KR200205579Y1 - Circulating equipment for a plating solution - Google Patents

Circulating equipment for a plating solution Download PDF

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Publication number
KR200205579Y1
KR200205579Y1 KR2020000019570U KR20000019570U KR200205579Y1 KR 200205579 Y1 KR200205579 Y1 KR 200205579Y1 KR 2020000019570 U KR2020000019570 U KR 2020000019570U KR 20000019570 U KR20000019570 U KR 20000019570U KR 200205579 Y1 KR200205579 Y1 KR 200205579Y1
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South Korea
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plating
plating solution
plating liquid
switching means
power switching
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KR2020000019570U
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Korean (ko)
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박용순
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주식회사탑코리아
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00Processes for servicing or operating cells for electrolytic coating
    • C25D21/10Agitating of electrolytes; Moving of racks

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

본 고안은 도금조의 도금액을 순환시키는 장치에 관한 것으로, 구동모터(210)와 동력전환수단(220) 및 지지구조체(230)에 상호 연동가능하게 연결되어진 도금액 순환플레이트(240)에 의해서 도금조(100)에 채워진 도금액(A)이 균일하면서 빠르게 순환되는 구조로 되어, 도금물(B) 표면의 도금편차가 감소되도록 된 것이다.The present invention relates to a device for circulating the plating solution of the plating bath, the plating tank (by the plating solution circulation plate 240 is connected to the drive motor 210 and the power switching means 220 and the support structure 230 so as to be interlocked with each other ( The plating liquid A filled in 100 is uniformly and rapidly circulated, so that the plating deviation of the surface of the plating material B is reduced.

Description

도금액 순환장치{Circulating equipment for a plating solution}Circulating equipment for a plating solution

본 고안은 도금조의 도금액을 순환시키는 장치에 관한 것으로, 특히 도금조에 채워진 도금액이 보다 균일하면서 빠르게 순환되도록 하는 도금액 순환장치에 관한 것이다.The present invention relates to an apparatus for circulating a plating solution of a plating bath, and more particularly, to a plating solution circulating device for circulating a plating solution filled in a plating bath more uniformly and quickly.

주지된 바와 같이, 금(Au)이나 구리(Cu), 또는 니켈(Ni) 등을 도금하는 경우에는, 도금액을 강제적으로 순환시키지 않게 되면 도금물의 계면에 발생되는 농도차이로 인해서 도금편차가 커지게 된다.As is well known, in the case of plating gold (Au), copper (Cu), nickel (Ni), or the like, if the plating solution is not forcedly circulated, the plating deviation may increase due to the concentration difference generated at the interface of the plating material. do.

따라서, 도 1에 도시된 바와 같이, 도금액 순환장치(200)를 설치해서 도금조(100)에 채워진 도금액(A)이 도금액 순환장치(200)에 의해 강제적으로 순환되도록 하고 있다.Therefore, as shown in FIG. 1, the plating liquid circulator 200 is provided to force the plating liquid A filled in the plating bath 100 to be forcedly circulated by the plating liquid circulator 200.

종래 도금액 순환장치(200)는, 도 1에 도시된 바와 같이, 도금조(100)에 각각 연통되어진 입수관(281)과 토출관(282)을 갖춘 도금액 순환라인(280)과, 도금액 순환라인(280)에 설치되는 순환펌프(270)로 이루어진 구조로 되어, 도금조(100)의 도금액(A)이 도금액 순환라인(280)을 통해서 순환펌프(270)에 의해서 강제적으로 순환되도록 되어 있다.As shown in FIG. 1, the conventional plating solution circulation device 200 includes a plating solution circulation line 280 having an inlet pipe 281 and a discharge pipe 282 respectively connected to the plating bath 100, and a plating solution circulation line. It has a structure consisting of a circulation pump 270 installed in 280, the plating liquid A of the plating bath 100 is forced to be circulated by the circulation pump 270 through the plating liquid circulation line 280.

