KR20060031266A - Hose connecting structure of a female coupling in an automatic connecting device of a hose for transfering a high purity chemicals - Google Patents

Hose connecting structure of a female coupling in an automatic connecting device of a hose for transfering a high purity chemicals Download PDF

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KR20060031266A
KR20060031266A KR1020040080233A KR20040080233A KR20060031266A KR 20060031266 A KR20060031266 A KR 20060031266A KR 1020040080233 A KR1020040080233 A KR 1020040080233A KR 20040080233 A KR20040080233 A KR 20040080233A KR 20060031266 A KR20060031266 A KR 20060031266A
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hose
coupling
flange
pipe
high purity
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KR1020040080233A
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Korean (ko)
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KR100592031B1 (en
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김철원
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김철원
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L27/00—Adjustable joints, Joints allowing movement
    • F16L27/10—Adjustable joints, Joints allowing movement comprising a flexible connection only, e.g. for damping vibrations
    • F16L27/107—Adjustable joints, Joints allowing movement comprising a flexible connection only, e.g. for damping vibrations the ends of the pipe being interconnected by a flexible sleeve
    • F16L27/11—Adjustable joints, Joints allowing movement comprising a flexible connection only, e.g. for damping vibrations the ends of the pipe being interconnected by a flexible sleeve the sleeve having the form of a bellows with multiple corrugations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L51/00—Expansion-compensation arrangements for pipe-lines
    • F16L51/02—Expansion-compensation arrangements for pipe-lines making use of bellows or an expansible folded or corrugated tube
    • F16L51/025—Expansion-compensation arrangements for pipe-lines making use of bellows or an expansible folded or corrugated tube with several corrugations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)

Abstract

본 발명의 반도체제조 공정에서 사용하는 케미컬 이송용 호스의 자동연결장치에 장착되는 암 커플링의 호스 연결구조는 암 커플링(1)의 슬라이드부(2)와 배관연결플랜지(18) 사이에 벨로우즈형 신축관(22)을 설치하고, 배관연결플랜지(18)에 2분할 고정간극덮개(19)를 더욱 설치하여서, 배관연결플랜지(18)에 배관연결용 호스(27)를 연결조립할 때 배관연결플랜지(18)가 수평으로 2분할 고정간극덮개(19)의 오목부(28) 내에서 이동가능하게 하여 배관연결용 호스(27)의 조립이 용이하게 이루어지게 함은 물론 외부로 부터 배관연결용 호스(27)에 가해지는 직접적인 충격이 간극 및 벨로우즈형 신축관(22)에 의해 흡수되게 함으로써 충격에 의한 장치의 손상이 방지되는 효과를 갖는다.The hose coupling structure of the arm coupling mounted on the automatic coupling device of the chemical transfer hose used in the semiconductor manufacturing process of the present invention is a bellows between the slide portion 2 and the pipe connection flange 18 of the female coupling 1. When installing the type expansion pipe 22 and further installing a two-part fixed clearance cover 19 on the pipe connection flange 18, the pipe connection when assembling the pipe connection hose 27 to the pipe connection flange (18). The flange 18 is movable horizontally within the recess 28 of the fixed gap cover 19 to facilitate the assembly of the hose 27 for pipe connection as well as for pipe connection from the outside. The direct impact applied to the hose 27 is absorbed by the gap and the bellows-type telescopic pipe 22, thereby preventing the damage of the device due to the impact.

케미컬, 이송, 호스, 세정, 건조, 관, 신축, 커플링Chemical, Transfer, Hose, Clean, Dry, Tubing, Stretch, Coupling

Description

고순도 케미컬 이송 호스의 자동연결장치에 장착되는 암 커플링의 호스연결구조{HOSE CONNECTING STRUCTURE OF A FEMALE COUPLING IN AN AUTOMATIC CONNECTING DEVICE OF A HOSE FOR TRANSFERING A HIGH PURITY CHEMICALS}HOSE CONNECTING STRUCTURE OF A FEMALE COUPLING IN AN AUTOMATIC CONNECTING DEVICE OF A HOSE FOR TRANSFERING A HIGH PURITY CHEMICALS}

도1은 종래의 암커플링에 연결된 호스의 작동 전 상태를 보여주는 단면도.1 is a cross-sectional view showing a state before operation of a hose connected to a conventional female coupling.

