있다.Since the liquid crystal aberration correction element of the present invention is small in size and lightweight, it can be suitably used for next-generation BD (Blu-ray Disc) and multi-density optical discs such as multilayer disks, which require high precision control.

다음에 본 발명의 액정수차보정소자의 제조방법을 도4~도10에 의거하여 설명한다. 이 제조방법은, 상기 제1실시예에 나타나는 소자에 대해서 적합하게 채용되는 것이다.Next, the manufacturing method of the liquid crystal aberration correction element of the present invention will be described with reference to FIGS. This manufacturing method is suitably employed for the element shown in the first embodiment.

우선, 도4 및 도6에 나타나 있는 바와 같이 단자 등을 마련하는 기판측(기판(10)측)에 대해서는, 모재가 되는 기판(100)에, 다수 개의 액정수차보정소자에 대응시킨 구멍(30A, 30B, 30C)과, 액정의 주입구(32)를 형성하고(S1O1), 각각의 구멍에 단자(31A, 31B, 31C)를 마련한다(S1O2). 각 단자를 마련할 때에는, 도7에 나타나 있는 바와 같이 구멍 이외의 부분에 마스크(70)를 형성한 다음에, 단자가 되는 금속을 도금 등에 의해 형성한 후, 마스크(70)를 제거함으로써 적합하게 행하여진다.First, as shown in Figs. 4 and 6, with respect to the substrate side (substrate 10 side) for providing terminals and the like, holes 30A corresponding to a plurality of liquid crystal aberration correction elements in the substrate 100 serving as the base material. , 30B, 30C, and the injection hole 32 of the liquid crystal are formed (S10O), and terminals 31A, 31B, 31C are provided in respective holes (S10O). When providing each terminal, as shown in FIG. 7, after forming the mask 70 in parts other than a hole, after forming the metal used as a terminal by plating etc., it removes the mask 70 suitably. Is done.

계속해서, 소정의 위치에 전극재를 증착 등에 의해 형성하고(S1O3), 에칭 등에 의한 패터닝을 행해 전극(20, 21)을 제작한다(S1O4). 이 상태를 도8에 도시한다. 또, 상기의 단자를 마련하는 공정과, 전극을 형성하는 공정은 전후해도 좋다.Subsequently, an electrode material is formed at a predetermined position by vapor deposition or the like (S103), and patterned by etching or the like to produce electrodes 20 and 21 (S104). This state is shown in FIG. In addition, the process of providing said terminal and the process of forming an electrode may be back and forth.

다음에 투명절연층을 필요에 따라서 적층시킨 후, PVA 등의 액정배향막을 형성하고, 러빙을 행한다(S1O5). 또한 액정을 봉입하기 위한 밀봉재(50)를 인쇄 등에 의해 전극(20)의 외측에 마련한다(S1O6). 이 상태를 도9에 도시한다.Next, after laminating | stacking a transparent insulating layer as needed, a liquid crystal aligning film, such as PVA, is formed and rubbing is performed (S105). Furthermore, the sealing material 50 for enclosing the liquid crystal is provided outside the electrode 20 by printing or the like (S106). This state is shown in FIG.

한편, 대향시키는 별도의 기판(기판(11)측)에 대해서는, 상기와 같이 모재로 되는 기판에 대하여 전극을 형성하고(S201), 패터닝을 행해서 공통전극(전극(22))으로 한다(S202). 또한 액정배향막을 형성하여 러빙을 행하고(S203), 공통전극과 단자를 접속하기 위한 도통재를 인쇄 등에 의해 마련한다(S204).On the other hand, with respect to another substrate (substrate 11 side) to be opposed, an electrode is formed on the substrate serving as the base material as described above (S201), and patterning is performed to form a common electrode (electrode 22) (S202). . Further, a liquid crystal alignment film is formed and rubbed (S203), and a conductive material for connecting the common electrode and the terminal is provided by printing or the like (S204).

그리고, 상기의 단자 등을 형성한 기판과, 공통전극 등을 형성한 별도의 기판을 대향시켜서 조합시킨다(S301). 이 공정은, 스페이서를 통해서 접착제로 접합시키는 등으로 해서 행하여진다.Subsequently, the substrate on which the terminal and the like are formed and the other substrate on which the common electrode and the like are formed are opposed to each other (S301). This step is performed by bonding with an adhesive through a spacer or the like.

계속해서, 주입구(32)로부터 밀봉재(50)의 내측에 액정을 주입하고(S302), 봉지(封止)한다. 그리고, 모재로 되는 기판(100) 위에 배열한 각 단자를 사용하여 소자의 동작검사를 행한다(S303). 검사가 불합격이었던 장소에 관해서는 NG마킹을 행한다(S305). 그 후에 모재로 되는 기판의 전면에 반사방지막(AR막)을 형성한다(S304). AR 막은, 기판(10)측 또는 기판(11)측의 어느 일방에 형성해도 좋고, 양쪽에 형성해도 좋다 Subsequently, liquid crystal is injected into the inside of the sealing material 50 from the injection hole 32 (S302), and it seals. Then, the operation inspection of the device is performed using each terminal arranged on the substrate 100 serving as the base material (S303). As to the place where the inspection failed, NG marking is performed (S305). Thereafter, an antireflection film (AR film) is formed on the entire surface of the substrate as the base material (S304). AR film may be formed in either one of the board | substrate 10 side, or the board | substrate 11 side, and may be formed in both.

