KR200415562Y1 - Apparatus for opening and closing a door for semiconductor processing chamber - Google Patents

Apparatus for opening and closing a door for semiconductor processing chamber Download PDF

Info

Publication number
KR200415562Y1
KR200415562Y1 KR2020060003980U KR20060003980U KR200415562Y1 KR 200415562 Y1 KR200415562 Y1 KR 200415562Y1 KR 2020060003980 U KR2020060003980 U KR 2020060003980U KR 20060003980 U KR20060003980 U KR 20060003980U KR 200415562 Y1 KR200415562 Y1 KR 200415562Y1
Authority
KR
South Korea
Prior art keywords
fixed
arm
support shaft
flow
door
Prior art date
Application number
KR2020060003980U
Other languages
Korean (ko)
Inventor
승 배 정
형 섭 최
Original Assignee
주식회사 싸이맥스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 싸이맥스 filed Critical 주식회사 싸이맥스
Priority to KR2020060003980U priority Critical patent/KR200415562Y1/en
Application granted granted Critical
Publication of KR200415562Y1 publication Critical patent/KR200415562Y1/en

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05F—DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION; CHECKS FOR WINGS; WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THE FUNCTIONING OF THE WING
    • E05F1/00—Closers or openers for wings, not otherwise provided for in this subclass
    • E05F1/08—Closers or openers for wings, not otherwise provided for in this subclass spring-actuated, e.g. for horizontally sliding wings
    • E05F1/10—Closers or openers for wings, not otherwise provided for in this subclass spring-actuated, e.g. for horizontally sliding wings for swinging wings, e.g. counterbalance
    • E05F1/14—Closers or openers for wings, not otherwise provided for in this subclass spring-actuated, e.g. for horizontally sliding wings for swinging wings, e.g. counterbalance with double-acting springs, e.g. for closing and opening or checking and closing no material
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05F—DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION; CHECKS FOR WINGS; WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THE FUNCTIONING OF THE WING
    • E05F15/00—Power-operated mechanisms for wings
    • E05F15/60—Power-operated mechanisms for wings using electrical actuators
    • E05F15/603—Power-operated mechanisms for wings using electrical actuators using rotary electromotors
    • E05F15/611—Power-operated mechanisms for wings using electrical actuators using rotary electromotors for swinging wings
    • E05F15/614—Power-operated mechanisms for wings using electrical actuators using rotary electromotors for swinging wings operated by meshing gear wheels, one of which being mounted at the wing pivot axis; operated by a motor acting directly on the wing pivot axis

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

본 고안은 반도체 제조 공정챔버의 플랜지에 회동 가능하게 설치되어 상측 입구를 개폐하는 도어의 개폐장치에 관한 것으로서, 상기 플랜지의 힌지결합부에 회전가능하게 설치된 유성기어부재와, 상기 유성기어부재의 회전축 일단에 고정된 고정지지축과, 상기 유성기어부재의 회전축 타단에 회전 가능하게 설치된 유동지지축과, 상기 고정지지축에 고정결합된 고정아암과, 상기 유동지지축에 베어링을 매개로 회전 가능하게 지지된 유동아암과, 상기 유동지지축에 상기 유동아암을 사이에 두고 고정결합된 구동부재를 포함하여, 공정챔버 도어의 개폐작동을 수행할 수 있음과 더불어, 폐쇄작동 또한 유성기어부재에 의해 용이하게 추가 가압 폐쇄할 수 있도록 함으로써, 보다 신속하고도 정확한 개폐작동이 이루어질 수 있도록 함으로써, 반도체 기판을 비롯한 각종 처리 대상물의 제조 수율을 증대할 수 있도록 하였다.The present invention relates to a door opening and closing device that is rotatably installed on the flange of the semiconductor manufacturing process chamber to open and close the upper inlet, the planetary gear member rotatably installed on the hinge coupling portion of the flange, and the rotary shaft of the planetary gear member A fixed support shaft fixed at one end, a flow support shaft rotatably installed at the other end of the rotary shaft of the planetary gear member, a fixed arm fixedly coupled to the fixed support shaft, and rotatably connected to the flow support shaft via a bearing. Including a supported flow arm and a drive member fixedly coupled to the flow support shaft with the flow arm interposed therebetween, the opening and closing operation of the process chamber door can be performed, and the closing operation is also facilitated by the planetary gear member. By further pressing and closing, thereby enabling a faster and more accurate opening and closing operation, thereby It was possible to increase the production yield of various treatment objects, including.