도2는 종래의 암커플링에 연결된 호스의 작동 후 상태를 보여주는 단면도.Figure 2 is a cross-sectional view showing a state after the operation of the hose connected to the conventional female coupling.

도3은 본 발명의 암커플링에 연결된 호스의 작동 전 상태를 보여주는 단면도.Figure 3 is a cross-sectional view showing a state before operation of the hose connected to the female coupling of the present invention.

도4는 본 발명의 암커플링에 연결된 호스의 작동 후 상태를 보여주는 단면도.Figure 4 is a cross-sectional view showing a state after operation of the hose connected to the female coupling of the present invention.

도면의 주요부분에 대한 부호의 설명Explanation of symbols for main parts of the drawings

1: 암 커플링 2: 슬라이드부1: female coupling 2: slide

10: 수 커플링 18: 배관연결플랜지10: male coupling 18: piping connection flange

19: 고정간극덮개 20: 2분할 덮개 플랜지19: Fixed gap cover 20: Two-part cover flange

22: 벨로우즈형 신축관 23: 링22: bellows type expansion pipe 23: ring

23: 암커플링 커버 25: 간극유지 지그23: female coupling cover 25: clearance holding jig

27: 배관연결용 호스 28: 오목부27: hose for pipe connection 28: recess

본 발명은 고순도 케미컬 이송용 호스의 자동연결장치에 장착되는 암 커플링의 호스연결구조에 관한 것으로서, 더욱 상세히 설명하면 암커플링의 후방에 신축가능한 벨로우즈튜브를 설치하여 암커플링의 전후방이동에 관계없이 가용성을 갖지 않는 관을 사용하여 간단히 자동연결장치에 연결하여 사용할 수 있는 고순도 케미컬(high purity chemicals) 이송용 호스의 자동연결장치에 장착되는 암 커플링의 호스연결구조에 관한 것이다.The present invention relates to a hose coupling structure of an arm coupling mounted on an automatic coupling device of a high purity chemical transfer hose, and more specifically, to a front and rear movement of an arm coupling by installing a flexible bellows tube at the rear of the arm coupling. It relates to a hose coupling structure of an arm coupling mounted on an automatic coupling device of a high purity chemicals conveying hose which can be simply connected to an automatic coupling device using a pipe having no solubility.

반도체 제조공정이나 액정표시장치 제조공정 등에 사용되는 고청정, 고순도의 케미컬은 사용량이 커짐에 따라서 운반용기의 사이즈가 점차로 대형화되고 있고, 케미컬을 이송시키기 위해 테프론 재질로 된 급속연결구(quick coupling)의 호스연결장치를 이용함으로써 용기뚜껑의 개폐회수가 줄어들으므로 케미컬을 취급하는 사용자들의 안전사고가 감소되는 장점이 있다.High-clean and high-purity chemicals used in semiconductor manufacturing processes and liquid crystal display device manufacturing processes are gradually increasing in size as the volume of use increases, and quick couplings made of Teflon are used to transfer chemicals. The use of the hose connection device reduces the opening and closing frequency of the container lid has the advantage of reducing the safety accidents of users handling the chemical.

본 출원인은 종래의 퀵커플링의 사용에 따른 제반문제점을 해소시키기 위해 고순도 케미컬 이송용 호스의 자동연결장치를 연구 개발하여 국내특허출원 제94-19828호, 국내실용신안등록출원 제95-8282호와 제95-47786호로 출원 한 바 있으며, 이들 기술은 암수커플러의 제정과 접속, 분리작업이 하나의 장치 내에서 순차적으로 이루어지게 함으로써 고순도 케미컬의 오염을 방지하는 효과를 제공함은 물론 케미컬 취급에 따른 작업자의 위험과 번거로움을 배제하여 작업성 및 안전성이 향상되게 하였다.The present applicant has researched and developed the automatic connection device of the high purity chemical conveying hose in order to solve all the problems caused by the use of the conventional quick coupling, and the domestic patent application No. 94-19828, the domestic utility model registration application No. 95-8282 And 95-47786, these techniques provide the effect of preventing the contamination of high-purity chemicals as well as the establishment, connection, and disconnection of the female and female couplers in a single device. The workability and safety are improved by eliminating the risk and inconvenience of the worker.

