CN1321779C - Processing device and detecting method for processing result - Google Patents

Processing device and detecting method for processing result Download PDF

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Publication number
CN1321779C
CN1321779C CNB021190984A CN02119098A CN1321779C CN 1321779 C CN1321779 C CN 1321779C CN B021190984 A CNB021190984 A CN B021190984A CN 02119098 A CN02119098 A CN 02119098A CN 1321779 C CN1321779 C CN 1321779C
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China
Prior art keywords
supporter
instrument
processing
relative position
determination data
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CN1377756A (en
Inventor
今井隆浩
斋藤正好
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Seiko Epson Corp
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Seiko Epson Corp
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Abstract

This machining device has a relatively movable tool 20, and a support 10. Positions of the tool 20 and the support 10 are measured by XYZ sensors 32, 34 and 36, and a measured data storage part 42 stores measured data. A specified data storage part 44 stores specified data when the machining result is acceptable. An operation part 52 determines the acceptability of the machining result by comparing the measured data with the specified data. A processing part 50 executes processing corresponding to an acceptability determining result.

Description

Processing unit (plant) and detecting method for processing result
Technical field
The present invention relates to a kind of processing unit (plant) and detecting method for processing result.
Background technology
In processing unit (plant), use FEEDBACK CONTROL.For example, measure the position of the workpiece (machined object) in the processing, the feedback measurement result is revised the location of workpiece.But, because in FEEDBACK CONTROL, follow error, so be necessary after processing, to detect whether correctly processing.Therefore, except the location of workpiece analyzer of feedback usefulness, also need detector (analyzer).In addition, in the sampling check of only in the part of a large amount of workpiece, checking, exist and not only can not carry out tight inspection, and before checking, make the problem of substandard products continuously.
Summary of the invention
In order to address this problem, the object of the present invention is to provide the detection method of a kind of processing unit (plant) and processing result, after process finishing, just do not check once more and can detect processing result.
(1) processing unit (plant) of the present invention comprises: supporter, can relatively move, and support the instrument and the described workpiece of processing work;
Analyzer is measured the relative position of described instrument and described supporter;
The determination data storage part is stored the determination data of described analyzer;
The specified data storage part, storage is as the specified data of the described determination data of measuring under the qualified situation of processing result of described workpiece;
Operational part, whether qualified more described determination data and described specified data carry out processing result the judgement of described workpiece; With
Handling part carries out the processing corresponding to the result of the whether qualification determination of described operational part.
In the present invention, both mobile supporter was come in the setting tool position, and also Move tool is come in the position of fixed support body, or mobile both sides' position.In addition, what is called locates and comprises mensuration displacement and direction of displacement from the off.Come ad-hoc location according to starting point and displacement and direction of displacement.According to the present invention, whether qualified comparative measurements data and specified data carry out processing result the judgement of workpiece, carry out the processing corresponding to this result.Therefore, after the process finishing of workpiece, need not just check once more and can detect its processing result.
(2) in this processing unit (plant), also comprise:
First dirver is in order to determine the position of described workpiece, the relative position of moving described instrument and described supporter; With
Second driver, the relative position of moving described instrument and described supporter is to describe to be used to process the track of described workpiece.
In view of the above, the position of using two drivers to carry out workpiece is determined and processing.
(3) in this processing unit (plant),
Described first dirver comprises the X drive division, moves the relative position of described instrument and described supporter along X-axis; With the Y drive division, along the relative position of moving described instrument of y-axis shift and described supporter, described XY axle is vertical,
Described second driver comprises the Z drive division, moves the relative position of described instrument and described supporter along described track.
In view of the above, determine the position of workpiece by the two-dimensional coordinate system of in the XY axle, setting.In addition, along the track that relatively moves of instrument and supporter, workpiece is processed.
(4) in this processing unit (plant),
Described analyzer comprises: the X sensor, measure described instrument and with respect to described supporter one side's position along the opposing party of described X-axis; The Y sensor is measured described instrument and with respect to described supporter one side's the position along the opposing party of described Y-axis; With the Z sensor, measure described instrument and with respect to described supporter one side's position along the opposing party of described track.
In view of the above, the position of workpiece can be measured two-dimensionally, the position that is used for processing work can be measured along track by the Z sensor by the XY sensor.
(5) in this processing unit (plant),
Described determination data comprises the X measured value that described X sensor is measured; The Y measured value that described Y sensor is measured; Z measured value with described Z sensor mensuration.
(6) in this processing unit (plant),
Described specified data comprises representational tool and with respect to the opposing party's of described supporter one side the X setting along the position of described X-axis; Representational tool and with respect to the opposing party's of described supporter one side Y setting along the position of described Y-axis; Representational tool and with respect to the opposing party's of described supporter one side Z setting along the position of described track.
