KR200384219Y1 - Horizontal type cleaning device of printed circuit board using plasma - Google Patents

Abstract

The present invention relates to a horizontal plasma cleaning apparatus using a plasma, comprising: an electrode and a ground socket formed on a rear wall of a plasma processing chamber having a pumping port for vacuum and exhaust and connected to an external power supply; A pair of guide rails disposed on the bottom surface of the chamber; A square frame bogie, on which a caster is fixed and movable; Another guide rail disposed on the upper surface of the trolley so as to correspond to the guide rail and to form a straight line in contact with the guide rail; A plate-shaped base plate having a guide roll sliding along the guide rails; An anode electrode and a cathode electrode vertically placed on an upper surface of the base plate and having an electrode and a ground block connected to the electrode and the ground socket, respectively; And an anode electrode plate and a cathode electrode plate which are cross-laid on the anode electrode and the cathode electrode through the insulating member and are interposed with the workpiece.

According to the present invention, it has a structure capable of drawing in and out of the plasma generating electrode itself, and has a horizontal electrode body, which is suitable for cleaning and etching only a flexible PCB, and is very efficient and easy to operate. It is easy to move and mass production is possible.

Description

Horizontal cleaning device using plasma {HORIZONTAL TYPE CLEANING DEVICE OF PRINTED CIRCUIT BOARD USING PLASMA}

The present invention relates to a horizontal PCB cleaning device using plasma, and more particularly, to an improved plasma suitable for surface cleaning, modification, and smear removal according to ultra-fine patterning of a flexible printed circuit board. It relates to a PC ratio horizontal cleaning device used.

Recently, the demand for ultra-high multilayer PCBs is increasing due to the rapid advancement of printed circuit board (hereinafter referred to as 'PCB') manufacturing technology at home and abroad. ), Multi-chip module, multilayer flexible PCB, etc.

With the development of PCB (including flexible PCB, rigid PCB, hybrid PCB, etc.) development technology, the demand of PCB requiring micro via hole (MICRO VIA HOLE) is increasing rapidly. The technology for processing organic impurities, residual moisture and residues before hole plating is very poor at present even though it has a great influence on the final quality of the PCB.

There is a wet equipment that uses chemicals in the traditional way for hole cleaning of PCB, but the equipment is huge and there are economical and environmental problems due to wet use, and there is no treatment effect on PCBs using Teflon material, and the process progresses. The disadvantage is that precise control and ultra-fine processing are not possible.

Recently, PCB hole cleaning technology using plasma, which is environmentally friendly, economical, has excellent smear (residue) removal ability, and is thin and short due to miniaturization of PCB holes, has been activated.

1 (a) and 1 (b) schematically illustrate such a cleaning apparatus, a main body 10 having a chamber 12 capable of plasma processing is provided, and a plurality of electrodes ( 14 is provided to position the object to be processed, that is, the PCB 20 between the electrodes 14 and then apply a voltage to the electrode 14 to generate a plasma using the reaction gas inside the chamber 12 The plasma was used to clean the PCB holes.

However, since most of the electrodes 14 used in the cleaning equipment are disposed in the vertical direction (vertical type), in the case of the flexible PCB among the PCBs 20, not only the mounting in the vertical form is possible, but also in some cases. Even if it is attached, the flexible PCB is bent under the influence of the high temperature during the plasma treatment, causing a poor processing due to the contact of the electrode (14).

Therefore, there is a need for a cleaning facility capable of plasma processing exclusively for flexible PCBs.

However, in the related art, since there is no dedicated cleaning facility for totally treating the plasma, the process of plasma treatment of the flexible PCB is very difficult and difficult, and the productivity is low.

The present invention was created to solve this problem in consideration of all the problems of the prior art as described above, and it is equipped with a facility capable of plasma treatment exclusively in consideration of the characteristics of the flexible PCB to ensure the smoothness and efficiency of work In addition, the main object of the present invention is to provide a plasma-type horizontal cleaning apparatus using a plasma that can improve productivity and improve its surface treatment quality.