그러나, 종래의 고순도 케미컬 이송용 호스의 자동연결장치에 장착되는 암커플링의 호스는 도1 및 도2에 작동상태단면도로 예시된 바와 같이, 가요성 테프론 주름관(FH)이 암 커플링(1)의 후방에 플랜지(28)로 직접 연결되어 있다.However, the hose of the arm coupling mounted on the automatic connection device of the conventional high purity chemical transfer hose has a flexible Teflon corrugated pipe (FH) arm coupling (1) as illustrated in the operating state cross-sectional view in Figs. ) Is directly connected to the rear of the flange 28.

이와 같이 암 커플링(1)의 후방에 플랜지(28)로 직접 연결된 가요성 테프론 주름관(FH)은 암,수 커플링(1,10)의 유로개폐를 위해 암 커플링(1)이 결합부(3)와 함께 전후방으로 이동될 때, 암 커플링(1)과 함께 전후방으로 이동된다. 예컨대 암 커플링(1)이 실린더 블럭(5) 내에서 소정 거리로 전방 이동되면 소정 곡률로 굴곡된 가요성 테프론 주름관(FH)이 펴져야 하고, 다시 암 커플링(1)이 후방으로 이동되면 가요성 테프론 주름관(FH) 굴곡되어 초기 설치상태로 복귀되는 과정이 반복되어 이루어진다. As such, the flexible Teflon corrugated pipe (FH) directly connected to the rear of the female coupling (1) by the flange (28) has a female coupling portion (1) coupled to the male and female coupling (1, 10) for opening and closing the flow path. When moved forward and backward with (3), it is moved forward and backward with the arm coupling 1. For example, if the arm coupling 1 is moved forward in the cylinder block 5 by a predetermined distance, the flexible Teflon corrugated pipe FH that is bent at a predetermined curvature should be unfolded, and again the arm coupling 1 is moved backward. The flexible Teflon corrugated pipe (FH) is bent repeatedly to return to the initial installation state.

이와 같이 커플링의 전후방 이동이 반복됨에 따라서 가요성 테프론 주름관(FH)도 펴지거나 다시 굴곡되어야 하므로 소정의 곡률반경을 갖는 가요성 테프론 주름관(FH)이 사용되어야 하는 문제점이 있다. As the front and rear movement of the coupling is repeated as described above, the flexible Teflon corrugated pipe (FH) also needs to be unfolded or bent again, so that the flexible Teflon corrugated pipe (FH) having a predetermined radius of curvature must be used.

아울러, 가요성 테프론 주름관(FH)이 펴지거나 굴곡되도록 소정의 공간이 확보되어야 하는 문제점이 있다.In addition, there is a problem that a predetermined space must be secured so that the flexible Teflon corrugated pipe (FH) is extended or curved.

본 발명은 종래의 이와 같은 문제점을 해소시키고자 발명된 것으로서, 본 발명의 목적은 커플링의 이동에 따라 굴곡이 반복될 필요가 없고, 이동에 따른 공간확보가 필요없는 고순도 케미컬 이송용 호스의 자동연결장치에 장착되는 암 커플링의 호스연결구조를 제공하고자 하는 것이다.The present invention has been invented to solve such problems in the prior art, the object of the present invention is that the bending does not need to be repeated according to the movement of the coupling, it is not necessary to secure the space according to the movement of high purity chemical transfer hose It is an object of the present invention to provide a hose connection structure of a female coupling mounted on a connecting device.

본 발명의 고순도 케미컬 이송용 호스의 자동연결장치에 장착되는 암 커플링의 호스연결구조는 암 커플링의 슬라이더 단부에 벨로우즈형 신축관을 장착하여 배관연결플랜지에 가요성 관이외의 고정관이 사용될 수 있게 하여 관의 사용범위를 확장시킨 것이 특징이다.The hose coupling structure of the arm coupling mounted on the automatic coupling device of the high purity chemical transfer hose of the present invention may be equipped with a bellows type expansion pipe at the slider end of the female coupling so that a fixed pipe other than the flexible pipe may be used in the pipe connection flange. This feature extends the scope of use of the pipe.