Description

공정챔버의 도어개폐장치{Apparatus for opening and closing a door for semiconductor processing chamber}Apparatus for opening and closing a door for semiconductor processing chamber

도 1은 일반적인 도어개폐장치의 구성을 개략적으로 도시한 구조도,1 is a structural diagram schematically showing a configuration of a general door opening and closing device,

도 2는 본 고안의 실시예에 따른 도어개폐장치의 구성을 개략적으로 도시한 측면상 구조도,Figure 2 is a side structural view schematically showing the configuration of the door opening and closing device according to an embodiment of the present invention,

도 3은 본 고안에 따른 도어개방 작동에 따른 일예로서, 도어의 완전 개방시의 작동을 설명하기 위한 개략 구조도,Figure 3 is an example according to the door opening operation according to the present invention, a schematic structural diagram for explaining the operation at the full opening of the door,

도 4는 도2의 도어 폐쇄시의 힌지부위 구조를 설명하기 위한 평면상 구조도,4 is a planar structural view for explaining the structure of the hinge portion when the door is closed in FIG.

도 5는 트랜스퍼 챔버에 배치된 도어개폐장치를 설명하기 위한 확대 사시도.Figure 5 is an enlarged perspective view for explaining the door opening and closing device disposed in the transfer chamber.

<도면의 주요 부분에 대한 부호의 설명><Explanation of symbols for the main parts of the drawings>

10 : 유성기어부재 11 : 고정지지축  10 planetary gear member 11 fixed shaft

13 : 유동지지축 20 : 트랜스퍼 챔버  13 flow support shaft 20 transfer chamber

20a : 플랜지부 27 : 도어 20a: flange 27: door

30 : 고정아암 33 : 제1 지지블록  30: fixed arm 33: first support block

40 : 유동아암 43 : 제2 지지블록  40: movable arm 43: second support block

50 : 베어링 60 : 연결블록  50: bearing 60: connection block

70 : 구동부재  70: drive member

본 고안은 반도체 기판 제조용 공정챔버의 도어 개폐장치에 관한 것으로서, 더욱 상세하게는 도어의 개폐동작을 용이하게 함과 동시에 기구적인 결함을 해소시킨 반도체 기판 제조용 공정챔버의 도어 개폐장치에 관한 것이다.The present invention relates to a door opening and closing apparatus of a process chamber for semiconductor substrate manufacturing, and more particularly, to a door opening and closing apparatus of a semiconductor substrate manufacturing process chamber which facilitates the opening and closing operation of the door and solves mechanical defects.

일반적으로 반도체 기판장치는 사진, 식각, 박막형성등 많은 공정을 수행하여 제조되는 것으로, 대부분 밀폐된 공정챔버내에서 이루어지고, 공정챔버내부는 일정한 진공상태를 유지하도록 되어 있다.In general, the semiconductor substrate device is manufactured by performing a number of processes such as photographing, etching, and thin film formation, and is mostly made in a closed process chamber, and the inside of the process chamber is to maintain a constant vacuum state.

따라서 공정챔버내의 안정된 진공상태를 유지하기 위해서는 프론트도어의 개폐동작이 정확하게 이루어져야 하고, 프론트도어가 닫힌 상태에서는 기밀이 유지되어야 한다.Therefore, in order to maintain a stable vacuum in the process chamber, the opening and closing operation of the front door must be precisely performed, and airtightness must be maintained when the front door is closed.

도 1은 일반적인 공정챔버의 도어조립체를 나타낸 것으로, 도어조립체(1)는 플랜지(20)의 일측에 형성된 힌지결합부(21)에 회전축(23)이 수직방향으로 각각 회전자유롭게 설치되고, 회전축(23)에 아암(25) 일단이 각각 고정되며, 아암(25)의 타단은 프론트도어(27)의 고정브라켓(28)에 고정된 하나의 회전지지축(30)으로 이루어져 있었다.1 shows a door assembly of a general process chamber, and the door assembly 1 is rotatably installed in the hinge coupling portion 21 formed at one side of the flange 20 in a vertical direction, respectively. One end of the arm 25 is fixed to 23, and the other end of the arm 25 is composed of one rotation support shaft 30 fixed to the fixing bracket 28 of the front door 27.

