KR20030075212A - Dieletric Device Using PVDF and Nano Ceramics Particles, and Method for Fabrication the Same - Google Patents
Dieletric Device Using PVDF and Nano Ceramics Particles, and Method for Fabrication the Same Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims abstract description 98
- 239000002033 PVDF binder Substances 0.000 title claims abstract description 70
- 229920002981 polyvinylidene fluoride Polymers 0.000 title claims abstract description 69
- 239000002245 particle Substances 0.000 title claims abstract description 42
- 238000000034 method Methods 0.000 title claims abstract description 33
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 239000002131 composite material Substances 0.000 claims abstract description 26
- 230000008569 process Effects 0.000 claims abstract description 26
- 238000000137 annealing Methods 0.000 claims abstract description 10
- 238000000071 blow moulding Methods 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims description 10
- 238000000465 moulding Methods 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 229910002113 barium titanate Inorganic materials 0.000 claims description 6
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 4
- 239000006104 solid solution Substances 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 2
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 2
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 2
- 238000003825 pressing Methods 0.000 abstract description 5
- 239000000843 powder Substances 0.000 description 18
- 239000004033 plastic Substances 0.000 description 15
- 229920003023 plastic Polymers 0.000 description 15
- 239000002105 nanoparticle Substances 0.000 description 12
- 239000010408 film Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 238000002156 mixing Methods 0.000 description 6
- 239000007822 coupling agent Substances 0.000 description 5
- 238000001125 extrusion Methods 0.000 description 5
- 229920001940 conductive polymer Polymers 0.000 description 3
- 239000011777 magnesium Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000010924 continuous production Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000004898 kneading Methods 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229920000265 Polyparaphenylene Polymers 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000002612 dispersion medium Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229920001197 polyacetylene Polymers 0.000 description 1
- -1 polyparaphenylene Polymers 0.000 description 1
- 229920000128 polypyrrole Polymers 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C48/00—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor
- B29C48/001—Combinations of extrusion moulding with other shaping operations
- B29C48/0011—Combinations of extrusion moulding with other shaping operations combined with compression moulding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C48/00—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor
- B29C48/001—Combinations of extrusion moulding with other shaping operations
- B29C48/0017—Combinations of extrusion moulding with other shaping operations combined with blow-moulding or thermoforming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C48/00—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor
- B29C48/001—Combinations of extrusion moulding with other shaping operations
- B29C48/0018—Combinations of extrusion moulding with other shaping operations combined with shaping by orienting, stretching or shrinking, e.g. film blowing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C48/00—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor
- B29C48/022—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor characterised by the choice of material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C48/00—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor
- B29C48/03—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor characterised by the shape of the extruded material at extrusion
- B29C48/07—Flat, e.g. panels
- B29C48/08—Flat, e.g. panels flexible, e.g. films
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2027/00—Use of polyvinylhalogenides or derivatives thereof as moulding material
- B29K2027/12—Use of polyvinylhalogenides or derivatives thereof as moulding material containing fluorine
- B29K2027/16—PVDF, i.e. polyvinylidene fluoride
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K2201/00—Specific properties of additives
- C08K2201/011—Nanostructured additives
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Abstract
Description
본 발명은 폴리비닐리덴 플루오라이드(PVDF: polyvinylidene fluoride)와 나노 세라믹을 이용한 압전체 및 그 제조방법에 관한 것으로, 보다 상세하게는 플라스틱 중 유전율과 압전율이 우수한 폴리비닐리덴 플루오라이드(PVDF: polyvinylidene fluoride)와 압전율, 유전율 및 도전성 등이 우수한 나노 세라믹 입자를 혼합한 복합재를 블로우 성형하여 필름 상으로 몰딩하고, 이를 로울러에 의한 압착 및 연신 공정을 수행함으로써 세라믹 입자의 PVDF에 대한 분산성이 향상되고, 우수한 압전 특성 및 기계적 강도를 가지며, 연속적인 제조공정에 따른 비용의 절감의 효과를 갖는 PVDF와 나노 세라믹을 이용한 압전체 및 그 제조방법에 관한 것이다.The present invention relates to a piezoelectric material using polyvinylidene fluoride (PVDF) and nano ceramics, and more particularly, to a polyvinylidene fluoride (PVDF) having excellent dielectric constant and piezoelectricity in plastics. ) And blow-molded a composite material of nano ceramic particles having excellent piezoelectricity, dielectric constant, conductivity, and the like, and molding onto a film, and then performing a pressing and stretching process using a roller to improve dispersibility of the ceramic particles in PVDF. The present invention relates to a piezoelectric material using PVDF and nano ceramics having excellent piezoelectric properties and mechanical strength, and having an effect of reducing cost according to a continuous manufacturing process, and a method of manufacturing the same.