또한, 배관 연결플랜지와 슬라이드부 사이에 별도의 고정간극 덮개를 설치하여 가요성 관 이외의 고정관의 연결시에도 축 방향 또는 면 접착 각도의 정열불량(MISALIGN)에 의해 관의 연결 조립시 발생되는 조립스트레스가 커플러 본체에 전달되는 것을 방지되도록 한 것이 특징이다. In addition, a separate fixed gap cover is installed between the pipe connecting flange and the slide part, so that the assembly occurs when the pipe is assembled by the misalignment of the axial direction or the surface adhesion angle (MISALIGN) even when the fixed pipe other than the flexible pipe is connected. It is characterized by preventing the stress from being transmitted to the coupler body.

상기와 같은 특징을 갖는 본 발명의 고순도 케미컬 이송용 호스의 자동연결장치에 장착되는 암 커플링의 호스연결구조를 첨부도면을 참조하여 더욱 상세히 설명한다.The hose connection structure of the arm coupling mounted on the automatic connection device of the high purity chemical transfer hose of the present invention having the above characteristics will be described in more detail with reference to the accompanying drawings.

본 발명의 이해를 돕기 위해 종래의 장치와 동일한 요소는 동일 도면부호로 설명하였으며, 기타 요소는 본 출원인의 선행기술에 기술되어 있으므로 이에 대한 상세한 설명을 생략한다. The same elements as the conventional apparatus have been described with the same reference numerals for better understanding of the present invention, and other elements are described in the Applicant's prior art, and thus detailed description thereof will be omitted.

도3 및 도4에 단면도로 예시된 바와 같이, 이 벨로우즈형 신축관(22)은 수평으로 소정 거리 이동하는 암 커플링(1)의 슬라이드부(2) 일단부에 플랜지(26)로 결합되어 슬라이드부(2)와 이에 결합된 결합부(3)의 전후방 이동시에 확장되거나 축소된다.3 and 4, the bellows-type telescopic pipe 22 is coupled to the one end of the slide portion 2 of the female coupling 1 moving horizontally a predetermined distance by a flange 26. It expands or contracts during the forward and backward movement of the slide portion 2 and the engaging portion 3 coupled thereto.

벨로우즈형 신축관(22)의 일단부는 배관연결플랜지(18)가 고정되고, 이의 타 단부는 슬라이드부(2)에 또다른 플랜지(26)로 고정된다. 슬라이드부(2)에 고정되는 플랜지(26)는 볼트와 같은 고정수단에 의해 완전히 고정되고, 벨로우즈형 신축관(22)의 배관연결플랜지(18)에는 배관연결용 호스(27)가 플랜지(28)에 의해 고정된다.One end of the bellows type expansion pipe 22 is fixed to the pipe connecting flange 18, the other end thereof is fixed to another slide 26 to the slide (2). The flange 26 fixed to the slide portion 2 is completely fixed by a fixing means such as a bolt, and the pipe connection hose 18 of the bellows type expansion pipe 22 is connected to a pipe 27 by a flange 28. It is fixed by).

또한, 배관연결플랜지(18)는 2분할 고정간극 덮개(19)가 더욱 장착되어 배관연결플랜지(18)와 슬라이드부(2)사이에 배치된다.In addition, the pipe connection flange 18 is further provided with a two-part fixed gap cover 19 is disposed between the pipe connection flange 18 and the slide portion (2).

2분할 고정간극 덮개(19)는 일측 단부가 배관연결 플랜지(18)에 그리고 타측 단부에 인접한 오목부(28)는 암 커플링(1)의 커버(24)를 덮는 2분할 덮개 플랜지(21)에 고정된다. 따라서, 배관 연결 플랜지(18)에 배관연결용 호스(27)의 결합이 완료된 후 암 커플링(1)의 슬라이드부(2)가 수평으로 전후방 이동될 때 배관연결 플랜지(18)에 연결 고정된 배관연결용 호스(27)와의 조립시 축 방향 또는 면 접착 각도의 정열불량(MISALIGN)에 의해 관의 연결 조립시 발생되는 조립스트레스가 커플러 본체에 전달되게 된다.The two-part fixed gap cover 19 has a two-part cover flange 21 whose one end covers the pipe connection flange 18 and the recess 28 adjacent the other end covers the cover 24 of the female coupling 1. Is fixed to. Therefore, after the coupling of the pipe connecting hose 27 to the pipe connecting flange 18 is completed, when the slide portion 2 of the female coupling 1 is moved back and forth horizontally, the pipe connecting flange 18 is fixed. When assembling with the pipe connection hose 27, the assembly stress generated during connection assembly of the pipe by the misalignment (MISALIGN) of the axial direction or the surface adhesion angle is transmitted to the coupler body.