The present invention is an electrode and a ground socket formed on the rear wall surface of the plasma processing chamber having a pumping port for vacuum and exhaust and connected to an external power supply in order to achieve the above technical problem; A pair of guide rails disposed on the bottom surface of the chamber; A square frame bogie, on which a caster is fixed and movable; Another guide rail disposed on the upper surface of the trolley so as to correspond to the guide rail and to form a straight line in contact with the guide rail; A plate-shaped base plate having a guide roll sliding along the guide rails; An anode electrode and a cathode electrode vertically placed on an upper surface of the base plate and having an electrode and a ground block connected to the electrode and the ground socket, respectively; It is characterized by providing a horizontal plasma cleaning apparatus using a plasma comprising an anode electrode plate and a cathode electrode plate cross-laminated on the anode electrode and the cathode electrode through the insulating member and the workpiece is interposed.

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment according to the present invention.

2 and 3 is a view showing an installation state and an operating state of the horizontal cleaning device according to the present invention.

As shown in FIG. 2 and FIG. 3, the chamber 110, which is a plasma processing chamber, is provided at an appropriate location of the cleaning facility main body 100, and the interior of the chamber 110 is vacuumed at an appropriate location of the rear wall of the chamber 110. Alternatively, a pumping port 120 for exhausting is installed, and sockets 130 and 132 connected to an external power supply are installed on the same surface.

The sockets 130 and 132 are divided into an electrode socket 130 connected to a negative electrode (cathode) of a power supply and a ground socket 132 connected to a positive electrode (anode).

In addition, a pair of guide rails 140 are disposed on the bottom surface of the chamber 110, and a stopper 150 is installed at an end portion of the guide rail 140, that is, at an end portion adjacent to the rear wall surface of the chamber 110. do.

The tip of the guide rail 140 extends to the side adjacent to the tip of the chamber 110 and extends to the extent that it does not affect the opening and closing of a door (not shown).

In addition, the front of the chamber 110 is provided with a horizontal electrode body 300 which is movable by the trolley 200.

Here, the trolley 200 is composed of a frame assembly of a substantially rectangular frame shape, the lower surface of the four corners is provided with a caster 210 is configured to easily move the trolley 200.

In addition, a guide rail 240 corresponding to the guide rail 140 is installed on the upper surface of the trolley 200. The guide rails 240 are coincided with each other when the trolley 200 is disposed at a work position. Exposed at a suitable height to form a straight line.

In addition, the surface side guide rail 240 disposed close to the chamber 110 when disposed at the front surface of the truck 200, that is, the working position is extended to be formed longer than the opposite side.

This is because the guide rail 140 disposed in the chamber 110 is not disposed to the end because of the door, so as to prevent charging failure when the horizontal electrode body 300 is charged, to place the bogie 200 in a working position. When the extension of the guide rail 240 is partially introduced into the chamber 110 to be in contact with the end of the guide rail 140, the breakage of the guide rail 140 is eliminated to maintain the form connected to each other. .

In addition, a stopper 250 for preventing separation of the horizontal electrode body 300 is formed in a shape corresponding to the stopper 150 at the opposite end of the guide rail 240 in which the extension is formed.

In addition, the protrusions 142 and the recessed grooves 242 are formed at ends of the guide rails 140 and 240 that are in contact with each other.

Thus, the protrusion 142 is inserted into the recessed groove 242 to easily connect the two to each other, on the contrary, a protrusion is formed in the recessed groove 242 portion, and the recessed groove 242 in the protrusion 142 region. Naturally, it may have a structure in which) is formed.

On the other hand, the horizontal electrode body 300 is provided with a base plate 310 of a rectangular frame or square plate, the upper surface of the base plate 310, the anode electrode 320 and the cathode electrode is formed in a pair at a predetermined interval 330 is installed.

In this case, the anode electrode 320 and the cathode electrode 330 are connected to the electrode block 350 and the ground block 352 fixed to the rear side of the base plate 310 in a properly insulated state.

The electrode and the ground blocks 350 and 352 are members connectable to the electrode socket 130 and the ground socket 132 in the chamber 110 described above. 320 and the cathode electrode 330.

In addition, the anode electrode plate 360 and the cathode electrode 330 are properly insulated from each other by the anode electrode plate 360 and the cathode electrode plate 370, so that the anode electrode plate 360 is connected only to the anode electrode 320. The cathode electrode plate 370 is disposed so as to be connected to only the cathode electrode 330 in a cross stacked manner at a mutual interval.

