KR20050051742A - High speed, great space laser finishing machine that control position by nano-meter scale - Google Patents

Abstract

The present invention provides a galvano-motor, a flat-field lens set, and a galvano to an XYZ-3 axis orthogonal robot equipped with a planar magnet-driven linear motor coupled with a guide that floats as a gas. Effectively combines a laser scanner consisting of a galvano-motor driver, and inserts a beam splitter in front of the reflector attached to the scanner's first galvano motor to image the search light from the machined surface onto the CCD camera element. Imagine and transmit the signal from the computer as an image signal, analyze it, and process it to dramatically reduce the welding, cutting, surface treatment, drilling, and marking of the desired shape. To implement a high-speed, large-space laser processing machine that precisely controls positions at a fast and nanometer scale;

XYZ-3 axis orthogonal robot equipped with a planar magnet driven linear motor coupled with a floating guide;

Efficiently combine a laser scanner with the orthogonal robot, insert a beam splitter in front of the reflector attached to the first galvano motor of the scanner,

The search beam is imaged to the CCD camera element through the beam splitter, and the signal from the beam splitter is transmitted to the computer as an image signal.

The video signal is received, analyzed and processed, and the large area is divided into the effective work space of the scanner as shown in FIG.

In the effective working space, the XY plane has a reference coordinate point of the scanner validating space, the scanner is in charge of the work,

The robot and the PZT are responsible for the movement of the reference coordinate point of the effective working space and the Z-axis movement that are different from the reference coordinate point of the effective working space, as shown in FIG.

When the voltage is applied between the robot and the laser scanner, the laser scanner body and the galvano motor, respectively, the piezo element (PZT) is changed in length,

All optical systems combined with the piezoelectric element (PZT) are precisely fixed in a stable state with a precision of several nanometers by attaching a separate and separate control device to minimize a change in refractive index due to air flow, temperature change, or air pressure change. Welding, cutting, surface treatment, drilling, marking information recording etc., using laser, solid laser, gas laser, semiconductor laser, liquid laser, Fiber lasers, COIL lasers and free electron lasers are used, and the oscillation method is used for acoustic optical (AO) Q-switching, electro-optical (EO) Q-switching, passive or active mode-locking, and electrical modulation. High-speed, large-space laser that controls position at nanometer level by controlling computer, microprocessor, robot and scanner by continuous oscillation at femto sec To provide the air.

Description

High speed, great space laser finishing machine that control position by nano-meter scale}

In the technical field of the present invention, first, the conventional orthogonal robot field has a maximum precision of 0.02mm of the ball screw type, which is a mechanical transfer method, so that more precise position control is difficult, but a plane magnet coupled with a guide that floats as a gas Using a linear motor, the XYZ-3 axis orthogonal robot can be configured to precisely control the position to hundreds of nanometers. The mechanical feed method has been limited in the processing area for precision due to the deflection due to the screw shaft's own load or the thermal deformation due to the temperature change in the place where it is used, but the linear motor using magnets compensates for this problem. . In laser processing, a laser must maintain a constant power while a robot must inevitably go through acceleration, constant velocity, and deceleration. At this time, the laser irradiation dose from the starting point to the constant velocity section is different, so the processing quality is different at each position within the section. The constant machining quality is maintained in the constant velocity section, and the same phenomenon occurs in the deceleration section as in the acceleration section. In addition, the feed speed is generally 1m / sec for the 20mm pitch ball screw type and 5m / sec for the linear motor type, but it is not economical to use at the maximum feed speed used in the machine due to its own load and mechanical limitations. As precision position control and machining become more common, the speed is gradually lowered, but in the field, a faster, more precise and economical machine is required.

Second, in the area of laser scanner using flat-field lens set, which is a combination of galvano motor and aspherical lens, the spot size of the beam must be increased even if the same laser is used to process the large area due to the characteristics of the laser. To reduce, the focal length is shorter and the working area is smaller. However, the laser scanner has a speed of moving the beam up to 10m / sec, and generates only a few hundred grams (g) of mass in itself without generating vibration. In addition, unlike orthogonal robots, acceleration and deceleration are almost negligible from the laser perspective, so that the processing quality between machining bulbs is kept constant.

Third, it is difficult to construct a precision of several nanometers by overcoming the precision of several hundred nanometers that can be realized by a planar magnet-driven linear motor coupled with a guide that floats with the gas. In general, the piezo element (PZT) varies in length of about 1 to 2 kV / mm. Even if the voltage is electrically controlled to about micro volts, it is 0 to several kV in microvolts to move the meter area in advance. It is not easy to configure a driver that can control up to, and it is not economical.

