KR200365578Y1 - air purification system for clean room - Google Patents

air purification system for clean room Download PDF

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KR200365578Y1
KR200365578Y1 KR20-2004-0020573U KR20040020573U KR200365578Y1 KR 200365578 Y1 KR200365578 Y1 KR 200365578Y1 KR 20040020573 U KR20040020573 U KR 20040020573U KR 200365578 Y1 KR200365578 Y1 KR 200365578Y1
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clean room
air
purifier
case
supplied
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KR20-2004-0020573U
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정영숙
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정영숙
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/80—Type of catalytic reaction
    • B01D2255/802—Photocatalytic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2279/00—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses
    • B01D2279/50—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning
    • B01D2279/51—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning in clean rooms, e.g. production facilities for electronic devices, laboratories

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Disinfection, Sterilisation Or Deodorisation Of Air (AREA)

Abstract

본 고안은 크린룸용 공기정화시스템에 관한 것으로, 블로어(2)에 의해 외부공기가 공급되는 제1케이스(21)와, 상기 제1케이스(21) 내에 충진되어 공급된 공기를 정화시키는 광촉매액(23)으로 이루어진 제1정화기(20)가 구비되고; 상기 제1케이스(21) 일측에 구비되어 광촉매액(23)을 통과한 1차 정화된 공기가 공급되는 제2케이스(31)와, 상기 제2케이스(31) 내에 충진되는 활성탄(33)으로 이루어진 제2정화기(30)가 구비되며; 상기 제2케이스(31)에, 활성탄(33)을 통과한 2차 여과 공기를 각 크린룸에 공급하도록 공지의 배관라인(3)이 연결되는 크린룸용 공기정화시스템을 구비하였다.The present invention relates to an air purification system for a clean room, comprising: a first case 21 supplied with external air by a blower 2 and a photocatalyst liquid for purifying the air filled in the first case 21 ( A first purifier 20 composed of 23); The second case 31 is provided on one side of the first case 21 and supplied with the first purified air passing through the photocatalyst liquid 23, and the activated carbon 33 filled in the second case 31. A second purifier 30 is provided; In the second case 31, a clean room air purification system is connected to a known pipe line 3 so as to supply secondary filtered air that has passed through activated carbon 33 to each clean room.

그러므로, 블로어(2)로부터 공급되는 공기가 제1정화기(20)와 제2정화기(30)를 지나면서 확실히 정화된 후 크린룸에 공급되고, 이에 따라 공기에 함유된 미세먼지, 세균 등이 제거된 후 크린룸에 공급되므로 크린룸 내의 고정밀도의 장비, 부품들의 불량 발생율를 최소화시킬 뿐 아니라 정확한 실험 데이터를 얻을 수 있도록 하였다.Therefore, the air supplied from the blower 2 is clarified after passing through the first purifier 20 and the second purifier 30 and then supplied to the clean room, whereby fine dust, bacteria and the like contained in the air are removed. Since it is supplied to the clean room, it is possible to minimize the incidence of defects of high-precision equipment and components in the clean room and to obtain accurate experimental data.

Description

크린룸용 공기정화시스템 {air purification system for clean room}Air purification system for clean room {air purification system for clean room}

본 고안은 크린룸(clean room)에 관한 것으로, 특히 크린룸에 공급되는 공기를 정화시키기 위한 크린룸용 공기정화시스템에 관한 것이다.The present invention relates to a clean room, and more particularly to an air purification system for a clean room for purifying the air supplied to the clean room.

크린룸의 종류는 대략 다음과 같은바, 전자공장이나 반도체 공장 등이 해당되는 산업형 크린룸(ICR : Industrial Clean Room)과, 생체시험을 위한 분야나 동물실험을 하는 분야에 해당하는 생명공학적인 크린룸(BCR : Biorogical Clean Room)과, 무균상태에서 제조해야 할 필요성이 있는 약품공장이나 화장품공장 등에 적용되는 크린룸과, 실험실의 크린룸이 있다.The types of clean rooms are as follows: Industrial Clean Room (ICR), which is applicable to electronic factories and semiconductor factories, and biotech clean rooms that correspond to the fields of biological testing or animal testing. BCR: Biorogical Clean Room), clean room applied to pharmaceutical or cosmetics factory that needs to be manufactured under aseptic condition, and clean room of laboratory.