이러한 물리적인 충격은 2분할 고정간극 덮개(19)가 수평으로 오목부(28)의 간극범위 내에서 이동가능하게 됨으로서 상기한 문제점을 해결된다.This physical impact solves the above problems by allowing the two-part fixed gap cover 19 to be movable horizontally within the gap range of the recess 28.

다시말해 이와 같은 간극범위내의 이동은 벨로우즈형 신축관(22)을 수용하도록 원통형으로 형성되고, 이의 일측 단부에 배관연결 플랜지(18)와 결합되는 플랜지결합부(29)가 형성되며, 하부에 간극유지 지그(25)와 2분할 덮개 플랜지(21)를 함께 수용하도록 오목부(28)(25)가 형성된 2분할 고정간극 덮개(19)에 의해 이루어진다. 2분할 고정간극 덮개(19)의 오목부(28) 측은 2분할 고정플랜지(20)가 볼트와 같은 고정수단에 의해 고정된다. In other words, the movement within the gap range is formed in a cylindrical shape to accommodate the bellows type expansion pipe 22, and a flange coupling portion 29 is formed at one end thereof to be coupled to the pipe connection flange 18, and a gap at the bottom thereof. It is made by a two-part fixed gap cover 19 in which recesses 28 and 25 are formed to receive the holding jig 25 and the two-part cover flange 21 together. On the side of the recess 28 of the two-part fixed gap cover 19, the two-part fixed flange 20 is fixed by fixing means such as bolts.

즉, 2분할 고정간극 덮개(19)를 암 커플링 커버(24)에 고정할 때, 2분할 덮개 플랜지(21)와 간극유지 지그(25)를 2분할 고정간극 덮개(19)의 오목부(28)에 끼워서 2분할 덮개 플랜지(21)를 암 커플링 커버(24)에 고정한 후 간극유지 지그(25)를 제거하면 2분할 고정간극 덮개(19)의 오목부(28)에는 간극이 생기고, 암 커플링 커버(24)에 고정된 2분할 덮개플랜지(21) 오목부(28)에 걸려있는 상태가 된다.That is, when the two-part fixed gap cover 19 is fixed to the female coupling cover 24, the recesses of the two-part fixed flange cover 19 and the two-part fixed gap cover 19 are divided into two. 28, the two-part cover flange 21 is fixed to the female coupling cover 24, and the gap retaining jig 25 is removed. Then, a gap is formed in the recess 28 of the two-part fixed gap cover 19. It is in the state which hangs in the recessed part 28 of the 2 part cover flange 21 fixed to the female coupling cover 24. As shown in FIG.

이 오목부(28)의 간극에 의해서 2분할 고정간극 덮개(19)는 간극범위 내에서 수평방향으로 이동이 가능해진다.The gap between the recesses 28 allows the two-part fixed gap cover 19 to move in the horizontal direction within the gap range.

한편, 벨로우즈형 신축관(22)의 나사산 사이에는 링(23)이 더욱 결합된다. 이 링(23)에 의해서 벨로우즈형 신축관(22) 내부에 고압으로 이송되는 케미컬에 의해 발생되는 압력에 의한 벨로우즈형 신축관(22)의 팽창이 방지된다.On the other hand, the ring 23 is further coupled between the threads of the bellows type expansion pipe 22. The ring 23 prevents the expansion of the bellows type expansion pipe 22 due to the pressure generated by the chemical transferred to the inside of the bellows type expansion pipe 22 at a high pressure.

이하, 본 발명의 작용을 설명하면 다음과 같다. Hereinafter, the operation of the present invention will be described.

