KR20030054587A - System for supplying power source - Google Patents

Abstract

PURPOSE: A power supply system is provided to operate a semiconductor apparatus stably by installing an auxiliary power supply part additionally so that an auxiliary power is directly supplied when a power supplied to the semiconductor apparatus is interrupted. CONSTITUTION: A power supply system includes a plurality of equipment power supply parts(30,62) each of which has a plurality of power supply units for supplying a power to plural semiconductor equipments, respectively. An auxiliary power supply part(44,46,48) is provided to supply a power to a semiconductor equipment corresponding to a defective one of the power supply units. The auxiliary power supply part supplies a power to a semiconductor equipment corresponding to a defective one of the power supply units, through breakers(44,48).

Description

Power supply system {SYSTEM FOR SUPPLYING POWER SOURCE}

The present invention relates to a power supply system, and more particularly, to a power supply system for stably supplying power to semiconductor equipment even when a failure occurs in a transformer for supplying power to semiconductor equipment.

In a semiconductor factory, stable supply of electricity is very important. If a problem occurs in the operation of the semiconductor device due to correction or the like, the damage of the semiconductor process is very large. Therefore, critical semiconductor equipment is organized in parallel, minimizing system down through thorough preventive management.

In the related art, when a transformer that supplies power to semiconductor equipment fails, the semiconductor equipment does not operate normally. Therefore, a large damage occurs in a related semiconductor process.

Therefore, the present invention has been made to solve the above-mentioned drawbacks of the prior art, and provided with a separate power supply to separate the power supply to the semiconductor equipment when the power supply is cut off immediately so that the semiconductor equipment always operates stably. The purpose is to provide a power supply system.

In order to achieve the above object, the present invention provides a power supply system including a plurality of equipment power supply units each having a plurality of power supply means for supplying power to a plurality of semiconductor equipment, the power supply for the semiconductor equipment And a preliminary power supply unit which supplies power to the semiconductor equipment on the side of the failed power supply means among the plurality of power supply means.

1 is a block diagram showing an embodiment of a power supply system according to the present invention.

<Description of the symbols for the main parts of the drawings>

10, 12, 20, 22, 34, 40, 46, 52, 58: transformer

Breaker: 14, 16, 18, 24, 26, 28, 32, 36, 38, 42, 44, 48, 50, 54, 56, 60

30, 62: equipment power supply

Hereinafter, the embodiment of the present invention will be described in detail with reference to the following drawings.

1 is a block diagram showing an embodiment of a power supply system according to the present invention, wherein the third high voltage circuit breaker 44, the third low voltage transformer 46, and the third low voltage circuit breaker 48 in the first equipment power supply 30. The preliminary power supply unit, which is formed by connecting the cascades in series, prepares the power supply for the semiconductor equipment. Configured to supply. At this time, the configuration of the second equipment power supply 62 is similar to the configuration of the first equipment power supply 30. However, the preliminary power supply unit may be selectively installed in the first and second equipment power supply units 30 and 62.

In the figure, the first and second high voltage transformers 10 and 12 receive, for example, a voltage of 154 KV from a high voltage line provided by KEPCO and transform the voltage into a voltage of 22.9 KV.

The first and second breakers 14 and 16 block the outputs of the first and second high voltage transformers 10 and 12, respectively, as necessary. The third breaker 18 cuts off the first and second breakers 14 and 16 as necessary. For example, the third circuit breaker 18 blocks the first and second circuit breakers 14 and 16, but does not supply voltage from the second high voltage transformer 12 to the second circuit breaker 16. By connecting the second breakers 14 and 16 to each other, the voltage on the first breaker 14 side can be supplied to the second breaker 16 side. In addition to this, it is possible to selectively operate the blocking function of the first, second and third breakers 14, 16 and 18 in order to perform a predetermined troubleshooting.

The eleventh and twenty-first high voltage transformers 20 and 22 transform voltages of 22.9 KV supplied from the first and second breakers 14 and 16 into 6.6 KV, respectively.

