KR20030037389A - Fluorescence spectrometer using acousto-optic tunable filter - Google Patents

Fluorescence spectrometer using acousto-optic tunable filter Download PDF

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KR20030037389A
KR20030037389A KR1020010068372A KR20010068372A KR20030037389A KR 20030037389 A KR20030037389 A KR 20030037389A KR 1020010068372 A KR1020010068372 A KR 1020010068372A KR 20010068372 A KR20010068372 A KR 20010068372A KR 20030037389 A KR20030037389 A KR 20030037389A
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light
modulation filter
sample
optical
acoustic
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KR1020010068372A
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Korean (ko)
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김수현
오세백
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한국과학기술원
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N2021/6463—Optics
    • G01N2021/6471—Special filters, filter wheel

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  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

PURPOSE: A fluorescence spectrometer is provided to analyze a spectrum of light having a wide wavelength band by substituting a monochromatic device having a diffractive grate for a monochromatic device having an acoustic optical turntable filter. CONSTITUTION: A fluorescence spectrometer includes an acoustic optical turntable filter(8). The acoustic optical turntable filter(8) has an optical device(8a) formed with a predetermined structural crystalline, an RF signal generator(81) attached to one end of the optical device(8a), and an RF signal absorber(82) attached to the other end of the optical device(8a) so as to absorb an RF signal propagating wave generated from the RF signal generator(81). An input slit is installed on a light incident side of the acoustic optical turntable filter(8) and an output slit is installed on a light output side of the acoustic optical turntable filter(8).

Description

음향광학변조필터를 이용한 형광 분광 분석기{Fluorescence spectrometer using acousto-optic tunable filter}Fluorescence spectrometer using acousto-optic tunable filter

본 발명은 높은 민감도로 물성 분석이 가능한 형광 분광 분석기에 관한 것으로, 특히 음향광학변조필터를 이용하여 매우 간단한 구조로서 측정 시스템의 크기를 소형화하고, 단시간내에 측정이 가능하도록 한 형광 분광 분석기에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluorescence spectrometer capable of analyzing physical properties with high sensitivity, and more particularly, to a fluorescence spectrometer that allows the measurement system to be miniaturized in a very simple structure by using an acoustic optical modulation filter and to be measured within a short time. .

일반적으로 형광 분광 분석기는 시료에 특정 파장의 빛을 입사시켜 시료를 여기(excitation)시킨 후, 방출(emission)되는 빛의 입사광에 대한 파장 변화 정도를 검출하여 물성을 분석하는 장치이다. 따라서 형광 분광 분석기는 효소나 각종 호르몬의 농도, 독성 물질 검출, 신약개발, 중금속 검출, DNA정량 분석 등으로 활용되고 있다.In general, a fluorescence spectrometer is an apparatus that analyzes physical properties by injecting light of a specific wavelength into a sample to excite the sample, and then detecting a degree of change in wavelength of incident light of the emitted light. Therefore, the fluorescence spectrometer is used for the concentration of enzymes and various hormones, the detection of toxic substances, the development of new drugs, the detection of heavy metals, and the analysis of DNA quantification.

형광 분광 분석기는 시료를 여기시키기 위한 광 여기 장치와 시료에서 방출되는 빛의 스펙트럼을 분석할 수 있는 방출광 분석 장치가 필요하다.Fluorescence spectrometers require an optical excitation device for exciting a sample and an emission light analysis device capable of analyzing the spectrum of light emitted from the sample.

도 1은 종래의 회절 격자를 이용한 단색화 장치를 광 여기 장치와 방출관 분석장치로 사용하고 있는 형광 분광 분석기의 구조를 나타내고 있다.Fig. 1 shows the structure of a fluorescence spectrometer which uses a conventional monochromator using a diffraction grating as an optical excitation device and an emission tube analyzer.