따라서, 도금조(100)에 채워진 도금액(A)이 토출관(282)으로부터 분사되는 도금액(A)에 의해 도금조(100) 내부에서 강제 순환된 후, 입수관(281)으로 유입되어, 도금액 순환라인(280)을 통해서 도금조(100) 외부에서 강제 순환되므로, 도금물(B)의 도금편차가 감소되도록 되어 있다.Therefore, after the plating liquid A filled in the plating tank 100 is forcedly circulated inside the plating tank 100 by the plating liquid A injected from the discharge tube 282, the plating liquid A flows into the water inlet pipe 281 and the plating liquid Since the circulation is forced through the plating tank 100 outside the circulation line 280, the plating deviation of the plating material (B) is reduced.

그러나, 상기 종래 기술에 따르면, 도금조(100)에 내부에 채워진 도금액(A)이 토출관(282)을 통해서 도금조(100) 내에서 한쪽 방향으로 강제적으로 순환된다고 하더라도, 도금액(A)의 점성에 의해 상대적으로 순환속도가 느리게 되므로, 도금물(B) 표면의 도금편차를 줄이기에는 한계가 있었다. 또한, 이와 같이 도금액(A)이 한쪽 방향으로 방향성을 가지고 순환하게 되면, 도금물(B)의 표면에 부착된 기포들이 도금물(B)로부터 제대로 떨어지지 못하게 되어, 도금물(B)이 빈번하게 불량처리되는 문제가 발생되었다.However, according to the prior art, even if the plating liquid A filled inside the plating tank 100 is forcedly circulated in one direction in the plating tank 100 through the discharge pipe 282, Because of the relatively low circulation rate due to viscosity, there was a limit in reducing the plating deviation on the surface of the plated material (B). In addition, when the plating liquid A is circulated in one direction in this direction, bubbles adhered to the surface of the plating material B do not properly fall from the plating material B, and the plating material B is frequently There was a problem of poor treatment.

이에 본 고안은 상기와 같은 목적을 달성하기 위하여 안출된 것으로, 도금조에 채워진 도금액이 보다 균일하면서 빠르게 순환되도록 하여, 도금물의 도금편차가 감소되도록 하는 도금액 순환장치를 제공함에 그 목적이 있다.The present invention has been made in order to achieve the above object, it is an object of the present invention to provide a plating solution circulator that allows the plating liquid filled in the plating tank is circulated more quickly and quickly, so that the plating deviation of the plating is reduced.

도 1은 종래 기술에 따른 도금액 순환장치를 개략적으로 도시한 도면,1 is a view schematically showing a plating liquid circulation device according to the prior art,

도 2는 본 고안에 따른 도금액 순환장치를 개략적으로 도시한 도면이다.2 is a view schematically showing a plating liquid circulation device according to the present invention.

- 첨부도면의 주요 부분에 대한 용어설명 --Explanation of terms for the main parts of the accompanying drawings-

100 ; 도금조, 200 ; 도금액 순환장치,100; Plating bath, 200; Plating liquid circulator,

210 ; 구동모터, 220 ; 동력전환수단,210; Drive motor, 220; Power conversion means,

230 ; 지지구조체, 240 ; 도금액 순환플레이트,230; Support structure, 240; Plating liquid circulation plate,

240a ; 연통홈, 241 ; 안내날개.240a; Communication grooves, 241; Guide wings.

상기와 같은 목적을 달성하기 위한 본 고안은, 구동모터와, 구동모터의 회전력을 직선 왕복운동으로 전환하는 동력전환수단, 동력전환수단에 의해 상하 방향으로 직선 왕복이동되는 지지구조체 및, 소정 각으로 경사진 안내날개들에 의해 형성되어진 다수의 연통홈을 갖추고 지지구조체에 고정되어서 도금조에 채워진 도금액을 강제적으로 순환시키는 도금액 순환플레이트로 이루어진 것을 특징으로 하는 구조로 되어 있다.The present invention for achieving the above object, the drive motor, the power switching means for converting the rotational force of the drive motor into a linear reciprocating motion, the support structure for linear reciprocating in the vertical direction by the power switching means, and at a predetermined angle A plurality of communication grooves formed by the inclined guide wings are fixed to the support structure to form a structure consisting of a plating liquid circulation plate for forcibly circulating the plating liquid filled in the plating bath.

