KR100711736B1 - Device for eliminating static electricity of an automatic female hose coupler transferring high purity chemicals - Google Patents

Abstract

The present invention relates to an electrostatic eliminator of an arm coupling mounted on an automatic coupling device for a chemical transfer hose used in a semiconductor manufacturing process, the outer end of which is provided inside the bellows type expansion pipe 22 installed on the female coupling 1. A conductor guide tube coupled to the pipe connecting flange 18 connected to the arm coupling cover 24 of the cylinder block 5 and extending inward to the inner passage 2a of the slide unit 2 to guide the high purity chemical. By installing (100) and connecting the earth wire 120 to one side of the guide tube 100 to prevent static electricity generated when the fluid (collision) transfers to the inner wall surface of the corrugated pipe of the stretching pipe as in the prior art. Of course, it is characterized by maximizing safety by removing the cause of explosion or fire caused by the electric spark by removing by grounding through the earth.

Chemical, Connection System, Coupling, Extension Tube, Guide Tube, Static Electricity

Description

Electrostatic eliminator of arm coupling mounted on automatic connection device of high purity chemical transfer hose {DEVICE FOR ELIMINATING STATIC ELECTRICITY OF AN AUTOMATIC FEMALE HOSE COUPLER TRANSFERRING HIGH PURITY CHEMICALS}

1 is a cross-sectional view showing a conventional automatic connection device.

Figure 2a, b is a cross-sectional view showing an automatic connection device previously filed by the applicant.

Figure 3 is a cross-sectional view showing a state before operation of the device of the present invention.

Figure 4 is a cross-sectional view showing a state after the operation of the device of the present invention.

5 is a perspective view showing a connector of the present invention.

Explanation of symbols for main parts of the drawings

1: female coupling 2: slide

3: coupling part 5: cylinder block

10: male coupling 18: piping connection flange

22: bellows-type expansion tube 100: guide tube

105: slot 110: guide tube plate

120: earth ship

The present invention relates to an electrostatic demagnetizing device of an arm coupling mounted on an automatic connection device of a high purity chemical transfer hose, and more specifically, to a separate conductor for guiding high purity chemicals inside a bellows type expansion pipe installed in an arm coupling. Hose for transporting high purity chemicals that maximize safety by installing a guide tube and connecting an earth wire to one side to prevent static electricity generated by guiding high purity chemicals (fluid) and to remove it by earthing through the earth wire It relates to a static elimination device of the arm coupling mounted on the automatic connection device of.

In general, high-clean and high-purity chemicals used in semiconductor manufacturing processes and liquid crystal display device manufacturing processes are gradually increasing in size as the amount of use increases, and quick couplings made of Teflon are used to transfer chemicals. By using the hose connection device of the), the number of opening and closing of the container lid is reduced, there is an advantage that the safety accidents of users handling the chemical is reduced.

The present applicant has researched and developed the automatic connection device of the high purity chemical conveying hose in order to solve all the problems caused by the use of the conventional quick coupling, and the domestic patent application No. 94-19828, the domestic utility model registration application No. 95-8282 And 95-47786, these techniques provide the effect of preventing contamination of high-purity chemicals as well as cleaning and connecting and disconnecting female and female couplers in a single device. The workability and safety are improved by eliminating the risk and inconvenience of the worker.

However, in the conventional automatic connection device of the high purity chemical transfer hose, the hose of the arm coupling is a flexible Teflon corrugated pipe (FH) as shown in Figure 1, the flange 28 to the rear of the arm coupling (1) When the female coupling 1 moves forward or backward with the coupling part 3 in the cylinder block 5 to open and close the flow path of the female and male couplings 1 and 10, the flexible The Teflon corrugated pipe (FH) is made to repeat the process of moving forward or backward with the arm coupling (1).

Therefore, in the prior art, since the flexible Teflon corrugated pipe (FH) needs to be operated to be extended or bent while moving forward and backward, there is a problem of requiring a predetermined curvature radius and securing a predetermined space for the operation. .

In order to solve this problem, the present applicant is made by coupling the slide portion 2 is coupled to the hose at one end and the coupling portion 3 is fitted with the valve body 4 and the spring therein as shown in Figure 2a, b The female coupling 1 is inserted into the cylinder block 5 so as to be flowable, and one side of the sealing double block 5 is coupled to the nozzle block 14 and the male coupling insertion hole 13. The fastening block 11 having the stopper 12 to which the 10 is detachably fitted is coupled to each other, and one end of the bellows-type telescopic pipe 22 is fixed to the end of the slide part 2 by the flange 26. The other end of the bellows type expansion pipe 22 is mounted to an automatic connection device of a high purity chemical transfer hose coupled to a pipe connection flange 18 connected to the arm coupling cover 24 of the cylinder block 5. Hose connection structure of the female coupling has been disclosed.

Since the technology previously filed by the present applicant uses the bellows type expansion pipe 22, the bending movement of the hose is excluded as well as the movement of the hose before and after the movement of the slide unit 2 as well as the bending movement. In addition, the necessity of eliminating the necessity of a large space is provided, as well as the shock absorbing acting on the hose, as well as the connection assembly with the external piping hose is provided more easily.