유전성, 압전성 등의 기능을 갖는 기능성 세라믹은 각종전기·전자 부품 등으로서 광범위한 분야에 사용되고 있다. 예컨대, 각종 작동기(actuator), 센서(sensor), 공진기(resonator) 등의 압전 소자에 사용되고 있다. 이러한 기능성 세라믹으로서 유전성을 갖는 세라믹으로는 실리카 글라스, 알루미나, 질화알루미늄, 티타늄산바륨 등을 들수 있으며, 압전성을 갖는 세라믹으로는 티탄산지르콘산연 등을 들수 있다.Functional ceramics having functions such as dielectric properties and piezoelectricity are used in a wide range of fields as various electric and electronic components. For example, it is used for piezoelectric elements, such as various actuators, a sensor, and a resonator. Examples of such ceramics having dielectric properties include silica glass, alumina, aluminum nitride, barium titanate, and the like, and piezoelectric ceramics include lead zirconate titanate.
그러나, 세라믹은 원하는 형상으로 성형하기 위해서는 소성 공정이 필요하고, 소성 후에는 기계 가공을 하는 것이 일반적이다. 세라믹은 가소성(plasticity)이 전혀 없어 복잡한 형상의 성형품을 얻는 것이 곤란하다. 즉, 성형의 자유도가 부족하다는 결점이 있다. 또한, 플라스틱에 비하여 성형 공정이 번잡하고, 생산성이 떨어지며 성형 비용이 비싸게 되는 단점을 동시에 가지고 있다. 따라서, 압전 특성에 영향을 주지 않으면서 세라믹에 유연성을 부여하는 기술이 필요하다.However, in order to shape | mold a ceramic to a desired shape, a baking process is needed, and after baking, it is common to machine. Ceramics have no plasticity, making it difficult to obtain a molded article having a complicated shape. That is, there is a drawback that the degree of freedom of molding is insufficient. In addition, it has the disadvantage that the molding process is more complicated than plastic, the productivity is low and the molding cost is expensive. Therefore, there is a need for a technique for imparting flexibility to ceramics without affecting piezoelectric properties.
한편, 플라스틱은 성형성이 우수하여 어떠한 복잡한 형상이라도 아주 정밀하고 저렴하게 제조할 수 있다는 장점이 있는 반면, 플라스틱은 강도가 약하고 전기전도도와 열전도도가 낮은 결점을 갖고 있다. 최근에는 많은 연구의 결과로 전자파 차폐용 박막, 이차전지, 센서 등에 다양하게 응용할 수 있는 전도성 고분자가 발표되고 있다. 예를 들어, 폴리파라페닐렌(polyparaphenylene), 폴리비닐리덴 플루오라이드(polyvinylidenefluororide; 이하 "PVDF"), 폴리피롤(polypyrrole), 폴리아세틸렌(polyacetylene) 등은 센서, 기억소자, 전극재료 등에 실용화되고 있는 전도성 고분자이다. 특히, PVDF는 이차전지의 전극성형 등에 널리 적용되고 있는 대표적인 전도성 고분자로서 압전 및 유전 특성을 갖는 폴리머이다. 그러나 전도성 고분자는 세라믹 분말에 비해 성형성은 매우 우수하지만 압전 특성은 낮은 문제점이 있다.On the other hand, plastic has the advantage of being excellent in formability, so that any complicated shape can be manufactured very precisely and inexpensively, whereas plastic has a weak strength, low electrical conductivity and low thermal conductivity. Recently, as a result of many studies, conductive polymers that can be applied to a variety of electromagnetic wave shielding thin films, secondary batteries, sensors, and the like have been published. For example, polyparaphenylene, polyvinylidenefluororide (hereinafter referred to as "PVDF"), polypyrrole, polyacetylene, and the like are used in sensors, memory devices, electrode materials, and the like. It is a polymer. In particular, PVDF is a polymer having piezoelectric and dielectric properties as a typical conductive polymer widely applied to electrode formation of secondary batteries. However, the conductive polymer is very excellent in formability compared to the ceramic powder, but the piezoelectric properties are low.
이에, 압전 특성이 우수한 세라믹 분말과 성형성이 우수한 플라스틱을 혼합, 조성하여 얻어진 복합재를 각종 압전 소자에 적용할 수 있는 압출 또는 사출 성형제품의 제조방법이 개발되고 있다. 플라스틱/세라믹 복합재는 플라스틱으로 이루어지는 매트릭스에 세라믹 입자를 분산시켜 제조한 것으로서 플라스틱에 세라믹 입자를 분산시켜 만든 것이기 때문에 그 성형이 용이하고, 저렴하게 제조할 수 있다.Accordingly, a method of manufacturing an extrusion or injection molded product in which a composite material obtained by mixing and forming a ceramic powder having excellent piezoelectric properties and a plastic having excellent moldability can be applied to various piezoelectric elements has been developed. Plastic / ceramic composites are made by dispersing ceramic particles in a matrix made of plastic, and are made by dispersing ceramic particles in plastic, so that molding is easy and can be manufactured at low cost.