(7) in this processing unit (plant),
When the relative position of described instrument and described supporter arrived first reference value along described track, described determination data storage part began to store described determination data,
When the relative position of described instrument and described supporter arrived second a reference value along described track, described determination data storage part finished the described determination data of storage,
When the relative position of described instrument and described supporter for after by described first reference value, before described second a reference value of arrival the time, can carry out the processing of described workpiece.
In view of the above, during the processing that comprises workpiece during in, carry out the storage of determination data.Therefore, can detect the location of workpiece in the processing.
(8) in this processing unit (plant),
After described determination data storage part finished the described determination data of storage, whether qualified described operational part carried out described judgement.
In view of the above, because carry out the qualified judgement of right and wrong simultaneously, so but the burden of alleviator with storing measurement data.
(9) in this processing unit (plant),
Described specified data is the value specific according to scope,
Described operational part judges that described determination data is whether in the scope of described specified data.
In view of the above, allow error to a certain degree, can carry out whether qualified judgement.
(10) in this processing unit (plant),
Described analyzer was measured in a plurality of moment, obtained a plurality of described determination datas, the described a plurality of determination datas of described determination data storage portion stores.
(11) in this processing unit (plant),
It is under the underproof situation that the processing of described handling part is included in the qualified result of determination of described right and wrong, stops the processing of processing.
In view of the above, can manage the processing of workpiece automatically.
(12) in this processing unit (plant),
The efferent that also comprises the result of exporting described handling part.
(13) in this processing unit (plant),
Also comprise the auxiliary storage portion that preserves at least a portion among described determination data, described specified data and the described whether qualification determination result.
In view of the above, can manage the machining state data of workpiece.
(14) detection method of processing result of the present invention comprises: by the support body supports workpiece, during the described workpiece by tool processes, analyzer is measured the relative position of described instrument and described supporter at least,
The determination data that the described analyzer of determination data storage portion stores obtains,
Relatively be stored in the specified data in the specified data storage part and the described determination data of described analyzer practical measurement in advance as the described determination data of under the qualified situation of the processing result of described workpiece, measuring, whether qualified operational part carry out processing result the judgement of described workpiece
Whether qualified handling part carry out the processing corresponding to described result.
In the present invention, both mobile supporter was come in the setting tool position, and also Move tool is come in the position of fixed support body, or mobile both sides' position.In addition, what is called locates and comprises mensuration displacement and direction of displacement from the off.Come ad-hoc location according to starting point and displacement and direction of displacement.According to the present invention, whether qualified comparative measurements data and specified data carry out processing result the judgement of workpiece, carry out the processing corresponding to this result.Therefore, after the process finishing of workpiece, need not just check once more and can detect its processing result.
(15) in the detection method of this processing result, also comprise:
First dirver moves the relative position of described instrument and described supporter, to determine the position of described workpiece; With
Second driver moves the relative position of described instrument and described supporter, to describe to be used to process the track of described workpiece.
In view of the above, the position of using two drivers to carry out workpiece is determined and processing.
(16) in the detection method of this processing result,
Described first dirver is along the relative position that at least one side of vertical X-axis and Y-axis moves described instrument and described supporter,
Described second driver moves the relative position of described instrument and described supporter along described track.
(17) in the detection method of this processing result,
Described determination data comprises representational tool and with respect to the opposing party's of described supporter one side the X measured value along the position of described X-axis; Representational tool and with respect to the opposing party's of described supporter one side Y measured value along the position of described Y-axis; Representational tool and with respect to the opposing party's of described supporter one side Z measured value along the position of described track.
In view of the above, determine the position of workpiece by the two-dimensional coordinate system of in the XY axle, setting.In addition, according to the track that relatively moves of instrument and supporter, workpiece is processed.
(18) in the detection method of this processing result,
Described specified data comprises representational tool and with respect to the opposing party's of described supporter one side the X setting along the position of described X-axis; Representational tool and with respect to the opposing party's of described supporter one side Y setting along the position of described Y-axis; Representational tool and with respect to the opposing party's of described supporter one side Z setting along the position of described track.
(19) in the detection method of this processing result,
When the relative position of described instrument and described supporter arrived first reference value along described track, described determination data storage part began to store described determination data,
When the relative position of described instrument and described supporter arrived second a reference value along described track, described determination data storage part finished the described determination data of storage,
When the relative position of described instrument and described supporter for after by described first reference value, before described second a reference value of arrival the time, can carry out the processing of described workpiece.
In view of the above, at least can be in the processing of workpiece storing measurement data, detect the location of workpiece in the processing.