여기에서, 상기 프론트도어(27)를 여닫을 경우, 프론트도어(27)의 회전각도는 사용자에 의해 아암(25)이 견인되는 파워에 따라 설정되게 된다.Here, when opening and closing the front door 27, the rotation angle of the front door 27 is set according to the power to be pulled by the arm 25 by the user.

그러나 종래의 도어 개폐장치는 무거운 프론트도어(27)를 수동으로 단순 견 인하여 개폐시킴에 따라, 프론트도어(27)의 하중을 견딜 수 없을 정도로 사용자의 힘이 가중됨과 동시에, 프론트도어(27)를 도1에 도시된 바와 같이 닫힘 작동할 경우에도, 사용자가 아암(25)을 눌러주거나 하는 등의 방식으로 폐쇄 작동시킴에 따라 폐쇄 동작이 원활치 않는 상황이 도래하였을 경우에는, 프론트도어(27)가 폐쇄 상태에서의 기밀이 완전하게 이루어지지 않는 등의 단점을 내포하고 있었다.However, according to the conventional door opening and closing device by manually opening and closing the heavy front door 27 simply, the user's force is increased so as not to endure the load of the front door 27, and the front door 27 is opened. Even in the closing operation as shown in FIG. 1, when the closing operation is not smooth as the user pushes the arm 25 or the like, the front door 27 is closed. There were disadvantages such as incomplete closure in closed state.

본 고안은 상술한 바와 같은 결점을 해소하기 위한 것으로, 그 주된 목적은 도어의 무게를 충분히 지탱하여 동작시킴과 동시에 폐쇄 작동 시에도 완전 폐쇄에 소요되는 부하를 저감시키더라도 충분한 폐쇄력을 발히할 수 있는 반도체 기판 제조용 공정설비의 도어 개폐장치를 제공함에 있다.The present invention is to solve the above-mentioned shortcomings, and its main purpose is to fully support the weight of the door, and at the same time, it is possible to exert a sufficient closing force even when reducing the load required for full closing even during closing operation. The present invention provides a door opening and closing device for a process for manufacturing a semiconductor substrate.

상술된 바와 같은 목적을 구현하고자 이루어지는 본 고안은;The present invention made to achieve the object as described above;

반도체 제조 공정챔버의 플랜지에 회동 가능하게 설치되어 상측 입구를 개폐하는 도어의 개폐장치에 있어서,In the opening and closing device of the door that is rotatably installed on the flange of the semiconductor manufacturing process chamber to open and close the upper inlet,

상기 플랜지의 힌지결합부에 회전가능하게 설치된 유성기어부재와,A planetary gear member rotatably installed at a hinge coupling portion of the flange;

상기 유성기어부재의 회전축 일단에 고정된 고정지지축과,A fixed support shaft fixed to one end of a rotation shaft of the planetary gear member;

상기 유성기어부재의 회전축 타단에 회전 가능하게 설치된 유동지지축과,A flow support shaft rotatably installed at the other end of the rotation shaft of the planetary gear member;

상기 고정지지축에 고정결합된 고정아암과,A fixed arm fixedly coupled to the fixed support shaft;

상기 유동지지축에 베어링을 매개로 회전 가능하게 지지된 유동아암과,A flow arm rotatably supported on the flow support shaft via a bearing;

상기 유동지지축에 상기 유동아암을 사이에 두고 고정결합된 구동부재를 포함하는 것을 특징으로 한다.And a drive member fixedly coupled to the flow support shaft with the flow arm therebetween.

다음에, 본 고안의 바람직한 실시예들에 대하여 첨부 도면을 참조하여 상세히 설명한다.Next, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

도 2는 본 고안의 실시예에 따른 공정챔버 도어개폐기구의 요부 구성을 개략적으로 도시한 평면면으로서, 본 고안에 따른 반도체 기판 공정에 있어서의 기판처리방식을 설명하기 위한 공정챔버의 일예를 나타낸 도면으로서, 일예로서 도 2에 도시된 트랜스퍼 챔버에 장착됨을 주된 실시예로 설명한다.FIG. 2 is a plan view schematically illustrating a main structure of a process chamber door opening and closing mechanism according to an embodiment of the present invention, and illustrates an example of a process chamber for explaining a substrate processing method in a semiconductor substrate process according to the present invention. As a drawing, the main embodiment will be described as being mounted in the transfer chamber shown in FIG. 2 as an example.

