KR20050040261A - Machining method and machining apparatus - Google Patents

Abstract

The present invention provides a processing method and a processing apparatus that can improve the processing efficiency and processing quality of the processing apparatus. Before machining, the NC control unit causes the X-axis drive unit to move the table according to predetermined inspection conditions. Thus, the NC control apparatus obtains the necessary stabilization time from the command-arrival time of the position command until the position response of the table is stabilized within a predetermined allowable range. Likewise, in the means for moving the drill in the Y-axis direction, the NC control device obtains the required stabilization time until the position response is stabilized within a predetermined allowable range. During processing, the drill is moved in the Z-axis direction to cut the printed circuit board as soon as the obtained stabilization time elapses.

Description

Processing method and processing device {MACHINING METHOD AND MACHINING APPARATUS}

The present invention relates to a machining method and a machining apparatus for machining a workpiece with a table on which a workpiece is mounted and a main axis for supporting the tool are moved relative to each other in the X-, Y- and Z-axis which are perpendicular to each other.

8 is a block diagram of a conventional printed circuit board processing apparatus. In FIG. 8, the printed circuit board 1 is fixed to the upper end of the table 2 provided with the lower plate 9. The table 2 can be moved as desired in the front-rear (X) direction by the X-axis drive device. The spindle 5 supporting the drill 4 can be moved as desired in the up and down (Z) direction by the Z-axis drive device 6. The Z-axis drive device 6 can be moved as desired in the left-right (Y) direction by the Y-axis drive device 7. Since each of the X-, Y-, and Z-axis drive devices 3, 7, 6 has a position detector not shown, the drive device can be accurately positioned at a predetermined position (coordinate) by feedback control.

In machining, the X-axis drive device 3 and the Y-axis drive device 7 are arranged such that the axis of the drill 4 is positioned on the axis of the drilling position 8 (perpendicular to the printed circuit board 1). It works. Thereafter, the spindle 5 is lowered to a predetermined height by the Z-axis drive device 6, and the printed circuit board 1 is drilled at a desired position. When the drilling is finished, the spindle 5 is raised and the drill 4 is returned to the standby position. Next, the operation is repeated until the processing is finished. Thus, the machining time is calculated as the sum of the X / Y-direction travel time and the Z-direction travel time.

The standby position of the drill 4 ensures that cutting chips are reliably discharged and that the front end of the drill 1 has a printed circuit board 1 to prevent interference with the printed circuit board 1 when the drill 4 moves horizontally. ) Is positioned at a distance away from the surface of The distance from the front end of the drill 4 in the standby position to the surface of the printed circuit board 1 is called the air-cut distance La. The value of the air-cut distance La is often determined by experience. The value determined according to the experience corresponds to the predetermined distance.

9 is a diagram showing the relationship between the position command of the X-axis drive device 3 and the actual position (response) on the horizontal axis representing the time axis. 10 is also a diagram showing the relationship between the position command and the actual position (response) of the X-axis drive device.

As shown in Fig. 9, the position response of the X-axis drive device 3 is delayed with respect to the X-axis position command. In addition, when stopped, the position response vibrates (overshoot or undershoot) with respect to the target position, and the X-axis drive device 3 gradually approaches the target position. The time required for the X-axis drive device 3 to reach the target position and stabilize the X-axis drive device within a predetermined allowable position error range is referred to as stabilization time Ts. On the other hand, the operation of the Y-axis drive device is the same as that of the X-axis drive device.

On the other hand, as shown in Fig. 10, since the load on the Z-axis drive is lighter than the load on the X-axis drive, the delay of the position response of the Z-axis drive device 6 to the Z-axis position command is delayed. (Position deviation) is smaller than the delay of the X-axis drive device 3. In addition, the acceleration time of the Z-axis drive device 6 is shorter. Therefore, the Z-axis drive device 6 generally descends at the speed determined by the processing conditions, and ascends at the maximum speed as soon as the drilling is completed.