즉, 세라믹과 같이 소성 및 소성 후의 기계 가공이 필요 없기 때문에 기계 가공에서는 제조할 수 없는 복잡한 형상의 물품을 용이하게 성형할 수 있고 생산성을 크게 향상시킬 수 있는 장점이 있다.That is, since there is no need for machining after firing and firing like ceramics, there is an advantage in that an article of a complicated shape that cannot be manufactured in machining can be easily molded and productivity can be greatly improved.
위와 같은 세라믹 분말과 플라스틱을 혼합함에 있어서는 균일한 혼합이 중요하다. 혼합이 균일하여야 공극이 최소화되고 압전체의 기계적 특성이 향상된다.In mixing the ceramic powder and plastic as described above, uniform mixing is important. Uniform mixing minimizes voids and improves the mechanical properties of the piezoelectric body.
따라서, 세라믹 분말과 플라스틱의 균일한 혼합에 의한 공극을 최소화하기 위해서는 보다 미세한 세라믹 분말을 사용하는 것이 요구된다. 그러나, 종래의 플라스틱/세라믹 복합재에 적용되는 세라믹 분말은 마이크로 사이즈의 입자로 그 크기가 커서 효과적인 혼합이 이루어지기 어려워 기계적 강도 및 분산성의 저하 등의 문제점이 있다. 이에 따라, 분산성을 향상시키기 위하여 물 또는 유기용매의 분산매와 실란커플링제, 티타네이트커플링제, 지루코알루미네이트커플링제 등의 커플링제(coupling agent)를 별도로 첨가해야 하는 문제점이 있었다.Therefore, in order to minimize voids caused by uniform mixing of ceramic powder and plastic, it is required to use finer ceramic powder. However, the ceramic powder applied to the conventional plastic / ceramic composite is a micro-sized particle having a large size, so that it is difficult to effectively mix, and thus there is a problem such as deterioration in mechanical strength and dispersibility. Accordingly, in order to improve dispersibility, there is a problem in that a dispersion agent of water or an organic solvent and a coupling agent such as a silane coupling agent, a titanate coupling agent, or a zirucoaluminate coupling agent must be added separately.
또한, 세라믹의 입자와 입자 사이의 공극으로 인하여 압전성, 유전성 및 도전성 등의 전기적 성능이 저하되는 문제점이 있었다. 즉, 세라믹 입자가 커서 입자와 입자 사이에 큰 공극이 생기고, 이 공극에 플라스틱이 함입되어지나 복합재의 단위 체적당 플라스틱보다 압전성, 유전성 등의 전기적 성능이 우수한 세라믹의 밀도가 작아져 만족할 만한 전기적 성능을 얻을 수가 없었다.In addition, there is a problem in that electrical performance such as piezoelectricity, dielectric property, and conductivity decreases due to the pores between the particles of the ceramic. That is, the ceramic particles are large, so that large voids are formed between the particles and the particles, and plastics are contained in the voids, but the electrical density of the ceramic, which is better in piezoelectricity and dielectric properties than the plastics per unit volume of the composite, is satisfactory, resulting in satisfactory electrical performance. Couldn't get it.
한편, 종래 상기와 같은 플라스틱/세라믹 복합재를 이용한 필름 상의 압전체를 성형함에 있어서는 세라믹 기판(substrate) 상에 압전성을 갖는 PVDF를 진공 증착시켜 압전 특성이 나타나도록 배향을 갖게 하거나, PVDF 필름 상에 마이크론 입자 크기의 메탈, 세라믹 등을 진공 증착, 스크린 인쇄 또는 접착 등의 방법을 이용하였다. 그러나, 위와 같은 진공 증착, 스크린 인쇄 등의 방법은 1회 배치(batch)식이어서 연속적인 공정이 어려웠으며 이에 따른 비용 증가의 문제점이 있었다.Meanwhile, in forming a piezoelectric material on a film using the plastic / ceramic composite as described above, the piezoelectric PVDF is vacuum-deposited on a ceramic substrate to have an orientation such that the piezoelectric properties are exhibited, or the micron particles on the PVDF film. Metals, ceramics, and the like of a size were used by vacuum deposition, screen printing, or bonding. However, the method of vacuum deposition, screen printing, etc. as described above is a single batch type, so that a continuous process is difficult and thus there is a problem of increased cost.
