KR20030063906A - A non-contact and portable surface roughness measuring device - Google Patents

A non-contact and portable surface roughness measuring device Download PDF

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Publication number
KR20030063906A
KR20030063906A KR1020020004260A KR20020004260A KR20030063906A KR 20030063906 A KR20030063906 A KR 20030063906A KR 1020020004260 A KR1020020004260 A KR 1020020004260A KR 20020004260 A KR20020004260 A KR 20020004260A KR 20030063906 A KR20030063906 A KR 20030063906A
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South Korea
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light
surface roughness
half mirror
contact
light source
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KR1020020004260A
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Korean (ko)
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안중환
최이존
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주식회사 새 미
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Priority to KR1020020004260A priority Critical patent/KR20030063906A/en
Publication of KR20030063906A publication Critical patent/KR20030063906A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/08—Testing mechanical properties
    • G01M11/081—Testing mechanical properties by using a contact-less detection method, i.e. with a camera
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: A non-contact type portable surface roughness measuring apparatus is provided to precisely measure the surface roughness of an object in a non-contact manner with reducing measuring time. CONSTITUTION: A non-contact type portable surface roughness measuring apparatus includes a light source(12) for radiating laser beam, a half mirror(14) for reflecting a part of laser beam towards a surface(20) of an article, a focusing lens(16) for focusing laser beam scattered and reflected from the surface(20) of the article, and a charge coupled device(18) for measuring laser beam introduced through the focusing lens(16). The light source(12) includes a laser diode. Light radiated from the light source(12) is proceded in a horizontal direction. Then, a part of light is incident into the surface(20) of the article by means of the half mirror(14) and the remaining of light passes through the half mirror. Light incident into the surface(20) is scattered and reflected from the surface(20), thereby upwardly proceeding through the half mirror(14).

Description

비접촉식 휴대용 표면거칠기 측정장치{A non-contact and portable surface roughness measuring device}A non-contact and portable surface roughness measuring device

본 발명은 비접촉식 휴대용 표면 거칠기 측정장치에 관한 것으로, 더욱 상세하게는 측정면의 표면에 입사되는 레이저광의 산란패턴을 이용하여 측정면의 스크래치 또는 거칠기를 측정할 수 있도록 구성되는 휴대용 표면 거칠기 측정장치에 관한 것이다.The present invention relates to a non-contact portable surface roughness measuring apparatus, and more particularly, to a portable surface roughness measuring apparatus configured to measure scratches or roughness of a measuring surface by using a scattering pattern of laser light incident on a surface of the measuring surface. It is about.

현재 가전제품을 포함하는 여러가지 제품에 대한 소비자의 미적 요구가 높아짐에 따라서, 여러가지 제품의 외부 표면상태에 대한 기준이 엄격해지고 있다. 따라서 제품의 외관상태를 결정하는 금형의 표면은 경면에 가까운 가공 정도를 필요로 하고 있다. 또한 이러한 금형을 이용하더라도, 제품의 표면에 대한 연삭, 연마, 래핑가공은 필수적인 마무리 공정으로 인식되어 있다.As consumers' aesthetic demands for various products, including home appliances, increase, at present, the criteria for the external surface condition of various products are becoming strict. Therefore, the surface of the mold for determining the appearance state of the product requires a degree of processing close to the mirror surface. In addition, even with such a mold, grinding, polishing and lapping on the surface of the product are recognized as an essential finishing process.