The present invention has been devised to solve the above problems, and its purpose is to precisely control the position up to hundreds of nanometers by using a planar magnet driven linear motor coupled with a guide that floats as a gas. XYZ-3 axis orthogonal robot, which can be adjusted within a micrometer by changing the length of the piezo element (PZT) by applying voltage, Z-axis, galvano motor, final axis of the robot, flat-field lens set It is inserted in between and coupled, and the beam splitter is inserted in front of the reflector attached to the galvano motor to form a device for extracting the image of the workpiece consisting of the CCD camera and the optical system, and transmits the image signal from the device to the computer. Analyze, analyze and process to find and align nanometer work locations, welding, cutting and surface shapes It can not only process drilling, drilling, marking, information recording, etc., but also process the image and continuously work by correcting the work order and position according to the state of the workpiece. It is not only possible to achieve nanometer-class ultra-precision machining, but also to achieve large space machining easily, and to achieve processing speed at least 10 times faster when the same precision is realized compared to the conventional linear motor robot method. do.

In order to achieve the above object, the present invention calculates a spot size of a laser to achieve a large area with a wavelength of a laser, and calculates the effective size of a scanner based on a galvano motor and a flat-field lens set. After division into XY planes inside the cell, the Cartesian robot and PZT move only to the cell and the specified coordinate points of the cell, and the work of the XY plane inside the cell is handled by a scanner consisting of a galvano motor and a flat-field lens set. In order to construct an ultra-precision processing that enables metric position control, and to make large-space processing easily, all the optical system parts are composed of air flow, temperature change, air pressure change, and refractive index change due to vibration. B. Sealing, vibration prevention, resonance phenomenon prevention, and separate control device for attaching a certain state to minimize position change The nanometer precision processing machine is provided, and the laser used should be a stable oscillation method of the pointing vector whose M ² (m square) value, which determines the beam quality, is between 1.0 and 2.0. Solid laser, gas laser, semiconductor laser, liquid laser, fiber laser, chemical laser, free electron laser and free electron laser are used depending on the type of material to be worked on. switching, electro-optical (EO) Q-switching, passive or active mode-locking, and electrical modulation. The pulse width is a laser from femto sec pulse laser to continuous oscillation. It is used according to the processing characteristics. The mechanical structures that make up the device use super invar, ceramic, and stone as the materials with the least thermal expansion due to temperature change. Laser heads are small and light lasers, such as diode lasers or solid-state lasers pumped by diode lasers, mounted in combination with a scanner on the Z axis, but large and heavy lasers are aligned on the robot's frame. Place and transmit using reflectors, and use a computer or a microprocessor to configure and control the various drivers used in this device, allowing for precise positioning control at the nanometer level used in semiconductor or nanotechnology. Composed of a large space laser processing machine It relates to people.

The configuration of the present invention for realizing this is as follows.

Precise position control in the nanometer-scale large-area laser processing machine, combined with a magnetically driven linear motor combined with a guide that rises as a gas, XYZ for precise position control up to several hundred nanometers The 3-axis orthogonal robot 1 is configured on the stable frame 2, and the piezoelectric element (PZT) 3 whose length changes when a voltage is applied is configured to be adjustable within a micrometer on the Z axis, which is the final axis of the robot. Insert and couple between the galvano motor (4) and the flat-field lens set (6), and insert the beam splitter (7) in front of the first optical path control reflector (5) attached to the galvano motor (CCD). 8) and an optical image extraction device of the work object consisting of the optical system (9), each device is configured by going through a driver or a macro processor or directly connected to the computer (13).

The operation of the present invention will be described with reference to the above configuration.