본 발명은 상기한 문제점을 해결하기 위하여 안출한 것으로, 유전율과 압전율이 우수한 PVDF에 압전율, 유전율 및 도전성 등이 우수한 세라믹 입자를 압출기에서 분산시키되 상기 세라믹 입자를 나노입자로 도입하고, 이러한 PVDF/나노 세라믹 복합재를 블로우 성형(blow molding) 방법에 의하여 필름 상으로 몰딩하고, 이를 로울러에 의한 압착 및 연신 공정과 물이 수용된 수용조에 함침시키는 어닐링(annealing)을 수행함으로써, PVDF에 세라믹 입자의 분산성을 향상시킴과 동시에 세라믹 입자간의 공극을 최소화하고, 우수한 압전성, 유전성 및 기계적 강도를 가지며, 연속적인 제조공정에 따른 비용 절감의 효과를 갖는 PVDF와 나노 세라믹을 이용한 압전체 및 그 제조방법을 제공하려는 것이다.The present invention has been made to solve the above problems, disperse ceramic particles having excellent piezoelectricity, dielectric constant, conductivity, etc. in an extruder in PVDF having excellent dielectric constant and piezoelectricity while introducing the ceramic particles as nanoparticles, and the PVDF The nano-particle composite is molded onto the film by blow molding method, which is then pressed and stretched by a roller and subjected to annealing to impregnate the water bath containing water, thereby dispensing the ceramic particles into PVDF. To improve the acidity, minimize the voids between ceramic particles, have excellent piezoelectricity, dielectric and mechanical strength, and provide a piezoelectric material using PVDF and nano ceramics and a method of manufacturing the same, which has the effect of reducing the cost of the continuous manufacturing process. will be.
도 1은 본 발명에 따른 PVDF와 나노 세라믹을 이용한 압전체의 제조방법을 설명하기 위한 장치의 개략적인 구성도.1 is a schematic configuration diagram of a device for explaining a method for manufacturing a piezoelectric material using PVDF and nano-ceramic according to the present invention.
* 도면의 주요 부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings
10: 압전체12: 파리손10: piezoelectric 12: flyson
20: 블로우 성형기22: 호퍼20: blow molding machine 22: hopper
24: 압출기26: 압출다이24: extruder 26: extrusion die
28: 안내판31, 32, 33, 34: 핀치 로울러28: Information board 31, 32, 33, 34: Pinch roller
40: 안내 로울러45: 가열판40: guide roller 45: hot plate
51, 52: 수용조60: 구동 로울러51, 52: reservoir 60: drive roller
본 발명은 PVDF와 나노 세라믹을 적정 비율로 조성한 PVDF/나노 세라믹 복합재를 압출기에서 혼련한 후 이를 블로우 성형(blow molding) 방법에 의하여 튜브 상의 파리손(parison)으로 몰딩하고, 상기 파리손을 핀치 로울러(pinch roller)에 통과시켜 필름 상으로 압착시킨 다음, 우수한 압전 배향을 갖도록 구동 로울러에 의한 연신 공정을 수행하고, 이와 동시에 기계적 강도를 보강하기 위하여 수용조에 함침시키는 어닐링 공정을 연속적으로 수행한 PVDF와 나노 세라믹을 이용한 압전체 및 그 제조방법을 제공한다.The present invention kneads PVDF / nano ceramic composites having a proper ratio of PVDF and nano ceramics in an extruder, and then molds them into a parison on a tube by a blow molding method and pinches the parisson. PVDF which is passed through a pinch roller and pressed onto a film, followed by a drawing process by a driving roller to have an excellent piezoelectric orientation, and at the same time a PVDF which is continuously subjected to an annealing process which is impregnated into a receiving tank to reinforce mechanical strength. Provided are a piezoelectric body using a nano ceramic and a method of manufacturing the same.
상기 PVDF/나노 세라믹 복합재는 압전성 및 유전성 등의 전기적 특성이 우수한 PVDF와 500 ~ 0.1 나노미터(nm) 크기의 세라믹 분말로 조성되는 것을 특징으로 한다. 상기 세라믹 분말은 티타늄(Ti), 납(Pb), 바륨(Ba), 규소(Si), 주석(Sn), 마그네슘(Mg), 니오븀(Nb), 지르코늄(Zr) 등의 금속을 하나 이상 포함하는 나노 입자의 세라믹 분말이다. 상기 금속을 포함하는 나노 입자의 세라믹 분말은 수열합성 또는 졸-겔법에 의하여 나노 크기의 미세 분말로 합성된 것이거나, 현재 상품화되고 있는 것을 사용할 수 있으며, 바람직한 것으로는 티탄산바륨(BaTiO3), PbZrO3-PbTiO3고용체(PZT), PbZrO3-PbTiO3-Pb(Mg1/3Nb2/3) 고용체(PZT-PMN), TiO2, TiO3, SiO2, ZnO, SnO2Zr 계열의 나노 세라믹 분말로서, 목적하는 압전 소자의 특성에 따라 상기 군 중에서 1 또는 2이상 선택하여 혼합 사용할 수 있다.The PVDF / nano ceramic composite material is composed of PVDF having excellent electrical properties such as piezoelectricity and dielectric property, and ceramic powder having a size of 500 to 0.1 nanometers (nm). The ceramic powder includes one or more metals such as titanium (Ti), lead (Pb), barium (Ba), silicon (Si), tin (Sn), magnesium (Mg), niobium (Nb), zirconium (Zr), and the like. It is a ceramic powder of nanoparticles. The ceramic powder of the nanoparticles including the metal may be synthesized into nano-sized fine powders by hydrothermal synthesis or sol-gel method, or may be commercially available, and preferably barium titanate (BaTiO 3 ) or PbZrO. 3 -PbTiO 3 solid solution (PZT), PbZrO 3 -PbTiO 3 -Pb (Mg 1/3 Nb 2/3 ) solid solution (PZT-PMN), TiO 2 , TiO 3 , SiO 2 , ZnO, SnO 2 Zr As the ceramic powder, one or two or more selected from the group can be selected and used according to the characteristics of the desired piezoelectric element.