However, the above-described technology applied by the present applicant, the high purity chemicals (high purity chemicals) are transferred to the inside of the bellows-type telescoping tube 22 of the corrugated form, the high purity on the curved inner wall surface of the bellows telescopic tube 22 When the chemical collides, it causes severe friction compared to the smooth surface, and in addition, when the high purity chemical is a nonconductor such as solvent, the static electricity is generated by friction between the curved inner wall surface of the expansion pipe 22 and the fluid. When the expansion pipe 22 is a non-conductor such as resin, the outside of the expansion pipe 22 causes a problem such that static electricity is generated due to the voltage corresponding to the friction, which is caused by an explosion or an electric spark. It also provided the cause of the fire.

The present invention was created to fundamentally solve the problems of the prior art and the prior art by the applicant, using a bellows-type expansion tube, the high-purity caulk conveyed through the inside of the conductor guide The purpose of maximizing safety by eliminating the cause of explosion or fire caused by electric sparks is to prevent static electricity caused by transfer friction and to remove static electricity by separate earth wire by being guided by a pipe.

The object of the present invention is to install a conductor guide tube for guiding high-purity chemical inside the bellows-type telescopic tube installed in the female coupling of the high-purity chemical transfer hose automatic connection device and to an electrostatic eliminator connected to an earth wire at one side thereof. Is achieved.

Hereinafter, with reference to the accompanying drawings, preferred embodiments for achieving the above object of the present invention will be described in detail.

First, in order to help the understanding of the present invention, the same elements as the conventional apparatus are described with the same reference numerals, and other elements are described in the applicant's prior art, and thus detailed description thereof will be omitted.

That is, in the present invention, as shown in FIGS. 2 and 3 to 5, the female coupling 1 is formed by coupling the valve part 4 and the coupling part 3 fitted with a spring into the slide part 2 and the inside thereof. ) Is inserted into the cylinder block 5 so as to be able to flow therein, and one side of the sealing double block 5 includes a nozzle block 14 having a plurality of nozzles and a male coupler to the male coupling insertion hole 13. The coupling block 11 having the stopper 12 to which the ring 10 is detachably fitted is mutually coupled, and one end of the bellows type expansion pipe 22 is connected to the flange 26 at the end of the slide portion 2. Fixed and the other end of the expansion pipe 22 is coupled to the pipe connection flange 18 which is connected to the female coupling cover 24 of the cylinder block 5,

Inside the bellows type expansion pipe 22, the guide pipe plate 110 is coupled to the pipe connection flange 18 connected to the arm coupling cover 24 of the cylinder block 5, the inner end of the slide portion (2) Installed to guide conductor 100 extending to the inner passage (2a) of the high-purity chemical, one side of the guide tube plate 110 is connected to the pipe connecting flange 18 and the earth wire 120 is made .

In this case, the conductor guide tube 100 is configured not to interfere with the inner passage (2a) of the slide unit 2, as well as to be separated from the inner passage (2a) even when the slide unit 2 moves forward as well as backward. do.

In addition, the guide pipe plate 110 of the conductor guide pipe 100 by pressing the bellows-type expansion pipe 22 between the pipe connection flange 18 to form a protruding gasket 112 to maximize the sealing effect It is composed.

In addition, on the circumference of the conductor guide tube 100 is formed by forming a plurality of long holes 105 in the longitudinal direction so that the high-purity chemical introduced between the guide tube 100 and the elastic tube 22 can move without stagnation. .

Of course, the plurality of long holes 105 may be formed to be divided into two parts in the longitudinal direction of the guide tube 100, as shown in the drawing, which can be variously formed in the form of multiple or single long holes.

As the reference numerals 8 and 9 denote position sensors, 15 denote injection holes, and 16 denote overflow outlets.

Next will be described the operation and action of the present invention described above.

The cylinder block 5, to which the conventional female coupling 1 is movably coupled, the nozzle block 14 for cleaning the mating surfaces of the female coupling 1 and the male coupling 10, The coupling block 11 for fixing the male coupling 10 is mutually coupled, and is connected to the slide portion 2 of the female coupling 1 and the female coupling cover 24 of the cylinder block 5. Both ends of the bellows type expansion pipe 22 are coupled to the pipe connection flange 18, and the male coupling 10 is inserted into the male coupling insertion hole 13 to fix the plurality of stoppers 12.

Then, the inside of the bellows-type expansion pipe 22 is inserted into the conductor guide pipe 100 for guiding the high purity chemical of the present invention, the guide pipe plate 110 and the pipe connection flange of the guide pipe 100 ( 18 is connected to the ground wire 120 with each other.

After the coupling of the female and male couplings (1) and (10) is completed in such a coupling manner, the operation of cleaning and drying the chemical liquid contact portion between the coupling portions is performed.

Then, since air is injected into one end of the cylinder block 11, the arm coupling 1 is moved back and forth so as to open and close the flow path.