이와 같이 제품의 외관 정도에 대한 관심이 고조됨에 따라서, 상술한 바와 같은 마무리 공정을 행할 때, 표면 거칠기의 측정을 통하여 외관 표면에 대한 정도를 충분히 확보하는 것이 요구되고 있다. 따라서 제품의 외관 정도를 확보하기 위하여, 마무리 가공에 있어서 표면 거칠기의 측정을 수행하게 되는데, 현재까지 사용되고 있는 표면 거칠기 측정기는, 제품의 외관에 직접 접촉하는 것에 의하여 표면 정도를 측정하는 접촉식 표면 거칠기 측정장치를 사용하고 있는 실정이다.As the interest in the appearance degree of the product rises in this way, when performing the finishing process as described above, it is required to sufficiently secure the degree on the appearance surface through the measurement of the surface roughness. Therefore, in order to secure the appearance of the product, the surface roughness is measured in the finishing process. The surface roughness measuring device, which has been used until now, is a contact surface roughness that measures the surface quality by directly contacting the appearance of the product. The situation is using a measuring device.

그러나 접촉식 표면 거칠기 측정기는, 제품의 표면정도를 측정을 위하여 가공물을 가공기에서 분리하여야 하기 때문에, 정밀도의 연속성을 보장하기 힘든 단점이 있다. 그리고 표면 정도 측정의 편의성을 위하여, 휴대가 가능한 접촉식 표면 거칠기 측정기도 개발되었으나, 접촉식 휴대용 측정기의 정확한 세팅 및 측정을 위하여 소요되는 시간이 길고, 측정을 수행할 때 측정기의 접촉부분이 측정면과 접촉하는데 따르는 측정압력에 의하여, 측정하고자 하는 면에 손상을 줄 우려도 있다.However, the contact surface roughness measuring device has a disadvantage in that it is difficult to guarantee the continuity of precision because the workpiece must be separated from the machine for measuring the surface accuracy of the product. In addition, a portable surface roughness measuring instrument has been developed for the convenience of measuring surface accuracy, but the time required for accurate setting and measuring of a portable portable measuring instrument is long, and when the measurement is performed, the contact portion of the measuring surface is Depending on the measured pressure resulting from contact with the product, the surface to be measured may be damaged.

본 발명의 목적은, 접촉식 표면 거칠기 측정장치가 가지는 단점을 보완하기 위한 것으로, 비접촉식으로 표면거칠기를 정확하게 측정할 수 있는 것을 목적으로 하고 있다.An object of the present invention is to compensate for the disadvantages of a contact surface roughness measuring apparatus, and aims to accurately measure surface roughness in a non-contact manner.

본 발명의 다른 목적은, 비접촉식이면서도 전체적으로 소형화가 가능하여 휴대가 간편한 표면 거칠기 측정장치를 제공하는 것이다.Another object of the present invention is to provide a surface roughness measuring apparatus that is non-contact and can be miniaturized as a whole and is easy to carry.

본 발명의 또 다른 목적은, 측정하고자 하는 면에 대한 측정준비 및 측정시간이 아주 짧아서 단시간에 측정이 가능한 표면 거칠기 측정장치를 제공하는 것이다.Still another object of the present invention is to provide a surface roughness measuring apparatus capable of measuring in a short time because the measurement preparation and measurement time for the surface to be measured is very short.

도 1은 본 발명의 표면 거칠기 측정장치의 개략적 구성을 보인 개략도.1 is a schematic view showing a schematic configuration of a surface roughness measuring apparatus of the present invention.

도 2는 접촉표면에서 산란되면서 반사되는 광의 패턴 예시 그래프.2 is a graph illustrating a pattern of light reflected while being scattered at a contact surface.

* 도면의 주요 부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings

12 ..... 광원14 ..... 하프미러12 ..... light source 14 ..... half mirror

16 ..... 포커싱렌즈18 ..... 촬상소자16 ..... focusing lens 18 ..... imaging device

20 ..... 측정 표면20 ..... Measuring surface

상기 목적을 달성하기 위한 본 발명에 의한 표면 거칠기 측정장치는, 레이저광을 발사하는 광원과; 상기 레이저광의 일부를 측정하고자 하는 표면으로 반사하는 하프미러와; 측정하고자 하는 표면에서 반사되고, 상기 하프미러를 통하여 투과되는 일부의 광을 집광하기 위한 포커싱렌즈; 그리고 상기 포커싱렌즈에서 집광되는 광이 입사되는 촬상소자를 포함하여 구성된다.Surface roughness measuring apparatus according to the present invention for achieving the above object is a light source for emitting a laser light; A half mirror reflecting a part of the laser light to a surface to be measured; A focusing lens for focusing a part of light reflected from a surface to be measured and transmitted through the half mirror; And an imaging device to which light focused from the focusing lens is incident.