상기 PVDF/나노 세라믹 복합재는 나노 세라믹 분말과 PVDF의 조성비를 적절히 조정함으로써 전기적 성능과 가공성을 조절할 수 있다. 복합재에 나노 세라믹 입자의 함유량이 많을수록 전기적 성능 면에서는 바람직하나, 너무 많으면 성형 시 유동성을 잃어버려 성형이 어려워진다. 즉, PVDF의 함량을 증가시키면 가공성은 향상되지만 세라믹 분말의 함량이 감소하는데 따른 압전성의 손실이 수반되며, 반면 PVDF의 함량을 감소시키면 압전성은 향상되지만 가공성이 감소하게 된다. 따라서, 상기 PVDF/나노 세라믹 복합재는 나노 세라믹 분말이 복합재의 전체 체적 대비 40체적% ~ 95체적% 함유된다. 반면에 PVDF의 함유량은 5체적% ~ 60체적%가 함유된다. 나노 세라믹 입자의 함유량이 40체적% 미만이면 만족할 만한 압전성을 기대할 수 없으며, 95체적%를 초과하면 가공성이 떨어진다.The PVDF / nano ceramic composite material can control the electrical performance and processability by appropriately adjusting the composition ratio of nano ceramic powder and PVDF. The higher the content of the nano-ceramic particles in the composite material, the more preferable in terms of electrical performance. However, too much of the composite material results in loss of fluidity during molding, making molding difficult. In other words, increasing the content of PVDF improves the workability but is accompanied by a loss of piezoelectricity as the content of the ceramic powder is reduced, while reducing the content of PVDF improves the piezoelectricity but decreases the workability. Therefore, the PVDF / nano ceramic composite material contains 40 to 95 volume% of the nano ceramic powder relative to the total volume of the composite material. On the other hand, the content of PVDF contains 5% by volume to 60% by volume. If the content of the nano-ceramic particles is less than 40% by volume, satisfactory piezoelectricity cannot be expected, and if it exceeds 95% by volume, workability is inferior.
또한, 상기 세라믹 입자의 종횡비는 2.0 이하로 하는 것이 바람직하다. 이는 PVDF에 나노 세라믹 입자를 최고 밀도로 충전하여 분산시킬 수 있으므로 복합재의 열팽창 계수를 더욱 작게 할 수 있기 때문이다. 즉 세라믹 입자의 가로 세로입자형상의 종횡비가 2.0을 초과하는 경우는 세라믹 입자의 함유량을 증가시키기 어렵다.Moreover, it is preferable that the aspect ratio of the said ceramic particle shall be 2.0 or less. This is because the PVDF can be dispersed by packing nanoceramic particles at the highest density, thereby making the thermal expansion coefficient of the composite material even smaller. In other words, when the aspect ratio of the aspect ratio of the ceramic particles exceeds 2.0, it is difficult to increase the content of the ceramic particles.
본 발명은 세라믹 입자를 나노입자로 도입함으로써 PVDF에 세라믹 입자의 분산성이 좋아져 별도의 분산매나 커플링제를 첨가하지 않아도 균일하게 분산시킬 수 있고, 이에 따라, 공극이 최소화되어 압전성 및 유전성 등의 전기적 성능을 발휘한다. 아울러, PVDF에 세라믹 나노 입자가 균일하게 분산됨에 따라 PVDF의 열변형온도(HDT)가 증가되어 PVDF의 강성이 부가되어지므로 이는 결국 우수한 기계적 강도를 갖는 압전체가 제조된다. 이에 더하여, 세라믹의 나노 입자에 따른 난연성 등을 효과를 도모할 수 있다.According to the present invention, the ceramic particles are introduced into the nanoparticles to improve the dispersibility of the ceramic particles in the PVDF so that they can be uniformly dispersed without the addition of a separate dispersion medium or coupling agent. Accordingly, the voids are minimized and the electrical properties such as piezoelectricity and dielectric property are minimized. Performance. In addition, as the ceramic nanoparticles are uniformly dispersed in the PVDF, the heat deflection temperature (HDT) of the PVDF is increased to add the rigidity of the PVDF. Thus, a piezoelectric body having excellent mechanical strength is produced. In addition, the flame retardance according to the nanoparticles of the ceramic can be achieved.
