KR20020091453A - Method for manufacturing liquid crystal display device utilizing spin coating - Google Patents

Abstract

PURPOSE: A method for fabricating a liquid crystal display device by using spin coating is provided to simplify the control of an alignment film thickness by controlling an amount of an alignment film solution and obtain the alignment film with a uniform thickness without any change according to the time or production amount. CONSTITUTION: A method for fabricating a liquid crystal display device by using spin coating includes the steps of forming a barrier(12) for an alignment film solution(18) on an array or color filter substrate(10), dropping the alignment film solution via at least one nozzle on to an active area(14) of the substrate, rotating the substrate on which the alignment film solution is dropped by using a rotating unit, and implanting liquid crystal between the substrates.

Description

Manufacturing method of liquid crystal display using spin coating {METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY DEVICE UTILIZING SPIN COATING}

The present invention relates to a method of manufacturing a liquid crystal display device using spin coating, and more particularly, to form an alignment layer on a substrate on which a barrier is formed by spin coating, and to maintain a constant thickness of the alignment layer by spin coating after a drop sealing process. The present invention relates to a method for manufacturing a liquid crystal display device using spin coating capable of uniform liquid crystal injection.

In general, a liquid crystal display device includes a liquid crystal inserted between two glass substrates and a polarizing plate attached to an outer surface of the substrate, and operates the liquid crystal according to an electrical signal input to an electrode located between the two substrates. By adjusting the polarization direction of the light through the polarizing plate it is possible to control the passage and blocking of light.

Conventionally, in manufacturing such a liquid crystal display device, an alignment layer is formed inside two substrates, and the liquid crystal cells are filled with liquid crystals and the liquid crystal inlet is sealed with an end sealant. Complete

Here, the alignment film uses a material having high anchoring energy, such as polyimide, as an important component for aligning the liquid crystal filled between the two substrates in a constant direction.

In the manufacturing method of the liquid crystal display device using the spin coating according to the prior art, the alignment film forming process is the offset (SET) printing method using a transfer plate, as shown in Figure 1, when the substrate 1 is inserted into the surface Is attached to the transfer plate 3, the printing roller 5 is rotated in the same direction as the traveling direction (straight arrow) of the substrate 1, and the alignment film is transferred in the opposite direction to the traveling direction of the substrate 1. The roller 11 rotates so that the alignment film liquid 9 discharged from the nozzle 11 is printed on the substrate 1.

Next, a PRE-CURE step of removing the solvent component from the alignment film printed on the substrate 1 and a MAIN CURE step of removing the residual solvent component to cure the alignment film curing. After passing through the alignment layer is completed.

In addition, in the manufacturing method of the liquid crystal display device using the spin coating according to the prior art, the liquid crystal injection process is to inject the liquid crystal between the two substrates using a capillary phenomenon and the pressure difference, this injection method is a vacuum exhaust device A vacuum chamber, a predetermined moving device, a liquid crystal tray and a gas injector are required.

2 is a cross-sectional view showing a so-called vacuum injection method which is a liquid crystal injection method of a conventional liquid crystal display device.

In the conventional vacuum injection method, as shown in FIG. 2A, first, the inside of the chamber 100 is maintained in a vacuum state through a vacuum exhaust (dashed arrow). Subsequently, as shown in FIG. 2B, the liquid crystal injection hole 150 is formed by using a predetermined moving device (not shown) in the state in which the chamber 100 is sealed with the sealing member 170. Contact or deposit on the surface of the liquid crystal 130 contained in 120. Then, as shown in (c) of FIG. 2, the liquid crystal 130 is injected into the cell 110 by capillary action. Subsequently, as shown in (d) of FIG. 2, when a gas such as nitrogen is gradually injected into the vacuum chamber 100, a pressure difference occurs in the cell 110 and the chamber 100, and the liquid crystal 130 is a cell. (110) Fill the empty space inside.

The vacuum injection method as described above has the disadvantage that the injection process time is very long (about 16 hours or more), the process equipment and the cost is very high. Moreover, as the manufacturing technology of liquid crystal display devices is developed, the necessity of injecting low cell gap, vertical alignment, high viscosity liquid crystal, etc. into a larger area panel has risen, resulting in a remarkable prolongation of liquid crystal injection time and mass production. There was a problem.

Accordingly, in order to solve the above problems, a liquid crystal injection method called one-drop filling has been proposed as Korean Patent Application No. 10-1997-004884.

