KR20030012349A - Bonding process of Al flange/Bronze wheel containing diamond for precision cutting - Google Patents
Bonding process of Al flange/Bronze wheel containing diamond for precision cutting Download PDFInfo
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- KR20030012349A KR20030012349A KR1020010046341A KR20010046341A KR20030012349A KR 20030012349 A KR20030012349 A KR 20030012349A KR 1020010046341 A KR1020010046341 A KR 1020010046341A KR 20010046341 A KR20010046341 A KR 20010046341A KR 20030012349 A KR20030012349 A KR 20030012349A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
- B23K20/023—Thermo-compression bonding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/18—Dissimilar materials
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Abstract
Description
본 발명은 다이아몬드가 첨가된 청동합금계 휠과 알루미늄플랜지의 접합체의 우수한 접합강도를 얻기 위하여 사용되는 접합방법에 관한 것으로, 특히, 소정의 온도 및 분위기하에서 고상확산접합시켜 접합계면에 발생하는 금속간화합물을 억제시키는 접합방법에 관한 것이다.The present invention relates to a bonding method used to obtain excellent bonding strength between a bronze alloy wheel and an aluminum flange bonded diamond added, in particular, between the metal generated in the junction interface by solid phase diffusion bonding under a predetermined temperature and atmosphere A conjugation method for inhibiting a compound.
종래에는 다이아몬드를 알루미늄 플랜지에 도금한 절삭가공용 휠의 다이아몬드 접합시키는 방법으로는 전해질도금(Electro plating) 혹은 무전해질(Electroless plating)으로 전착시킨 방법이 널리 사용되어 왔다.Conventionally, as a method of diamond bonding of a cutting wheel in which diamonds are plated on aluminum flanges, a method of electrodeposition by electroplating or electroless plating has been widely used.
그러나, 다음과 같은 몇가지 문제점이 있었다.However, there are some problems as follows.
첫째, 종래 전착으로 다이아몬드를 알루미늄 플랜지에 도금한 절삭가공용 휠은 접합강도가 불충분하여 실리콘웨이퍼와 같이 경도가 높은 피가공재를 가공할 때 다이아몬드가 이탈되는 단점이 있다.First, a cutting wheel in which diamond is plated on an aluminum flange by electrodeposition is insufficient in bonding strength, so that diamond is separated when processing a workpiece having high hardness, such as a silicon wafer.
둘째, 특히 실리콘와이퍼 표면에 폴리머계통의 화학제품이 피복되어 있는 경우 절삭가공휠로부터 다이아몬드의 이탈이 특히 심하게 발생한다.Second, the separation of diamond from the cutting wheel occurs particularly severely, especially when the polymer-based chemical is coated on the surface of the silicon wiper.
셋째, 전착된 다이아몬드의 두께가 매우 얇아 장시간 사용할 수 없다.Third, the electrodeposited diamond is very thin and cannot be used for a long time.
한편, 절삭가공용 휠(Wheel)은 절삭 및 연삭시 고속으로 회전하므로 다이아몬드 소결체와 플랜지(Flange)간의 결합력이 중요하다. 일반적으로 다이아몬드 소결체와 플랜지(Flange)간의 결합은 용융접합, 전착법, Laser방법으로 실시되고 있으나 접합시 접합계면에서 발생되는 결함과 냉각시 접합계면에서의 열팽창계수에 의한 잔류응력이 발생되기 때문에, 파괴가 발생된다.On the other hand, since the cutting wheel (Wheel) rotates at high speed during cutting and grinding, the bonding force between the diamond sintered body and the flange (Flange) is important. In general, the bonding between the diamond sintered body and the flange is carried out by melt bonding, electrodeposition, or laser method, but defects in the bonding interface during bonding and residual stress due to thermal expansion coefficient in the bonding interface during cooling are generated. Destruction occurs.
