KR20060028620A - Ceramic heater and fabrication method thereof - Google Patents
Ceramic heater and fabrication method thereof Download PDFInfo
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- KR20060028620A KR20060028620A KR1020040077647A KR20040077647A KR20060028620A KR 20060028620 A KR20060028620 A KR 20060028620A KR 1020040077647 A KR1020040077647 A KR 1020040077647A KR 20040077647 A KR20040077647 A KR 20040077647A KR 20060028620 A KR20060028620 A KR 20060028620A
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- 239000000919 ceramic Substances 0.000 title claims abstract description 47
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 238000000034 method Methods 0.000 title abstract description 10
- 238000010438 heat treatment Methods 0.000 claims abstract description 60
- 239000011247 coating layer Substances 0.000 claims abstract description 34
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 31
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 29
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 25
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 25
- 238000001035 drying Methods 0.000 claims abstract description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 7
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 4
- 239000011230 binding agent Substances 0.000 claims description 2
- 239000011863 silicon-based powder Substances 0.000 claims description 2
- 239000002904 solvent Substances 0.000 claims 1
- 239000007858 starting material Substances 0.000 abstract description 11
- 229910052710 silicon Inorganic materials 0.000 abstract description 9
- 239000010703 silicon Substances 0.000 abstract description 9
- 239000002131 composite material Substances 0.000 abstract description 5
- 239000012299 nitrogen atmosphere Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 description 22
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 12
- 239000000843 powder Substances 0.000 description 7
- 239000002345 surface coating layer Substances 0.000 description 7
- 239000007789 gas Substances 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 230000035939 shock Effects 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910016006 MoSi Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910002060 Fe-Cr-Al alloy Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- UPHIPHFJVNKLMR-UHFFFAOYSA-N chromium iron Chemical compound [Cr].[Fe] UPHIPHFJVNKLMR-UHFFFAOYSA-N 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000010338 mechanical breakdown Methods 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/148—Silicon, e.g. silicon carbide, magnesium silicide, heating transistors or diodes
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/017—Manufacturing methods or apparatus for heaters
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
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- Organic Chemistry (AREA)
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Abstract
본 발명은 세라믹 발열체에 관한 것으로, 표면에 질화규소/탄화규소 복합재료로 된 코팅층을 포함한다. 상기 코팅층에 의하여 세라믹 발열체의 강도가 향상되고 절연 특성이 부여되어 가정용 기기 등 다양한 제품에 적용될 수 있다. 세라믹 발열체에 코팅층을 형성하는 방법은 출발물질로 탄화규소 및 규소를 발열체 표면에 도포한 후, 건조 과정을 거치고, 최종적으로 질소분위기에 열처리하여 반응결합된 질화규소/탄화규소 코팅층을 얻는다.The present invention relates to a ceramic heating element, which includes a coating layer of a silicon nitride / silicon carbide composite material on a surface thereof. By the coating layer, the strength of the ceramic heating element is improved, and the insulating property is provided, so that the coating layer can be applied to various products such as home appliances. In the method of forming a coating layer on the ceramic heating element, silicon carbide and silicon are coated on the surface of the heating element as a starting material, followed by a drying process, and finally heat treatment in a nitrogen atmosphere to obtain a silicon nitride / silicon carbide coating layer which is reacted and bonded.
세라믹발열체, 질화규소/탄화규소 코팅층, 점화기Ceramic heating element, silicon nitride / silicon carbide coating layer, igniter
Description
도 1은 본 발명의 실시예에 따른 세라믹 점화기를 보여주는 사진.1 is a photograph showing a ceramic igniter according to an embodiment of the present invention.
도 2는 본 발명에 따라 코팅층을 형성하기 위한 열처리 공정을 구체화한 그래프.Figure 2 is a graph embodying a heat treatment process for forming a coating layer according to the present invention.
도 3은 본 발명에 의하여 형성된 질화규소/탄화규소 코팅층의 상분석 그래프.3 is a phase analysis graph of the silicon nitride / silicon carbide coating layer formed according to the present invention.
