KR200410056Y1 - Valve Drive for Liquid Crystal Display Panel Manufacturing Device - Google Patents

Abstract

The present invention relates to a valve driving device for a liquid crystal display device manufacturing equipment, the airtight member 112 is in close contact to open and close the supply portion supplied to the vacuum and the high temperature manufacturing equipment is processed liquid crystal display device to prevent the leakage of vacuum (112) And a valve portion (110) having a valve plate (111) provided with a plurality of drive arms (113) formed at a lower portion of the valve plate (111) for opening and closing operation, and a plurality of the valve portions (110). It is coupled to the rotary shaft 121 so as to interlock the drive arm 113, a plurality of rotation shaft 121 is formed to support with the support 122 formed in the supply portion, both sides of the rotary shaft 121 is fixed frame 124 Fixed to the rotating shaft 121 and the rotating unit 120 is formed by coupling the rotating gear 125 with teeth formed on both ends to rotate while the rotating shaft 121 is interlocked, and the rotating gear 125 and the gear ratio of the rotating unit 120 According to the amount of rotation Tooth coupling the drive gear 131 is formed on the outer side of the lock, the hinge 133 is formed to be rotated about the center of the drive gear 131, the connecting projection protruding to one side of the drive gear 131 to the outside It is characterized in that it comprises a drive unit 130 formed to rotate the drive gear 131 while driving the front and rear by coupling to the piston rod 135 of the drive cylinder 134 which is operated back and forth by forming the 133 .

 Valve plate, driving arm, rotary shaft, rotary gear, driving gear

Description

Valve Drive for Liquid Crystal Display Manufacturing Equipment {Valve Drive for Liquid Crystal Display Panel Manufacturing Device}

1 is a reference diagram illustrating a manufacturing apparatus for a liquid crystal display device to which the present invention is applied.

Figure 2 is a plan view showing a valve drive device for a liquid crystal display device manufacturing equipment according to the present invention.

Figure 3 is a front view showing a valve drive device for a liquid crystal display device manufacturing equipment according to the present invention.

Figure 4 is a perspective view showing the main part of the valve drive device for a liquid crystal display device manufacturing equipment according to the present invention.

5 is a side view showing a state in which the valve closed state in the valve drive device for the LCD manufacturing apparatus according to the present invention.

Figure 6 is a side view of the use state showing the valve opening state 90 degrees to the valve drive device for a liquid crystal display device manufacturing equipment according to the present invention.

Figure 7 is a side view of the use state showing the open state at an angle of more than 90 degrees to the valve drive device for a liquid crystal display device manufacturing equipment according to the present invention.

* Description of the symbols for the main parts of the drawings *

100: valve driving device 110: valve unit

111: valve plate 112: airtight member

113: driving arm 120: rotating part

121: rotating shaft 122: support

123: driving arm fixing part 124: fixed frame

125: rotary gear 130: drive unit

131: drive gear 132: connection projection

133: hinge portion 134: driving cylinder

135: piston rod

The present invention relates to a valve drive device for a liquid crystal display device manufacturing equipment, and more particularly, the amount of rotation is controlled by the gear ratio to the rotation drive portion of the valve to block the internal environment of high temperature and vacuum in the liquid crystal display device manufacturing process It relates to a valve driving device for a liquid crystal display device manufacturing equipment having a drive device to adjust the rotation angle of the valve by coupling the rotary shaft and the drive cylinder so as to.

In general, a liquid crystal display device may be largely divided into a liquid crystal panel displaying an image and a driving unit for applying a driving signal to the liquid crystal panel, wherein the liquid crystal panel has upper and lower substrates bonded to each other with a predetermined space, and the upper and lower substrates. It consists of a liquid crystal layer formed between the lower substrate. Here, the lower substrate (TFT array substrate) has a plurality of gate wirings arranged in one direction at a predetermined interval, a plurality of data wirings arranged at regular intervals in a vertical direction with the respective gate wirings, and each of the gate wirings and data. A plurality of pixel electrodes formed in a matrix form in each pixel region defined by crossing wires and a plurality of thin film transistors which are switched by signals of the gate wirings to transfer the signals of the data wirings to the pixel electrodes are formed. . On the upper substrate (color filter substrate), a black matrix layer for blocking light except for the pixel region, an R, G, B color filter layer for expressing color colors, and a common electrode for implementing an image are formed.

In recent years, as the above-mentioned liquid crystal display substrate becomes larger and larger in size, the size of equipment for manufacturing the liquid crystal display device is increasing.

1 is a reference diagram illustrating a manufacturing apparatus of a liquid crystal display device to which the present invention is applied. Referring to FIG. 1, a load lock chamber 300 is usually loaded at a place where a glass substrate is loaded or unloaded from a low or high vacuum (10) from atmospheric pressure. -6 Torr) to create ultra high vacuum (10-7 Torr) from atmospheric pressure. On the contrary, when the substrate is unloaded, the thin film deposited on the substrate after all the deposition processes on the glass substrate is heat-treated or the substrate is cooled at a high temperature, and it is also a place where the high vacuum is brought to atmospheric pressure.