3 is a process-specific diagram showing a conventional one-drop filling method.

In the conventional one-drop peeling method, first, as shown in FIG. 3A, the sealant 220 is applied to the color filter substrate 200 along a seal line (not shown), and then dried. Thereafter, as shown in FIG. 3B, the liquid crystal 260 is rotated through the liquid crystal supply nozzle 240 while rotating the color filter substrate 200 in a chamber (not shown). Drop on the surface of Then, as shown in FIG. 3C, the liquid crystal 260 is dispersed on the color filter substrate 200 under centrifugal force. Finally, as shown in FIG. 3D, when the color filter substrate 200 and the thin film transistor substrate 280 are bonded together, a liquid crystal layer (not shown) is formed between the substrates 200 and 280. It is formed.

However, the manufacturing method of the liquid crystal display device using the spin coating according to the prior art as described above has the following problems.

First, in the alignment film forming step according to the prior art, first, the thickness change of the alignment film in mass production is large. That is, when the transfer plate and the alignment film transfer roller are aged, it is difficult to control the alignment film thickness in the process, and thus it is difficult to keep the alignment film thickness constant. Secondly, since the alignment film is formed by moving from the alignment film transfer roller to the transfer plate and back from the transfer plate to the substrate, expensive equipment necessary for the alignment film forming process is required, and the process step is increased, so that the cause of the alignment film failure increases. Third, as the liquid crystal display device becomes larger and more detailed, printing errors increase when the original plate is printed by the transfer plate method. Fourth, since the thickness of the alignment film in the transfer plate method is largely dependent on the viscosity of the alignment film liquid or the concentration of solids, there are problems in that it is sensitive to process conditions.

In addition, the one-drop peeling method according to the prior art has a lot of constraints on the sealant condition, and there is a problem in the adhesive strength of the sealant when the liquid crystal is buried before the sealant. In other words, as shown in FIG. 4A, when the substrates 200 and 280 are bonded, the liquid crystal 260 cannot be controlled to spread out toward the sealant so that the width of the sealant 220 is uniformly adjusted. It cannot be formed. Here, since the liquid crystal 260 is not peeling (FILLING) is not expected, this is an expected effect, but it is very difficult to prevent the liquid crystal 260 from reaching the sealant 220 until the sealant 220 is cured. . As described above, since the bonding of the substrate and the liquid crystal injection occur at the same time, the sealant and the liquid crystal coexist on the substrate, thereby causing a problem in the process.

In addition, the conventional one-drop filling method has a problem that it is difficult to uniformly inject the liquid crystal only by pressing as shown in FIG. The cell gap, which is the thickness of the liquid crystal layer, is in the unit of several μm. However, when the liquid crystal 260 is dropped, the liquid crystal 260 aggregates to a thickness of several tens to hundreds of micrometers and gradually spreads and becomes thin. Therefore, when the dispersion of the liquid crystal 260 proceeds simultaneously with the bonding process of the substrates 200 and 280, the negative effect on the bonding process There is a problem that will give.

Accordingly, a method of manufacturing a liquid crystal display device using spin coating according to the present invention is devised to solve the problems of the prior art, and an object of the present invention is to maintain an alignment layer thickness by forming an alignment layer on a substrate on which a barrier is formed by spin coating. The present invention provides a method of manufacturing a liquid crystal display device using spin coating, which can simplify the process and enables uniform liquid crystal injection through a spin process after the liquid drop sealing process.

1 is a perspective view illustrating a method of manufacturing a liquid crystal display using spin coating according to the prior art.

Figure 2 is a cross-sectional view for each process showing a vacuum injection method according to the prior art.

Figure 3 is a process-specific perspective view showing a one-drop filling method according to the prior art.

4 is a cross-sectional view of a liquid crystal cell by a one-drop filling method according to the prior art.

5 illustrates formation of an alignment film liquid barrier in a liquid crystal display according to the present invention.

6 is a view showing the drop of the alignment film liquid of the liquid crystal display according to the present invention.

7 is a view showing an alignment film liquid drop method of the liquid crystal display device according to the present invention.

8 is a view showing a substrate rotation of the liquid crystal display according to the present invention.

9 illustrates formation of an alignment layer of a liquid crystal display according to the present invention.

10 shows the rotation of the substrate by the rotating arm.