11 is an explanatory diagram of a machining procedure of the present invention in which the machining speed can be improved. In order to shorten the machining time and improve the machining accuracy, the drill 4 is located as soon as the axis of the drill 4 is positioned on the axis (upper direction in the vertical direction) of the drilling position 8, as shown in FIG. That is, the printed circuit board 1 may be cut as soon as the stabilization time Ts elapses.

To this end, as disclosed in Japanese Patent Laid-Open No. 2002-166396, the present applicant has described that the drill 2 is placed at the machining position when the table 2 and the drill 4 move in the X-axis and Y-axis directions. The timing of positioning the axis is calculated from the travel distance, velocity and acceleration, and the invention is proposed in which the front end of the drill 4 reaches the top of the printed circuit board simultaneously with the end point of the stabilization time Ts.

In the present invention, assuming that the speed of the Z-axis drive device 6 is constant and that there is no delay in the positional response of the Z-axis drive device 6 to a predetermined command, the drill 4 is a substrate. The travel time Ta to reach the top of can be obtained from Equation 1 using the fall time Vz of the Z-axis drive device 6 and the air-cut distance La.

Ta = La / Vz ... Equation 1

here,

Simultaneous with the instruction arrival time of the X-axis if Ts = Ta;

After Ts-Ta has elapsed from the command arrival time of the X-axis when Ts> Ta; And

If Ta> Ts, then the previous time (Ta-Ts) of the instruction arrival time of the X-axis

The lowering of the Z-axis drive device 6 is started.

Also, in order to move to the next machining position, the X-axis drive device 3 and the Y-axis drive device 7 are operated simultaneously. Thus, the timing at which the Z-axis operation is started is determined later in accordance with the slower drive to reach the next machining position.

However, the timing obtained in the prior art is theoretically the timing. Actual processing equipment varies in characteristics. Moreover, even in the case of the same processing apparatus, the characteristic can change according to a moving direction, a moving start position, etc., for example. In addition, the characteristics may change depending on the maintenance state or the environment in which the apparatus is installed. Therefore, in order to keep the processing accuracy high, it may be necessary to measure the puncturing position accuracy of the actually punched printed circuit board. When performing the above measurement, improvement in processing efficiency cannot be expected due to the measuring step.

In order to solve the above problems in the prior art, it is an object of the present invention to provide a processing method and a processing apparatus that can improve the processing efficiency and the processing quality of the workpiece without going through the measuring step.

In order to achieve the above object, in an aspect of the present invention, there is provided a method for processing a workpiece by positioning the workpiece and the tool in directions perpendicular to each other in the X-, Y-, and Z-axes, wherein the method includes: Moving relative to the Z-axis corresponding to the axis of the tool in the X- and Y-axis directions, respectively; Examining positioning response characteristics in the X- and Y-axis directions with respect to the Z-axis; And positioning the tool in the X-axis direction according to the obtained positioning response characteristic.

In the above case, a plurality of measurement conditions for confirming the positioning response characteristic are set in advance. Further, the condition according to one of the moving start point, the moving direction, the moving speed, the moving acceleration and the moving distance is selected as the measurement condition. The position response characteristic used for positioning is selected from the data obtained by comparing the measurement conditions with the movement conditions to be used during machining. In addition, control parameters that can change the positioning response characteristic can be prepared in advance. In this case, the control parameter can be changed when the obtained data is not included in the predetermined range. Next, the positioning response characteristic is checked, and the tool is positioned axially according to the control parameter whose data obtained falls within the above range.

Further, at least one of the movement start time, the movement speed, and the movement start position at which the tool moves in the axial direction is controlled according to the obtained positioning response characteristic. At this time, the movement start position is a formula that uses the difference Tc between the movement time Ta, the stabilization time Ts and the falling speed Vz rather than the predetermined air-cut distance.

Lc = Vz (Ta-Ts)

It can be set shorter by the distance (Lc) obtained from. That is, the movement start position can be shortened by being set at the position indicated by the air-cut distance La-Lc.

In addition, the stabilization allowable range may be set according to the processing precision. In this case, the positioning response characteristics in the X-axis and Y-axis directions with respect to the Z-axis are checked within the set stabilization tolerance.