The nanometer precision position control large space laser processing machine calculates the spot size of the laser 10 to be formed with the wavelength of the laser in the manner as shown in FIG. 3 and the galvano motor and the flat-field based on the values. After dividing the cell into the size of the scanner effective working area of the lens set, the Cartesian robot and the PZT move only to the cell and the specified coordinate points of the cell, and the work of the XY plane inside the cell is performed by the galvano motor and the flat-field lens set. It is possible to control the position of the nanometer by being in charge of the scanner which is composed of the optical system and the CCD camera which is operated by at least 10 times faster when the same precision is realized compared to the conventional linear motor robot method. Each drive unit transmits, analyzes and processes the image signal from the image extraction device to the computer and compares it with the data already written. It processes signals by finding and aligning nanometer-class working positions by processing signals, or by processing already extracted images to process large spaces while continuously performing work order, position correction, and origin correction according to the state of the workpiece 11. The parts that make up all optical systems are airtight, anti-vibration, anti-resonance, separate control to maintain a certain state to minimize air flow, temperature change, air pressure change, refractive index change or position change due to vibration. By attaching the device, a few nanometer precision processing machine is provided, and the laser used is a stable oscillation method of the pointing vector whose M2 (m square) value, which determines the quality of the beam, is between 1.0 and 2.0. The laser head is a small and light laser, such as a diode laser or a solid state laser pumped by a diode laser. Combined with a scanner and mounted on the Z-axis, the large and heavy lasers are aligned together on the robot's frame and transmitted using reflectors (12). The mechanical structures that make up the nanometer-class precision processing machine have thermal expansion due to temperature changes. It uses the smallest materials such as super invar, ceramics, stone, or materials with length control, and uses a computer or microprocessor to configure and control the various drivers used in this device. It is a large-space laser processing machine compared to the working precision that enables the precise control of the nanometer grade used.

The present invention is a device that can perform nanometer-class precise position control and processing, but also laser processing a large space compared to precision, the configuration is very simple and easy to manufacture and economical, due to the acceleration and deceleration time of the existing robot Overcoming the limitations of work inhomogeneity and mechanical precision in the area, not only has the work speed dramatically increased compared to the work precision, but also significantly reduces vibration, abrasion, resonance and perturbation. It is a useful invention.

1 is a configuration diagram of the entire system of the present invention

2 is a flowchart of the configuration and operation algorithm of the present invention.

3 is an explanatory diagram of a large space and a cell of the present invention;

<Sign Description for Main Parts>

1. A magnetically driven linear motor combined with a guide that floats into the aircraft

2. Stable frame

3. Piezo element (PZT) whose length changes when voltage is applied

4. Galvano-motor

5. Laser control mirror

6.Flat field lens set

7. beam split mirror

8. Optical system for image forming on CCD camera

9. CCD camera

10. Laser

11.Work piece

12.mirror

13.Computer

Claims (2)

           XYZ-3 axis orthogonal robot with magnet driven linear motor coupled with airborne guide Efficiently combine a laser scanner with the orthogonal robot, insert a beam splitter in front of the reflector attached to the first galvano motor of the scanner, The search beam is imaged to the CCD camera element through the beam splitter, and the signal from the beam splitter is transmitted to the computer as an image signal. The XY plane inside the effective work area is divided into the effective work area of the scanner as shown in FIG. The XY plane inside the effective working area is the scanner is responsible for the work and the reference coordinate point of the effective working area, The movement of the reference coordinate point of the effective work area and the reference coordinate point of the other effective work is performed by the PZT configured to be controlled within a micrometer and the robot as shown in FIG. Between the robot and the laser scanner, between the laser scanner body and the galvano motor, the piezoelectric element (PZT) is used to control the combination within a micrometer, respectively, All optical systems combined with the piezoelectric element (PZT) are precisely fixed in a stable state with a precision of several nanometers by attaching a separate and separate control device to minimize the change in refractive index due to air flow, temperature change, or air pressure change. Welding, cutting, surface treatment, drilling, marking, recording, etc., using laser, solid laser, gas laser, semiconductor laser, liquid laser , Fiber laser, COIL laser and free electron laser. The oscillation method is acoustic optical (AO) Q-switching, electro-optical (EO) Q-switching, passive or active mode-locking, electrical pulse Width modulation, pulse width is continuous in femto sec, select oscillation according to work type, and control several nano by interworking with computer, micro processor, robot and scanner High speed, large space laser machine for metric position control. The laser 13 is a stable oscillation method in which a pointing vector having a value of M2 (m square), which determines a beam quality, is between 1.0 and 2.0, and the head is pumped by a diode laser or a diode laser. Small and light lasers (pumping solid lasers) are mounted with a scanner on the Z axis, and large and heavy lasers are aligned on the robot's frame and transmitted using reflectors, and the mechanical structure of a nanometer precision machine These are the materials that have the least thermal expansion due to temperature change. They are made of super inbar, ceramic, stone, or other materials whose length can be controlled. They use a computer or microprocessor to control and control various drivers used in this device. By constructing, precise nanometer-scale positioning systems used in semiconductors and nanotechnology Space for laser machining is possible.