(20) in the detection method of this processing result,
After described determination data storage part finished the described determination data of storage, whether qualified described operational part carried out described judgement.
In view of the above, because carry out the qualified judgement of right and wrong simultaneously, so but the burden of alleviator with storing measurement data.
(21) in the detection method of this processing result,
Described specified data is the value specific according to scope,
Described operational part judges that described determination data is whether in the scope of described specified data.
In view of the above, allow error to a certain degree, can carry out whether qualified judgement.
(22) in the detection method of this processing result,
Described analyzer was measured in a plurality of moment, obtained a plurality of described determination datas, the described a plurality of determination datas of described determination data storage portion stores.
(23) in the detection method of this processing result,
It is under the underproof situation that the processing of described handling part is included in the qualified result of determination of described right and wrong, stops the processing of processing.
In view of the above, can manage the processing of workpiece automatically.
(24) in the detection method of this processing result,
Comprise that also efferent exports the result of described handling part.
(25) in the detection method of this processing result,
Comprise that also auxiliary storage portion preserves at least a portion among described determination data, described specified data and the described whether qualification determination result.
In view of the above, can manage the machining state data of workpiece.
Description of drawings
Fig. 1 is the figure that explanation is suitable for the processing unit (plant) of embodiments of the invention.
Fig. 2 is the figure that explanation is suitable for the processing unit (plant) of embodiments of the invention.
Fig. 3 is the figure that explanation is suitable for the work flow of embodiments of the invention.
Fig. 4 (A)-Fig. 4 (C) is the figure that explanation is suitable for the manufacturing procedure of embodiments of the invention.
Fig. 5 is the figure that the detection method of the processing result that is suitable for embodiments of the invention is described.
Fig. 6 is the figure of an example of the qualified judgement of the processing result right and wrong of the suitable embodiments of the invention of explanation.
Fig. 7 is the figure that the instantiation of the detection method that is suitable for processing result of the present invention is described.
Fig. 8 is the figure that the instantiation of the detection method that is suitable for processing result of the present invention is described.
Fig. 9 is the figure that the instantiation of the detection method that is suitable for processing result of the present invention is described.
Figure 10 is the figure that the instantiation of the detection method that is suitable for processing result of the present invention is described.
The specific embodiment
With reference to accompanying drawing most preferred embodiment of the present invention is described.
Fig. 1 is the figure that explanation is suitable for the processing unit (plant) of embodiments of the invention.Processing unit (plant) processing work (machined object) 1.Work in-process punches, punching press, shear, block etc.Processing unit (plant) also can be cutting or grind turning equipment (ball (ボ Le) dish, silk are cut discharging processing machine etc.), or pressing equipment.
Processing unit (plant) shown in Figure 1 is the pressing equipment that forms the hole in workpiece 1.
Processing unit (plant) 1 has supporter 10 and instrument 20.Supporter 10 and instrument 20 can relatively move.That is, supporter 10 and instrument 20 boths are removable, or only instrument 20 moves and the fixed-site of supporter 10, or only supporter 10 moves and the fixed-site of instrument 20.
But supporter 10 both one dimension (for example along rectilinear direction) moves, and also can move three-dimensionally.In the present embodiment, supporter 10 moves two-dimensionally.In example shown in Figure 1, supporter 10 has the X workbench 12 that moves along X-axis and along the moving Y workbench 14 of y-axis shift in the XY coordinate system.The XY axle is vertical.The track 13 that extends to X-direction is set on the platform 11, and X workbench 12 can move along track 13 (for example point-blank).Also track 15 can be set on X workbench 12, Y workbench 14 can move along track 15 (for example point-blank).On Y workbench 14, load workpiece 1.Workpiece 1 preferably mechanically or temporarily is fixed on the Y workbench 14 with adsorbing.
With respect to the opposing party's of a side position, can determine the position of workpiece 1 in mobile supporter 10 and the instrument 20.Can carry out this position by first dirver (for example X drive division 16 and Y drive division 18) determines.In the present embodiment, XY worktable 12,14 moves by X drive division 16 or Y drive division 18. XY drive division 16,18 for example is a servomotor.The axle of X drive division 16 (Y drive division 18) rotatablely moves and for example is converted to rectilinear motion by spring gear.Therefore, along the mobile X workbench 12 of X-axis (Y-axis) (Y workbench 14).
In the present embodiment, instrument 20 can not move along the XY axle.As variation, constitute instrument 20 and move along the XY axle, supporter 10 (XY worktable 12,14) can not move along the XY axle.