이와 같은 본 발명에 의한 장치에 의하면, 비접촉으로 표면거칠기를 측정할 수 있으며, 소형으로 구성하여 휴대가 간편한 장점을 기대하는 것이 가능하게 되는 편리한 이점을 기대할 수 있게 된다.According to the apparatus according to the present invention, it is possible to measure the surface roughness in a non-contact, it can be expected a convenient advantage that can be expected to the advantage that the compact configuration is easy to carry.

다음에는 도면에 도시한 실시예에 기초하면서 본 발명에 대하여 더욱 상세하게 살펴보기로 한다.Next, the present invention will be described in more detail with reference to the embodiments shown in the drawings.

도 1에 도시한 바와 같이, 본 발명에 의한 표면거칠기 측정장치는, 레이저광을 조사하는 광원(12)과, 상기 광원(12)에서의 레이저광의 일부를 측정하고자 하는 제품의 표면(20)으로 반사하는 하프미러(14), 상기 표면(20)에서 산란되고 반사된 광을 포커싱하는 포커싱렌즈(16), 그리고 상기 포커싱렌즈(16)를 통하여 입사되는광을 측정할 수 있는 촬상소자(CCD:Charged Coupled Device)(18)를 포함하여 구성된다.As shown in FIG. 1, the surface roughness measuring apparatus according to the present invention includes a light source 12 for irradiating a laser light and a surface 20 of a product to measure a part of the laser light from the light source 12. Half mirror 14 for reflecting, a focusing lens 16 for focusing the light scattered and reflected from the surface 20, and an imaging device capable of measuring the light incident through the focusing lens 16 (CCD: Charged Coupled Device) 18 is configured.

예를 들면 레이저 다이오드로 구성될 수 있는 상기 광원(12)에서의 빛은, 처음에는 수평방향으로 진행한 후, 상기 하프미러(14)에 의하여 일부가 측정 표면(20)으로 입사된다. 하프미러(14)의 특성상, 상기 광원(12)에서의 광의 반은 그것을 투과하고 나머지 반은 상기 측정 표면(20)을 향하여 반사된다.Light from the light source 12, which may for example consist of a laser diode, initially travels in the horizontal direction, and then part of it is incident on the measurement surface 20 by the half mirror 14. Due to the nature of the half mirror 14, half of the light in the light source 12 passes through it and the other half is reflected towards the measurement surface 20.

그리고 상기 측정 표면(20)으로 입사된 빛은 산란되면서 반사되어, 다시 상부의 하프미러(14)를 거쳐 상부로 진행하게 된다. 여기서 상기 측정표면(20)은, 가공방법에 따라 뚜렷한 스크래치 방향이 존재하고, 면의 특성이 일정한 방향성을 가지고 있다. 따라서 상기 측정 표면(20)에서 발생하는 산란광의 분포는 스크래치의 영향을 많이 받으면 스크래치 방향에 수직되는 방향으로 많이 퍼지게 된다.Light incident on the measurement surface 20 is reflected while being scattered, and then travels upward through the upper half mirror 14. Here, the measurement surface 20 has a distinct scratch direction in accordance with the processing method, and has a characteristic orientation of the surface characteristics. Therefore, the scattered light generated from the measurement surface 20 spreads in a direction perpendicular to the scratch direction when subjected to a lot of scratches.