In another aspect of the present invention, there is provided a method of machining a workpiece by positioning the workpiece and the tool in directions perpendicular to each other in the X-, Y- and Z-axes, wherein the method includes the axis of the tool in the Z-axis before machining. Obtaining a delay in the Z-axis positioning response of the spindle for setting and supporting the tool; And the starting axis of the X-axis and the Y-axis at the time required for the front end of the tool inside the work to be lifted back to the surface of the work from the time when the front end of the tool reaches the cutting distance (cut-in end). And setting the time obtained by adding the delay of the Z-axis positioning response to.

According to still another aspect of the present invention, there is provided a moving table, comprising: moving means for machining a work by moving the table on which the work is mounted and the main axes supporting the tool relative to each other in the X-, Y- and Z-axis directions perpendicular to each other; Drive means for relatively moving the workpiece in the X- and Y-axis directions, respectively, with respect to the Z-axis corresponding to the axis of the tool before machining; Response characteristic detecting means for inspecting positioning response characteristics in the X- and Y-axis directions with respect to the Z-axis; And positioning control means for positioning the tool in the Z-axis direction in accordance with the obtained positioning response characteristic.

Further, in another aspect of the present invention, a moving means operable to process the work by moving the table on which the work is mounted and the main axes supporting the tool relative to each other in the X-, Y- and X-axis directions perpendicular to each other. ; Program storage means for storing the inspection program and the machining program; Analysis means for reading a program from the storage means and analyzing the read program; Pattern storage means for storing a pattern of a predetermined movement operation and a stabilization time; Pattern matching determination means for determining a match between the movement operation analyzed by the analysis means and the movement operation stored in the pattern storage means; Drive control means for moving the workpiece and / or the tool in the X- and Y-axis directions; Instruction generating means for creating a Z-axis descending instruction in the drive control means; And response analysis means for analyzing the positional response of the workpiece and / or tool of each axis driven by the drive control means, wherein the table and the tool are perpendicular to the Z-axis corresponding to the main axis with predetermined measurement conditions before machining. The required stabilization time is obtained until the positional movement of the moving means reaches and remains within the predetermined allowable range after the command-arrival time of the positioning command, The tool is characterized in that it moves in the Z-axis direction.

In this case, the processing apparatus further includes parameter storage means for storing a predetermined set of control parameters, wherein the drive control means obtains control parameters from the parameter storage means, and the work and / or tool in accordance with the control parameters. Move in the X- and Y-axis directions.

Further, the processing apparatus inspects the positioning response characteristics in two directions at the time of shipment, stores the obtained stabilization time in the pattern storage means, and compares the stored stabilization time with the stabilization time inspected after installation to determine the installation state. The control means may further include determining. In this case, the processing apparatus is provided with a determination function for determining the installation state.

At this time, the control means judges that the predetermined position of the base supporting the apparatus is impaired when the stabilization time varies widely according to the coordinate value of the movement start point inspected after installation. In addition, the control means can estimate the installation state and / or floor stiffness by determining the swing of the device according to the overshoot / undershoot magnitude and stabilization time of the response waveform inspected after installation.

Further, for example, when using a drill as a tool and a printed circuit board as a work, the processing method has a function as a printed circuit board punching method and the processing apparatus has a function as a printed circuit board punching device.

Next, the present invention will be described with reference to the embodiments shown in the accompanying drawings.

1 is a connection diagram of an X-axis control device according to the present invention, Figure 2 is a processing block diagram of the NC control device according to the present invention. In these drawings, the same parts as those in the prior art shown in FIG. 8 are denoted by the same reference numerals, and thus redundant description of these parts will be omitted.

In FIG. 1, the X-axis control device is composed of an NC control device 51, a drive control device 52, and a servo amplifier 53. The NC control device 51 outputs a position command to the drive control device 52 and receives a position response of the table 2 from the drive control device 52. In response to a command from the NC control device, the drive control device 52 operates the X-axis drive device 3 via the servo amplifier 53 to position the table 2. The position detector 54 outputs the current position of the table 2 to the drive control device 52.