Instrument 20 shown in Figure 1 is a drift.As variation, instrument 20 also can be cutting or grind lathe tool in the turning equipment, drill bit, milling cutter etc.In removable supporter 10 and the instrument 20 with respect to the opposing party's of a side position, to describe to be used for the track of processing work 1.In the present embodiment, removable instrument 20 describes to be used for the track of processing work 1.In the processing of workpiece 1, the fixed-site of supporter 10.
The track that is used for processing work 1 both can be a straight line, also can be curve, and was both unidirectional, also reciprocal.In the present embodiment, the motion track of instrument 20 is depicted as straight line.Particularly, when instrument 20 moves (motion) along a direction as straight line, carry out the processing of workpiece 1, after the process finishing, move (motion) as straight line round about.That is, instrument 20 is reciprocating.Instrument 20 moves along the Z axle vertical with the XY axle.
Processing unit (plant) has the Z drive division 22 (motor etc.) as second driver that instrument 20 is moved.Instrument 20 in the present embodiment,, can not move, so can not move along the XY axle along the XY axle because Z drive division 22 is installed on the platform 11.In addition, aid 24 is set in processing unit (plant).Aid 24 is the guide rail of instrument 20 or the pressing element of workpiece 1.Particularly, shown in Fig. 4 (A)-Fig. 4 (C), aid 24 also can move along with moving of instrument 20.In addition, are drifts according to instrument 20, not shown punch die is set.For example, shown in Fig. 4 (A),, realize function as punch die by in Y workbench 14, forming hole 19.
Processing unit (plant) has the analyzer of measuring in supporter 10 and the instrument 20 with respect to the opposing party's of a side position (for example the XYZ sensor 32,34,36).Analyzer for example uses light wave such as laser to come the displacement of determination object thing or distance etc.In the present embodiment, measure the interior supporter 10 of XYZ coordinate system or the position of instrument 20.In addition, XYZ coordinate system is a benchmark with platform 11.In the following description, measuring under the situation of displacement, although understand displacement be transformed to the position, but but the also data of treated as such displacement.
X sensor 32 is installed in (with respect to platform 11 fixed-site) on the platform 11, is determined at the position of the X workbench 12 on the platform 11.X sensor 32 is measured the position (X coordinate) of X workbench 12 along X-axis.Particularly, measure displacement (displacement is transformed to the position to be described).The YZ coordinate of X workbench 12 does not change.
Y sensor 34 is installed in (with respect to X workbench 12 fixed-site) on the X workbench 12, measures Y workbench 14 positions at X workbench 12.Y sensor 34 is measured the position (Y coordinate) of Y workbench 14 along Y-axis.Particularly, measure displacement (displacement is transformed to the position to be described).The Z coordinate of Y workbench 14 does not change.The X coordinate of Y workbench 14 can detect corresponding to the X coordinate of X workbench 12.In addition, the position of fixation workpiece 1 and Y workbench 14.Can detect the position of the workpiece 1 on the Y workbench 14.
Z sensor 36 is installed in (platform 11 fixed-site relatively) on the platform 11, is benchmark with platform 11, the position of tools for measurement 20.Z sensor 36 is measured along the position (Z coordinate) of the track (Z axle) of X instrument 20.Particularly, measure displacement (displacement is transformed to the position to be described).The XY coordinate of instrument 20 does not change.
As shown in Figure 2, processing unit (plant) has the determination data storage part 42 of the determination data (for example XYZ measured value) of storing measurement device.The XYZ measured value is respectively the value of XYZ sensor 32,34,36 practical measurement.This value can be a displacement, describes as locative amount.When measuring in a plurality of moment, determination data storage part 42 storage a plurality of determination datas (a plurality of XYZ measured value).
Processing unit (plant) have processing result at workpiece 1 be the determination data of measuring real income under the qualified situation (below be called the specified data storage part 44 of specified data (for example XYZ setting).Specified data also can be by the specific value of scope (upper limit-lower limit).Each of XYZ setting is also represented the value of a bit.The XY setting is represented in supporter 10 and the instrument 20 position along the XY axle (XY coordinate) with respect to the opposing party of a side.In the present embodiment, the XY setting represents that the processing result of workpiece 1 is the position of the XY worktable 12,14 under the qualified situation.The Z setting is represented in supporter 10 and the instrument 20 position along track (Z axle) (Z coordinate) with respect to the opposing party of a side.In the present embodiment, the Z setting represents that the processing result of workpiece 1 is the position (for example lower dead center) of the instrument 20 under the qualified situation.