통상의 암커플링(1)이 수평이동가능하게 결합된 실린더블록(5)과, 암커플링(1)과 수커플링(10)의 결합면을 세정시키기 위한 노즐블럭(14)과, 수커플링(10)을 고정하는 체결블럭(11)들이 결합되고, 암커플링(1)에 본 발명의 벨로우즈형 신축관(22)이 암커플링(1)의 슬라이드부(2) 일단부에 결합되고, 2분할 고정간극 덮개(19)가 암 커플링 커버(24)에 장착되어 외부로 노출된 암커플링(1)의 슬라이드부(2)가 커버(24)와 고정간극 덮개(19)로 둘러싸이게 된다. 그리고, 배관연결플랜지(18) 에 배관연결용 호스(27)를 연결하고 수커플링(10)을 수커플링삽입공(13)에 끼워서 복수의 스토퍼(12)로 고정시킨다.A cylinder block 5 having a conventional female coupling 1 horizontally coupled thereto, a nozzle block 14 for cleaning the mating surfaces of the female coupling 1 and the male coupling 10, The fastening blocks 11 for fixing the coupling 10 are coupled, and the bellows type expansion pipe 22 of the present invention is connected to the female coupling 1 at one end of the slide portion 2 of the female coupling 1. The two-part fixed gap cover 19 is mounted on the female coupling cover 24 so that the slide portion 2 of the female coupling 1 exposed to the outside is covered with the cover 24 and the fixed gap cover 19. It is surrounded by. Then, a pipe connection hose 27 is connected to the pipe connection flange 18, and the male coupling 10 is inserted into the male coupling insertion hole 13 to fix the plurality of stoppers 12.

이와 같이 암커플링(1)과 수커플링(10)의 결합이 완료된 후 컨트롤패널(도시하지 않음)의 작동지시에 의해서 노즐블럭(14)의 분사공(15)을 통해 소정 압력으로 초순수 세정수가 소정 설정시간동안 노즐블럭(14) 내부로 분사되어 암,수 커플링(1,10)의 결합부 내부가, 즉 접액부가 세척된다.As such, after the coupling of the female coupling 1 and the male coupling 10 is completed, the ultrapure water is cleaned at a predetermined pressure through the injection hole 15 of the nozzle block 14 by an operation instruction of a control panel (not shown). The water is injected into the nozzle block 14 for a predetermined time so that the inside of the coupling portion of the female and male couplings 1 and 10, that is, the liquid contact portion, is cleaned.

노즐블럭(14) 내부로 분사된 세정수는 상부에 접선 방향으로 형성되어 있는 큰 사이즈의 오버플로우 배출구(16)를 통해 대부분 배출되고, 잔여 세정수는 하부의 배출구(17)를 통해서 배출된다.Most of the washing water injected into the nozzle block 14 is discharged through the large size overflow outlet 16 formed in the tangential direction at the top, and the remaining washing water is discharged through the lower outlet 17.

이후 고순도 질소가스나 청정 압축공기로 이루어진 건조용 가스가 세정수가 분사된 경로를 따라서 상기 암,수 커플링(1,10)의 결합부 내부로 분사되어 암수커플링의 결합부 내면, 즉 접액부를 건조시킨다.Thereafter, a drying gas composed of high purity nitrogen gas or clean compressed air is injected into the coupling part of the female and male couplings 1 and 10 along the path in which the washing water is injected, so that the inner part of the coupling part of the male and female couplings, that is, the liquid contact part, is formed. To dry.

세정 및 건조가 완료되면 실린더블럭(5)의 일측에 위치한 전진 에어유입공(6)으로 유입되는 구동압축공기에 의해 암커플링(1)의 슬라이드부(2) 외측을 밀어주고, 이 슬라이드부(2)에 결합된 결합부(3)가 동시에 위치센서(9)에 감지될 때까지 수평이동하여 슬라이드부(2)가 커플링(10)에 완전히 결합된 다음 케미컬이 이송이 시작된다.When the cleaning and drying is completed, the slide portion (2) of the arm coupling (1) is pushed out by the drive compressed air flowing into the forward air inlet hole (6) located on one side of the cylinder block (5), and the slide portion (2) is horizontally moved until the coupling portion 3 coupled to the position sensor 9 is sensed at the same time so that the slide portion 2 is completely coupled to the coupling 10 and then the chemical transfer starts.