도 4는 코팅층이 형성된 세라믹 발열체의 단면 사진.4 is a cross-sectional photograph of a ceramic heating element in which a coating layer is formed.
본 발명은 세라믹 발열체에 관한 것이며, 구체적으로 표면에 파괴 강도가 높고 절연 특성을 나타내는 코팅층이 형성된 세라믹 발열체에 관한 것이다.BACKGROUND OF THE
열기기에 있어서 전기에 의한 가열을 위해 금속발열체가 사용되어 왔으며, 금속발열체 재료로 저렴한 가격의 니크롬선, 철크롬선, 칸탈선(Fe-Cr-Al) 등이 사용되고 있다.Metal heating elements have been used for heating by electricity in hot air heaters, and inexpensive nichrome wire, iron chromium wire, and cantal wire (Fe-Cr-Al) are used as the metal heating material.
한편, 가정용 가스보일러, 온수기, 건조기, 주방용 렌지 등에 있어 가스의 안전한 점화를 위해 사용되는 점화기 및 공업용 노의 가열에 사용되는 히터 재료로서 세라믹 발열체가 널리 사용되고 있다. On the other hand, ceramic heating elements are widely used as heater materials used for heating of industrial furnaces and igniters used for safe ignition of gas in domestic gas boilers, water heaters, dryers, kitchen stoves, and the like.
대표적인 발열 세라믹 재료인 MoSi2 또는 SiC로 이루어진 세라믹 발열체는 비저항이 매우 낮기 때문에, 예를 들어 가정용 기기의 점화기로 사용될 경우, 가정용 선로 전압(110V 또는 220V) 하에서 돌입 전류가 매우 높다는 단점이 있다. 돌입 전류가 큰 발열체는 가정용 기기에 적합하지 않으므로 종래의 세라믹 발열체는 선로 전압으로부터 전압을 강하시키는 고가의 변압기를 사용하는 것이 요구되었다. Since the ceramic heating element made of MoSi 2 or SiC, which is a representative heating ceramic material, has a very low resistivity, for example, when used as an igniter of a household device, the inrush current is very high under the household line voltage (110V or 220V). Since a heating element having a large inrush current is not suitable for home appliances, conventional ceramic heating elements have been required to use expensive transformers that drop voltage from line voltage.
고가의 변압기를 사용하지 않고 저항을 높힘으로써 가정용 기기에 사용될 수 있는 세라믹 발열체에 대하여 연구가 활발하게 진행되고 있다. Research is actively being conducted on ceramic heating elements that can be used in home appliances by increasing resistance without using expensive transformers.
세라믹 발열체의 형태적인 설계 변화를 통하여 간단하게 저항을 증가시킬 수 방법이 있다. 즉, 발열체 재료의 두께를 감소시키고 전기가 통하는 경로를 증가시킴으로써 저항을 높이는 것이다. 이 경우, 저항의 증가로 인하여 돌입전류는 감소하지만, 반대로 기계적 파괴강도가 약하게 되어 제품의 구조적인 안정성에 취약하게 된다. There is a simple method of increasing the resistance through the change in the shape of the ceramic heating element. In other words, the resistance is increased by reducing the thickness of the heating element material and increasing the path through which electricity passes. In this case, the inrush current decreases due to the increase in resistance, but on the contrary, the mechanical breakdown strength becomes weak, making the product vulnerable to structural stability.
한편, 종래의 세라믹 발열체는 표면에서 전도성을 띄는데, 이로 인하여 전기기기 내에서 전기적인 단락을 야기하는 등 세라믹 발열체를 가정용 기기에 적용하는데 큰 위험성을 가지고 있었다.On the other hand, the conventional ceramic heating element is conductive on the surface, which causes a large risk in the application of the ceramic heating element in the home appliance, such as causing an electrical short in the electrical equipment.