도 1에서와 같이 광원(1)으로부터 나온 빛은 회절격자(23)를 이용한 광 여기 장치(2)에 입사한다. 즉, 빛은 입력슬릿(21), 제1반사거울(22)을 거친 후, 회절격자(23)에 의해 분광되며 다시 제2반사거울(24), 출력슬릿(25)을 통과한다. 광 여기 장치(2)를 통과한 빛은 특정 파장의 빛을 갖게 되며 시료(3)에 입사한다. 시료(3)에 입사한 빛은 시료의 분자 상태를 여기(excitation)시킨다. 여기된 상태의 분자들은 불안정하기 때문에 빛을 방출(emission)하며 안정한 상태로 되돌아온다.As shown in FIG. 1, light from the light source 1 is incident on the optical excitation device 2 using the diffraction grating 23. That is, the light passes through the input slit 21 and the first reflecting mirror 22, is then spectroscopically by the diffraction grating 23, and passes through the second reflecting mirror 24 and the output slit 25. Light passing through the optical excitation device 2 has light of a specific wavelength and enters the sample 3. Light incident on the sample 3 excites the molecular state of the sample. The excited molecules are unstable and emit light and return to a stable state.

상기 시료(3)에서 방출된 빛은 회절격자(43)를 이용한 방출광 분석 장치(4)에 입사하게 되며, 입력슬릿(41), 제1반사거울(42)을 거친 후, 회절격자(43)에 의해 분광되며, 다시 제2반사거울(44), 출력슬릿(45)을 통과한다. 빛은 최종적으로 광검출기(5)에 입사하게 되며, 광검출기(5)의 출력신호를 분석하여 시료의 특성을분석한다. 각기 회절격자(23,43)를 이용한 광여기 장치(2)와 방출광 분석장치(4)의 기계적 구조는 동일하며 형광 분광 분석기에서의 역할만이 다를 뿐이다.The light emitted from the sample 3 enters the emission light analyzer 4 using the diffraction grating 43, passes through the input slit 41 and the first reflection mirror 42, and then the diffraction grating 43 Is passed through the second reflecting mirror 44 and the output slit 45. The light finally enters the photodetector 5, and analyzes the output signal of the photodetector 5 to analyze the characteristics of the sample. The mechanical structures of the optical excitation device 2 and the emission light analyzer 4 using the diffraction gratings 23 and 43, respectively, are identical and only differ in their role in the fluorescence spectrometer.

도 1과 같은 종래의 형광 분광 분석기는 넓은 파장 영역의 빛을 분광시키기 위해서 회절 격자 구동에 시간이 소요되므로, 측정시간이 오래 걸리는 문제점으로 지적되고 있다.The conventional fluorescence spectrometer as shown in FIG. 1 has been pointed out as a problem in that it takes a long time to measure a diffraction grating in order to spectroscopic light in a wide wavelength region.

조금 더 구체적으로 살펴보면, 분석과정에서 일단 광여기 장치를 이용해서 시료에 일정한 파장 영역(실제로는 아주 좁은 스펙트럴 대역(spectral bandwiddth )의 빛을 입사시킨다. 그리고 시료의 형광반응에 의해 발생된 빛의 스펙트럼을 분석하기 위해, 방출광 분석장치는 회절 격자를 구동해 가면서 방출광의 스펙트럼을 얻는다. 그러나 이것만으로 끝나는 것이 아니고, 여기까지의 단계는 일정한 파장 영역을 갖는 입사광에 대한 형광 스펙트럼을 얻는다.In more detail, during the analysis process, a photoexciter is used to inject light of a certain wavelength region (actually a very narrow spectral bandwiddth) into the sample, and then the light generated by the fluorescence reaction of the sample. In order to analyze the spectrum, the emission light analyzer obtains the spectrum of the emitted light while driving the diffraction grating, but this is not the only step, and the steps up to here obtain the fluorescence spectrum for the incident light having a constant wavelength range.