이러한 크린룸에는 보통 고도의 청결을 요하게 되며, 눈에 보이는 비교적 큰 먼지는 물론이고, 미세한 먼지 등이 유입되지 않도록 주의하여야 한다.Such clean rooms usually require a high level of cleanliness, and care must be taken not to introduce fine dust as well as relatively large dust visible.

따라서 고밀도 장비나 이로부터 제작되는 부품들, 실험 대상에서 발생될 수 있는 불량 발생률, 실험오차 등을 최소화시키기 위해 크린룸에 유입되는 공기를 더욱 확실하게 정화시키기 위한 노력이 지속되고 있다.Therefore, efforts have been made to more reliably purify the air flowing into the clean room in order to minimize high density equipment or components manufactured therefrom, defect rates that may occur in the test subjects, and experimental errors.

상술한 문제를 감안한 본 고안의 목적은, 확실하게 정화된 외부 공기를 각각의 크린룸에 공급할 수 있도록 된 크린룸용 공기정화시스템을 제공하는데 있다.The object of the present invention in view of the above-described problems is to provide an air purification system for a clean room, which is capable of supplying externally purified clean air to each clean room.

이와 같은 목적을 달성하기 위한 본 고안 크린룸용 공기정화시스템은, 크린룸에 연결설치되어 실내로 공급되는 공기를 정화시키는 크린룸용 공기정화시스템에 있어서, 블로어에 의해 외부 공기가 공급되는 제1케이스와, 상기 제1케이스 내에 충진되어 공급된 공기를 정화시키는 광촉매액으로 이루어진 제1정화기가 구비되고; 상기 제1케이스 일측에 구비되어 광촉매액을 통과한 1차 정화된 공기가 공급되는 제2케이스와, 상기 제2케이스 내에 충진되는 활성탄으로 이루어진 제2정화기가 구비되며; 상기 제2케이스에, 활성탄을 통과한 2차 여과 공기를 각 크린룸에 공급하도록 공지의 배관라인이 연결되는 것을 특징으로 한다.The present invention clean room air purification system for achieving the above object is, in the clean room air purification system is installed in the clean room to purify the air supplied to the room, the first case is supplied with external air by the blower, A first purifier made of a photocatalyst liquid for purifying the air supplied and filled in the first case; A second case provided on one side of the first case and supplied with first purified air passing through the photocatalyst liquid, and a second purifier made of activated carbon filled in the second case; In the second case, a known pipe line is connected to supply secondary filtration air that has passed through activated carbon to each clean room.

본 고안 크린룸용 공기정화시스템의 다른 특징은, 외부에서 공급된 공기가광촉매액과 활성탄을 여러번 반복 통과하여 다수의 정화과정을 거치도록, 상기 제1정화기와 제2정화기 일측에, 이들과 동일한 구조의 정화기들이 교번하여 반복 설치된다.Another feature of the present invention clean room air purification system, the same structure on the one side of the first purifier and the second purifier, so that the air supplied from the outside passes through the photocatalyst liquid and activated carbon several times to undergo a plurality of purification processes Purifiers are alternately installed.

따라서, 블로어로부터 공급되는 공기가 제1정화기와 제2정화기를 지나면서 확실히 정화된 후 크린룸에 공급되고, 이에 따라 공기에 함유된 미세먼지, 세균 등이 제거된 후 크린룸에 공급되므로 크린룸 내의 고정밀도의 장비, 부품들의 불량 발생율를 최소화시킬 뿐 아니라 정확한 실험 데이터를 얻을 수 있는 등의 효과가 있다.Therefore, the air supplied from the blower is clarified after passing through the first and second purifiers, and then supplied to the clean room, and thus, fine dust and bacteria contained in the air are removed and then supplied to the clean room, thereby providing high accuracy in the clean room. Minimize the failure rate of equipment and components of the machine, as well as get accurate experimental data.