Processing unit (plant) has the target data storage part 46 of storage as the target data (for example XYZ desired value) of the moving target of supporter 10 and instrument 20.The XYZ desired value can be identical with the XYZ setting, also expression by any value in the scope of the specific XYZ setting of scope (upper limit-lower limit).The XY desired value is represented in supporter 10 and the instrument 20 position along the XY axle (XY coordinate) with respect to the opposing party of a side.In the present embodiment, the XY desired value represents that the processing result of workpiece 1 becomes the position of qualified XY worktable 12,14.The Z desired value is represented in supporter 10 and the instrument 20 position along track (Z axle) (Z coordinate) with respect to the opposing party of a side.In the present embodiment, the Z setting represents that the processing result of workpiece 1 becomes the position of qualified instrument 20 (for example lower dead center).
Processing unit (plant) 20 has the reference data storage part 48 of Memory Reference data (for example first, second a reference value).The benchmark that reference data begins and finishes as the storage of determination data.In the present embodiment, when arriving first reference value along track (Z axle) with respect to the opposing party's of a side position (for example position of instrument 20) in instrument 20 and the supporter 10, the determination data of beginning storing measurement data storage part.When arriving second a reference value along track (Z axle) with respect to the opposing party's of a side position (for example position of instrument 20) in instrument 20 and the supporter 10, finish the determination data of storing measurement data storage part.When after by first reference value, arriving before second a reference value with respect to the opposing party's of a side position (for example position of instrument 20) in instrument 20 and the supporter 10, carry out the processing (concrete punching, cut, grind and cut etc.) of workpiece 1.
In the present embodiment, at least one in said determination data store 42, specified data storage part 44, target data storage part 46 and the reference data storage part 48 is the part of primary storage portion 40.Primary storage portion 40 for example gets by high speed reads such as RAM, is the medium that can read.Primary storage portion 40 is the part of CPU also.
Processing unit (plant) also can have auxiliary storage portions 49 such as hard disk, MO, floppy disk.Auxiliary storage portion 49 storage said determination data, specified data, target data, reference data etc.The data of temporary transient storage in more than the 49 storage primary storage portions 40 of auxiliary storage portion.
Processing unit (plant) has operational part 52.Whether qualified operational part 52 is said determination data (for example XYZ measured value) and specified datas (for example XYZ setting) relatively, carry out processing result the judgement of workpiece 1.At specified data is under the situation of value with width (by scope specific value), and operational part 52 judges that each determination data is whether in the scope of specified data.
Processing unit (plant) has the handling part 50 that carries out corresponding to the whether qualification determination result's of operational part 52 processing.For example, whether the qualification determination result is under the underproof situation, can stop the processing of the processing of workpiece 1.As shown in Figure 2, operational part 52 can be the part of handling part 50, but also double as operational part 52 of handling part 50.Handling part 50 can carry out the storage control to the data of primary storage portion 40.At this moment, finish, carry out the whether qualified judgement of operational part 52 from the control (for example controlling the storage of the determination data of determination data storage part 42) of primary storage 40.Therefore, can alleviate the burden of handling part 50, improve arithmetic speed.Handling part 50 is the part of CPU also.
Processing unit (plant) has input parts 54 such as keyboard.Can be from the above-mentioned XYZ desired value of input part 54 inputs, XYZ setting, first, second a reference value etc.In addition, processing unit (plant) has efferents 56 such as display or printer.The result of efferent 56 output processing part 50.For example, whether qualified corresponding to the processing result of workpiece 1, carry out OK demonstration or NG and show.
The processing unit (plant) of present embodiment such as above-mentioned structure in its action of explanation, illustrate the detection method of processing result below.As shown in Figure 1, at supporter 10 upper support workpiece 1.For example, fixation workpiece 1 on Y workbench 14.
Supporter 10 is configured on the position as mobile starting point.Simultaneously, instrument 20 also is configured on the position as the starting point that moves (descend in the present embodiment and rise).
As shown in Figure 2, store predetermined data in specified data storage part 44 (for example XYZ setting), in target data storage part 46, store target data (for example XYZ desired value), Memory Reference data in reference data storage part 48 (for example first, second a reference value).From input part 54 these data of input.
(manufacturing procedure)
Fig. 3 is the figure of expression work flow.Handling part 50 instruction supporters 10 move (S11) from the position as starting point to the XY desired value.By this instruction, drive first dirver (XY drive division 16,18), supporter 10 (XY worktable 12,14) moves.During supporter 10 moved, analyzer (XY sensor 32,34) was measured the position of supporter 10.For example measured with per 0.1 second.Mensuration only is not limited to during the position of determining supporter 10, determines in the position that also the back carries out in the processing of workpiece 1, also can carry out after the processing of workpiece 1.At least the determination data (XY measured value) that obtains in workpiece 1 descends can be used in the detecting method for processing result described later.