따라서, 본 발명의 목적은 고전압용 점화기에 적용할 수 있도록 파괴강도가 높은 세라믹 발열체를 제공하는 데 있다. Accordingly, it is an object of the present invention to provide a ceramic heating element having high breaking strength to be applied to a high voltage igniter.
본 발명의 다른 목적은 전기적인 안정성을 확보하기 위하여 절연 특성을 가진 세라믹 발열체를 제공하는데 있다.Another object of the present invention to provide a ceramic heating element having an insulating property in order to ensure electrical stability.
본 발명의 또 다른 목적은 제조가 용이하며, 저가로 대량 생산이 가능한 세라믹 발열체 제조방법을 제공하는데 있다.Still another object of the present invention is to provide a method of manufacturing a ceramic heating element, which is easy to manufacture and can be mass-produced at low cost.
본 발명은 가스를 사용하는 보일러, 온수기, 건조기, 주방용 렌지 등에서 적용되는 세라믹 발열체에 관한 것으로, 표면에 파괴 강도가 높고 절연 특성을 나타내는 코팅층이 형성된 세라믹 발열체를 제공한다. The present invention relates to a ceramic heating element applied to a boiler, a water heater, a dryer, a kitchen stove using a gas, and provides a ceramic heating element having a coating layer having high fracture strength and insulating properties on its surface.
본 발명에 따른 세라믹 발열체는 기존에 사용되어 왔던 세라믹 히터나 세라믹 점화기는 물론, 기타 발열이 필요한 각종 기기에 다양한 형태로 적용될 수 있다.The ceramic heating element according to the present invention may be applied to various types of ceramic heaters or ceramic igniters that have been conventionally used, as well as various devices requiring heat generation.
세라믹 발열체 표면에 형성되는 코팅층은 다음과 같은 조건을 만족하여야 한다.The coating layer formed on the surface of the ceramic heating element must satisfy the following conditions.
i) 먼저, 세라믹 발열체는 적어도 1000oC 이상의 고온을 동반하므로 표면 코팅 층이 고온에서 발열체의 기지 물질과 반응이 일어나지 않아야 한다. 특히 내산화성을 필요로 한다. i) First, the ceramic heating element is accompanied by a high temperature of at least 1000 o C and therefore the surface coating layer should not react with the known material of the heating element at a high temperature. In particular, it requires oxidation resistance.
ii) 또한, 기지 물질과 표면 코팅 층의 열팽창 계수 차이가 크면, 발열체의 발열 시 표면 코팅 층에서 힐록(hillock)이 발생되거나 기지 물질과 표면 코팅 층이 분리(split)되는 현상이 발생한다. 따라서, 표면 코팅층은 가능한 기지 물질과 열팽창 계수가 비슷한 재료일 수록 유리하다.ii) In addition, when the thermal expansion coefficient difference between the base material and the surface coating layer is large, hillock occurs in the surface coating layer when the heating element is heated, or a phenomenon occurs in which the base material and the surface coating layer split. Thus, the surface coating layer is advantageous as the material has a similar coefficient of thermal expansion as possible known materials.
질화규소계 재료들은 고강도, 고인성 및 고온까지의 크립(creep) 저항성, 그리고 비교적 높은 경도와 열전도도 그리고 낮은 비중과 열팽창 계수라는 독특한 물성들의 조합을 가지며, 이러한 물성의 조합으로 인해 질화규소계 재료는 마모, 열충격 및 기계적 응력에 대해 우수한 저항성을 가지는 물성을 가진다. 고인성, 고강도 및 고경도를 가짐으로써, 질화규소계 재료는 절삭공구용 비트, 고성능 베어링, 그리고 내마모재로서 응용을 위한 연구가 한창이다. Silicon nitride based materials have a combination of high strength, high toughness and creep resistance up to high temperatures, and unique properties such as relatively high hardness and thermal conductivity, low specific gravity and coefficient of thermal expansion. It has physical properties with excellent resistance to thermal shock and mechanical stress. With high toughness, high strength and high hardness, silicon nitride based materials are being studied for application as cutting tools bits, high performance bearings and wear resistant materials.