The eleventh and twenty-first breakers 24 and 26 respectively cut off the outputs of the eleventh and twenty-second high voltage transformers 20 and 22 as necessary. The thirty-first breaker 28 blocks the eleventh and twenty-first breakers 24 and 26 as necessary. For example, the thirty-first circuit breaker 28 cuts off the eleventh and twenty-first circuit breakers 24 and 26, and when no voltage is supplied from the twenty-first high voltage transformer 22 to the twenty-first circuit breaker 26, the eleventh circuit breaker 28 is closed. By connecting the twenty-first circuit breakers 24 and 26 to each other, the voltage at the eleventh circuit breaker 24 side can be supplied to the twenty-first circuit breaker 26 side. In addition to this, it is possible to selectively operate the blocking function of the eleventh, twenty-first, and thirty-first breakers 24, 26, and 28 in order to perform a predetermined troubleshooting.

The first and second equipment power supply units 30 and 62 receive voltages of 6.6 KV from the eleventh and twenty-first circuit breakers 24 and 26, respectively, and provide power to each semiconductor device.

The detailed operation thereof is as follows through the first equipment power supply unit 30.

First, the first low voltage transformer 34 receives a voltage of 6.6 KV provided from the eleventh circuit breaker 24 through the first high voltage circuit breaker 32 and transforms the voltage into a voltage of 208 to 120 V, thereby reducing the first low voltage circuit breaker 36. Supply to the first semiconductor equipment through the rule.

The second low voltage transformer 40 receives a voltage of 6.6 KV provided from the eleventh circuit breaker 24 through the second high voltage circuit breaker 38 and transforms the voltage into a voltage of 208 to 120 V to pass through the second low voltage circuit breaker 42. Supply to the second semiconductor equipment.

The fourth low voltage transformer 52 receives a voltage of 6.6 KV provided from the eleventh circuit breaker 24 through the fourth high voltage circuit breaker 50 and transforms the voltage into a voltage of 208 to 120 V to pass through the fourth low voltage circuit breaker 54. Supply to the third semiconductor equipment.

The fifth low voltage transformer 58 receives the voltage of 6.6 KV provided from the eleventh circuit breaker 24 through the fifth high voltage circuit breaker 56 and transforms the voltage to a voltage of 208 to 120 V to pass through the fifth low voltage circuit breaker 60. Supply to the fourth semiconductor equipment.

In addition, the preliminary power supply unit in which the third high voltage circuit breaker 44, the third low voltage transformer 46, and the third low voltage circuit breaker 48 are connected in series is provided with a predetermined circuit breaker for supplying power to the semiconductor equipment on the side of the failed power supply means. Feed through. That is, circuit breakers are respectively installed between the power output terminal of the third low voltage circuit breaker 48 and the power input terminal of the plurality of semiconductor devices.

The breakers installed between the power output terminal of the third low voltage circuit breaker 48 and the power input terminals of the plurality of semiconductor devices may be selectively operated to facilitate repair of each low voltage transformer in the first device power supply unit 30.

As described above, the present invention provides a separate power supply unit so that when the power supply to the semiconductor device is cut off, the power supply is immediately input to allow the semiconductor device to operate stably. Therefore, since power is always normally supplied to semiconductor equipment, semiconductor equipment always operates stably. In addition, since semiconductor equipment always operates stably, damage such as a semiconductor process does not occur.

Claims (2)

In the power supply system comprising a plurality of equipment power supply unit each having a plurality of power supply means for supplying power to a plurality of semiconductor equipment, respectively, And a preliminary power supply unit preparing power for the semiconductor equipment and supplying power to the semiconductor equipment on the side of the failed power supply means among the plurality of power supply means. The power supply system according to claim 1, wherein the preliminary power supply unit supplies power to the semiconductor equipment on the side of the failed power supply means through a breaker.