따라서 다시 광여기 장치의 회절격자를 통해서 입사광의 파장영역을 변화시키고, 방출광 장치를 이용해서 분석하는 과정을 되풀이 한다.Therefore, the wavelength region of the incident light is changed again through the diffraction grating of the optical excitation device, and the process of analyzing the emission light device is repeated.

또한 입력슬릿(21,41), 제1반사거울(22,42), 회절격자(23,43), 제2반사거울 (24,44)들은 회절 격자의 분광 성능을 높이기 위해 사용되는 것으로서, 서로간에 일정 거리 이상을 유지하여야 하므로 단색화장치(2,4)의 크기는 필연적으로 일정 한도 이상이 되어야 하므로 전체적으로 시스템의 크기가 더욱 커져서 많은 공간을 차지해야 하는 문제를 갖고 있다.In addition, the input slits 21 and 41, the first reflection mirrors 22 and 42, the diffraction gratings 23 and 43, and the second reflection mirrors 24 and 44 are used to increase the spectral performance of the diffraction grating. Since the size of the monochromator (2,4) must necessarily be more than a certain limit because it must be maintained over a certain distance between the overall system has a problem that the size of the system is larger and occupy a lot of space.

따라서 본 발명은 상기와 같은 문제점을 해결하기 위한 것으로, 광 여기 장치 및 방출광 분석 장치로 사용되고 있는 회절 격자를 이용한 단색화 장치를 음향광학변조필터를 이용한 단색화장치로 대체하여 넓은 파장 영역을 갖는 빛의 스펙트럼을 단시간내에 분석이 가능하도록 하고, 전체 시스템의 크기를 매우 작게 구현할 수 있도록 한 음향광학변조필터를 이용한 형광 분광 분석기를 제공함에 그 목적이 있다.Accordingly, the present invention has been made to solve the above problems, by replacing the monochromator using the diffraction grating used as the optical excitation device and the emission light analysis device with the monochromator using the acoustic optical modulation filter, It is an object of the present invention to provide a fluorescence spectrometer using an acoustic optical modulation filter that enables the analysis of a spectrum within a short time and makes the size of the whole system very small.

상기의 목적을 달성하기 위한 본 발명의 구체적인 수단은,Specific means of the present invention for achieving the above object,

입사광에서 특정한 파장을 얻어내기 위한 장치로서,A device for obtaining a specific wavelength from the incident light,

음향광학변조필터(8)와;An acoustic optical modulation filter 8;

상기 음향광학변조필터(8)는,The acoustic optical modulation filter 8,

특정한 형태의 구조 결정을 갖는 광학소자(8a)와;An optical element 8a having a specific type of structure crystal;

상기 광학소자(8a)의 일단에 부착된 RF신호발생기(81)와;An RF signal generator 81 attached to one end of the optical element 8a;

상기 광학소자(8a)의 타단에 부착되어 상기 RF신호발생기(81)로부터 발생된 RF신호 진행파(83)를 흡수하는 RF신호흡수기(82)를 구비하고,An RF signal absorber 82 attached to the other end of the optical element 8a to absorb the RF signal traveling wave 83 generated from the RF signal generator 81;

상기 음향광학필터(8)의 입사광측에 배설된 입력슬릿(101); 및An input slit 101 disposed on the incident light side of the acoustooptic filter 8; And

상기 음향광학필터(8)의 출사광측에 배설된 출력슬릿(102)을 포함한 음향광학변조필터를 이용한 단색화장치를 제공한다.Provided is a monochromator using an acoustic optical modulation filter including an output slit 102 disposed on the output light side of the acoustic optical filter (8).