한편, 질화규소와 탄화규소의 복합재료는 내산화성을 비롯한 고온강도 및 내열충격성이 뛰어난 재료로 알려져 있으며, 전기적으로 절연성을 갖는다.Meanwhile, a composite material of silicon nitride and silicon carbide is known as a material having excellent high temperature strength and thermal shock resistance including oxidation resistance, and has electrical insulation.
이와 같은 이유에서 본 발명에서는 질화규소/탄화규소의 복합재료를 세라믹 발열체를 위한 코팅층 재료로 사용한다. 질화규소/탄화규소의 복합재료를 코팅칭으로 사용하면 세라믹 발열체의 기지 성분이 탄화규소일 경우, 코팅층과의 열팽창 계수 차이를 매우 작게 할 수 있는 장점이 있다. For this reason, in the present invention, a silicon nitride / silicon carbide composite material is used as the coating layer material for the ceramic heating element. When the composite material of silicon nitride / silicon carbide is used as the coating name, when the known component of the ceramic heating element is silicon carbide, there is an advantage that the thermal expansion coefficient difference with the coating layer can be made very small.
본 발명에 따른 세라믹 발열체의 제조 과정은 크게 다음과 같은 단계를 거친다. The manufacturing process of the ceramic heating element according to the present invention is largely subjected to the following steps.
먼저, 소정 재료로 소정 형태의 세라믹 발열체를 준비하고, 이 발열체 표면에 출발물질로서 탄화규소 및 규소 분말이 함유된 용액을 도포하고, 질소 가스를 인가하면서 반응결합시켜 상기 발열체 표면에 질화규소/탄화규소 코팅층을 형성한 다.First, a ceramic heating element of a predetermined form is prepared from a predetermined material, and a solution containing silicon carbide and silicon powder as a starting material is coated on the surface of the heating element, and reacted and bonded by applying nitrogen gas to the surface of the heating element. A coating layer is formed.
이하에서는 고전압용 세라믹 점화기에 대한 실시예를 통하여 본 발명을 더욱 구체적으로 설명하지만 본 발명에 적용되는 분야는 이에 한정되지 않는다. Hereinafter, the present invention will be described in more detail with reference to an embodiment of a high voltage ceramic igniter, but the field to which the present invention is applied is not limited thereto.
본 발명에 따른 고강도 및 절연성 코팅층이 적용되는 세라믹 점화기(또는 히터) 재료로는 MoSi2, SiC, carbon 등 기존의 발열체 재료를 사용할 수 있으며, 다른 특별한 제한은 없지만 코팅층과의 열팽창 계수가 작은 물질이 사용되는 것이 좋다. 따라서, 탄화규소 계열의 재료로 이루어진 점화기가 열팽창 계수 차이가 적기 때문에 유리하다. 본 발명의 실시예에서 사용된 탄화규소로 이루어진 점화기를 도 1에 나타내었다. 도시된 바에 따르면, 전체적인 길이에 비하여 두께가 상대적으로 매우 얇은 것을 볼 수 있으며, 비발열부(2)(즉, 전원 인가 영역)로부터 발열부(1)에 이르는 경로가 매우 길어 저항이 클 것임을 예측할 수 있다. 반면, 두께가 비교적 얇으므로 기계적인 강도는 상당히 취약할 것으로 예상된다.As a ceramic igniter (or heater) material to which the high-strength and insulating coating layer according to the present invention is applied, conventional heating element materials such as MoSi 2 , SiC, and carbon may be used, and there is no particular limitation, but a material having a small coefficient of thermal expansion with the coating layer may be used. It is good to be used. Therefore, an igniter made of a silicon carbide series material is advantageous because there is little difference in coefficient of thermal expansion. An igniter composed of silicon carbide used in the embodiment of the present invention is shown in FIG. As shown, it can be seen that the thickness is relatively thin compared to the overall length, and the path from the non-heating unit 2 (that is, the power supply region) to the