도 1은 일반적인 반도체 제조설비 중에서 트랜스퍼 챔버를 일예로 나타낸 도면으로서, 생산라인으로부터 복수 웨이퍼(W)를 탑재한 카세트(K)가 투입 위치되고, 이 트랜스퍼 챔버(110)는 구비된 게이트(14)를 통해 카세트(K)의 투입 및 인출에 대응하여 선택적으로 밀폐된 분위기를 이루게 된다.FIG. 1 is a view illustrating an example of a transfer chamber in a general semiconductor manufacturing facility, and a cassette K having a plurality of wafers W mounted therein is placed at a production line, and the transfer chamber 110 includes a gate 14 provided therein. Through the cassette (K) through the input and withdrawal to achieve an optionally sealed atmosphere.

또한 트랜스퍼 챔버(110)의 내부에는 카세트(도시하지 않은)를 위치시키기 위한 테이블(T)이 설치되며, 또 그 내부는 게이트(14)의 개폐에 대응하여 연결된 진공압 제공수단(도시 생략함)의 구동으로 소정의 진공압 분위기를 이루게 된다.In addition, a table (T) for positioning a cassette (not shown) is provided inside the transfer chamber 110, and a vacuum pressure providing means (not shown) connected therein to correspond to opening and closing of the gate 14. A predetermined vacuum pressure atmosphere is achieved by driving.

그리고, 트랜스퍼 챔버(110)의 상부 일측으로는 플랜지부(15)가 형성되어 있고, 상기 플랜지부(15)에는 도어(27)가 힌지 회동 가능하게 결합되는 힌지결합부(15)가 고착되어 있다.In addition, a flange portion 15 is formed at an upper side of the transfer chamber 110, and a hinge coupling portion 15 to which the door 27 is hingedly coupled is fixed to the flange portion 15. .

또, 상기 힌지결합부(15)에는 선기어 및 유성기어에 의해 회전비율이 결정되는 기어트레인을 내부에 갖는 유성기어부재(10)가 고착되어 있다.In addition, the hinge coupling portion 15 is fixed to the planetary gear member 10 having a gear train therein, the rotation ratio of which is determined by the sun gear and the planetary gear.

또, 상기 유성기어부재(10)의 회전축 일단에는 고정지지축(11)이 고정되고, 상기 유성기어부재(10)의 회전축 타단에는 유동지지축(13)이 회전 가능하게 설치되며, 상기 고정지지축(11)에는 고정아암(30)이 고정결합되어 있다.In addition, the fixed support shaft 11 is fixed to one end of the rotary shaft of the planetary gear member 10, the flow support shaft 13 is rotatably installed at the other end of the rotary shaft of the planetary gear member 10, the fixed support A fixed arm 30 is fixedly coupled to the shaft 11.

또한, 상기 유동지지축(13)에는 베어링을 매개로 유동아암(40)이 회전 가능하게 지지되어 있다.In addition, the flow support shaft 13 is rotatably supported by the flow arm 40 via a bearing.

또, 상기 유동지지축(13)에는 상기 유동아암(40)을 사이에 두고 손잡이(71)-구비 핸들(70)이 고정결합되어 있다.In addition, the handle 71-the handle 70 is fixedly coupled to the flow support shaft 13 with the flow arm 40 therebetween.

또한, 상기 고정지지축(11)과 고정아암(30), 그리고 상기 유동지지축(13)과 핸들(70)의 고정결합은 스플라인 결합으로 달성되도록 상기 제1 및 제2 암수 세레이션 쌍(31, 41)을 구비하고 있다.In addition, the fixed support shaft 11 and the fixed arm 30, and the fixed support of the flow support shaft 13 and the handle 70 is the first and second male and female serration pairs 31 to be achieved by spline coupling And 41).