Afterwards, handling part 50 (exclusive disjunction portion 52) judges whether supporter 10 arrives XY desired value (S12).Particularly, relatively X measured value and X desired value compare Y measured value and Y desired value.Step S12 arrives the XY desired value up to supporter 10 repeatedly.When supporter 10 arrived the XY desired value, the position of workpiece 1 (supporter 10) was determined, and advances to step S13.
In step S13, handling part 50 (exclusive disjunction portion 52) appointment instrument 20 moves (decline) to the Z desired value.By this instruction, drive second driver (Z drive division 22), instrument 20 moves.Fig. 4 (A)-Fig. 4 (C) is the figure of specification tool 20 actions.Shown in Fig. 4 (A), the instrument 20 that is in start position moves (decline) shown in Fig. 4 (B).During instrument 20 moves, the position of analyzer (Z sensor 36) tools for measurement 20.For example measured with per 0.1 second.(in the processing), processing back (instrument 20 connects workpiece 1 back) are measured before instrument 20 contact workpieces 1, in the contact.At least the determination data (Z measured value) that (in the processing) obtains during instrument 20 contact workpieces 1 is used for detecting method for processing result described later.
Afterwards, handling part 50 (exclusive disjunction portion 52) judges whether instrument 20 arrives Z desired value (S14).Particularly, compare Z measured value and Z desired value.
Step S14 arrives the Z desired value up to instrument 20 repeatedly.Shown in Fig. 4 (C), when instrument 20 arrives the Z desired value, become processing work 1, advance to step S15.That is, handling part instructs instrument 20 to move (rising) along the direction of leaving the Z desired value.By this instruction, drive second driver (Z drive division 22), instrument 20 moves.By above operation, but processing work 1.
(detection method of processing result)
In the present embodiment, can detect the processing result of workpiece 1.Fig. 5 is the figure of the detection method of explanation processing result.In the detection of processing result, tool using 20 (is punching, is cutting, is grinding during cutting etc.) determination data (XYZ measured value) that obtains behind instrument 20 contact workpieces 1 during the processing work 1 at least.If the detection difficult of processing zero hour then also can be used before processing beginning the determination data that obtains after the process finishing.
For example, shown in Fig. 4 (B), handling part 50 (for example operational part 52) judges whether arrive first reference value (S21 shown in Figure 5) after instrument 20 moves.Particularly, compare Z measured value and first reference value.First reference value is the value of storing in advance as the reference data storage part 48 of the position of the instrument 20 of (before the processing) before instrument 20 contact workpieces 1.Repeating step S21 reaches first reference value up to instrument 20.After instrument 20 reaches first reference value, the storage (S22) of beginning XYZ measured value.Afterwards, process, after the process finishing, shown in Fig. 4 (C), instrument 20 moves to the direction that departs from the Z desired value.
Shown in Fig. 4 (B), handling part 50 (for example operational part 52) judges whether arrive second a reference value (S23 shown in Figure 5) after instrument 20 moves.Particularly, compare the Z measured value and second a reference value.Second a reference value is the value of storing in advance as the reference data storage part 48 of the position of the instrument after the process finishing 20.In the present embodiment, because instrument moves back and forth, so first, second a reference value can be a same position.In addition, as displacement, both also can be different.Repeating step S23 reaches second a reference value up to instrument 20.After instrument 20 reaches second a reference value, finish the storage (S24) of XYZ measured value.
Therefore, obtain determination data (XYZ measured value) during the instrument 20 actual processing works 1 at least.Particularly, the XYZ measured value that obtains in a plurality of chronometries.Handling part 50 (for example operational part 52) uses these measured values to judge whether processing normally carries out (S25).
Fig. 6 is the figure that an example of the flow process whether processing is normally carried out is judged in explanation.For example, judge whether X setting (lower limit)≤X measured value≤X setting (upper limit) (S31, S32), judge whether Y setting (lower limit)≤Y measured value≤Y setting (upper limit) (S33, S34).Carry out these judgements by operational part 52.If satisfy above condition, mean that then in the processing of workpiece 1, supporter 10 is in the appropriate location.
In addition, judge whether instrument 20 suitably moves.For example, the lower dead center of checking tool 20 (maximum shift position).For example, from the Z measured value, extract mobile maximum (position of lower dead center) (S35), judge whether mobile maximum 〉=Z setting (S36).Arrive the Z desired value because detected instrument 20, so needn't change the inspection of minimum shift position.Operational part 52 carries out these judgements.If satisfy above-mentioned condition, mean that then instrument 20 suitably moves (moving to the appropriate location).
Judge according to these, can carry out the whether qualified judgement of processing result of workpiece 1.