위와 같은 PVDF/나노 세라믹 복합재를 압출기에 투입하여 PVDF의 용융과 동시에 세라믹 입자는 PVDF에 분산되게 하는 혼련 작업을 30 ~ 60분 동안 수행한다. 이 때, 압출기의 온도는 270℃~300℃가 되게 하고, 균일한 혼련을 위해 압출기는 트윈-스크류(twin-screw)가 내장된 것을 사용하는 것이 바람직하다. 연속하여, PVDF/나노 세라믹 용융물을 블로우 성형(blow molding)하여 튜브 형태의 파리손(parison)으로 몰딩한 다음, 블로우 성형기의 상단에 테이퍼지게 구비된 안내판에 의하여 단일 필름 상으로 접합되게 한다. 그리고, 핀치 로울러 사이를 통과시키는 압착 공정을 수행한다. 이에 따라, 나노 세라믹 입자 상호간은 긴밀하게 밀착되어 단위 체적당 세라믹 입자의 밀도가 증가된다. 계속하여, 상기 핀치 로울러를 통과한 압전체의 기계적 강도를 향상시키기 위하여 수용조에 함침시키는 어닐링(annealing) 공정을 수행한다. 이와 동시에 우수한 압전 특성이 나타나는 β배향을 갖도록 하기 위해 구동 로울러에 의한 연신 공정을 수행한다. 바람직하게는 4배 이상의 연신이 이루어지도록 한다. 위와 같은 공정은 연속적으로 수행되며, 공정을 마친 압전체는 구동 로울러에 권취된다.The PVDF / nano ceramic composite material as described above is added to the extruder and the kneading operation is performed for 30 to 60 minutes so that the ceramic particles are dispersed in the PVDF simultaneously with melting of the PVDF. At this time, the temperature of the extruder It is preferable to use a twin-screw-embedded extruder in order to achieve a temperature of 270 ° C to 300 ° C and to uniformly knead the mixture. Subsequently, the PVDF / nano ceramic melt is blow molded and molded into a tube-shaped parison, which is then bonded onto a single film by a guide plate tapered on top of the blow molding machine. Then, a crimping step for passing the pinch rollers is performed. As a result, the nano-ceramic particles closely adhere to each other to increase the density of the ceramic particles per unit volume. Subsequently, an annealing process is performed to impregnate the receiving tank in order to improve the mechanical strength of the piezoelectric body passed through the pinch roller. At the same time, the stretching process by the driving roller is performed in order to have the β orientation showing excellent piezoelectric properties. Preferably at least four times stretching is achieved. The above process is carried out continuously, the finished piezoelectric body is wound in a drive roller.
이하에서는, 도 1을 참조하여 본 발명에 따른 압전체의 제조 방법을 보다 상세히 설명한다.Hereinafter, a method of manufacturing a piezoelectric body according to the present invention will be described in more detail with reference to FIG. 1.
도 1에 보인 바와 같이, 본 발명에 따른 압전체(10)를 제조하기 위한 장치는 호퍼(22), 압출기(24), 압출다이(26) 및 안내판(28)으로 구성되는 블로우 성형기(20), 두 개의 로울러가 소정의 간격을 이루며 구동되는 다수의 핀치 로울러(31)(32)(33)(34), 다수의 안내 로울러(40)가 설치되고 물이 수용된 수용조(51)(52), 그리고 구동 로울러(60)로 구성된다. 도 1은 본 발명에 따른 PVDF와 나노 세라믹을 이용한 압전체의 제조방법을 설명하기 위한 장치의 개략적인 구성도를 보인 것으로 장치를 이루는 다수의 구성 부재들이 생략되어 도시되어 있다. 예를 들면, 압출기(24)에 내장된 트윈-스크류, 압출다이(26)의 에어 주입구 등이다.As shown in FIG. 1, the apparatus for manufacturing the piezoelectric body 10 according to the present invention includes a blow molding machine 20 composed of a hopper 22, an extruder 24, an extrusion die 26, and a guide plate 28. A plurality of pinch rollers 31, 32, 33, 34, two rollers are driven at predetermined intervals, and a plurality of guide rollers 40 are installed and the water tanks 51, 52, And a driving roller 60. 1 is a schematic configuration diagram of a device for explaining a method of manufacturing a piezoelectric material using PVDF and nano ceramics according to the present invention, in which a plurality of constituent members constituting the device are omitted. For example, the twin-screw built into the extruder 24, the air injection port of the extrusion die 26, etc. are mentioned.