The transfer chamber 400 maintains a high vacuum (10-6 Torr) and includes a robot spindle and a sensor therein, and a robot arm (not shown) centering on the robot's spindle. The substrate is moved between the load lock chamber or process chambers 500 in which various processes such as deposition and etching are performed.

When the substrate is moved between the load lock chamber 300 and the transfer chamber 400, the valve 100 stably maintains the vacuum in the transfer chamber 400 and processes the substrate. Repeating the opening and closing operation as necessary to facilitate the progress of, the large sized equipment according to the size of the liquid crystal display device has a problem that a lot of restrictions in processing, operation, maintenance work.

In addition, the conventional liquid crystal display device manufacturing equipment valve is formed to be in close contact with the door lock chamber and the gate to process the liquid crystal display device by vacuum when in operation to maintain the vacuum and high temperature therein and to open and close the valve to supply the liquid crystal display device. By forming the driving device to be rotated at a right angle, it is impossible to adjust the rotation angle, the high vacuum acts from the inside to the valve side, the vacuum pressure is concentrated on the airtight member side, the breakage occurs, or the vacuum pressure leaks to decrease the productivity There was a problem.

In addition, the valve for the liquid crystal display manufacturing apparatus of the prior art is formed to drive the valve by a driving device that is rotated at a right angle, it can be rotated by adjusting the angle to minimize the interference with the moving arm moving during the liquid crystal display device transfer. Therefore, there was a problem that the risk of contact or collision between the transfer arm and the valve is increased.

The main purpose of the present invention, which is intended to solve the above problems, is to transfer the liquid crystal display device manufacturing process to the liquid crystal display device manufacturing process and adjust the amount of rotation by the gear ratio to the driving part of the valve that is opened and closed to process at a high temperature and a vacuum state inside. By combining the gears as much as possible to adjust the rotation angle to the gear ratio, to double the rotational pressure when closed to block the vacuum leakage, and to adjust the lowering angle when opening to minimize the interference when supplying the liquid crystal display device.

As such, the valve driving device for a liquid crystal display device manufacturing facility of the present invention devised to achieve the object is in close contact to open and close the supply portion supplied to the vacuum and the high temperature manufacturing equipment is processed liquid crystal display device to prevent the leakage of vacuum A valve plate having an airtight member is formed, and a valve part having a drive arm for opening and closing the plurality of openings and a lower portion of the valve plate is coupled to a rotating shaft so as to interlock with a driving arm formed with a plurality of the valve parts. Rotating parts formed of a plurality to support with a support formed in the portion, and fixed to both sides of the rotating shaft with a fixed frame, combined rotation gears with teeth formed on both ends to the outer end to rotate while the rotating shaft is interlocked, the rotary gear of the rotating part Drive gear with teeth on the outside to adjust the angle of rotation by displacing the amount of rotation according to the Coupling the gear, forming a hinge so as to rotate around the center of the drive gear, forming a connecting projection protruding outward to one side of the drive gear is coupled to the piston rod of the drive cylinder that is operated back and forth to rotate the drive gear while driving back and forth It characterized in that it comprises a drive unit formed so as to.

In addition, the rotating part is formed in a plurality is characterized in that it is configured to securely secured by forming a groove-shaped drive arm fixing portion to connect and couple the lower portion of the drive arm for operating the valve plate.

In addition, the rotary gear and the driving gear according to the angle of rotation of the valve plate in consideration of the diameter and the amount of rotation of the piston rod of the drive cylinder for rotating the drive gear to the drive gear coupled to the rotary gear of the rotary unit. It characterized in that the configuration to adjust the gear ratio according to the number and shape of the teeth.

Thus, a preferred embodiment of the valve drive device for a liquid crystal display device manufacturing apparatus of the present invention configured as follows with reference to the drawings.

2 is a plan view showing a valve driving apparatus for a liquid crystal display manufacturing apparatus according to the present invention, Figure 3 is a front view showing a valve driving apparatus for a liquid crystal display manufacturing apparatus according to the present invention, Figure 4 is a liquid crystal according to the present invention 5 is a perspective view illustrating a main part of a valve driving device for a display device manufacturing facility, and FIG. 5 is a side view showing a closed state of a valve in the valve driving device for a liquid crystal display device manufacturing facility according to the present invention, and FIG. A state of use showing a valve opening state at 90 degrees to a valve driving apparatus for a liquid crystal display manufacturing apparatus, and FIG. 7 is a use state showing an opening state at an angle of 90 degrees or more to a valve driving apparatus for a liquid crystal display manufacturing apparatus according to the present invention. Side view.