If qualified, then carry out the processing (S26) of OK correspondence.For example, in efferent 56 (with reference to Fig. 2), show OK.If defective, then carry out the processing (S27) of NG correspondence.For example, the limit shows NG at efferent 56 (with reference to Fig. 2), and the limit is arresting stop in order to stop processing.
At least preserve the data (S28) whether processing result uses in the qualification determination.For example, in auxiliary storage portion 49, preserve data.These data can be used for understanding the performance or the machining accuracy of device.
According to the detection method of the processing unit (plant) or the processing result of present embodiment, can after the process finishing of workpiece 1, needn't just check once more and can detect this processing result.
[embodiment]
Fig. 7-Figure 10 is the figure that the instantiation of the detection method that is suitable for processing result of the present invention is described.Here, use above-mentioned processing unit (plant).Transverse axis is represented elapsed time, and the longitudinal axis in left side is represented the displacement (XY measured value) of XY worktable 12,14 (supporter 10), the displacement of the longitudinal axis representational tool 20 on right side (Z measured value).The XY measured value is relative value (displacement), and the Z measured value is absolute value (position).
In example shown in Figure 7, XY worktable 12,14 repeats to move to the XY desired value from starting point, by the XY desired value, passes through the XY desired value once more after oppositely advancing, and slowly converges near the XY desired value.Instrument 20 begins to descend when XY worktable 12,14 both sides arrive the moment (time t1) of XY desired value, rises after stopping after arriving the Z desired value again.Instrument 20 arrives first reference value when t2, arrive second a reference value when t3, so carry out the storage of XYZ measured value between t2-t3.Through behind the t3, judge whether processing is normal.As a result, the XY measured value between the t2-t3 is between XY setting (lower limit)-XY setting (upper limit).In addition, though the Z measured value surpasses the Z desired value, do not surpass the Z setting.Therefore, judge that processing result is qualified, carry out to the processing of correspondence.
In example shown in Figure 8, XY worktable 12,14 moves to the XY desired value from starting point, after the XY desired value, does not converge near the XY desired value.The action of instrument 20 is identical with example shown in Figure 7.In this example, the XY measured value between the t2-t3 is in the outside of XY setting (lower limit)-XY setting (upper limit).Therefore, judge that processing result is defective, carry out to the processing of correspondence.
In example shown in Figure 9, the action of XY worktable 12,14 is identical with example shown in Figure 7.Z measured value between the t2-t3 surpasses the Z setting.Because instrument 20 too descends, therefore, judge that processing result is defective, carry out to the processing of correspondence.
In example shown in Figure 10 because the XYZ measured value is in arbitrary processing result all in the acceptable ranges, therefore, carry out to the processing of correspondence.But the Y measured value does not converge near the Y desired value.Preserve this data, can apply flexibly in the maintenance etc.

Claims (25)

1. a processing unit (plant) is characterized in that, comprising:
Supporter can relatively move, and supports the instrument and the described workpiece of processing work;
Analyzer is measured the relative position of described instrument and described supporter;
The determination data storage part is stored the determination data of described analyzer;
The specified data storage part, storage is as the specified data of the described determination data of measuring under the qualified situation of processing result of described workpiece;
Operational part, whether qualified more described determination data and described specified data carry out processing result the judgement of described workpiece; With
Handling part carries out the processing corresponding to the result of the whether qualification determination of described operational part.
2. processing unit (plant) according to claim 1 is characterized in that, also comprises:
First dirver is in order to determine the position of described workpiece, the relative position of moving described instrument and described supporter; With
Second driver, the relative position of moving described instrument and described supporter is to describe to be used to process the track of described workpiece.
3. processing unit (plant) according to claim 2 is characterized in that,
Described first dirver comprises the X drive division, moves the relative position of described instrument and described supporter along X-axis; With the Y drive division, along the relative position of moving described instrument of y-axis shift and described supporter, described XY axle is vertical,
Described second driver comprises the Z drive division, moves the relative position of described instrument and described supporter along described track.
4. processing unit (plant) according to claim 3 is characterized in that,
Described analyzer comprises: the X sensor, measure the relative position between described instrument and the described supporter along described X-axis; The Y sensor is measured the relative position along described Y-axis between described instrument and the described supporter; With the Z sensor, measure the relative position between described instrument and the described supporter along described track.
5. processing unit (plant) according to claim 4 is characterized in that,
Described determination data comprises the X measured value that described X sensor is measured; The Y measured value that described Y sensor is measured; Z measured value with described Z sensor mensuration.
6. processing unit (plant) according to claim 5 is characterized in that,
Described specified data comprises the X setting along the relative position of described X-axis between representational tool and the described supporter; Y setting between representational tool and the described supporter along the relative position of described Y-axis; Z setting between representational tool and the described supporter along the relative position of described track.