As shown in FIG. 2, the NC control device 51 includes a storage unit 61, a program reading / analysis unit 62, a pattern / stabilization time storage unit 63, a pattern matching determination unit 64, and an operation command. And a creating unit 65, a response analyzing unit 66, a warning display unit 67, a control parameter setting unit 68, a switch unit 70, and the like. The storage unit 61 stores an inspection program, a machining program for performing matching, and the like. In each inspection program, inspection conditions described later are written. The program reading / analysis section 62 reads a program from the storage section 61 and analyzes the read program. The pattern / stabilization time storage section 63 allows the X-axis drive device 3 to stabilize within a predetermined allowable position error range from a predetermined pattern of the movement operation and an X-axis positioning command that has reached a desired position. Remember the stabilization time required until. The pattern matching determination unit 64 determines a matching between the analyzed movement operation and the movement operation according to the inspection condition stored in the pattern / stabilization time storage unit 63. The operation command creation unit 65 creates an X-axis descending command in the drive control device 52 that operates the X-axis drive device 3. The response analyzer 66 analyzes the response of the X-axis drive device 3. The warning display unit 67 displays a predetermined warning. The control parameter setting unit 68 stores a predetermined control parameter set. The switch unit 70 connects the response analyzer 66 to the warning display unit 67 or to the control parameter setting unit 68.

The NC control device 51 thus configured executes the operation as shown in the following steps 1 to 8. In this specification, a side of the switch part 70 shall be connected.

Step 1:

In response to the matching command, the NC control device 51 reads and stores the inspection program previously output from the storage unit 61. The NC control device 51 causes the operation command creation unit 65 to write a command to the drive control device 52 through the pattern matching determination unit 64 and passes through the servo amplifier 53 to the X-axis drive device 3. ). The inspection program is, for example, as shown in Table 1, for each of the X-axis drive device 3 and the Y-axis drive device 7 speed, acceleration, movement direction, movement start coordinate values, stop position coordinates Specifies the factors that affect the characteristics at standstill, such as a value. In addition, in Table 1, since acceleration can be set to a fixed value, acceleration is abbreviate | omitted.

Table 1

Test Condition X-axis Speed Move Direction Move Start Stop Position

             (m / min) Coordinate Value Coordinate Value

     1 30 + 0 1

     2 30 + 0 5

     3 30 + 0 10

     4 30 + 0 20

     5 40 + 0 1

     6 40 + 0 5

     7 40 + 0 10

     8 40 + 0 20

     9 30-100 80

    10 30-100 50

     . . . . .

     . . . . .

     . . . . .

Step 2:

When one inspection program is executed, the NC control device 51 causes the response analyzer 66 to analyze the response (position response) of the X-axis drive device 3 to calculate the stabilization time Ts. For example, the stabilization time Ts is calculated by the following method. That is, stabilization is determined according to whether or not the positional deflection is located within a predetermined allowable range for a predetermined time. Thus, the time required for the position deflection to fall within the predetermined allowable range from the command-arrival time at which the positioning command reaches a value determined from the desired position is calculated as the stabilization time Ts. In addition, when the stabilization time Ts calculated by the response analyzer 66 and the magnitude of the overshoot or undershoot of the response waveform described in FIG. 9 exceed a predetermined threshold, a warning is issued by the warning display 67. Is displayed to notify the operator that an abnormality has occurred in the device.

Step 3:

The set of inspection conditions and the obtained stabilization time Ts are stored in the pattern / stabilization time storage unit 63.

Step 4:

When other inspection conditions remain, the operation of steps 1 to 3 is repeated, and the inspection conditions and the obtained set of stabilization time Ts are stored in the pattern / stabilization time storage 63.

When the operation so far is finished, the actual machining is started.

Step 5:

Next, the NC control device 51 reads the actual machining program from the storage unit 61, and causes the program reading / analysis unit 62 to analyze the contents of the actual machining program.