또, 상기 고정아암(30)과 유동아암(40)의 상측 외주에는 상기 고정아암(30)의 회전력이 상기 유동아암(40)에 균등하게 전달되도록 제1 및 제2 지지블록(33, 43)이 돌출형성되어 있다.In addition, the upper and outer circumference of the fixed arm 30 and the flow arm 40, the first and second support blocks 33 and 43 so that the rotational force of the fixed arm 30 is evenly transmitted to the flow arm 40. It is projected.

또한, 상기 제1 및 제2 지지블록(33, 43) 사이에는 연결블록(60)이 체결고정되어 있다.In addition, the connection block 60 is fastened and fixed between the first and second support blocks 33 and 43.

또, 상기 고정아암(30)과 유동아암(40)의 상측 외주에 돌출된 제1 및 제2 지지블록(33, 43)은 수평향으로 돌출 절곡형성되어 있고, 이 제1 및 제2 지지블록(33, 43) 사이에는 연결블록(60)이 고정되어 있다.In addition, the first and second support blocks 33 and 43 protruding from the upper outer periphery of the fixed arm 30 and the floating arm 40 are protruded and bent in a horizontal direction, and the first and second support blocks are formed. The connection block 60 is fixed between the 33 and 43.

이러한 구성의 본 고안은 도 3 내지 도 5에 도시된 바와 같이 프론트도어(27)가 닫힌 상태에서 구동부재를 구동, 일예로 구동부재로서의 핸들(70)의 손잡이(71)를 회동시키면, 양쪽 고정지지축(11)과 유동지지축(13)이 도 3에서 반시계방향 으로 소정각도 회전하게 되고, 이와 고정된 고정아암(30)과 유동아암(40)이 같은 방향으로 소정각도 회전하게 됨으로써, 아암들(30, 40)의 타단이 고정된 프론트도어(27)가 지지축들(11, 13)을 중심으로 소정각도 회전하여 도 5에 도시된 바와 같이 프론트도어(27)가 열리게 되는 것이다.The present invention of such a configuration drives both the driving member in a state where the front door 27 is closed, as shown in FIGS. 3 to 5, for example, by rotating the handle 71 of the handle 70 as the driving member, both sides are fixed. The support shaft 11 and the flow support shaft 13 is rotated by a predetermined angle in the counterclockwise direction in FIG. 3, and the fixed arm 30 and the flow arm 40 fixed thereto are rotated by a predetermined angle in the same direction, The front door 27 having the other ends of the arms 30 and 40 fixed thereon is rotated by a predetermined angle about the support shafts 11 and 13 to open the front door 27 as shown in FIG. 5.

위와 역으로 핸들(70)의 손잡이(71)를 반시계방향으로 추가 회전하면, 양쪽 고정지지축(11)과 유동지지축(13)이 반시계방향으로 소정각도 더 회전하게 되어, 아암들(30, 40)이 연동 회전하면서, 프론트도어(27)가 도4에 도시된 바와 같이 완전 개방되게 됨으로써 프론트도어(27)의 개방동작이 완료되게 되는 것이다.When the handle 71 of the handle 70 is further rotated counterclockwise, the fixed support shaft 11 and the flow support shaft 13 are further rotated counterclockwise by a predetermined angle. As the 30 and 40 rotate in conjunction with each other, the front door 27 is fully opened as shown in FIG. 4, thereby completing the opening operation of the front door 27.

이때, 상기 도어(27)의 추가적인 개방은 상기 고정아암(30)과 유동아암(40)의 상측 외주에 돌출된 제1 및 제2 지지블록(33, 43)의 제1 및 제2 연장부(33a, 43a)가 트랜스퍼 챔버(20)의 플랜지(20a)에 당접 지지되어 더 이상 개방작동이 이루어지지 않게 되는 것이다.In this case, the additional opening of the door 27 may include first and second extension portions of the first and second support blocks 33 and 43 protruding from the upper circumference of the fixed arm 30 and the floating arm 40. 33a and 43a are abutted and supported by the flange 20a of the transfer chamber 20 so that the opening operation is no longer performed.

물론, 상기 제1 및 제2 지지블록(33, 43) 사이의 연결블록(60)에 의해 항시 핸들(70)에 연동하는 고정지지축(11)의 회전력이 유동지지축(13)에 전가됨은 물론이다.Of course, the rotational force of the fixed support shaft 11 which is always linked to the handle 70 by the connection block 60 between the first and second support blocks 33 and 43 is transferred to the flow support shaft 13 Of course.