그러므로, 접합강도 및 신뢰도가 높은 접합체를 개발하기 위해서는 접합체내에 발생되는 잔류응력의 크기를 최소화하여야 하며, 작업공정을 간략하게 하기 위해서는 접합부의 설계기술 개발이 요구되고 접합부의 신뢰성을 확보하기 위하여 새로운 접합법이 이용되어야 한다Therefore, in order to develop a joint with high joint strength and reliability, the amount of residual stress generated in the joint should be minimized. In order to simplify the work process, development of joint design technology is required, and a new joint method is required to secure the joint reliability. Should be used
고상확산접합법은 물성이 서로 다른 이종금속과의 접합이 가능하고, 기존의 용융접합(브레이징, 솔더링, Laser방법)과는 달리 접합부의 미세조직이 변할 위험이 적기 때문에 우수한 접합특성을 얻을 수 있다.The solid phase diffusion bonding method is capable of bonding with dissimilar metals having different physical properties, and unlike conventional melt bonding (brazing, soldering, and laser methods), it is possible to obtain excellent bonding characteristics because there is little risk of changing the microstructure of the joint.
따라서 니켈 크롬 코발트가 각 각 첨가된 청동합금에 다이아몬드를 첨가하여 플랜지로 사용되는 알루미늄(Al)과 고상접합을 실시하여 결합재와 지지체(shank부)간의 접합계면을 분석함이 필요로 된다.Therefore, it is necessary to analyze the bonding interface between the bonding material and the support (shank part) by performing solid-phase bonding with aluminum (Al) used as a flange by adding diamond to the bronze alloy to which nickel chromium cobalt is added.
일반적으로 청동계 합금을 알루미늄과 접합하면 접합계면에 기계적 특성에 나쁜 영향을 미치는 금속간 화합물(CuAl Cu2Al Cu9Al4 등)이 생성된다는 보고가 있고 이들은 접합중에 발생한다.In general, it has been reported that the bonding of bronze-based alloys with aluminum produces intermetallic compounds (such as CuAl Cu 2 Al Cu 9 Al 4) which adversely affect the mechanical properties at the joint interface and these occur during bonding.
금속간화합물의 존재를 최소화하기 위해서는 용융접합법(솔더링, 브레이징, Laser법)에 비하여 고상확산접합법은 두 모재의 융접이하에서 작업을 실시되므로 냉각과정 중 발생할 수 있는 응고조직의 변화 및 중간생성물의 생성을 최소화하고 서로 다른 이종금속의 열팽창계수로 인한 접합계면의 파괴를 최소화할 수 있다.In order to minimize the presence of intermetallic compounds, the solid-state diffusion bonding method is performed under the fusion welding of the two base materials, compared to the melt bonding method (soldering, brazing, laser method). It can minimize the breakdown of the bonding interface due to the coefficient of thermal expansion of different dissimilar metals.
전술한 문제를 해결하고자 하는 본 발명의 목적은 상기 다이아몬드가 첨가된 청동합금계 휠과 알루미늄플랜지가 접합된 접합체의 접합계면을 청동과 알루미늄으로 금속결합시키고 이때 다이아몬드는 전위(Dislocation)의 이동을 고정시키는 핀(pine)역활을 하게 하여 기계적강도를 향상시키고, 고상확산법으로 접합시켜 접합계면에 발생할 수 있는 금속간화합물 최소화시켜 접합강도의 감소를 억제시킴에 있다.An object of the present invention to solve the above problem is to bond the bonding interface of the diamond alloy-bonded alloy wheel and the aluminum flange bonded with bronze and aluminum, wherein the diamond is fixed to the displacement (Dislocation) movement It improves the mechanical strength by acting as a pin, and minimizes the intermetallic compounds that can occur at the bonding interface by inhibiting the decrease of the bonding strength by joining by solid phase diffusion method.
또한, 본 발명의 다른 목적은 작업공정이 간단하여, 이를 통해 생산비 및 공정수를 절감할 수 있는 다이아몬드가 첨가된 청동합금계 휠과 알루미늄플랜지의 접합방법을 제공함에 있다.In addition, another object of the present invention is to provide a method of joining a bronze alloy-based wheel and an aluminum flange to which diamond is added, which can simplify the work process, thereby reducing the production cost and the number of processes.