코팅층의 출발물질로 사용하는 탄화규소 및 규소의 분말크기는 각각 1 ~ 200 ㎛, 및 1 ~ 200 ㎛ 이었다. 탄화규소 분말크기는 최종적인 질화규소/탄화규소 코팅 층의 밀도, 두께에 영향을 준다. 또한, 규소의 분말크기는 질화규소가 형성되는 양에 영향을 준다. 규소의 분말 크기가 감소할수록, 즉 표면적이 넓어질수록 질화반응은 활성화된다. 출발물질의 분말 크기가 작을수록 점화기에 도포시 기지 물질과의 접합이 유리하다. 반대로 분말 크기가 커질 수록 기지 물질과의 접합은 약하게 된다. 한편, 최종적인 코팅층에서 탄화규소 대 질화규소의 성분비가 9:1에서 5:5의 범위가 되도록 탄화규소 및 규소의 양을 조절한다. 코팅층의 주 성분은 탄화규소이지만, 질화규소의 양이 증가함에 따라 본 발명에서 달성하려는 효과, 즉 강도 및 절연 특성 측면에서 유리하다. 또한, 질화규소와 탄화규소의 성분 비율을 조절함으로써 열팽창 계수를 조절함으로 표면 코팅층의 열충격을 최소화 할 수 있다. The powder sizes of silicon carbide and silicon used as starting materials for the coating layer were 1 to 200 µm and 1 to 200 µm, respectively. The silicon carbide powder size affects the density and thickness of the final silicon nitride / silicon carbide coating layer. The powder size of silicon also affects the amount of silicon nitride formed. As the powder size of silicon decreases, that is, the surface area becomes larger, the nitriding reaction is activated. The smaller the powder size of the starting material, the better the bonding with the known material when applied to the igniter. Conversely, the larger the powder size, the weaker the bond with the known material. On the other hand, the amount of silicon carbide and silicon is adjusted so that the component ratio of silicon carbide to silicon nitride in the final coating layer is in the range of 9: 1 to 5: 5. The main component of the coating layer is silicon carbide, but it is advantageous in terms of the effect to be achieved in the present invention, namely strength and insulation properties, as the amount of silicon nitride increases. In addition, it is possible to minimize the thermal shock of the surface coating layer by adjusting the coefficient of thermal expansion by adjusting the ratio of the silicon nitride and silicon carbide components.
준비된 출발물질을 스펙트로밀(spectro-mill)을 사용하여 약 10분간 혼합하였다.The prepared starting material was mixed for about 10 minutes using a spectro-mill.
출발물질은 스프레이, 디핑(dipping) 등 다양한 방법으로 점화기 표면에 도포 가능하다. 본 발명의 실시예에서는 도포되는 분말의 균일한 코팅을 위해서 본 발명에서는 스프레이 법을 사용하였다.The starting material may be applied to the igniter surface in a variety of ways, such as by spraying or dipping. In the embodiment of the present invention, the spray method was used in the present invention for uniform coating of the powder to be applied.
스프레이에 있어서 출발물질을 점화기에 이동시키기 위한 이동액(vehicle liquid)으로는 에탄올, 메탄올, 증류수 등을 사용할 수 있으며, 특별한 한정을 요하지는 않는다. 본 발명의 실시예에서는 편의상 상온에서 휘발성이 우수한 메탄올을 사용하였다. 출발물질의 분말크기가 큰 경우에는 도포 과정에서 기지 물질과 접합이 약하기 때문에 이를 보완하고자 메탄올에 예를 들어 PVA 등의 바인더(binder)를 첨가할 수 있다. As the vehicle liquid for moving the starting material to the igniter in the spray, ethanol, methanol, distilled water, and the like may be used, and there is no particular limitation. In the embodiment of the present invention, methanol, which is excellent in volatility at room temperature, is used for convenience. When the powder size of the starting material is large, since the bonding with the known material is weak during the coating process, a binder such as PVA may be added to methanol to compensate for this.