압출기(24)의 호퍼(22)에 PVDF와 나노 세라믹 입자를 적정 혼합 조성한 PVDF/나노 세라믹 복합재가 투입된다. 압출기(24)의 온도는 270℃~300℃로 유지되어 PVDF는 용융되고, 압출기(24)에 내장된 트윈-스크류(도시하지 않음)의 회동에 의해 나노 세라믹 입자는 PVDF에 균일하게 분산된다. 위와 같은 혼련 작업은 30~60분 동안 수행된다. PVDF/나노 세라믹 용융물은 압출다이(26)를 통하여 블로우 성형되어 튜브 형태의 파리손(12)으로 몰딩된다. 파리손(12)은 블로우성형기(20)의 상단 좌우측(도면에서 보았을 때)에 구비된 안내판(28)에 의해 단일의 필름으로 접합되고 제1 핀치 로울러(31)를 통과하여 압착된다. 제1 핀치 로울러(31)를 통과한 압전체(10)는 안내 로울러(40)를 따라 130℃~140℃로 승온된 가열판(45)을 지나 제2 핀치 로울러(32)를 통과하게 된다. 계속하여, 80℃~90℃의 물이 수용된 제1 수용조(51)에 함침되고 제3 핀치 로울러(33)에 의해 압착된다. 그리고, 40℃~50℃의 물이 수용된 제2 수용조(52)에 함침된 후 제4 핀치 로울러(34)에 의해 압착된다. 이와 같은 압전체(10)는 구동 로울러(60)에 의해 연신된다.The PVDF / nano ceramic composite material in which PVDF and nano-ceramic particles are appropriately mixed and introduced into the hopper 22 of the extruder 24 is introduced. The temperature of the extruder 24 is 270 ° C to 300 ° C. The PVDF is kept melted and the nano ceramic particles are uniformly dispersed in the PVDF by the rotation of twin-screws (not shown) embedded in the extruder 24. The kneading operation above is carried out for 30 to 60 minutes. The PVDF / nano ceramic melt is blow molded through an extrusion die 26 and molded into a parison 12 in the form of a tube. The parison 12 is bonded to a single film by a guide plate 28 provided on the upper left and right sides (as seen in the drawing) of the blow molding machine 20 and pressed through the first pinch roller 31. The piezoelectric body 10 having passed through the first pinch roller 31 passes through the second pinch roller 32 through the heating plate 45 heated to 130 ° C. to 140 ° C. along the guide roller 40. Subsequently, water of 80 ° C. to 90 ° C. is impregnated in the first accommodating tank 51 housed therein and pressed by the third pinch roller 33. Then, after impregnated in the second receiving tank 52, the water of 40 ℃ ~ 50 ℃ is pressed by the fourth pinch roller 34. The piezoelectric body 10 is stretched by the driving roller 60.
상기 연신 공정은 제1 핀치 로울러(31)에서 시작하여 제4 핀치 로울러(34)를 거치는 과정에서 수행되며, 연신 공정을 거친 압전체(10)는 구동 로울러(60)에 권취된다.The stretching process is performed in the process of starting from the first pinch roller 31 and passing through the fourth pinch roller 34, and the piezoelectric body 10 which has undergone the stretching process is wound around the driving roller 60.
상기 수용조(51)(52)는, 도 1에서는 2개를 도시하여 설명하였으나, 온도 범위를 다르게 한 3개 이상의 다수 개를 설치하여 어닐링(annealing) 공정을 수행할 수 있다.Although the reservoirs 51 and 52 are illustrated in FIG. 1, two or more reservoirs 51 and 52 may be annealed by installing a plurality of three or more units having different temperature ranges.
따라서, 본 발명은 핀치 로울러(31)(32)(33)(34)에 의한 수회의 압착 공정을 수행함에 따라 단위 체적당 세라믹 입자의 밀도를 증가시켜 전기적 성능이 향상되고, 구동 로울러(60)에 의한 연신 공정에 의해 β배향을 형성시켜 우수한 압전 특성을 갖게 하며, 다수의 수용조(51)(52)에 함침시키는 어닐링(annealing) 공정에 의해 기계적 강도가 향상된다.Accordingly, the present invention increases the density of ceramic particles per unit volume by performing several pressing processes by the pinch rollers 31, 32, 33, 34, thereby improving electrical performance, and driving the roller 60. By forming the β orientation by the stretching process by the film, it has excellent piezoelectric characteristics, and the mechanical strength is improved by an annealing process in which the plurality of receiving tanks 51 and 52 are impregnated.