본 발명은 니켈 크롬 코발트가 각 각 첨가된 청동합금에 다이아몬드를 첨가하여 플랜지로 사용되는 알루미늄(Al)과 고상접합을 실시하여 결합재와 지지체(shank부)간의 접합계면을 분석함을 그 목적으로 하기도 한다.The present invention is to analyze the interface between the bonding material and the support (shank part) by performing a solid-phase bonding to aluminum (Al) used as a flange by adding diamond to the bronze alloy added nickel nickel cobalt, respectively. do.
도 1은 본 발명에 따른 다이아몬드가 첨가된 청동합금계 휠과 알루미늄 플랜지를 확산접합한 뒤의 접합계면에 발생한 금속간화합물의 두께를 접합시간에 따른 변화를 나타낸 그래프이다.Figure 1 is a graph showing the change in thickness of the intermetallic compound generated in the bonding interface after the diffusion bonding the diamond alloy bronze alloy wheel and the aluminum flange according to the present invention according to the bonding time.
도 2는 본 발명에 따른 다이아몬드가 첨가된 청동합금계 휠에 각 각 니켈 , 크롬, 코발트의 첨가량을 증가시며 알루미늄 플랜지를 확산접합한 뒤 반응층의 두께를 나타낸 그래프이다.2 is a graph showing the thickness of the reaction layer after diffusion bonding the aluminum flange while increasing the amount of nickel, chromium, and cobalt added to the diamond-based bronze alloy wheel according to the present invention.
도 3은 본 발명에 따르는 다이아몬드가 첨가된 청동합금계 휠과 알루미늄플랜지의 접합계면에서의 경도값 분포를 나타내는 그래프이다.3 is a graph showing the distribution of hardness values at the interface between the diamond alloy-added bronze alloy wheel and the aluminum flange according to the present invention.
전술한 목적을 달성하고자 하는 본 발명은 다이아몬드 외 니켈, 크롬 코발트가 각 각 10%이하 첨가된 청동합금계 휠과 순도 99%이상의 알루미늄플랜지를 고상확산접합법으로 달성된다.The present invention to achieve the above object is achieved by a solid-state diffusion bonding method of aluminum alloy with a purity of 99% or more and a bronze alloy wheel with nickel and chromium cobalt added to each other less than 10%.
이때 청동계합금휠과 알루미늄의 두께는 각각 2 내지 20mm이하로 하고 접합계면을 45°이하로 각각 가공하여 접합계면의 접합면적을 최대한 확보하는 것이 바람직하다.At this time, the thickness of the bronze-based alloy wheel and aluminum is preferably 2 to 20mm or less and the joint interface is processed to 45 ° or less, respectively, to secure the maximum joint area of the joint interface.
또한, 접합온도는 알루미늄의 융점을 고려하여 400내지 560℃의 온도에서 실시하여 접합계면의 반응층이 150㎛이하로 제어하기 위하여 30MPa전후의 압력을 가하고, 접합온도는 5분 내지 60분 동안 접합하는 단계 및 상기 청동계합금과 알루미늄의 접합체를 노냉 혹은 50℃/초 이하의 속도로 냉각시키는 단계를 포함하는 고상확산접합법으로 달성된다.In addition, the bonding temperature is carried out at a temperature of 400 to 560 ℃ in consideration of the melting point of aluminum to apply a pressure of around 30MPa in order to control the reaction layer of the bonding interface to 150㎛ or less, the bonding temperature is bonded for 5 to 60 minutes And it is achieved by a solid-phase diffusion bonding method comprising the step of cooling the conjugate of the bronze-based alloy and aluminum at a rate of no cooling or 50 ℃ / sec or less.
이때, 상기의 접합단계는 진공 대신 불활성가스( N2, Ar 등) 혹은 환원성분위기(H2)중에서 수행해도 무방하다.At this time, the bonding step may be performed in an inert gas (N2, Ar, etc.) or reducing component (H2) instead of vacuum.