As shown in Figures 2 to 7, the valve drive device 100 for manufacturing liquid crystal display device of the present invention is formed valve unit 110 for opening and closing the supply portion for processing the liquid crystal display device, the valve The rotating part 120 is connected to the lower part so as to rotate to open and close the part 110 and the rotating part 120 is adjusted to a desired angle by the operation of the driving cylinder 134 at both ends of the rotating part 120. It comprises a drive unit 130 to rotate.

The valve unit 110 is a valve plate 111 provided with an airtight member 112 that is in close contact to open and close the supply portion supplied to the high temperature manufacturing equipment and the vacuum in which the liquid crystal display is processed. It is configured to form a drive arm 113 for opening and closing a plurality of operations in the lower portion of the valve plate 111.

The rotary part 120 is coupled to the rotary shaft 121 so as to interlock the drive arm 113 formed of a plurality of the valve unit 110, a plurality of supports to support the rotary shaft 121 with the support 122 formed in the supply portion It is formed, and fixed to both sides of the rotating shaft 121 with a fixed frame 124, it is configured to couple to form a rotary gear 125 provided with teeth on both ends to rotate while rotating shaft 121 is interlocked.

Here, the rotary part 120 is formed in a plurality to form a groove-shaped drive arm fixing portion 123 to be coupled to the coupling of the lower portion of the drive arm 113 for operating the valve plate 111 is configured to be firmly fixed. It is desirable to.

The drive unit 130 gear-couples the drive gear 131 having teeth formed on the outside to adjust the angle of rotation by displacing the rotation amount according to the gear ratio of the rotating unit 120 and the gear ratio, the drive gear 131 Piston rod 135 of the driving cylinder 134 is formed to form a hinge 133 so as to rotate around the center, and the front and rear driving link 132 is formed to protrude outward to one side of the drive gear 131. It is configured to be formed to rotate the drive gear 131 while driving back and forth coupled to.

Here, the piston rod 135 of the drive cylinder 134 to rotate the diameter and the drive gear 131 to the drive gear 131 of the drive unit 130 is geared to the rotary gear 125 of the rotary unit 120. In consideration of the amount of rotation according to the stroke, it is preferable to configure the gear ratio according to the number and shape of the teeth of the rotary gear 125 and the drive gear 131 according to the angle at which the valve plate 111 is rotated.

Thus, look at the operation of the valve drive device for the LCD device manufacturing equipment of the present invention configured as follows.

First, the valve plate 111 with the airtight member 112 is formed in the close contact portion so as to open and close the supply portion for supplying the high temperature and vacuum process to manufacture the liquid crystal display device, and the valve plate 111 is rotated. A plurality of drive arms 113 are formed in the portion to form the valve plate 111 to open and close the close contact portion in which the airtight member 112 is formed by the rotation of the drive arm 113.

As such, the plurality of drive arms 113 are coupled to the drive arm fixing part 123 formed on the rotation shaft 121 so as to rotate the drive arm 113 for driving the valve plate 111, and the lower portion of the rotation shaft 121. A plurality of supports 122 are formed at regular intervals on the support arm 113 so that the driving arm 113 is fixed to the fixed arm fixing part 123 so as to be interlocked with the valve plate 111, and both sides of the rotating shaft 121 are supported. It is formed to be fixed to the fixing frame (124).

As described above, the rotary gear 125 is installed at both ends in a state in which the rotating shaft 121 is fixed to the fixed frame, and the driving gear 131 is rotated about the hinge 133 by gear coupling with the rotary gear 125. Forming, but connecting the connecting projection 132 to one side of the drive gear 131 and the piston rod 135 of the drive cylinder 134 to form a connecting projection (forward and backward of the piston rod 135 of the drive cylinder 134) Rotating the drive gear 131 is a 132 is formed to rotate the rotary shaft 121 while the gear-coupled rotary gear 125 is rotated to install the valve plate 111 to rotate.

At this time, the stroke of the piston rod 135 of the drive cylinder 134 to rotate the diameter and the drive gear 131 to the drive gear 131 of the drive unit 130 is geared to the rotary gear 125 of the rotary unit 120. In consideration of the amount of rotation according to the valve plate 111 is formed and installed to adjust the gear ratio according to the number and shape of the teeth of the rotary gear 125 and the drive gear 131 according to the angle of rotation.

In this way, when the driving cylinder 134 is operated to open the valve 100 installed in the supply portion to supply the manufacturing equipment for producing the liquid crystal display device, the driving gear 131 rotates around the hinge to minimize supply interference. The gear ratio is adjusted to an angle desired by a user of 90 degrees or more, and the gears coupled to the rotary gear 125 are rotated to rotate the rotating shaft 131 on which the plurality of drive arms 113 are fixed at a set angle to the airtight member 112. While maintaining the airtight, the closed valve plate 111 is lowered and opened.