이하 본 고안을 첨부된 예시도면에 의거하여 상세히 설명한다.Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

도 2는 본 고안에 따른 도금액 순환장치를 개략적으로 도시한 도면인 바, 종래 기술을 도시한 도 1과 동일한 부위에는 동일한 참조부호를 붙이면서 그 설명을 생략한다.2 is a view schematically showing a plating liquid circulating device according to the present invention, and the description thereof will be omitted while attaching the same reference numerals to the same parts as in FIG.

도 1에 의하면, 본 고안에 따른 도금액 순환장치(200)는, 구동모터(210)와, 구동모터(210)의 회전력을 직선 왕복운동으로 전환하는 동력전환수단(220), 동력전환수단(220)에 의해 상하 방향으로 직선 왕복이동되는 지지구조체(230) 및, 소정 각으로 경사진 안내날개(241)들에 의해 형성되어진 다수의 연통홈(240a)을 갖추고 지지구조체(230)에 고정되어서 도금조(100)에 채워진 도금액(A)을 강제적으로 순환시키는 도금액 순환플레이트(240)로 이루어진 구조로 되어 있다.According to Figure 1, the plating liquid circulating device 200 according to the present invention, the drive motor 210, the power switching means 220 for converting the rotational force of the drive motor 210 to linear reciprocating motion, power switching means 220 The support structure 230 which is linearly reciprocated in the vertical direction by the < RTI ID = 0.0 >), < / RTI > The plating liquid circulation plate 240 for forcibly circulating the plating liquid A filled in the tank 100 is configured.

상기 도금액 순환플레이트(240)는, 도금물(B)의 양쪽에 채워진 도금액(A)을 각각 적절하게 순환시킬 수 있도록, 도금조(100)에 잠겨지는 도금물(B)의 양쪽에 한 쌍의 도금액 순환플레이트(240)가 각각 대향되게 배치되도록 하는 것이 바람직하다.The plating solution circulation plate 240 has a pair of both sides of the plating material B immersed in the plating bath 100 so as to properly circulate the plating solution A filled on both sides of the plating material B, respectively. Preferably, the plating liquid circulation plates 240 are disposed to face each other.

상기 지지구조체(230)는, 도금액 순환플레이트(240)을 지지할 수 있는 공지의 모든 구조체들이 적용가능하다.The supporting structure 230 is applicable to all known structures capable of supporting the plating liquid circulation plate 240.

상기 동력전환수단(220)은, 회전력을 직선 왕복이동시킬 수 있는 공지의 모든 동력전환수단이 적용될 수 있지만, 캠 등의 편심체를 이용하는 것이 비용과 작동 구조면에서 적절하다고 할 수 있다.The power switching means 220 may be any known power switching means capable of linear reciprocating rotational force, but it can be said that it is appropriate in terms of cost and operating structure to use an eccentric body such as a cam.

상기 구동모터(210)로는 회전력을 발생시키는 공지의 모든 것들이 적용될 수 있다.As the driving motor 210, all known ones for generating a rotation force may be applied.