출발물질과 메탄올을 혼합한 후, 스프레이를 사용하여 점화기 표면에 도포하였다. 코팅액을 도포한 후, 점화기를 건조기에서 3시간 동안 충분히 건조하였다. 이 과정에서 다른 물질은 모두 제거되고, 점화기 표면에는 출발물질만 잔류하였다. The starting material and methanol were mixed and then applied to the igniter surface using a spray. After applying the coating solution, the igniter was sufficiently dried in a dryer for 3 hours. In the process, all other material was removed and only the starting material remained on the igniter surface.
도포, 건조 과정을 반복함으로써 코팅층의 두께를 원하는 치수로 제어 가능하다. 코팅층의 두께를 조절하여 세라믹 발열체의 파괴강도를 조절할 수 있으며, 적절한 두께는 1㎛ ~ 200㎛ 이다.By repeating the application and drying process, the thickness of the coating layer can be controlled to a desired dimension. By controlling the thickness of the coating layer it is possible to control the breaking strength of the ceramic heating element, the appropriate thickness is 1㎛ ~ 200㎛.
상기 출발물질이 도포된 점화기를 진공로에서 열처리한다. 이 열처리 과정을 도 2에 상세하게 도시하였다. 먼저, 진공(약 10-4 torr)을 유지한 후, 400oC 에서 30분간 번아웃(burn-out) 공정을 수행한다(I 단계). 그 다음, 약 800oC에서 질소 가스 주입하여 퍼징(purging) 과정을 거친다(II 단계). 이어, 질소가스의 작업압력을 높인 후, 1200 ~ 1450oC 에서 0.5 내지 20시간을 유지한다(III 단계). 이 단계에서 코팅층 내의 규소와 외부 질소가 반응하여 다음과 같이 질화규소를 형성한다.The igniter to which the starting material is applied is heat treated in a vacuum furnace. This heat treatment process is shown in detail in FIG. First, a vacuum (about 10 -4 torr) is maintained, followed by a burn-out process at 400 ° C. for 30 minutes (step I). Next, nitrogen gas is injected at about 800 ° C. to purging (step II). Then, after increasing the working pressure of the nitrogen gas, it is maintained for 0.5 to 20 hours at 1200 ~ 1450 ° C (step III). In this step, the silicon in the coating layer and the external nitrogen react to form silicon nitride as follows.
3Si + 2N2 = Si3N4 3Si + 2N 2 = Si 3 N 4
이때, 잔류 규소가 존재하면, 점화기를 발열시킬 때 규소의 산화(Si+O2=SiO2) 가능성이 존재하기 때문에 규소가 완전히 질화규소로 반응할 정도로 충분한 반응 시간을 주는 것이 유리하다. 형성된 질화규소는 탄화규소 입자와 반응결합하여 질화규소/탄화규소 복합층을 형성한다.At this time, if residual silicon is present, it is advantageous to give a sufficient reaction time so that silicon completely reacts with silicon nitride because there is a possibility of silicon oxidation (Si + O 2 = SiO 2 ) when the igniter generates heat. The formed silicon nitride reacts with the silicon carbide particles to form a silicon nitride / silicon carbide composite layer.
마지막으로, 약 800oC 에서 질소 가스를 차단한 후, 상온까지 냉각한다(IV 단계). Finally, the nitrogen gas is shut off at about 800 o C and then cooled to room temperature (step IV).