케미컬의 이송이 완료되면 이송 완료 신호가 컨트롤 패널(도시되지 않음)에 전달되고, 이후 전진 에어유입공(6)에 가해졌던 전진용 구동압축공기의 공급이 중단됨과 동시에 타측의 후진 에어유입공(7)을 통해서 후진용 구동압축공기가 공급되어 암 커플링(1)이 위치센서(8)에 감지될 때까지 수평으로 복귀이동되어 암, 수 커플링(1,10)의 결합이 해제된다. 그 다음 암,수 커플링(1,10)의 내부에 설치된 스프 링(s)의 복원력에 의해서 밸브체(4)가 원상복귀되어 케미컬의 이송통로가 완전히 차단된다.When the transfer of the chemical is completed, the transfer completion signal is transmitted to the control panel (not shown), and then, the supply of the forward driving compressed air applied to the forward air inlet hole 6 is stopped, and the reverse air inlet hole on the other side ( 7) the driving compressed air for reverse is supplied, and the female and male couplings 1 and 10 are released by horizontally moving back until the female coupling 1 is detected by the position sensor 8. Then, the valve body 4 is returned to its original position by the restoring force of the spring s installed inside the male and female couplings 1 and 10, and the transfer path of the chemical is completely blocked.

그리고, 다시 결합부 내면, 즉 접액부가 세정되고 건조된 후 작업자는 스토퍼(12)를 해제시켜 수 커플링(10)을 체결블럭(11)으로부터 이탈시킨다.Then, after the inside of the coupling part, that is, the liquid contact part is cleaned and dried, the operator releases the stopper 12 to separate the male coupling 10 from the fastening block 11.

한편, 배관연결 플랜지(18)에 연결된 배관연결용 호스(27)에 외부로부터 충격이 가해지는 경우, 배관연결플랜지(18)에 결합된 벨로우즈형 신축관(22)과, 2분할 고정간극덮개(19)의 오목부(28)에 형성된 간극에 끼움결합된 2분할 덮개플랜지(21)에 의해 배관연결플랜지(18)가 간극범위 내에서 수평이동되어 플랜지 본체에 가해지는 스트레스를 흡수함으로써 본 발명의 고순도 케미컬 이송용 호스의 자동연결장치로에 가해지는 외부의 충격이 전달되는 것이 방지된다.On the other hand, when an impact is applied from the outside to the pipe connection hose 27 connected to the pipe connection flange 18, the bellows type expansion pipe 22 coupled to the pipe connection flange 18 and a two-part fixed gap cover ( The pipe connecting flange 18 is horizontally moved within the gap by absorbing the stress applied to the flange body by the two-part cover flange 21 fitted into the gap formed in the recess 28 of the present invention. External shocks to the automatic coupling device of the high purity chemical transfer hose are prevented from being transmitted.

본 발명의 고순도 케미컬 이송용 호스의 자동연결장치에 장착되는 암 커플링의 호스연결구조는 슬라이드부의 단부에 벨로우즈형 신축관을 결합시키고 간극덮개를 사용하여 배관연결된 호스가 슬라이드부의 수평작동에 의해 반복적으로 굴곡 이동되지 않게 함은 물론 굴곡이동에 따른 큰 공간부의 필요성이 제거되게 함으로써호스에 작용되는 충격흡수는 물론 외부 배관호스와의 연결조립이 더욱 용이하게 이루어지게 하는 효과를 갖는다.The hose coupling structure of the arm coupling mounted on the automatic connection device of the high purity chemical transfer hose of the present invention is to connect the bellows type expansion pipe to the end of the slide portion and the hose connected to the pipe using the gap cover is repeatedly operated by the horizontal operation of the slide portion. As a result of the bending movement, the necessity of the large space part due to the bending movement is eliminated, so that the shock absorbing acting on the hose and the connection assembly with the external piping hose can be made more easily.

Claims (3)