7. according to the described processing unit (plant) of one of claim 2-6, it is characterized in that,
When the relative position of described instrument and described supporter arrived first reference value along described track, described determination data storage part began to store described determination data,
When the relative position of described instrument and described supporter arrived second a reference value along described track, described determination data storage part finished the described determination data of storage,
When the relative position of described instrument and described supporter for after by described first reference value, before described second a reference value of arrival the time, can carry out the processing of described workpiece.
8. processing unit (plant) according to claim 7 is characterized in that,
After described determination data storage part finished the described determination data of storage, whether qualified described operational part carried out described judgement.
9. processing unit (plant) according to claim 1 is characterized in that,
Described specified data is the value specific according to scope,
Described operational part judges that described determination data is whether in the scope of described specified data.
10. processing unit (plant) according to claim 1 is characterized in that,
Described analyzer was measured in a plurality of moment, obtained a plurality of described determination datas, the described a plurality of determination datas of described determination data storage portion stores.
11. processing unit (plant) according to claim 1 is characterized in that,
It is under the underproof situation that the processing of described handling part is included in the qualified result of determination of described right and wrong, stops the processing of processing.
12. processing unit (plant) according to claim 1 is characterized in that,
The efferent that also comprises the result of exporting described handling part.
13. processing unit (plant) according to claim 1 is characterized in that,
Also comprise the auxiliary storage portion that preserves at least a portion among described determination data, described specified data and the described whether qualification determination result.
14. the detection method of a processing result is characterized in that, comprising:
By the support body supports workpiece, during the described workpiece by tool processes, analyzer is measured the relative position of described instrument and described supporter at least,
The determination data that the described analyzer of determination data storage portion stores obtains,
Relatively be stored in the specified data in the specified data storage part and the described determination data of described analyzer practical measurement in advance as the described determination data of under the qualified situation of the processing result of described workpiece, measuring, whether qualified operational part carry out processing result the judgement of described workpiece
Whether qualified handling part carry out the processing corresponding to described result.
15. the detection method of processing result according to claim 14 is characterized in that, also comprises:
First dirver moves the relative position of described instrument and described supporter, to determine the position of described workpiece; With
Second driver moves the relative position of described instrument and described supporter, to describe to be used to process the track of described workpiece.
16. the detection method of processing result according to claim 15 is characterized in that,
Described first dirver is along the relative position that at least one side of vertical X-axis and Y-axis moves described instrument and described supporter,
Described second driver moves the relative position of described instrument and described supporter along described track.
17. the detection method of processing result according to claim 16 is characterized in that,
Described determination data comprises the X measured value along the relative position of described X-axis between representational tool and the described supporter; Y measured value between representational tool and the described supporter along the relative position of described Y-axis; Z measured value between representational tool and the described supporter along the relative position of described track.
18. the detection method of processing result according to claim 17 is characterized in that,
Described specified data comprises the X setting along the relative position of described X-axis between representational tool and the described supporter; Y setting between representational tool and the described supporter along the relative position of described Y-axis; Z setting between representational tool and the described supporter along the relative position of described track.
19. the detection method according to one of claim 15-18 described processing result is characterized in that,
When the relative position of described instrument and described supporter arrived first reference value along described track, described determination data storage part began to store described determination data,
When the relative position of described instrument and described supporter arrived second a reference value along described track, described determination data storage part finished the described determination data of storage,
When the relative position of described instrument and described supporter for after by described first reference value, before described second a reference value of arrival the time, can carry out the processing of described workpiece.
20. the detection method of processing result according to claim 19 is characterized in that,
After described determination data storage part finished the described determination data of storage, whether qualified described operational part carried out described judgement.
21. the detection method of processing result according to claim 14 is characterized in that,
Described specified data is the value specific according to scope,
Described operational part judges that described determination data is whether in the scope of described specified data.
22. the detection method of processing result according to claim 14 is characterized in that,
Described analyzer was measured in a plurality of moment, obtained a plurality of described determination datas, the described a plurality of determination datas of described determination data storage portion stores.
23. the detection method of processing result according to claim 14 is characterized in that,
It is under the underproof situation that the processing of described handling part is included in the qualified result of determination of described right and wrong, stops the processing of processing.
24. the detection method of processing result according to claim 14 is characterized in that,
Comprise that also efferent exports the result of described handling part.
25. the detection method of processing result according to claim 14 is characterized in that, comprises that also auxiliary storage portion preserves at least a portion among described determination data, described specified data and the described whether qualification determination result.
CNB021190984A 2001-03-23 2002-03-22 Processing device and detecting method for processing result Expired - Fee Related CN1321779C (en)

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