Here, the anode electrode plate 360 and the cathode electrode plate 370 are not necessarily limited to a plate-shaped conductive member, but a member having a frame (frame) shape or a bar (so long as the member can sufficiently support the workpiece). Bar) shape may be sufficient.

In addition, a guide roll 380 that is movable along the guide rails 140 and 240 is installed on the bottom surface of the base plate 310.

The guide roll 380 may be a simple rotatable wheel, and preferably, a roll (roller) having a shape that does not easily detach from the guide rails 140 and 240 while being able to slide smoothly.

Finally, a handle 390 is installed at the tip of the base plate 310 to facilitate pushing and pulling it.

In particular, as shown in FIG. 4, at least one of the anode electrode plate 360 and the cathode electrode plate 370, preferably at the front end of the top and bottom electrode plates of the horizontal electrode body 300, the shock absorbing member S. Is fixed, the buffer member (S) is a cylindrical body (S1) fixed to the electrode plate (360,370), respectively, a rod (S2) fitted to the body (S1) having a protrusion and the body (S1) It is composed of a spring (S3) is installed inside and installed to elastically push the rod (S2).

Thus, the electrode block 350 and the ground block 352 fixed to the rear ends of the electrode plates 360 and 370 are connected to the electrode socket 130 and the ground socket 132, respectively, and then the door of the chamber 12 is sealed. When the rod (S2) of the buffer member (S) is in contact with the inner surface of the door to suppress the spring (S3), the close connection between the socket 130, 132 and the blocks (350, 352) by the elastic force is continued It can be maintained as a smooth power supply is possible.

In addition, as shown in FIG. 5, the shape of supplying power to the electrode plates 360 and 370 may be changed. For example, any one of the pair of guide rails 240 arranged in parallel may be disposed so that the anode is energized and the ground socket A ), And the other is arranged so that the cathode is energized to make the electrode socket (B), and then the guide roll 380 rolling contact with the ground socket (A) is used as a ground block, and the opposite electrode socket (B) and Rolling contact guide roll 380 may induce the same operation as described above by using the electrode block.

In addition, as shown in Figure 6, the electrode plate (360,370) is formed in a drawable structure, the front end surface is provided with the above-mentioned buffer member and the handle (P), the rear end of the electrode block 350 or ground block 352 may be installed, and a plurality of holes may be formed in the bottom surface thereof.

As shown in FIG. 6B, the electrode plates 360 and 370 may be installed to be pulled in and out between the insulating members, and the workpiece may be seated on the upper surface thereof.

Furthermore, although not shown, a cradle (member for receiving a workpiece) having a structure as shown in FIGS. 6A and 6B is provided so that the workpiece is formed by two insulating plates 360 and 370. It may be intermittent in between.

This may be disposed to be in contact with the surfaces of the electrode plates 360 and 370 according to the processing characteristics of the object to be treated, or may be treated by being held in an excited state between the electrode plates 360 and 370.

The working relationship of the present invention made of such a configuration is as follows.

First, the object to be processed (PCB, BGA, CSP, electromagnetic plate, parts requiring surface cleaning, etc.), in particular, the flexible PCB is not suitable for vertically arranged because of the ductility is strong, the anode electrode plate 320 and the cathode as shown in the figure Charged and disposed between the electrode plates 330.

In this case, the flexible PCB is preferably disposed in surface contact with the cathode electrode plate 370, and in some cases, may be spaced apart from the cathode electrode plate 360 with a predetermined height. Can be spaced apart.

The insulating member such as Teflon may also be used to insulate the cathode electrode plate 370 from the anode electrode 320 or the anode electrode plate 360 from the cathode electrode 330.

When the object to be processed is stacked and disposed through the above process, the user moves the cart 200 to the working position.

The working position refers to a position where the guide rail 140 and the guide rail 240 are in contact with each other in a straight line as the front adjacent side of the chamber 110.

When the trolley 200 is positioned at the working position, the operator grasps the handle 390 and exerts a force to push the base plate 310, and by the force, the base plate 310 is fixed to the guide roll (if any). 380 is moved while sliding along the guide rail 240.

When the guide plate 380 is pushed to the base plate 310 as much as possible to the stopper 150 inside the chamber 110, the charging operation is completed and the door of the chamber 110 is sealed.