또한, 본 발명의 청동계합금과 알루미늄의 접합은 열팽창계수가 차이가 나므로 접합하려는 두 재료의 융점이하의 고상상태에서 접합을 수행한다.In addition, the bonding of the bronze-based alloy and aluminum of the present invention is different in thermal expansion coefficient, so that the bonding is performed in the solid state below the melting point of the two materials to be joined.
본 발명의 청동계합금에 첨가된 다이아몬드, 크롬, 니켈, 코발트는 청동계합금에 고용 혹은 석출되어 청동계합금의 기계적 특성을 향상시키고, 다이아몬드가 청동계합금 중으로부터 이탈되지 않지 않도록 하는 장점이 있다.Diamond, chromium, nickel, cobalt added to the bronze-based alloy of the present invention has the advantage of being dissolved or precipitated in the bronze-based alloy to improve the mechanical properties of the bronze-based alloy, so that the diamond does not escape from the bronze-based alloy .
또한 청동계 합금중의 크롬, 니켈, 코발트원소는 폴리머 혹은 수지형 화합물이 부착되어 있는 실리콘와이퍼의 절삭가공시 수지형화합물과 반응을 일으키지 않아 정밀도가 우수한 가공면을 달성할 수 있다.In addition, chromium, nickel, and cobalt elements in the bronze-based alloy do not react with the resin-type compound during cutting of the silicon wiper to which the polymer or resin-type compound is attached, thereby achieving a highly precise machining surface.
본 발명은 물성이 서로 다른 이종금속과의 접합이 가능하고, 기존의 용융접합(브레이징, 솔더링, Laser방법)과는 달리 접합부의 미세조직이 변할 위험이 적기 때문에 우수한 접합특성을 얻는 고상확산접합법을 제공한다.The present invention is capable of bonding with dissimilar metals having different physical properties, and unlike the conventional melt bonding (brazing, soldering, laser method), there is little risk of changing the microstructure of the joint, so that the solid-state diffusion bonding method is obtained. to provide.
따라서 본 발명에서는 니켈 크롬 코발트가 각 각 첨가된 청동합금에 다이아몬드를 첨가하여 플랜지로 사용되는 알루미늄(Al)과 고상접합을 실시하여 결합재와 지지체(shank부)간의 접합계면이 분석가능하다.Therefore, in the present invention, the bonding interface between the binder and the support (shank part) can be analyzed by adding a diamond to the bronze alloy to which nickel chromium cobalt is added and performing solid phase bonding with aluminum (Al) used as a flange.
일반적으로 청동계 합금을 알루미늄과 접합하면 접합계면에 기계적 특성에 나쁜 영향을 미치는 금속간 화합물(CuAl Cu2Al Cu9Al4 등)이 생성되어 된다는 보고가 있고 이들은 접합중에 발생하며, 금속간화합물의 존재를 최소화하기 위해서는 용융접합법(솔더링, 브레이징, Laser법)에 비하여 고상확산접합법은 두 모재의 융접이하에서 작업을 실시되므로 냉각과정 중 발생할 수 있는 응고조직의 변화 및 중간생성물의 생성을 최소화하고 서로 다른 이종금속의 열팽창계수로 인한 접합계면의 파괴를 최소화할 수 있다.In general, when a bronze alloy is bonded with aluminum, it is reported that intermetallic compounds (CuAl Cu2Al Cu9Al4, etc.) are generated at the bonding interface, which adversely affects mechanical properties, and these occur during the joining, and minimize the presence of intermetallic compounds. In contrast to the melt bonding method (soldering, brazing, and laser method), the solid-state diffusion bonding method is performed under the welding of two base materials, so that the change of coagulation structure and intermediate product that may occur during the cooling process is minimized, It is possible to minimize the fracture of the joint interface due to the coefficient of thermal expansion.
이하 첨부된 도면에 의거 본 발명의 실시예를 설명한다.Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.