이와 같은 과정을 통하여 파괴강도가 높고 절연성이 있는 질화규소/탄화규소 코팅층을 세라믹 점화기에 형성하였다. 형성된 질화규소/탄화규소 코팅층의 상분석 그래프를 도 3에 도시하였다. 탄화규소 및 질화규소 상들이 존재하는 것을 알 수 있다. 도 4에는 질화규소/탄화규소 코팅층이 형성된 세라믹 점화기의 단면 사진을 보여주고 있다. 점화기 표면에 코팅층이 견고하게 형성되어 있는 것을 볼 수 있다.Through this process, a silicon nitride / silicon carbide coating layer having high fracture strength and insulation was formed on a ceramic igniter. A phase analysis graph of the formed silicon nitride / silicon carbide coating layer is shown in FIG. 3. It can be seen that there are silicon carbide and silicon nitride phases. 4 shows a cross-sectional photograph of a ceramic igniter having a silicon nitride / silicon carbide coating layer formed thereon. It can be seen that the coating layer is firmly formed on the surface of the igniter.
본 발명에 따르면 세라믹 발열체에 고강도 및 절연 특성을 부여할 수 있다. 따라서, 가정용 상용 전압에서도 안정적으로 사용할 수 있으며, 기존의 발열체, 점화기로의 응용은 물론 강도가 요구되고, 절연성이 필요한 각종 기기에 널리 응용될 수 있다.According to the present invention, it is possible to impart high strength and insulation properties to the ceramic heating element. Therefore, it can be used stably even at home commercial voltage, and can be widely applied to various devices that require strength as well as application to existing heating elements and igniters.
본 발명은 특히 표면 코팅 층의 두께를 쉽게 변화할 수 있기 때문에 세라믹 발열체에서 필요로 하는 파괴강도로 조절이 가능하다. 또한, 탄화규소가 주 성분인 세라믹 발열체에서는 코팅층과 성분이 같기 때문에 열팽창 계수가 비슷하여 고온에서의 열적 피로나 파괴 등을 감소시킬 수 있다. In the present invention, the thickness of the surface coating layer can be easily changed, so that the breaking strength required by the ceramic heating element can be adjusted. In addition, in the ceramic heating element in which silicon carbide is the main component, since the components are the same as those of the coating layer, the thermal expansion coefficient is similar to reduce thermal fatigue or fracture at high temperatures.
또한, 본 발명의 질화규소/탄화규소 코팅층이 형성된 세라믹 발열체는 제조방법이 용이하고, 기존의 고온(1900oC 이상) 소결법이 아닌 반응 결합(약 1600oC 이하)을 이용하기 때문에 제조 단가가 낮고, 따라서 대량 생산에서 매우 유리하다.In addition, the ceramic heating element formed with the silicon nitride / silicon carbide coating layer of the present invention is easy to manufacture, and the manufacturing cost is low because it uses a reaction bond (about 1600 o C or less) rather than the conventional high temperature (1900 o C or more) sintering method Therefore, it is very advantageous in mass production.
Claims (6)
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010011003A1 (en) * | 2008-07-21 | 2010-01-28 | Lg Electronics Inc. | A steam head for cleanner |
| KR102367910B1 (en) * | 2021-02-03 | 2022-02-25 | 주식회사 에스플러스컴텍 | Planar heating element and clothing manager and cold/hot water purifier and floor heating panel including the same |
| US11594639B2 (en) | 2012-04-02 | 2023-02-28 | Samsung Display Co., Ltd. | Thin film transistor, thin film transistor array panel including the same, and method of manufacturing the same |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010011003A1 (en) * | 2008-07-21 | 2010-01-28 | Lg Electronics Inc. | A steam head for cleanner |
| US8731384B2 (en) | 2008-07-21 | 2014-05-20 | Lg Electronics Inc. | Steam head for cleaner |
| US11594639B2 (en) | 2012-04-02 | 2023-02-28 | Samsung Display Co., Ltd. | Thin film transistor, thin film transistor array panel including the same, and method of manufacturing the same |
| KR102367910B1 (en) * | 2021-02-03 | 2022-02-25 | 주식회사 에스플러스컴텍 | Planar heating element and clothing manager and cold/hot water purifier and floor heating panel including the same |
| WO2022169169A1 (en) * | 2021-02-03 | 2022-08-11 | (주)에스플러스컴텍 | Planar heating element, and clothing management apparatus, hot/cold water purifier and floor heating panel for building, comprising same |
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