In this state, the plug 350 is completely connected to the socket 130.

Subsequently, when the required vacuum degree and the reaction gas are supplied and power is applied, power applied to each electrode 320 and 330 is applied to each electrode plate 360 and 370, and discharge is generated therebetween to generate plasma and to generate the plasma. As a result, the flexible PCB interposed between the electrode plates 360 and 370 is cleaned and etched.

After the plasma processing is completed, the horizontal electrode body 300 is separated from the chamber 110, and then another horizontal electrode body in the air is loaded in the same manner, thereby enabling a quick, simple and easy plasma treatment of the flexible PCB. do.

As described in detail above, according to the present invention, it has a structure capable of drawing in and out of the plasma generating electrode itself, and has a horizontal electrode body, which is suitable for cleaning and etching only flexible PCBs, and is very efficient. It is not only easy to work but also easy to move, so mass production is possible.

1 is an exemplary view showing a general plasma cleaning apparatus,

2 and 3 is a view showing the installation and operating state of the horizontal cleaning device according to the present invention,

4 is a detailed view of the main portion of the horizontal cleaning device according to the present invention,

5 is an exemplary view showing a power connection relationship of the horizontal cleaning device according to the present invention,

6 is an exemplary view showing an electrode plate of a horizontal cleaning device according to the present invention.

♧ description of the symbols for the main parts of the drawing ♧

100 .... body 110 .... chamber

120 ... pumping port 130 ... socket

140,240 .... Guide rail 150,250 .... Stopper

200 .... balance 210 .... caster

300 .... horizontal electrode 310 .... base plate

320 .... anode electrode 330 .... cathode electrode

350..electrode block 360 .... anode electrode plate

370 .... cathode electrode 380 .... guide roll

390 ... handle

Claims (7)

An electrode and a ground socket formed on the rear wall of the plasma processing chamber having a pumping port for vacuum and exhaust and connected to an external power supply; A pair of guide rails disposed on the bottom surface of the chamber; A square frame bogie, on which a caster is fixed and movable; Another guide rail disposed on the upper surface of the trolley so as to correspond to the guide rail and to form a straight line in contact with the guide rail; A plate-shaped base plate having a guide roll sliding along the guide rails; An anode electrode and a cathode electrode vertically placed on an upper surface of the base plate and having an electrode and a ground block connected to the electrode and the ground socket, respectively; A horizontal plasma cleaning apparatus using a plasma, characterized in that it comprises an anode electrode plate and a cathode electrode plate cross-laminated on the anode electrode and the cathode electrode through an insulating member interposed with the workpiece. The method according to claim 1, And said guide rail has a stopper attached to its front end or rear end thereof. The method according to claim 1, The guide rails are horizontal plasma cleaning device using a plasma, characterized in that the grooves and protrusions are assembled to each other at the opposite ends to be closely connected and assembled. The method according to claim 1, And the anode electrode plate and the cathode electrode plate are plate-shaped conductive plates or frame-shaped conductive frames. The method according to claim 1, At the front end of the anode electrode plate and the cathode electrode plate is provided with a cushioning member consisting of a rod in close contact with the door of the chamber, a cylindrical body in which the rod is accommodated, a spring embedded in the body and suppressing the rod Plasma horizontal cleaning device using plasma. The method according to claim 1, The workpiece is disposed between the anode electrode and the cathode electrode plate in an excited state while both ends thereof are supported by an insulating member or placed in contact with the cathode electrode plate. Cleaning device. A pair of guide rails disposed on the bottom surface of the plasma processing chamber and connected to the anode and the cathode of the power supply source, respectively; A square frame bogie, on which a caster is fixed and movable; Another guide rail disposed on the upper surface of the trolley so as to correspond to the guide rail and to form a straight line in contact with the guide rail; A plate-shaped base plate provided with a pair of guide rolls installed to be energized while sliding along the guide rails; An anode electrode and a cathode electrode vertically placed on an upper surface of the base plate and having an electrode and a ground block electrically connected to the guide rolls; A horizontal plasma cleaning apparatus using a plasma, characterized in that it comprises an anode electrode and a cathode electrode plate is cross-laminated and connected to the anode electrode and the cathode electrode through an insulating member.