이와 같이 동작하는 도어(27) 개폐장치는 프론트도어(27)가 유성기어의 회전비율에 따라 구동하는 고정아암(30)과 유동아암(40)에 동작되는 것이므로 구동력이 프론트도어(27)의 무게에 대한 부하를 충분히 지탱할 수 있고, 수월하게 도어(27)에 회전력이 전달되어 도어(27)의 개폐동작이 원활하게 수행되어진다.The door 27 opening and closing device operated as described above is driven by the fixed arm 30 and the floating arm 40 which drive the front door 27 according to the rotational ratio of the planetary gear, so that the driving force is the weight of the front door 27. It can fully support the load, and the rotational force is easily transmitted to the door 27, the opening and closing operation of the door 27 is smoothly performed.

본 고안의 도어(27)개폐기구를 이용하여 용이하게 도어(27)의 개폐작동을 수행할 수 있음과 더불어, 폐쇄작동 또한 유성기어부재(10)에 의해 용이하게 추가 가압 폐쇄할 수 있도록 함으로써, 보다 신속하고도 정확한 개폐작동이 이루어질 수 있도록 함으로써, 반도체 기판을 비롯한 각종 처리 대상물의 제조 수율을 증대할 수 있는 등의 뛰어난 효과가 있는 것이다.By using the door 27 opening and closing mechanism of the present invention can easily perform the opening and closing operation of the door 27, the closing operation can be easily further closed by the planetary gear member 10, By making the opening and closing operation faster and more accurate, there is an excellent effect of increasing the production yield of various processing objects including semiconductor substrates.

본 고안은 도면에 도시된 일 실시예를 참고로 설명되었으나 이는 예시적인 것에 불과하며, 본 기술 분야의 통상의 지식을 가진 자라면 이로부터 다양한 변형 및 균등한 타 실시예가 가능하다는 점을 이해할 것이다. Although the present invention has been described with reference to one embodiment shown in the drawings, this is merely exemplary, and it will be understood by those skilled in the art that various modifications and equivalent other embodiments are possible.

Claims (4)

반도체 제조 공정챔버의 플랜지에 회동 가능하게 설치되어 상측 입구를 개폐하는 도어의 개폐장치에 있어서,In the opening and closing device of the door that is rotatably installed on the flange of the semiconductor manufacturing process chamber to open and close the upper inlet, 상기 플랜지의 힌지결합부에 회전가능하게 설치된 유성기어부재와,A planetary gear member rotatably installed at a hinge coupling portion of the flange; 상기 유성기어부재의 회전축 일단에 고정된 고정지지축과,A fixed support shaft fixed to one end of a rotation shaft of the planetary gear member; 상기 유성기어부재의 회전축 타단에 회전 가능하게 설치된 유동지지축과,A flow support shaft rotatably installed at the other end of the rotation shaft of the planetary gear member; 상기 고정지지축에 고정결합된 고정아암과,A fixed arm fixedly coupled to the fixed support shaft; 상기 유동지지축에 베어링을 매개로 회전 가능하게 지지된 유동아암과,A flow arm rotatably supported on the flow support shaft via a bearing; 상기 유동지지축에 상기 유동아암을 사이에 두고 고정결합된 구동부재를 포함하는 것을 특징으로 하는 도어의 개폐장치.And a drive member fixedly coupled to the flow support shaft with the flow arm interposed therebetween. 제 1 항에 있어서,The method of claim 1, 상기 고정지지축과 고정아암, 그리고 상기 유동지지축과 구동부재의 고정결합은 스플라인 결합으로 달성되도록 상기 제1 및 제2 암수 세레이션 쌍을 구비한 것을 특징으로 하는 도어의 개폐장치.And the first and second male and female serration pairs are provided such that the fixed support shaft and the fixed arm, and the fixed support of the flow support shaft and the drive member, are achieved by spline coupling. 제 2 항에 있어서,The method of claim 2, 상기 고정아암과 유동아암의 상측 외주에는 상기 고정아암의 회전력이 상기 유동아암에 균등하게 전달되도록 제1 및 제2 지지블록이 돌출형성되어 있고, 이 제 1 및 제2 지지블록 사이에는 연결블록이 고정된 것을 특징으로 하는 도어의 개폐장치.First and second support blocks protrude from the upper outer circumference of the fixed arm and the floating arm so that the rotational force of the fixed arm is evenly transmitted to the flow arm, and a connection block is formed between the first and second support blocks. Door opening and closing device, characterized in that fixed. 제 3 항에 있어서,The method of claim 3, wherein 상기 고정아암과 유동아암의 상측 외주에 돌출된 제1 및 제2 지지블록은 이 돌출 절곡형성되어 있고, 이 제1 및 제2 지지블록 사이에는 연결블록이 고정된 것을 특징으로 하는 도어의 개폐장치.The first and second support blocks protruding from the upper and outer periphery of the fixed arm and the floating arm are formed in the protruding bent, and the connection block is fixed between the first and the second support block is fixed. .
KR2020060003980U 2006-02-13 2006-02-13 Apparatus for opening and closing a door for semiconductor processing chamber KR200415562Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2020060003980U KR200415562Y1 (en) 2006-02-13 2006-02-13 Apparatus for opening and closing a door for semiconductor processing chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2020060003980U KR200415562Y1 (en) 2006-02-13 2006-02-13 Apparatus for opening and closing a door for semiconductor processing chamber