최후에, 도10에 나타나 있는 바와 같이 모재로 되는 기판을 다이서 등을 사용하여 개개의 액정수차보정소자(1)로 잘라 나누고(S307), 단품의 검사공정(S307)을 거친 후에 출하한다(S308). 또, 단품의 검사에 있어서 불합격이 된 소자는, 폐기 또는 수리하든지, 또는 재생공정으로 옮겨진다(S309).Finally, as shown in Fig. 10, the substrate as the base material is cut into individual liquid crystal aberration correction elements 1 by using a dicer or the like (S307), and shipped after passing through a single inspection step (S307) ( S308). Moreover, the element which failed in the inspection of a single product is discarded or repaired, or it transfers to a regeneration process (S309).

이상과 같은 제조방법에 의하면, 각 단자나 전극의 형성, 및 액정의 주입공정 등이 개개의 소자로 잘라 나누기 전의 모재의 상태에서 모두 이루어지기 때문에, 생산효율이 대단히 높고 비용도 대폭 줄일 수 있다. 또한 생산규모의 확대에도 용이하게 대응가능하다.According to the manufacturing method as described above, since the formation of each terminal and electrode, the liquid crystal injection process, and the like are all performed in the state of the base material before being divided into individual elements, the production efficiency is extremely high and the cost can be greatly reduced. It is also easy to cope with the expansion of production scale.

또한, 액정을 주입봉지한 후에 행하여지는 검사공정(S302)도 모재의 상태에서 일제히 행하여지기 때문에 산업상 극히 유용하다.In addition, since the inspection step (S302) performed after the injection sealing of the liquid crystal is also performed simultaneously in the state of the base material, it is extremely useful industrially.

본 발명의 액정수차보정소자는, 광디스크 장치에 있어서, 광픽업에서의 기록재생시에 생기는 수차를 보정하기 위해서 사용할 수 있다.The liquid crystal aberration correcting element of the present invention can be used to correct aberrations generated during recording and reproduction in an optical pickup in an optical disk device.

Claims (5)

전극이 형성된 다수의 기판과, 상기 다수의 기판 사이에 끼워진 액정을 가지는 액정수차보정소자로서, 상기 다수의 기판의 적어도 하나에는 두께방향으로 구멍이 뚫어지고, 상기 구멍에는 상기 전극에 접속하기 위한 단자가 마련되어지는 액정수차보정소자.A liquid crystal aberration correction element having a plurality of substrates on which electrodes are formed and a liquid crystal sandwiched between the plurality of substrates, wherein at least one of the plurality of substrates is formed with a hole in a thickness direction, and the hole is a terminal for connecting to the electrode. Liquid crystal aberration correction device is provided. 전극이 형성된 다수의 기판과, 상기 다수의 기판 사이에 끼워진 액정을 가지는 액정수차보정소자로서, 상기 다수의 기판 중 하나의 기판에는 두께방향으로 구멍이 뚫어지고, 상기 구멍에는 상기 전극에 접속하기 위한 단자가 마련되어지는 액정수차보정소자.A liquid crystal aberration correction element having a plurality of substrates having electrodes formed thereon, and a liquid crystal sandwiched between the plurality of substrates, wherein one of the plurality of substrates has a hole formed in a thickness direction, and the hole is connected to the electrode. A liquid crystal aberration correction element provided with a terminal. 제2항에 있어서, 하나의 기판에, 액정을 주입하기 위한 주입구를 형성한 것을 특징으로 하는 액정수차보정소자.The liquid crystal aberration correction element as claimed in claim 2, wherein an injection hole for injecting liquid crystal is formed in one substrate. 제1항 또는 제2항에 있어서, 기판이 사각형 모양으로 형성되고, 상기 기판에 있어서의 광속이 통과하는 원형영역 이외의 모서리부 부근에 구멍이 뚫어지는 것을 특징으로 하는 액정수차보정소자.The liquid crystal aberration correction element according to claim 1 or 2, wherein the substrate is formed in a rectangular shape, and holes are formed near edge portions other than the circular region through which the light flux in the substrate passes. 제3항에 따른 액정수차보정소자의 제조방법에 있어서,In the method of manufacturing a liquid crystal aberration correction device according to claim 3, 모재로 되는 기판에, 다수 개의 액정수차보정소자에 대응시킨 단자 및 주입구를 형성하는 공정과, 전극을 형성하는 공정과, 상기의 단자, 주입구, 및 전극을 형성한 기판에 대하여 전극을 형성한 별도의 기판을 조합시키는 공정과, 조합시킨 후에 주입구로부터 액정을 주입하는 공정과, 개개의 액정수차보정소자로 잘라 나누는 공정을 포함하여 이루어지는 액정수차보정소자의 제조방법.A step of forming a terminal and an injection hole corresponding to a plurality of liquid crystal aberration correction elements, a step of forming an electrode, and an electrode formed on the substrate on which the terminal, injection hole, and electrode are formed A method of manufacturing a liquid crystal aberration correction element comprising the steps of combining the substrates, a step of injecting liquid crystals from the injection holes after the combination thereof, and a step of dividing into individual liquid crystal aberration correction elements.
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