도1은 본 고안 크린룸용 공기정화시스템의 설치상태를 보이는 개략도1 is a schematic view showing an installation state of the present invention clean room air purification system

도2는 도1의 요부를 보이는 개략적 발췌 단면도Figure 2 is a schematic cross-sectional view showing the main portion of Figure 1

도3은 본 고안 크린룸용 공기정화시스템의 다른 실시예를 보이는 개략적 단면도Figure 3 is a schematic cross-sectional view showing another embodiment of the present invention clean room air purification system

*도면의 주요 부분에 대한 부호의 설명** Description of the symbols for the main parts of the drawings *

10 : 공기정화시스템 20 : 제1정화기10: air purification system 20: first purifier

23 : 광촉매액 30 : 제2정화기23 photocatalyst liquid 30 second purifier

33 : 활성탄 40 : 제3정화기33: activated carbon 40: third purifier

50 : 제4정화기50: fourth purifier

본 고안의 구체적 특징 및 이점은 첨부된 도면을 참조한 이하의 설명으로 더욱 명확해 질 것이다.Specific features and advantages of the present invention will become more apparent from the following description with reference to the accompanying drawings.

도1은 본 고안 크린룸용 공기정화시스템이 설치된 상태를 보이는 개략도이고, 도2는 도1의 주요부를 보이는 개략적 확대 단면도로써, 공기정화시스템(10)은 블로어(2)에 연결되어 외부의 공기가 공급되는 제1정화기(20)와, 제1정화기(20) 및 공지의 배관라인(3)에 연결되어 제1정화기(20)를 통과한 공기를 2차 여과시킨 후 배관라인(3)을 통해 각 크린룸에 공급하는 제2정화기(30)로 대분된다.1 is a schematic view showing a state of the present invention clean room air purification system is installed, Figure 2 is a schematic enlarged cross-sectional view showing the main part of Figure 1, the air purification system 10 is connected to the blower (2) to the outside air The second purifier 20 is connected to the first purifier 20, the first purifier 20, and the known pipe line 3, and the air passing through the first purifier 20 is filtered secondly. It is divided into the 2nd purifier 30 which supplies to each clean room.

제1정화기(20)에는, 자외선살균램프(24)가 설치된 제1케이스(21)가 구비되고, 제1케이스(21) 내에는 블로어(2)에 의해 외부 공기가 공급되도록 공기공급호스(4)가 연결되며, 공기공급호스(4) 단부에는 제1기포발생부(22)가 연결된다.The first purifier 20 is provided with a first case 21 provided with an ultraviolet sterilization lamp 24, and the air supply hose 4 is provided in the first case 21 so that external air is supplied by the blower 2. ) Is connected, and the first bubble generator 22 is connected to the end of the air supply hose (4).

그리고 제1케이스(21) 내에는 광촉매액(23)이 저장되어 제1기포발생부(22)에서 분사된 공기가 광촉매액(23)을 통과하면서 정화된다.In the first case 21, the photocatalyst liquid 23 is stored, and the air injected from the first bubble generator 22 is purified while passing through the photocatalyst liquid 23.

제2정화기(30)에는 활성탄(33)이 충진된 제2케이스(31)가 구비되고, 이 제2케이스(31) 내에는 제2기포발생부(32)가 구비되며, 제2기포발생부(32)와 제1정화기(20)의 제1케이스(21) 상부에는 연결호스(25)가 연결된다.The second purifier 30 is provided with a second case 31 filled with activated carbon 33, and the second case 31 is provided with a second bubble generator 32, and a second bubble generator. A connection hose 25 is connected to the upper portion of the first case 21 of the first and second purifiers 32 and 32.

그리고 제2케이스(31)에는, 활성탄(33)을 통과한 2차 여과 공기를 각 크린룸에 공급하도록 공지의 배관라인(3)이 연결된다.In addition, a known piping line 3 is connected to the second case 31 so as to supply secondary filtered air that has passed through the activated carbon 33 to each clean room.