첨부 도면중 도 1은 본 발명에서 얻어진 접합시간 및 온도와 반응층 두께와의 관계를 나타내었다. 이 그래프에서 보는 바와같이 접합온도를 560℃ 온도에서 20분간 접합했을 때 접합계면은 완전히 형성되어 있었으나 접합계면에는 16㎛두께의 반응층이 관찰되었고 접합시간의 증가와 더불어 60분간 접합했을 때 반응층의 두께는 59㎛로 증가하였다.1 of the accompanying drawings shows the relationship between the bonding time and temperature obtained in the present invention and the thickness of the reaction layer. As shown in this graph, the bonding interface was completely formed when the bonding temperature was bonded at 560 ℃ for 20 minutes, but the reaction layer of 16 µm thickness was observed on the bonding interface. The thickness of was increased to 59 μm.
접합온도가 500℃에서 20분동안 실시한 경우는 반응층의 두께는 매우 좁았으나 접합계면을 완전히 형성되지 못하고 국부적으로 미 접합 부위 및 균열이 발견되었다.When the bonding temperature was carried out at 500 ° C. for 20 minutes, the thickness of the reaction layer was very narrow, but the joint interface was not completely formed and local unbonded sites and cracks were found.
첨부 도면중 도 2는 본 발명에서 얻어진 560℃에서 20min분 동안 다이아몬드가 첨가된 청동합금에 각 각 니켈 크롬 코발트를 첨가한 경우 알루미늄 플랜지를 확산 접합하여 생성된 반응층의 두께를 나타낸 그래프이다.Figure 2 of the accompanying drawings is a graph showing the thickness of the reaction layer produced by diffusion bonding the aluminum flange when each nickel chromium cobalt is added to the bronze alloy added with diamond for 20 minutes at 560 ℃ obtained in the present invention.
상기 그래프에서는 니켈 크롬 코발트의 첨가량이 증가할수록 접합계면에서 발생하는 반응층의 두께는 극히 얇게 형성되어 있다. 이것은 청동합금내의 니켈 크롬 코발트 첨가원소 및 다이아몬드가 원자의 확산이동을 부분적으로 방해하고 있기 때문이다.In the graph, as the amount of nickel chromium cobalt increases, the thickness of the reaction layer generated at the bonding interface is extremely thin. This is because nickel chromium cobalt addition element and diamond in bronze alloy partially prevent the diffusion movement of atoms.
첨부 도면중 도 3은 본 발명에 따르는 다이아몬드가 첨가된 청동합금계 휠과 알루미늄플랜지의 접합계면에서의 경도값 분포를 나타내는 그래프이다.Figure 3 of the accompanying drawings is a graph showing the distribution of hardness value at the interface of the bonding of the aluminum alloy and the bronze alloy wheel with the addition of diamond according to the present invention.
상기 그래프에서 니켈, 크롬, 코발트가 첨가된 경우 계면에서 경도값이 첨가원소가 첨가되지 않은 시편에 비해 경도값이 상승하여 나타났으며 청동에 고용되는 니켈과 코발트는 고용강화효과로 인하여 반응층의 경도값은 석출효과가 나타나는 크롬이 첨가된 청동과 알루미늄의 접합계면의 반응층에서의 경도값보다는 다소 낮게 나타났다.In the graph, when nickel, chromium, and cobalt were added, the hardness value increased at the interface compared with the specimen without the added element. The nickel and cobalt solid solution in bronze were dissolved in the reaction layer due to the solid solution effect. The hardness value was slightly lower than the hardness value in the reaction layer of the chromium-added bronze-aluminum interface.
본 발명은 청동계합금에 첨가된 다이아몬드, 크롬, 니켈, 코발트는 청동계합금에 고용 혹은 석출되어 청동계합금의 기계적 특성을 향상시키고, 다이아몬드가 청동계합금 중으로부터 이탈되지 않지 않도록 하는 장점이 있다.The present invention has the advantage that diamond, chromium, nickel, cobalt added to the bronze-based alloy is dissolved or precipitated in the bronze-based alloy to improve the mechanical properties of the bronze-based alloy and prevent the diamond from being separated from the bronze-based alloy. .