Step 6:

The NC control device 51 causes the pattern matching determination unit 64 to determine a match between the analyzed movement operation and the movement operation according to the inspection condition supported by the pattern / stabilization time storage unit 63. Therefore, the stabilization time Ts that matches or closest to the inspection condition is read out from the pattern / stabilization time storage 63.

Step 7:

The NC control device 51 uses the air command distance 65 to determine the substrate top arrival time Ta of the drill 4 from Equation 1 using the air-cut distance La and the Z-axis lowering speed Vz. The optimum Z-axis falling time t is calculated using the stabilization time Ts read out from the storage unit 63, and a command is written to the drive control device 52.

Step 8:

The drive control device 52 operates the X-axis drive device 3 in accordance with the instruction made in step 7.

The operation of steps 5 to 8 is repeated until the processing is finished.

On the other hand, when the b side of the switch unit 70 is connected, that is, when the control parameter setting unit 68 is connected, the operation is executed as follows.

When the control parameter setting unit 68 is connected to the response analysis unit 68, no alarm is displayed on the alarm display unit 67, and the control parameter set previously stored in the control parameter setting unit 68 is selected. The control parameter currently set in the drive control device 52 is replaced with the selected control parameter. Next, execute steps 1 and 2 again to observe the response waveform of the selected control parameter. When the overshoot of the response waveform, the magnitude of the undershoot, and the like are parameter sets within a predetermined threshold, they are processed using the selected control parameter. When the desired result cannot be obtained, another control parameter is selected.

Even when the above operation is repeated, in the absence of an appropriate set of parameters, an abnormality occurs in the apparatus, or the installation state of the apparatus is often worsened. Therefore, the NC control apparatus 51 causes the warning display part 67 to display a warning, and notifies the apparatus that an abnormality has occurred.

The Z-axis drive device 6 operates as follows. 3-7 is explanatory drawing which shows the position of the drill which makes a time axis a horizontal axis.

Example 1: In the case where the top end arrival time (Ta) of the drill 4> stabilization time (Ts)

In the prior art, the drill descends at a speed Vz as shown by the dashed line in FIG. On the other hand, according to the present invention, the drill 4 is lowered at the speed Vz1 (Vz1> Vz) obtained in the following formula 2 as shown by the solid line in FIG.

Vz1≥La / Ts ... Equation 2

Therefore, processing efficiency can be improved.

3, it is assumed that the Z-axis drive device 6 has no response delay. In practice, however, there is also a response delay in the Z-axis drive device 6. Thus, as shown in Fig. 4, the optimum Z-axis falling timing t is calculated according to the value obtained by adding the delay time Td to the travel time obtained in step 7, and this calculated timing t The drill descends. Therefore, processing accuracy can be improved without degrading processing precision.

Further, without changing the lowering speed of the drill 4, the difference Tc between the travel time Ta and the stabilization time Ts is obtained from the following equation (3), and the air-cut distance La is a solid line in FIG. As shown by, the distance Lc is shortened. The drill then descends at that position. In this way, processing efficiency can be improved compared to the prior art shown by the dashed lines in FIG.

 Lc = Vz (Ta-Ts) ... Equation 3

Example 2: When Machining Precision Is Required

When high processing precision is required, the stabilization tolerance is narrowed down in advance as shown by the solid line in FIG. Next, the stabilization time Ts is observed in this state. Therefore, the processing accuracy can be improved and the processing efficiency can be improved.

Conversely, when high processing precision is not required, the stabilization tolerance is widened in advance as shown by the dashed lines in FIG. Therefore, processing efficiency can be improved.

Conventionally, the time which removes the drill 4 from a board | substrate was not considered. However, as soon as the drill 4 is removed from the substrate, when the X-axis drive device 3 and the Y-axis drive device 7 operate, the machining efficiency can be improved.

In the above embodiment, when the stabilization time Ts calculated in step 2 and the magnitude of the overshoot or undershoot of the response waveform deviate from a predetermined threshold, the operator knows that an abnormality has occurred in the apparatus. Therefore, processing defects can be prevented beforehand.

Next, the case where the x-axis moving device and the Y-axis moving device are controlled based on the operation of the Z-axis moving device will be described.