이러한 구성의 본 고안 크린룸용 공기정화시스템은, 블로어(2)로부터 공급된 공기가 공기공급호스(4)를 통해 제1정화기(20)의 제1기포발생부(22)로 공급되고 이에 의해 공급된 공기는 광촉매액(23)을 통과하면서 1차 여과되며, 1차 여과된 공기는 연결호스(25)를 통해 제2정화기(30)로 유입된다.In the present invention clean room air purification system of this configuration, the air supplied from the blower (2) is supplied to the first bubble generator 22 of the first purifier 20 through the air supply hose (4), thereby supplying The filtered air is first filtered while passing through the photocatalyst liquid 23, and the first filtered air is introduced into the second purifier 30 through the connection hose 25.

제2기포발생부(32)로부터 제2정화기(30)에 분사되는 공기는 활성탄(33)을 지나면서 2차 정화되며, 그 후 각 크린룸에 연결되는 배관라인(3)에 공급된다.The air injected from the second bubble generator 32 to the second purifier 30 is secondly purified while passing through the activated carbon 33 and then supplied to the pipe line 3 connected to each clean room.

이러한 본 고안 크린룸용 공기정화시스템은, 블로어(2)로부터 공급되는 공기가 제1정화기(20)와 제2정화기(30)를 지나면서 확실히 정화된 후 크린룸에 공급되고, 이에 따라 공기에 함유된 미세먼지, 세균 등이 제거된 후 크린룸에 공급되므로 크린룸 내의 고정밀도의 장비, 부품들의 불량 발생율를 최소화시킬 뿐 아니라 정확한 실험 데이터를 얻을 수 있게 된다.In the air purification system for the present invention, the air supplied from the blower 2 is clarified while passing through the first purifier 20 and the second purifier 30, and then supplied to the clean room. Since fine dust and bacteria are removed and supplied to the clean room, it is possible to obtain accurate experimental data as well as to minimize the occurrence rate of high precision equipment and components in the clean room.

도3은 본 고안 크린룸용 공기정화시스템의 다른 실시예를 보이는 개략적 단면도로써, 이는 외부에서 공급된 공기가 광촉매액과 활성탄을 여러번 반복 통과하여 다수의 정화과정을 거치도록, 제1정화기(20)와 제2정화기(30) 일측에, 이들과 동일한 구조의 제3정화기(40), 제4정화기(50)가 교번하여 반복 설치된 구조이다.Figure 3 is a schematic cross-sectional view showing another embodiment of the present invention clean room air purification system, which is a first purifier 20 so that the air supplied from the outside passes through the photocatalyst liquid and activated carbon several times to undergo a plurality of purification processes. And a third purifier 40 and a fourth purifier 50 having the same structure as these are alternately and repeatedly provided on one side of the second purifier 30.

이러한 크린룸용 공기정화시스템은, 제1정화기(20), 제2정화기(30)를 통과한 공기가 보조로 더 설치된 제3정화기(40), 제4정화기(50)를 통과하면서 확실하게 정화되므로, 외부에서 공급된 공기가 광촉매액과 활성탄을 여러번 반복 통과하여 다수의 정화과정을 거치게 된다.The air purification system for the clean room is reliably purified while passing through the third purifier 40 and the fourth purifier 50 in which the air passing through the first purifier 20 and the second purifier 30 is further assisted. In addition, the externally supplied air passes through the photocatalyst liquid and activated carbon several times and undergoes a plurality of purification processes.

한편 제4정화기(50) 내부에는 활성탄만 충진시킬 수도 있지만 적정량의 활성탄이 물에 잠기도록 물도 충진시킬 수도 있다.Meanwhile, although only activated carbon may be filled in the fourth purifier 50, water may also be filled so that an appropriate amount of activated carbon is submerged in water.

또한 제4정화기(50) 내의 활성탄과 물이 격리되도록 별도의 보조케이스를 제4정화기 내부에 위치시킨 후 보조케이스 내부에 적정량의 물을 투입할 수 있으며, 이러한 경우 제3정화기(40)로부터 공급된 공기가 보조케이스 내부의 물을 통과하고 제4정화기 내부의 활성탄을 거친 후 배관라인(3)으로 공급된다.In addition, a separate auxiliary case may be placed inside the fourth purifier to separate activated carbon and water in the fourth purifier 50, and then an appropriate amount of water may be introduced into the auxiliary case. In this case, the third purifier 40 is supplied from the third purifier 40. The air passed through the water inside the auxiliary case, passed through the activated carbon in the fourth purifier and is supplied to the pipe line (3).