따라서 이러한 산란패턴을 가지는 산란광은, 상기 하프미러(14)를 거치면서 촬상소자(18)로 입사될 것이다. 그리고 이 때 상기 하프미러(14)를 거쳐서 투과되는 광은 측정 표면(20)에서 산란되면서 반사되는 광의 반에 해당하는 광량이고, 하프미러를 거친 광은 상기 포커싱렌즈(16)에 의하여 촬상소자(18)에 포커싱된다. 이렇게 하여 촬상소자(18)로 입사되는 광의 산란패턴을 이용하여 측정표면(20)의 스크래치의 크기 및 분포를 파악하는 것이 가능하게 된다.Therefore, the scattered light having such a scattering pattern will be incident to the image pickup device 18 while passing through the half mirror 14. In this case, the light transmitted through the half mirror 14 is the amount of light corresponding to half of the light reflected while being scattered on the measurement surface 20, and the light passing through the half mirror is captured by the focusing lens 16. 18). In this way, it is possible to grasp the magnitude and distribution of the scratch on the measurement surface 20 using the scattering pattern of the light incident on the image pickup device 18.

측정 표면(20)의 상태에 따라, 산란되는 패턴이 상이하게 되고, 실질적으로 상기 촬상소자(18)에 입사되어 얻어지는 데이터의 분포가 다르게 나타나게 되는데, 이는 광분포곡선의 표준편차가 표면거칠기와 상관관계를 가지고 있기 때문이다.측정 표면(20)의 거칠기가 경면에 가까울수록 표준편차 값은 작아지게 되고, 광분포곡선의 정규분포에 가까워지지만, 측정 표면(20)의 거칠기가 나쁠수록 표준편차가 커지게 되는데, 본 발명에 의한 장치는 이러한 산란패턴의 상이한 특성을 이용하여 표면 거칠기를 측정하게 되는 것이다.Depending on the state of the measurement surface 20, the scattered pattern is different, and the distribution of data obtained by being incident on the imaging device 18 is substantially different, which is correlated with the surface roughness of the standard deviation of the light distribution curve. The closer the roughness of the measurement surface 20 is to the mirror surface, the smaller the standard deviation value becomes, and the closer to the normal distribution of the light distribution curve, the worse the roughness of the measurement surface 20 is. The apparatus according to the present invention is to measure the surface roughness by using different characteristics of the scattering pattern.

그리고 측정 표면(20)에 존재하는 스크래치에 따라서 레이저광의 산란신호가 다르게 나타난다. 측정 표면에 스크래치가 존재하는 경우, 측정 표면에 의하여 산란되어 촬상소자(18)에서 획득되는 표면 정보 데이터는 어지럽게 상하로 요동하는 그래프를 나타낸다. 즉, 도 2에 있어서, 가로축이 250에 가까운 부분은 실질적으로 경면에 가까운 표면 정도를 보이는 것이고, 세로방향으로 골이 깊은 부분은 스크래치의 정도를 보이게 되는 것이다. 이러한 그래프는, 스크래치의 깊이나 스크래치 사이의 간격 등에 관한 정보를 보이는 것이고, 이를 이용하여 제품의 표면(20)에 나타나는 평가를 수행하게 되는 것이다.The scattering signal of the laser light is different depending on the scratch present on the measurement surface 20. When scratches exist on the measurement surface, the surface information data scattered by the measurement surface and obtained by the imaging device 18 exhibits a graph which fluctuates up and down. In other words, in FIG. 2, the portion near the 250 in the horizontal axis shows the surface degree substantially close to the mirror surface, and the portion deep in the longitudinal direction shows the degree of scratch. Such a graph shows information about scratch depth, gap between scratches, and the like, and uses this to perform evaluation appearing on the surface 20 of the product.