본 발명에 따른 상기 단색화장치는, 광원(1)측 빛을 광 여기 장치(2)로 출사시켜 얻어진 특정 파장의 빛을 시료(3)에 입사시키고, 시료에서 다시 방출된 빛을 방출광 분석장치(4)를 통해 광 검출기(5)로 입사시켜 출력신호를 분석하여 시료의 특성을 분석하는 형광 분광 분석기의 광 여기 장치(2)에 대체될 수 있다.In the monochromator according to the present invention, light having a specific wavelength obtained by emitting light from the light source 1 side to the optical excitation device 2 is incident on the sample 3, and the light emitted from the sample is emitted again. It can be replaced by the optical excitation device 2 of the fluorescence spectrometer, which enters the photodetector 5 through (4) and analyzes the output signal to analyze the characteristics of the sample.

본 발명에 따른 상기 단색화장치는, 광원(1)측 빛을 광 여기 장치(2)로 출사시켜 얻어진 특정 파장의 빛을 시료(3)에 입사시키고, 시료에서 다시 방출된 빛을 방출광 분석장치(4)를 통해 광 검출기(5)로 입사시켜 출력신호를 분석하여 시료의 특성을 분석하는 형광 분광 분석기의 방출광 분석장치에 대체될 수 있다.In the monochromator according to the present invention, light having a specific wavelength obtained by emitting light from the light source 1 side to the optical excitation device 2 is incident on the sample 3, and the light emitted from the sample is emitted again. It can be replaced by the emission spectrometer of the fluorescence spectrometer, which enters the photodetector 5 through (4) and analyzes the output signal to analyze the characteristics of the sample.

본 발명에 따른 상기 단색화장치는, 광원(1)측 빛을 광 여기 장치(2)로 출사시켜 얻어진 특정 파장의 빛을 시료(3)에 입사시키고, 시료에서 다시 방출된 빛을 방출광 분석장치(4)를 통해 광 검출기(5)로 입사시켜 출력신호를 분석하여 시료의 특성을 분석하는 형광 분광 분석기의 상기 광 여기 장치와 상기 방출광 분석장치에 모두 적용될 수 있다.In the monochromator according to the present invention, light having a specific wavelength obtained by emitting light from the light source 1 side to the optical excitation device 2 is incident on the sample 3, and the light emitted from the sample is emitted again. It can be applied to both the optical excitation device and the emission light analyzer of the fluorescence spectrometer that enters the photo detector 5 through (4) and analyzes the output signal to analyze the characteristics of the sample.

도 1은 종래 형광 분광 분석기의 구성도.1 is a block diagram of a conventional fluorescence spectrometer.

도 2는 본 발명에 적용되는 음향광학변조필터의 동작 원리를 설명한 구성도.2 is a configuration diagram illustrating an operation principle of an acoustic optical modulation filter applied to the present invention.

도 3은 본 발명의 실시예에 따른 단색화장치의 구성도.3 is a block diagram of a monochrome device according to an embodiment of the present invention.

도 4는 본 발명에 따른 형광분광 분석기의 구성도.4 is a block diagram of a fluorescence spectrometer according to the present invention.

<도면의 주요 부분에 대한 부호의 설명><Explanation of symbols for the main parts of the drawings>

4, 40 : 방출광 분석장치 8 : 음향광학변조필터4, 40: emission light analyzer 8: acoustic optical modulation filter

2, 20 : 광 여기 장치 81 : RF신호발생기2, 20: optical excitation device 81: RF signal generator

82 : RF신호흡수기 101 : 입력슬릿82: RF signal absorber 101: Input slit

102 : 출력슬릿102: output slit

이하, 첨부된 도면을 참조하여 본 발명의 바람직한 실시예를 상세히 설명한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

도 2는 본 발명에 적용되는 음향광학변조필터의 동작 원리를 설명한 구성도이고, 도 3은 본 발명의 실시예에 따른 단색화장치의 구성도이고, 도 4는 본 발명에 따른 형광분광 분석기의 구성도이다.2 is a block diagram illustrating an operation principle of an acoustic optical modulation filter applied to the present invention, FIG. 3 is a block diagram of a monochromator according to an embodiment of the present invention, and FIG. 4 is a block diagram of a fluorescence spectrometer according to the present invention. It is also.