여기서 보조케이스에 수납된 물에 아로마향 등 인체에 유용한 향을 첨가한다면 각 크린룸에 정화된 공기와 함께 인체에 유용한 향을 공급할 수 있게 된다.If you add aromas, such as aroma, to the water stored in the auxiliary case, it is possible to supply a useful aroma to the human body with the purified air to each clean room.

이상에서와 같은 본 고안에 따른 크린룸용 공기정화시스템에 의하면, 블로어(2)로부터 공급되는 공기가 제1정화기(20)와 제2정화기(30)를 지나면서 확실히 정화된 후 크린룸에 공급되고, 이에 따라 공기에 함유된 미세먼지, 세균 등이 제거된 후 크린룸에 공급되므로 크린룸 내의 고정밀도의 장비, 부품들의 불량 발생율를 최소화시킬 뿐 아니라 정확한 실험 데이터를 얻을 수 있는 등의 효과가 있다.According to the clean room air purification system according to the present invention as described above, the air supplied from the blower (2) is clarified while passing through the first purifier 20 and the second purifier 30 is supplied to the clean room, Accordingly, since the fine dust, bacteria, etc. contained in the air is removed and supplied to the clean room, it is possible to minimize the defect occurrence rate of high-precision equipment and components in the clean room as well as to obtain accurate experimental data.

Claims (2)

크린룸에 연결설치되어 실내로 공급되는 공기를 정화시키는 크린룸용 공기정화시스템에 있어서,In the clean room air purification system is connected to the clean room to purify the air supplied to the room, 블로어(2)에 의해 외부 공기가 공급되는 제1케이스(21)와, 상기 제1케이스(21) 내에 충진되어 공급된 공기를 정화시키는 광촉매액(23)으로 이루어진 제1정화기(20)가 구비되고;The first purifier 20 includes a first case 21 to which external air is supplied by the blower 2, and a photocatalyst liquid 23 to purify the air supplied and filled in the first case 21. Become; 상기 제1케이스(21) 일측에 구비되어 광촉매액(23)을 통과한 1차 정화된 공기가 공급되는 제2케이스(31)와, 상기 제2케이스(31) 내에 충진되는 활성탄(33)으로 이루어진 제2정화기(30)가 구비되며;The second case 31 is provided on one side of the first case 21 and supplied with the first purified air passing through the photocatalyst liquid 23, and the activated carbon 33 filled in the second case 31. A second purifier 30 is provided; 상기 제2케이스(31)에, 활성탄(33)을 통과한 2차 여과 공기를 각 크린룸에 공급하도록 공지의 배관라인(3)이 연결되는 것을 특징으로 하는 크린룸용 공기정화시스템.The clean room air purification system, characterized in that the known pipe line (3) is connected to the second case (31), to supply the secondary filtered air passing through the activated carbon (33) to each clean room. 제1항에 있어서,The method of claim 1, 외부에서 공급된 공기가 광촉매액과 활성탄을 여러번 반복 통과하여 다수의 정화과정을 거치도록, 상기 제1정화기와 제2정화기 일측에, 이들과 동일한 구조의 제3정화기(40), 제4정화기(50)들이 교번하여 반복 설치되는 것을 특징으로 하는 크린룸용 공기정화시스템.The third purifier 40 and the fourth purifier having the same structure on one side of the first purifier and the second purifier so that the air supplied from the outside passes through the photocatalyst liquid and the activated carbon several times and undergoes a plurality of purification processes. Air cleaning system for a clean room, characterized in that 50) are alternately installed repeatedly.
KR20-2004-0020573U 2004-07-19 2004-07-19 air purification system for clean room KR200365578Y1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101457814B1 (en) * 2013-08-14 2014-11-03 곽삼영 Gas filtration appratus and system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101457814B1 (en) * 2013-08-14 2014-11-03 곽삼영 Gas filtration appratus and system

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