일단에 호스가 결합된 슬라이드부(2)와 내부에 밸브체(4)와 스프링이 끼워진 결합부(3)가 체결되어 이루어진 암 커플링(1)이 전진 및 후진 에어유입공(6,7)을 갖는 실린더블럭(5)의 내부에 유동가능하게 끼워지고,Forward and backward air inlet holes (6, 7) are provided with a slide (2) having a hose coupled to one end and an arm coupling (1) formed by fastening a valve body (4) and a spring-coupled coupling portion (3) therein. It is fitted to the inside of the cylinder block 5 having a flowable, 상기 실링더블럭(5)의 일측에는 분사공(15)과 세정수 배출구(16,17)를 갖는 노즐블럭(14)과, 수 커플링삽입공(13)에 수 커플링(10)이 착탈가능하게 끼워지는 스토퍼(12)를 갖는 체결블럭(11)이 상호결합되어 이루어진 고순도 케미컬 이송용 호스의 자동연결장치에 있어서,On one side of the sealing double block 5, the nozzle block 14 having the injection hole 15 and the washing water discharge ports 16 and 17 and the male coupling 10 are attached to and detached from the male coupling insertion hole 13. In the automatic connection device of the high purity chemical transfer hose made of a fastening block (11) having a stopper (12) to be fitted into each other, 슬라이드부(2)의 단부에 축방향으로 신축가능한 벨로우즈형 신축관(22)의 일단이 플랜지(26)로 고정되고, 벨로우즈형 신축관(22)의 타단은 실린더블럭(5)의 암 커플링 커버(24)에 연결되는 배관연결플랜지(18)에 결합된 것을 특징으로 하는 고순도 케미컬 이송용 호스의 자동연결장치에 장착되는 암 커플링의 호스연결구조.One end of the bellows-type telescopic tube 22, which is axially extensible at the end of the slide section 2, is fixed by the flange 26, and the other end of the bellows-type telescopic tube 22 is the female coupling of the cylinder block 5. Hose connection structure of the female coupling mounted to the automatic connection device of the high purity chemical transfer hose, characterized in that coupled to the pipe connection flange (18) connected to the cover (24). 제1항에 있어서,The method of claim 1, 벨로우즈형 신축관(22)의 나사산 사이에 링(23)이 결합된 것을 특징으로 하는 고순도 케미컬 이송용 호스의 자동연결장치에 장착되는 암 커플링의 호스연결구조.Hose connection structure of the female coupling mounted on the automatic coupling device of the high purity chemical transfer hose, characterized in that the ring 23 is coupled between the threads of the bellows type expansion pipe (22). 제1항 또는 제2항에 있어서, The method according to claim 1 or 2, 배관연결플랜지(18)는 벨로우즈형 신축관(22)을 수용하도록 원통형으로 형성되고, 이의 일측 단부에 배관연결플랜지(18)와 결합되는 플랜지결합부(29)가 형성되며, 하부에 간극유지 지그(25)를 수용하도록 오목부(28)가 형성된 2분할 고정간극 덮개(19)가 더욱 설치되는 것을 특징으로 하는 고순도 케미컬 이송용 호스의 자동연결장치에 장착되는 암 커플링의 호스연결구조.Piping connection flange 18 is formed in a cylindrical shape to accommodate the bellows type expansion pipe 22, a flange coupling portion 29 is formed at one end thereof is coupled to the pipe connection flange 18, the gap holding jig at the bottom Hose connection structure of the female coupling mounted to the automatic coupling device of the high purity chemical transfer hose, characterized in that the two-part fixed clearance cover 19 is further provided with a recess 28 to accommodate the (25).
KR1020040080233A 2004-10-08 2004-10-08 Hose connecting structure of a female coupling in an automatic connecting device of a hose for transfering a high purity chemicals KR100592031B1 (en)

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KR102633745B1 (en) * 2022-12-06 2024-02-02 한양이엔지 주식회사 Coupling device and fluid transfer system compring the same

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JPH11210965A (en) 1998-01-21 1999-08-06 Wako Steel Kk Expansion pipe coupling
KR200196946Y1 (en) 1998-02-25 2000-10-02 김철원 A coupling of unleak device for semiconductor chemical transfer line
KR19990075353A (en) * 1998-03-19 1999-10-15 윤종용 Coupler of chemical supply line
KR100394328B1 (en) * 2001-03-02 2003-08-09 (주)알에프씨씨 Reflection type low phase shift attenuator

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JP2020016318A (en) * 2018-07-27 2020-01-30 サーパス工業株式会社 Fluid transfer connector
CN110778831A (en) * 2018-07-27 2020-02-11 沙巴斯工业株式会社 Connector for moving fluid
US11435022B2 (en) 2018-07-27 2022-09-06 Surpass Industry Co., Ltd. Fluid transfer connector
TWI825117B (en) * 2018-07-27 2023-12-11 日商沙巴斯工業股份有限公司 Connectors for fluid transfer

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