본 발명은 종래 회절격자를 사용한 단색화 장치(2,4)가 도2의 음향광학변조필터(8)를 포함한 단색화 장치(20,40)에 도 4와 같이 대체된다.In the present invention, the monochromator 2,4 using the conventional diffraction grating is replaced with the monochromator 20,40 including the acoustooptic modulation filter 8 of FIG.

먼저, 동조 가능 필터의 원리를 도 2에서 설명한다.First, the principle of a tunable filter is demonstrated in FIG.

도 2와 같이 음향광학변조필터(8)는 특정한 형태의 결정 구조를 갖는 광학소자를 이용한다. 이 광학소자(8a)의 양단에는 RF신호발생기(81)와 RF신호흡수기(82)가 부착되어 있다. 여기서 RF라는 용어는 라디오 주파수(Radio Frequency)를 의미한다.As shown in FIG. 2, the acoustooptic modulation filter 8 uses an optical element having a specific crystal structure. The RF signal generator 81 and the RF signal absorber 82 are attached to both ends of the optical element 8a. The term RF refers to a radio frequency.

RF신호 발생기(81)로부터 발생된 RF신호진행파(83)는 음향광학변조필터(8)를 진행하여 RF신호흡수기(82)로 흡수된다.The RF signal traveling wave 83 generated from the RF signal generator 81 passes through the acoustic optical modulation filter 8 and is absorbed by the RF signal absorber 82.

도 2와 같이 음향광학변조필터(8)에 빛(9)이 입사하는 경우, 그대로 통과하는 빛(91)과 음향광학변조필터(8)에 가해지는 RF신호진행파(83)의 주파수에 해당하는 빛(92,93)이 나오게 된다. 즉, 동조 가능 필터는 가해지는 RF신호에 해당하는 빛만을 통과시키는 성질이 있다. 이러한 성질을 이용하여 음향광학변조필터(8)에 가해지는 RF신호를 변화시키면, 회절격자를 이용한 단색화장치에서 회절격자를 구동하는 것과 같이 빛을 분광시킬 수 있는 결과를 얻을 수 있다.When light 9 is incident on the acoustooptic modulation filter 8 as shown in FIG. 2, it corresponds to the frequencies of the light 91 passing through the same and the RF signal traveling wave 83 applied to the acoustooptic modulation filter 8. Light (92,93) comes out. That is, the tunable filter has a property of passing only light corresponding to an applied RF signal. By using this property to change the RF signal applied to the acoustic optical modulation filter 8, it is possible to obtain light spectroscopy, such as driving a diffraction grating in a monochromator using a diffraction grating.

도 3은 음향광학변조필터(8)를 이용한 단색화장치(10)가 도시되어 있다.3 shows a monochromator 10 using an acoustooptic modulation filter 8.

음향광학변조필터(8)를 이용한 단색화장치(10)는 음향광학변조필터(8)와 입력슬릿(101) 및 출력슬릿(102)으로 구성되어 있다. 음향광학변조필터(8)를 이용한 단색화장치(10)에 입사하는 입사광(9)은 음향광학변조필터(8)에 의해 3개의 빛(91, 92,93)으로 분광되며, 이중 출력슬릿(102)을 통과한 출사광(93)만이 출력되게 된다.The monochromator 10 using the acoustooptic modulation filter 8 is composed of an acoustooptic modulation filter 8, an input slit 101, and an output slit 102. The incident light 9 incident on the monochromator 10 using the acoustooptic modulation filter 8 is spectroscopically divided into three lights 91, 92, and 93 by the acoustooptic modulation filter 8, and the dual output slit 102. Only the outgoing light 93 passing through) is output.