도 2에 도시된 본 고안에 따른 도금액 순환장치의 작동상태를 설명해 보면, 구동모터(210)가 구동되면 동력전환수단(220)에 의해 지지구조체(230)가 상하방향으로 반복적으로 직선 왕복이동되므로, 지지구조체(230)에 고정된 도금액 순환플레이트(240)가 도금조(100)의 도금액(A)에 잠겨진 상태를 유지하면서 상하방향으로 반복적으로 직선 왕복이동된다. 이와 같이, 도금액 순환플레이트(240)가 상하 왕복이동되면, 도금액(A)이 경사진 안내날개(241)에 의해서 연통홈(240a)으로 유도되므로, 도금액 순환플레이트(240) 주변의 도금액(A)들이 강제적으로 빠르게 순환되면서 뒤섞이게 된다. 따라서, 도금물(B) 표면의 도금편차가 종래에 비해서 크게 감소된다.Referring to the operation state of the plating solution circulator according to the present invention shown in Figure 2, when the drive motor 210 is driven, the support structure 230 is linearly reciprocated repeatedly in the vertical direction by the power switching means 220 The plating liquid circulation plate 240 fixed to the support structure 230 is repeatedly linearly reciprocated in the vertical direction while maintaining the state locked in the plating liquid A of the plating bath 100. As described above, when the plating liquid circulating plate 240 is vertically reciprocated, the plating liquid A is guided to the communication groove 240a by the inclined guide vane 241, and thus the plating liquid A around the plating liquid circulating plate 240. Are forced to circulate rapidly and mixed up. Therefore, the plating deviation of the surface of the plating material B is greatly reduced as compared with the prior art.

또한, 상기 도금액 순환플레이트(240)를 이용하면, 도금액(A)의 순환이 한쪽 방향으로만 순환되지 않게 되므로, 도금물(B)의 기포 부착율이 감소된다.In addition, when the plating liquid circulation plate 240 is used, since the circulation of the plating liquid A is not circulated only in one direction, the bubble adhesion rate of the plating material B is reduced.

이상 상기한 바와 같은 본 고안에 따르면, 구동모터와 동력전환수단 및 지지구조체에 상호 연동가능하게 연결되어진 도금액 순환플레이트에 의해서 도금조에 채워진 도금액의 순환이 균일하면서 빠르게 수행되므로, 도금물 표면의 도금편차가 감소되어 제품의 신뢰성과 상품성이 향상되는 효과가 있다.According to the present invention as described above, since the circulation of the plating liquid filled in the plating bath is carried out uniformly and quickly by the plating liquid circulation plate which is connected to the drive motor, the power switching means and the support structure to be interlocked with each other, the plating deviation of the plating surface Is reduced to improve the reliability and marketability of the product.

또한, 도금물의 기포 부착율이 감소되므로, 기포에 의한 제품불량이 감소되는 효과가 있다.In addition, since the bubble adhesion rate of the plating material is reduced, there is an effect that the product defects due to bubbles are reduced.

본 고안은 상기한 실시예에 한정되지 않고, 이하의 청구범위를 벗어나지 않는 한도내에서, 보다 다양하게 변형 실시될 수 있음은 물론이다.The present invention is not limited to the above embodiments, and may be modified in various ways within the scope of the following claims.

Claims (1)

구동모터(210)와, 구동모터(210)의 회전력을 직선 왕복운동으로 전환하는 동력전환수단(220), 동력전환수단(220)에 의해 상하 방향으로 직선 왕복이동되는 지지구조체(230) 및, 소정 각으로 경사진 안내날개(241)들에 의해 형성되어진 다수의 연통홈(240a)을 갖추고 지지구조체(230)에 고정되어서 도금조(100)에 채워진 도금액(A)을 강제적으로 순환시키는 도금액 순환플레이트(240)로 이루어진 것을 특징으로 하는 도금액 순환장치.A driving structure 210 and a support structure 230 linearly reciprocating in the vertical direction by the power switching means 220 for converting the rotational force of the driving motor 210 into a linear reciprocating motion, the power switching means 220, and Plating solution circulation to forcibly circulate the plating solution A filled in the plating bath 100 with a plurality of communication grooves 240a formed by guide vanes 241 inclined at a predetermined angle and fixed to the support structure 230. Plating liquid circulation device, characterized in that consisting of a plate (240).
KR2020000019570U 2000-07-08 2000-07-08 Circulating equipment for a plating solution KR200205579Y1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020099947A1 (en) * 2018-08-22 2020-05-22 盛青永致半导体设备(苏州)有限公司 Electroplating device and electroplating method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020099947A1 (en) * 2018-08-22 2020-05-22 盛青永致半导体设备(苏州)有限公司 Electroplating device and electroplating method

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