이하에서는, 본 발명의 구체적인 실시예를 통하여 설명한다.Hereinafter, a description will be given through specific embodiments of the present invention.
[실시예]EXAMPLE
PVDF 10체적%에 평균 입자 크기가 0.3nm이고, 종횡비가 1.7인 티탄산바륨(BaTiO3) 90체적%를 혼합 조성하여 도 1에 도시한 바와 같은 공정으로 압전체(10)를 제조하였다.A piezoelectric body 10 was manufactured by a process as shown in FIG. 1 by mixing 90 volume% of barium titanate (BaTiO 3 ) having an average particle size of 0.3 nm and an aspect ratio of 1.7 to 10 volume% of PVDF.
이에 대하여 압전 정수 및 유전율을 측정하여 그 결과를 하기 [표 1]에 나타내었다. 압전 정수는 D meter(일본, ANDO사)를 사용하여 측정하였으며, 유전율은 LSR meter(일본, ANDO사)를 사용하여 측정하였다.On the other hand, the piezoelectric constant and dielectric constant were measured and the results are shown in the following [Table 1]. The piezoelectric constant was measured using a D meter (Ando, Japan), and the dielectric constant was measured using an LSR meter (Ando, Japan).
[비교예][Comparative Example]
PVDF 50체적%에 평균 입자 크기가 35㎛이고, 종횡비가 1.2인 티탄산바륨(BaTiO3) 50체적%를 혼합 조성한 복합재를 300℃에서 사출 성형하여 판형의 압전체로 성형하였다. 이에 대하여 압전 정수 및 유전율을 측정하여 그 결과를 하기 [표 1]에 나타내었다. 측정방법은 상기 실시예와 동일하다.A composite material having 50 vol% of PVDF and 50 vol% of barium titanate (BaTiO3) having an average particle size of 35 µm and an aspect ratio of 1.2 was mixed by injection molding at 300 ° C. to form a plate-like piezoelectric body. On the other hand, the piezoelectric constant and dielectric constant were measured and the results are shown in the following [Table 1]. The measuring method is the same as that of the said Example.
따라서, 본 발명은 압전성, 유전성 및 도전성을 갖는 세라믹 분말을 PVDF에분산시킴으로 인해 복잡한 성형물의 가공이 용이하고, 가공성 및 정밀성이 우수하고, 대량 생산, 비용 절감 등과 같은 종래의 플라스틱/세라믹 복합재가 수반하는 효과와 더불어 상기 세라믹 분말을 나노입자로 도입하고, 압착 및 연신 공정이 수행됨으로써 세라믹 입자의 나노 크기의 미세 분말에 따른 공극이 최소화되어 PVDF에 세라믹 입자의 분산성이 향상되고, 별도의 분산매나 커플링제를 첨가하지 않아도 되며, 종래 마이크로 크기 이상의 세라믹 입자가 적용된 압전체에 비해 크게는 수백배, 수천배의 압전율, 유전율 및 도전성을 갖는다.Accordingly, the present invention facilitates the processing of complex moldings by dispersing piezoelectric, dielectric and conductive ceramic powders in PVDF, and is accompanied by conventional plastic / ceramic composites such as mass production, cost reduction, and the like. In addition to the effect of introducing the ceramic powder into the nanoparticles, and the compression and stretching process is carried out to minimize the pores according to the nano-sized fine powder of the ceramic particles to improve the dispersibility of the ceramic particles in the PVDF, The coupling agent does not need to be added, and has a piezoelectricity, dielectric constant and conductivity of several hundred times and thousands of times as compared with the piezoelectric body to which ceramic particles of micro size or more are conventionally applied.
또한, PVDF에 세라믹 나노 입자가 균일하게 분산됨에 따라 PVDF의 열변형온도(HDT)가 증가되어 PVDF의 강성이 부가되어지고 어닐링 공정이 수행되어 우수한 기계적 강도를 갖는다. 이에 더하여, 세라믹 나노 입자의 구조적 특성에 따른 난연성 등의 효과를 도모할 수 있다.In addition, as the ceramic nanoparticles are uniformly dispersed in the PVDF, the heat deflection temperature (HDT) of the PVDF is increased so that the rigidity of the PVDF is added and the annealing process is performed to have excellent mechanical strength. In addition, effects such as flame retardancy according to the structural characteristics of the ceramic nanoparticles can be achieved.
아울러, 본 발명에 따른 제조방법은 압착 및 연신 공정에 따른 압전율의 증가와 연속적인 공정으로 이루어져 대량 생산 및 비용 절감의 효과를 갖는다.In addition, the manufacturing method according to the present invention has the effect of increasing the piezoelectric rate and continuous process according to the pressing and stretching process, and has the effect of mass production and cost reduction.
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