도 4는 음향광학변조필터를 이용한 형광 분광 분석기의 구조를 설명한다. 본 발명은 음향광학변조필터를 이용한 단색화장치(10)를 광 여기 장치(20) 및 방출광 분석장치(40)로 대체되어 있다. 본 발명의 구조를 이용하면, 종래와 같이 회절 격자 구동 시간이 따로 필요치 않으므로 단시간내에 측정이 가능하며, 또 종래와 같이 일정 거리를 유지해야 하는 제1 및 제2반사거울이 삭제되어 형광 분광 분석기의 전체 크기를 줄일 수 있어 휴대용 및 소형 분석기 제작이 가능해진다.4 illustrates the structure of a fluorescence spectrometer using an acoustic optical modulation filter. In the present invention, the monochromator 10 using the acoustic optical modulation filter is replaced by the optical excitation device 20 and the emission light analyzer 40. According to the structure of the present invention, since the diffraction grating driving time is not required as in the prior art, the measurement can be performed within a short time, and the first and second reflection mirrors, which need to maintain a certain distance as in the prior art, are eliminated to eliminate the The overall size can be reduced, enabling portable and compact analyzers.

상술한 바와 같이 본 발명의 음향광학변조필터를 이용한 형광 분광 분석기에 따르면, 단시간내에 물성 측정이 가능하고, 시스템을 초소형으로 제작할 수 있기 때문에 초고속 분광 분석 영역을 비롯하여, 의료, 생명, 환경, 산업현장 등과 같은 다양한 분야의 적용에 기여할 수 있다.According to the fluorescence spectrometer using the acoustic optical modulation filter of the present invention as described above, it is possible to measure the physical properties within a short time, and the system can be manufactured in a very small size, so that the high-speed spectroscopic analysis area, medical, life, environment, industrial sites It can contribute to the application of various fields such as.

Claims (3)