More specifically, first, the ultrapure water is injected into the interior of the female and male couplings 1 and 10 through the injection hole 15 of the nozzle block 14 by the operation of a control panel (not shown). Inside the joint, i.e. the wetted part, is cleaned. The sprayed washing water is discharged through the overflow outlet 16 and the lower outlet (not shown), and the drying gas composed of high-purity nitrogen gas or clean compressed air is sprayed along the path where the washing water is sprayed again. Allow the inside of the ring to dry.

When the cleaning and drying is completed as described above, the slide portion 2 of the female coupling 1 is pushed out by the driving compressed air flowing into the forward air inlet hole of the cylinder block 5, and the slide portion 2 is coupled to the slide portion 2. The slide unit 2 is completely coupled to the male coupling 10 by horizontally moving until the combined portion 3 is simultaneously detected by the position sensor 9.

At this time, the tip of the guide tube 22 installed inside the bellows stretch tube 22 of the arm coupling 1 interferes with the inner passage 2a of the slide unit 2 even when the slide unit 2 moves forward. Not to be of course not to leave the state is not to leave.

In this state, when the transfer of the high purity chemical is started, the chemical is guided and transferred through a separate guide tube 100 installed inside the bellows-type expansion tube 22 of the female coupling 1. Therefore, as in the prior art, the chemical prevents the generation of static electricity generated while directly hitting the corrugated inner wall surface of the bellows-type telescopic pipe 22.

In other words, most of the high-purity chemicals are guided to the inside of the guide tube 100 to reduce the relative friction rate between the fluid and the inner side of the flexible tube 22 to prevent the occurrence of static electricity and to prevent the occurrence of static electricity. The minimum static electricity generated by the corresponding voltage according to the transfer friction is to be removed by grounding through the earth wire 120 connected to the conductor guide pipe 100.

In addition, the guide tube 100 and the bellows type expansion pipe 22 inside the chemical pipe between the bent groove of the expansion pipe is communicated through the long hole 105 formed in the longitudinal direction of the guide pipe 100 while being guided The fluid in the space between the 100 and the bellows-type telescoping tube 22 is not stagnant and is always washed to prevent contamination due to stagnation of the fluid.

In this manner, when the transfer of the chemical is completed, a transfer completion signal is transmitted to a control panel (not shown), and then the driving compressed air for reverse is supplied through the reverse air inlet hole of the cylinder block 5 to provide an arm coupling ( 1) is moved horizontally until the position sensor 8 is detected, so that the coupling of the female and male couplings 1 and 10 is released, so that the transport path of the chemical is completely blocked.

Then, after the inside of the coupling part, that is, the liquid contact part is cleaned and dried, the operator releases the stopper 12 to separate the male coupling 10 from the fastening block 11.

As described above, the electrostatic eliminator of the present invention installs a conductor guide tube for guiding the chemical inside the bellows-type telescopic tube installed in the female coupling, and connects an earth wire to one side thereof, so that the chemical corrugates the telescopic tube as in the prior art. By preventing the static electricity generated by hitting the inner wall surface of the earth as well as by removing the earth through the earth wire has the effect of maximizing safety by eliminating the cause of explosion or fire caused by the electric spark.

Claims (3)

An arm coupling (1) formed by coupling the valve member (4) and the spring-coupled coupling portion (3) to the slide portion (2) therein is inserted into the cylinder block (5) so as to be flowable. A fastening block having a nozzle block 14 having a plurality of nozzles on one side of the block 5 and a stopper 12 to which the male coupling 10 is detachably fitted into the male coupling insertion hole 13 ( 11) are coupled to each other, one end of the bellows type expansion pipe 22 is fixed to the end of the slide portion 2 by the flange 26, the other end of the expansion pipe 22 is the arm of the cylinder block (5) In the coupling to the pipe connection flange 18 connected to the coupling cover 24, Inside the bellows type expansion pipe 22, the guide pipe plate 110 is coupled to the pipe connection flange 18 connected to the arm coupling cover 24 of the cylinder block 5, the inner end of the slide portion (2) Installed to guide conductor 100 extending to the inner passage (2a) of the high-purity chemical, and connected to the pipe connection flange 18 and the earth wire 120 on one side of the guide tube plate 110 Electrostatic eliminating device of the arm coupling mounted to the automatic connection device of the high purity chemical transfer hose, characterized in that. The method of claim 1, High purity, characterized in that formed on the circumference of the guide tube 100 formed a plurality of long holes 105 in the longitudinal direction so that the high-purity chemical introduced between the guide tube 100 and the expansion tube 22 can move without stagnation. Electrostatic eliminator of arm coupling mounted on automatic connection device of chemical transfer hose. The method of claim 1, High purity chemical transfer, characterized in that the guide pipe plate 110 of the conductor guide pipe 100 is formed to protrude a gasket 112 to press the bellows-type expansion pipe 22 between the pipe connection flange 18. Static eliminator for arm couplings mounted on automatic couplings for hoses.

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