Publications (1)

Publication Number Publication Date
KR200415562Y1 true KR200415562Y1 (en) 2006-05-03

Family

ID=41765047

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2020060003980U KR200415562Y1 (en) 2006-02-13 2006-02-13 Apparatus for opening and closing a door for semiconductor processing chamber

Country Status (1)

Country Link
KR (1) KR200415562Y1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100859786B1 (en) * 2007-03-08 2008-09-24 세메스 주식회사 Cover of processing chamber used in substrate processing apparatus
KR101410880B1 (en) 2012-11-26 2014-07-01 주식회사 선익시스템 A Door Opening/Closing Apparatus Using Link Structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100859786B1 (en) * 2007-03-08 2008-09-24 세메스 주식회사 Cover of processing chamber used in substrate processing apparatus
KR101410880B1 (en) 2012-11-26 2014-07-01 주식회사 선익시스템 A Door Opening/Closing Apparatus Using Link Structure

Similar Documents

Publication Publication Date Title
US5288379A (en) Multi-chamber integrated process system
US5147175A (en) Wafer transfer device for a semiconductor device fabricating system
TWI598195B (en) Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing
US6302684B1 (en) Apparatus for opening/closing a process chamber door of ovens used for manufacturing semiconductor devices
JP2831820B2 (en) Substrate transfer device
JP4847136B2 (en) Vacuum processing equipment
JPH0774228A (en) Method and equipment for reverting sample in treating process
TW201517200A (en) Vacuum robot with linear translation carriage
KR200415562Y1 (en) Apparatus for opening and closing a door for semiconductor processing chamber
JP3623292B2 (en) Substrate tilt revolution device for vacuum deposition
WO1998041366A1 (en) Conveyor robot
TWI758391B (en) Apparatus and methods for wafer rotation to improve spatial ald process uniformity
JP5568328B2 (en) Transport device
TWI386353B (en) Transfer apparatus, transfer chamber having the same, and vacuum processing system including the same
JPH0492446A (en) Substrate conveyance robot
JP2004106105A (en) Delivery robot
JP4352467B2 (en) Rotation transmission mechanism for vacuum chamber
KR101410880B1 (en) A Door Opening/Closing Apparatus Using Link Structure
KR20100002938A (en) Vacuum chamber of side open type
JP3851794B2 (en) Small door type door opening and closing device
KR100211667B1 (en) Door opening device for procedure chamber of semiconductor manufacturing
KR20190094869A (en) A appraratus for opening the upper lid of vacuum chamber
KR20070048936A (en) Process chamber
JP7296083B1 (en) rotary driven gate valve
JP2002299410A (en) Substrate transporting apparatus and vacuum processor

Legal Events

Date Code Title Description
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20130426

Year of fee payment: 8

FPAY Annual fee payment

Payment date: 20140425

Year of fee payment: 9

FPAY Annual fee payment

Payment date: 20150427

Year of fee payment: 10

EXPY Expiration of term