As described above, when the liquid crystal display device is supplied to the valve 100 and the supply is completed, the driving cylinder is formed to close the valve plate 111 rotated at an angle set to minimize supply interference to form a vacuum at a high temperature vacuum. When the driving gear 131 is rotated about the hinge to rotate the rotating gear 125 by rotating the driving gear 131, the connected driving arm 113 is rotated to seal the valve plate 111 to the supply part. While the member 112 is in close contact with each other, the rotation force rotates at a predetermined angle or more to prevent leakage of the vacuum pressure generated therein, thereby converting the rotational force rotated on the rotation shaft 121 into a sealing force to tightly seal and improve productivity.

In this way, the valve driving device for the liquid crystal display device manufacturing equipment of the present invention configured to be in close contact with the door lock chamber supplied to process the liquid crystal display device to a high temperature vacuum and the airtight member formed to maintain the high temperature and vacuum inside the gate side Forming a plate-shaped valve plate provided in the, and forming a plurality of drive arms rotated at a predetermined angle to open and close the operating portion of the valve plate, forming a rotary gear with the end of the rotating shaft fixed with a fixed frame connecting projections The connecting projection is connected to the piston rod of the driving cylinder in a state in which the toothed driving gear is geared and coupled to the fixed frame by a hinge to rotate. When driving the piston rod of the driving cylinder, the driving gear coupled to the connecting protrusion is hinged. When rotating to the center, the gear combined with the gears rotates according to the gear ratio. By opening and closing the valve by rotation, while section, improve the airtight performance, as to adjust the angle of closing by controlling the amount of rotation times the adhesive force of the rotational force to the valve key provides an effect.

In addition, the present invention is a valve drive device for the liquid crystal display device manufacturing equipment is a rotary gear and piston gear of the driving cylinder formed on both ends of the rotating shaft for rotating the valve plate with a gas-tight member formed on the supply side for processing the liquid crystal display device The rotating drive gear is geared so as to adjust the amount of rotation according to the gear ratio so that it can be easily rotated at an angle that minimizes the interference of the liquid crystal display which is conveyed at the time of opening, thereby preventing contact and collision of the valve generated during the liquid crystal display transfer. Prevents the effect of improving productivity.

In addition, the valve drive device for a liquid crystal display device manufacturing apparatus of the present invention is connected to the drive cylinder formed in the valve plate to rotate the teeth and the teeth of the drive gear connected to the operation cylinder and the connecting projection to rotate the drive unit for opening and closing the valve is formed By calculating the teeth according to the angle of rotation by calculating the teeth of the rotary gears of the rotary shaft according to the angle of rotation, the exact amount of rotation according to the teeth of the gear is realized. The control provides the effect of improving accuracy.

Claims (3)

A valve plate 111 having a gastight member 112 is formed to be in close contact with the liquid crystal display device to close and open the processing portion supplied to the high temperature manufacturing equipment and prevent the leakage of vacuum. A valve unit 110 having a driving arm 113 configured to open and close a plurality of operations at a lower portion thereof); It is coupled to the rotary shaft 121 so as to interlock the drive arm 113 formed of a plurality of the valve unit 110, a plurality of rotary shaft 121 is formed to support the support 122 formed in the supply portion, the rotary shaft ( Both sides of the 121 is fixed to the fixed frame 124, the rotating part 120 is formed by coupling the rotary gear 125, which is provided with teeth on both ends to the outside so that the rotating shaft 121 rotates, and Gear-driven gears 131 having teeth formed on the outside to adjust the angle of rotation by shifting the amount of rotation in accordance with the gear ratio of the rotating unit 120 and the gear ratio, the center of the center of the drive gear 131 The hinge 133 is formed to rotate, and the connecting protrusion 132 protruding outward to one side of the drive gear 131 is coupled to the piston rod 135 of the driving cylinder 134 which is operated back and forth to drive back and forth. And a drive unit (130) formed to rotate the drive gear (131) . The method of claim 1, The rotating part 120 is formed in a plurality to form a groove-shaped drive arm fixing portion 123 to be coupled to connect the lower portion of the drive arm 113 for operating the valve plate 111 to securely configured to securely Valve driving apparatus for liquid crystal display manufacturing equipment . The method of claim 1, On the stroke of the piston rod 135 of the drive cylinder 134 to rotate the diameter and the drive gear 131 to the drive gear 131 of the drive unit 130 is geared to the rotary gear 125 of the rotary unit 120. Manufacturing the liquid crystal display device, characterized in that configured to adjust the gear ratio according to the number and shape of the teeth of the rotary gear 125 and the drive gear 131 according to the angle of rotation of the valve plate 111 in consideration of the amount of rotation Valve actuating device for equipment .

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