광원(1)측 빛을 광 여기 장치(2)로 출사시켜 얻어진 특정 파장의 빛을 시료 (3)에 입사시키고, 시료에서 다시 방출된 빛을 방출광 분석장치(4)를 통해 광 검출기(5)로 입사시켜 출력신호를 분석하여 시료의 특성을 분석하는 형광 분광 분석기에 있어서,The light of a specific wavelength obtained by emitting the light of the light source 1 side to the optical excitation device 2 is incident on the sample 3, and the light emitted from the sample is again emitted through the emission light analyzer 4 through the light detector 5 In the fluorescence spectrometer to analyze the characteristics of the sample by entering the 상기 광 여기 장치(2)는 음향광학변조필터(8)를 이용한 단색화장치(10)이고,The optical excitation device 2 is a monochromator 10 using an acoustic optical modulation filter 8, 상기 단색화장치(10)는 상기 음향광학변조필터(8)의 입사광측에 배설된 입력슬릿(101)과 상기 음향광학변조필터(8)의 출사광측에 배설된 출력슬릿(102)을 구비하고,The monochromator 10 has an input slit 101 disposed on the incident light side of the acoustic optical modulation filter 8 and an output slit 102 disposed on the output light side of the acoustic optical modulation filter 8, 상기 음향광학변조필터(8)는, 특정한 형태의 구조 결정을 갖는 광학소자(8a)와 상기 광학소자(8a)의 일단에 부착된 RF신호발생기(81)와 상기 광학소자(8a)의 타단에 부착되어 상기 RF신호발생기(81)로부터 발생된 RF신호 진행파(83)를 흡수하는 RF신호흡수기(82)를 포함한 것을 특징으로 하는 음향광학변조필터를 이용한 형광 분광 분석기.The acoustooptic modulation filter 8 is provided at the other end of the optical element 8a having a specific type of structure determination and the RF signal generator 81 attached to one end of the optical element 8a and the optical element 8a. And an RF signal absorber (82) attached to absorb the RF signal traveling wave (83) generated from the RF signal generator (81). 광원(1)측 빛을 광 여기 장치(2)로 출사시켜 얻어진 특정 파장의 빛을 시료 (3)에 입사시키고, 시료에서 다시 방출된 빛을 방출광 분석장치(4)를 통해 광 검출기(5)로 입사시켜 출력신호를 분석하여 시료의 특성을 분석하는 형광 분광 분석기에 있어서,The light of a specific wavelength obtained by emitting the light of the light source 1 side to the optical excitation device 2 is incident on the sample 3, and the light emitted from the sample is again emitted through the emission light analyzer 4 through the light detector 5 In the fluorescence spectrometer to analyze the characteristics of the sample by entering the 상기 방출광 분석장치(4)는 음향광학변조필터(8)를 이용한 단색화장치(10)이고,The emission light analyzer 4 is a monochromator 10 using an acoustic optical modulation filter 8, 상기 단색화장치(10)는 상기 음향광학변조필터(8)의 입사광측에 배설된 입력슬릿(101)과 상기 음향광학변조필터(8)의 출사광측에 배설된 출력슬릿(102)을 구비하고,The monochromator 10 has an input slit 101 disposed on the incident light side of the acoustic optical modulation filter 8 and an output slit 102 disposed on the output light side of the acoustic optical modulation filter 8, 상기 음향광학변조필터(8)는, 특정한 형태의 구조 결정을 갖는 광학소자(8a)와 상기 광학소자(8a)의 일단에 부착된 RF신호발생기(81)와 상기 광학소자(8a)의 타단에 부착되어 상기 RF신호발생기(81)로부터 발생된 RF신호 진행파(83)를 흡수하는 RF신호흡수기(82)를 포함한 것을 특징으로 하는 음향광학변조필터를 이용한 형광 분광 분석기.The acoustooptic modulation filter 8 is provided at the other end of the optical element 8a having a specific type of structure determination and the RF signal generator 81 attached to one end of the optical element 8a and the optical element 8a. And an RF signal absorber (82) attached to absorb the RF signal traveling wave (83) generated from the RF signal generator (81). 광원(1)측 빛을 광 여기 장치(2)로 출사시켜 얻어진 특정 파장의 빛을 시료 (3)에 입사시키고, 시료에서 다시 방출된 빛을 방출광 분석장치(4)를 통해 광 검출기(5)로 입사시켜 출력신호를 분석하여 시료의 특성을 분석하는 형광 분광 분석기에 있어서,The light of a specific wavelength obtained by emitting the light of the light source 1 side to the optical excitation device 2 is incident on the sample 3, and the light emitted from the sample is again emitted through the emission light analyzer 4 through the light detector 5 In the fluorescence spectrometer to analyze the characteristics of the sample by entering the 상기 광 여기 장치(2)와 상기 방출광 분석장치(4)는 각기 음향광학변조필터 (8)를 이용한 단색화장치(10)이고,The optical excitation device 2 and the emission light analysis device 4 are monochrome devices 10 using an acoustic optical modulation filter 8, respectively. 상기 단색화장치(10)는 상기 음향광학변조필터(8)의 입사광측에 배설된 입력슬릿(101)과 상기 음향광학변조필터(8)의 출사광측에 배설된 출력슬릿(102)을 구비하고,The monochromator 10 has an input slit 101 disposed on the incident light side of the acoustic optical modulation filter 8 and an output slit 102 disposed on the output light side of the acoustic optical modulation filter 8, 상기 음향광학변조필터(8)는, 특정한 형태의 구조 결정을 갖는 광학소자(8a)와 상기 광학소자(8a)의 일단에 부착된 RF신호발생기(81)와 상기 광학소자(8a)의 타단에 부착되어 상기 RF신호발생기(81)로부터 발생된 RF신호 진행파(83)를 흡수하는 RF신호흡수기(82)를 포함한 것을 특징으로 하는 음향광학변조필터를 이용한 형광 분광 분석기.The acoustooptic modulation filter 8 is provided at the other end of the optical element 8a having a specific type of structure determination and the RF signal generator 81 attached to one end of the optical element 8a and the optical element 8a. And an RF signal absorber (82) attached to absorb the RF signal traveling wave (83) generated from the RF signal generator (81).
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