In machining, the time taken for the drill 4 to rise from the position where the drill 4 reaches the machining depth to the surface of the printed circuit board is determined by the position of the Z-axis drive device 6 (or the main shaft supporting the drill). Calculate based on the output of the position detector to detect. At the same time, the response delay of the Z-axis drive device 6 is obtained according to the positional response of the Z-axis drive device. Next, as shown by the solid line in FIG. 7, the front end of the drill 4 is cut off from the point at which the front end of the drill 4 reaches the cutting distance Ld from the surface of the printed circuit board. The X-axis drive device 3 and the Y-axis drive device 7 operate as soon as the time obtained by adding the response delay of the Z-axis drive device to the time taken to rise by.

In this way, the X-axis drive device 3 and the Y-axis drive device 7 operate with the drill 4 completely separated from the printed circuit board 1. Therefore, breakage of the drill 4 can be prevented, and at the same time, processing efficiency can be improved as compared with the prior art shown by the broken line in FIG.

In addition, the present invention not only improves the machining precision and the machining speed, but also the present invention is effective in the following cases.

That is, the settling time Ts obtained at the time of installation is compared with the settling time Ts measured before shipment. In this way, the quality of the installation state can be determined. The determination is performed by the pattern matching determination unit 64, for example. Further, the determination can be executed by the CPU of the NC control apparatus, not shown.

In addition, when changing the stabilization time Ts extensively according to the coordinate value of the start point of movement, it can be easily determined that there is an abnormality in a specific position of the base supporting the apparatus.

It is also possible to determine the swing of the device from the overshoot / undershoot magnitude and stabilization time Ts of the response waveform. Therefore, the installation state and floor rigidity can be estimated.

The present invention is also applicable to a processing apparatus in which the table 2 moves in two directions, namely in the X- and Y-directions.

As mentioned above, according to the present invention, the processing apparatus actually operates under predetermined conditions before processing. Thus, the current state of the processing apparatus can be grasped appropriately. The machining operation is executed in accordance with the obtained result. Therefore, high speed and high precision machining can be realized without having to measure the accuracy of the puncture position.

In addition, it is possible to detect deterioration in accuracy or change in the setting state due to the setting state, aging, etc. at the time of installation. Therefore, not only the machining defect can be prevented in advance, but also the processing efficiency is improved.

1 is a connection diagram of an X-axis control device according to the present invention.

2 is a processing block diagram of the NC control apparatus according to the present invention.

3 shows a relationship between a drill and an X-axis moving device according to the invention.

4 shows a relationship between a drill and an X-axis moving device according to the invention.

5 shows a relationship between a drill and an X-axis moving device according to the invention.

6 shows a relationship between a drill and an X-axis moving device according to the invention.

7 shows the relationship between the drill and the X-axis movement device according to the invention.

8 is a configuration diagram of a printed circuit board processing apparatus used in the prior art.

9 is a diagram showing a relationship between a movement position command and an actual position of the X-axis drive device.

10 is a diagram showing a relationship between a movement position command and an actual position of the Z-axis drive device.

11 is an explanatory diagram of a prior art.

Claims (19)