이상에서 살펴본 바와 같은 본 발명에 의하면, 표면 거칠기 측정장치(A)는, 전원을 온(ON)시킨 상태에서 측정 준비가 완료되면, 상기 광원(12)에서의 레이저광이 표면(20)에 조사되어, 표면(20)의 거칠기 또는 스크래치의 여부에 따라서 반사율, 편차, 패턴 등이 상이하게 반사되어, 상술한 포커싱렌즈(16)를 통하여 촬상소자(18)에 입사된다. 이렇게 촬상소자(18)로 입사되는 광을 신호처리하여, 가공물의 평가척도인 표면 거칠기 값으로 환산하여 표시부(도시 생략)에 디스플레이하게 되는 것이다.According to the present invention as described above, when the surface roughness measuring device (A) is ready to measure in the state that the power is turned on (ON), the laser light from the light source 12 is irradiated to the surface 20 Thus, reflectance, deviation, pattern, and the like are differently reflected depending on the roughness or scratch of the surface 20, and are incident on the imaging device 18 through the focusing lens 16 described above. In this way, the light incident on the image pickup device 18 is subjected to signal processing, and converted into a surface roughness value, which is an evaluation scale of the workpiece, to be displayed on a display unit (not shown).

이상에서 살펴본 바와 같은 본 발명에 의한 기본적인 기술적 사상의 범주 내에서, 당업계의 통상의 지식을 가진 자에게 있어서는 다른 많은 변형이 가능할 것이고, 본 발명은 첨부한 특허청구의 범위에 기초하여 해석되어야 할 것이다.Within the scope of the basic technical idea according to the present invention as described above, many modifications will be possible to those skilled in the art, the present invention should be interpreted based on the appended claims will be.

이상에서 살펴본 바와 같은 본 발명에 의하면, 레이저광의 산란패턴을 이용하는 것에 의하여 실질적으로 비접촉식으로 측정 표면의 거칠기 또는 스크래치 등을 측정하는 것이 가능하게 된다. 따라서 접촉식에 의한 여러가지 단점을 해결하고, 표면 거칠기를 정확하게 측정하는 것이 가능하게 되는 편리함이 있다.According to the present invention as described above, by using the scattering pattern of the laser light, it becomes possible to measure the roughness or scratch, etc. of the measurement surface substantially in a non-contact manner. Therefore, there is a convenience that can solve various disadvantages by the contact type and accurately measure the surface roughness.

그리고 상술한 바와 같은 본 발명의 측정장치는 실질적으로 소형으로 구현 가능하기 때문에, 휴대가 간편하여 표면거칠기의 측정에 아주 편리한 장점도 기대된다.In addition, since the measuring apparatus of the present invention as described above can be implemented in a substantially small size, it is also expected to be very portable and very convenient for measuring surface roughness.

Claims (1)

레이저광을 발사하는 광원과;A light source for emitting a laser light; 상기 레이저광의 일부를 측정하고자 하는 표면으로 반사하는 하프미러와;A half mirror reflecting a part of the laser light to a surface to be measured; 측정하고자 하는 표면에서 반사되고, 상기 하프미러를 통하여 투과되는 일부의 광을 집광하기 위한 포커싱렌즈; 그리고A focusing lens for focusing a part of light reflected from a surface to be measured and transmitted through the half mirror; And 상기 포커싱렌즈에서 집광되는 광이 입사되는 촬상소자를 포함하여 구성되는 비접촉식 휴대용 표면 거칠기 측정장치.And a non-contact portable surface roughness measuring device comprising an image pickup device to which light focused from the focusing lens is incident.
KR1020020004260A 2002-01-24 2002-01-24 A non-contact and portable surface roughness measuring device KR20030063906A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100488305B1 (en) * 2002-03-21 2005-05-11 주식회사 새 미 A non-contact and portable surface roughness measuring device
KR101275793B1 (en) * 2006-08-04 2013-06-18 삼성디스플레이 주식회사 System for measuring surface roughness and mehtod of measuring surface roughness

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100488305B1 (en) * 2002-03-21 2005-05-11 주식회사 새 미 A non-contact and portable surface roughness measuring device
KR101275793B1 (en) * 2006-08-04 2013-06-18 삼성디스플레이 주식회사 System for measuring surface roughness and mehtod of measuring surface roughness

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