또한 청동계 합금중의 크롬, 니켈, 코발트원소는 폴리머 혹은 수지형 화합물이 부착되어 있는 실리콘와이퍼의 절삭가공시 수지형화합물과 반응을 일으키지 않아 정밀도가 우수한 가공면을 달성할 수 있다.In addition, chromium, nickel, and cobalt elements in the bronze-based alloy do not react with the resin-type compound during cutting of the silicon wiper to which the polymer or resin-type compound is attached, thereby achieving a highly precise machining surface.
또한 본 발명은 접합강도 및 신뢰도가 높은 접합체를 개발하고 접합체내에 발생되는 잔류응력의 크기를 최소화하며, 작업공정을 간략하게 하는 접합부의 설계기술 개발에 적당하며 접합부의 신뢰성이 확보되는 고상확산접합법을 제공하여 물성이 서로 다른 이종금속과의 접합이 가능해지고, 기존의 용융접합(브레이징, 솔더링, Laser방법)과는 달리 접합부의 미세조직이 변할 위험이 적기 때문에 우수한 접합특성을 얻게 된 효과가 있다.In addition, the present invention is to develop a joint with high joint strength and reliability, minimize the amount of residual stress generated in the joint, and is suitable for the development of the design technology of the joint to simplify the work process, solid phase diffusion bonding method that ensures the reliability of the joint It is possible to bond with dissimilar metals having different physical properties, and unlike conventional melt bonding (brazing, soldering, and laser methods), there is little risk of changing the microstructure of the joint, and thus excellent bonding characteristics are obtained.
이러한 효과는 본 발명으로 하여금 니켈 크롬 코발트가 각 각 첨가된 청동합금에 다이아몬드를 첨가하여 플랜지로 사용되는 알루미늄(Al)과 고상접합을 실시하여 결합재와 지지체(shank부)간의 접합계면을 분석할 수 있는 부수효과도 얻는다.This effect allows the present invention to analyze the bonding interface between the binder and the support (shank part) by performing a solid-phase bonding with aluminum (Al) used as a flange by adding diamond to the bronze alloy to which nickel chromium cobalt is added. It also has side effects.
일반적으로 청동계 합금을 알루미늄과 접합하면 접합계면에 기계적 특성에 나쁜 영향을 미치는 금속간 화합물(CuAl Cu2Al Cu9Al4 등)이 생성되는 일이 접합중에 발생하므로 이를 최소화하기 위한 용융접합법(솔더링, 브레이징, Laser법)에 비하여 본 발명 고상확산접합법은 두 모재의 융접이하에서 작업을 실시되므로 냉각과정중 발생할 수 있는 응고조직의 변화 및 중간생성물의 생성을 최소화하고 서로 다른 이종금속의 열팽창계수로 인한 접합계면의 파괴를 최소화할 수 있기도 한다.In general, when a bronze-based alloy is bonded to aluminum, intermetallic compounds (CuAl Cu2Al Cu9Al4, etc.) are generated during the bonding, which adversely affects mechanical properties, so that the melt bonding method (soldering, brazing, laser) is minimized. Compared to the method), the solid-state diffusion bonding method of the present invention is performed under the fusion of the two base materials, thereby minimizing the change of coagulation structure and the formation of intermediate products that may occur during the cooling process, It can also minimize destruction.
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CN107234133A (en) * | 2017-04-13 | 2017-10-10 | 华峰日轻铝业股份有限公司 | A kind of method for solving to produce bubble in aluminum matrix composite rolling adhesion process |
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CN103964375A (en) * | 2013-02-01 | 2014-08-06 | 中芯国际集成电路制造(上海)有限公司 | Chip bonding method |
CN107234133A (en) * | 2017-04-13 | 2017-10-10 | 华峰日轻铝业股份有限公司 | A kind of method for solving to produce bubble in aluminum matrix composite rolling adhesion process |
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