In the machining method for positioning the workpiece and the tool in the X-, Y- and Z-axis direction perpendicular to each other and machining the workpiece, Prior to machining, moving the workpiece relatively in the X- and Y-axis directions, respectively, with respect to the Z-axis corresponding to the axis of the tool, Examining a positioning response characteristic with respect to the Z-axis in the X- and Y-axis directions, and Positioning the tool in the Z-axis direction according to the obtained data of the positioning response characteristic. Processing method comprising a. The method of claim 1, And a plurality of measurement conditions for confirming the positioning response characteristics are set in advance. The method of claim 2, The measuring conditions are defined in accordance with at least one of a moving start point, a moving direction, a moving speed, a moving acceleration, and a moving distance. The method of claim 2, And said positioning response characteristic is selected from said data obtained by comparing said specific condition with a movement condition to be used during processing. The method of claim 1, A control parameter capable of changing the positioning response characteristic is prepared in advance, the control parameter is changed when the obtained data is not within a predetermined range, the positioning response characteristic is checked, and the tool is obtained. A machining method in which data is positioned in the axial direction according to the control parameter within the range. The method of claim 1, At least one of a movement start time, a movement speed, and a movement start position at which the tool moves in the Z-axis direction is controlled according to the obtained positioning response characteristic. The method of claim 6, The starting position of the movement is expressed by using the difference Tc and the falling speed Vz between the movement time Ta and the stabilization time Ts rather than a predetermined air-cut distance. Lc = Vz (Ta-Ts) The machining method is set as shorter as the distance (Lc) obtained from. The method of claim 1, The stabilization tolerance is set according to the machining precision, and the positioning response characteristic with respect to the Z-axis in the X- and Y-axis directions is checked within the set stabilization tolerance. In the machining method for machining the workpiece by positioning the workpiece and the tool in the X-, Y- and Z-axis direction perpendicular to each other, Before machining, setting the axis of the tool to the Z-axis and obtaining a delay in the Z-axis position response of the main axis supporting the tool, and The starting end of the X- and Y-axes moves the delay of the Z-axis position response of the main axis from the point at which the front end of the tool reaches the cutting distance to the surface of the work. Setting at the point of time obtained by adding to the time required to be lifted again Processing method comprising a. The method according to any one of claims 1 to 9, The tool is a drill. The method according to any one of claims 1 to 9, And said workpiece is a printed circuit board. Moving means operable to machine the work by moving the table on which the work is mounted and the main axes supporting the tool in the X-, Y- and Z-axis directions perpendicular to each other; Drive means for moving the workpiece relative to the Z-axis corresponding to the axis of the tool in the X-axis direction and the Y-axis direction, respectively, before machining; Response characteristic detection means for examining a positioning response characteristic in the X- and Y-axis directions with respect to the Z-axis; And Positioning control means for positioning the tool in the Z-axis direction according to the obtained positioning response characteristic Processing apparatus comprising a. Moving means operable to machine the work by moving the table on which the work is mounted and the main axes supporting the tool in the X-, Y- and Z-axis directions perpendicular to each other; Program storage means for storing the inspection program and the machining program; Analysis means for reading the program from the storage means and analyzing the read program; Pattern storage means for storing a pattern of a preset movement operation and a stabilization time; Pattern matching determination means for determining a match between the movement operation analyzed by the analysis means and the movement operation stored in the pattern storage means; Drive control means for moving the workpiece and / or the tool in the X- and Y-axis directions; Instruction generating means for creating a Z-axis descending instruction in the drive control means; And Response analysis means for analyzing the positional response of the workpiece and / or the tool with the respective axes driven by the drive control means Including, Before machining, the stabilization time required to move the table and the tool in two directions perpendicular to the Z-axis corresponding to the main axis under predetermined measurement conditions, and for the position response of the moving means to reach within a predetermined tolerance range. Is obtained after reaching the command of the positioning command, and during machining, the tool is moved in the Z-axis direction according to the obtained stabilization time. Processing equipment. The method according to claim 12 or 13, Further comprising parameter storage means for storing a predetermined control parameter, The drive control means obtains the control parameter from the parameter storage means and moves the workpiece and / or the tool in the X-axis direction and the Y-axis direction according to the control parameter. Processing equipment. The method according to claim 12 or 13, A control means for inspecting the positional response characteristics of the two directions at the time of shipment, storing the obtained stabilization time in the pattern storage means, and comparing the stored stabilization time with the stabilization time inspected after installation to determine the installation state; Processing device further including. The method of claim 15, And the control means determines that an abnormality has occurred at a predetermined position of the base supporting the apparatus when the stabilization time varies widely according to the coordinate value of the movement start point inspected after installation. The method of claim 16, And the control means determines the installation state and / or floor stiffness by determining the swing of the device according to the overshoot / undershoot magnitude and the stabilization time of the response waveform inspected after installation. The method according to any one of claims 12 to 17, The tool is a drill. The method according to any one of claims 12 to 17, And said workpiece is a printed circuit board.