11 is a perspective view showing the rotation of the substrate by the rotating table.

12 is a perspective view showing a swivel with a built-in heating wire;

13 is a perspective view showing a liquid crystal injection method of the liquid crystal display device according to the present invention.

14 shows a rotating device with a rotating arm according to the invention.

15 is a perspective view showing a rotating device having a swivel according to the present invention.

Figure 16 is a cross-sectional view showing a substrate bonding, hot press and a sealant curing process according to the present invention.

17 is a cross-sectional view showing a liquid crystal dispersion process according to the present invention.

18 is a cross-sectional view illustrating an isotropic process according to the present invention.

19 is a cross-sectional view showing a liquid crystal display device according to the present invention.

20 is a perspective view showing a squeeze type liquid crystal injection method of the liquid crystal display device according to the present invention.

Explanation of symbols on the main parts of the drawings

10; Substrate 12; Alignment film liquid barrier

14; Active area 16; Nozzle

16a; Cylindrical nozzle 16b; Blade type nozzle

18; Alignment film solution 20; Swivel arm

22; Swivel 24; thermic rays

A method of manufacturing a liquid crystal display device using spin coating to achieve the above object includes forming an alignment film liquid barrier on an arbitrary substrate selected from an array substrate or a color filter substrate, and at least one or more within an active region on the substrate. Dropping the alignment film liquid through a nozzle; rotating the substrate on which the alignment film liquid is dropped by using a rotating apparatus; and injecting a liquid crystal between the array substrate and the color filter substrate. .

Hereinafter, a method of manufacturing a liquid crystal display device using spin coating according to the present invention will be described in detail with reference to the accompanying drawings.

5 is a view showing the formation of the alignment film liquid barrier of the liquid crystal display according to the present invention, FIG. 6 is a view showing the drop of the alignment film liquid of the liquid crystal display according to the present invention, and FIG. 7 is a liquid crystal display according to the present invention. 8 is a view illustrating a substrate rotation method of the liquid crystal display device according to the present invention, and FIG. 9 is a view showing the formation of the alignment film of the liquid crystal display device according to the present invention. 10 is a view showing the rotation of the substrate by the rotary arm, Figure 11 is a perspective view showing the rotation of the substrate by the swivel, Figure 12 is a perspective view showing a swivel with a heating wire.

13 is a perspective view illustrating a liquid crystal injection method of a liquid crystal display device according to the present invention, FIG. 14 is a view showing a rotating device having a rotating arm according to the present invention, and FIG. 15 is provided with a rotating table according to the present invention. 16 is a sectional view showing a substrate bonding, a hot press and a sealant curing process according to the present invention, FIG. 17 is a sectional view showing a liquid crystal dispersion process according to the present invention, and FIG. 19 is a cross-sectional view illustrating an isotropic process, and FIG. 19 is a cross-sectional view illustrating a liquid crystal display device according to the present invention, and FIG. 20 is a perspective view illustrating a squeeze type liquid crystal injection method of the liquid crystal display device according to the present invention.

In the method of manufacturing the liquid crystal display device using the spin coating according to the present invention, the alignment film forming process is first performed as shown in FIG. 5A to define the alignment layer 14 on the substrate 10. A liquid barrier 12 (BARRIER) is formed. The substrate 10 may be an array substrate or a color filter substrate. In addition, the substrate 10 may be a single plate having only one active region 14, or may be a multi-plate having a plurality of the active regions 14.

The alignment layer should be formed only in the active region 14 of the substrate 10. In contrast, if the alignment layer is formed outside the active region 14, the sealant is formed on the alignment layer during the subsequent sealing process. It is also formed in the resin can significantly reduce the adhesive strength of the sealant may be a cause of weakening the reliability of the liquid crystal display device. Accordingly, the alignment layer barrier 12 may be trapped so that the dropped alignment layer liquid is not applied to the outside of the active region 14, so that the alignment layer barrier 12 may be applied only to the desired region, that is, the active region 14. It plays a role. In addition, the alignment layer liquid barrier 14 also serves to prevent orientation defects in the parallel alignment cell CELL.

5B is a cross-sectional view of any one of the active regions 14 shown in FIG. 2A taken along line II-II, and is formed inside the alignment film liquid barrier 12. Components are omitted.

Here, when the substrate 10 is an array substrate, the alignment layer liquid barrier 12 may be formed from a gate, an insulating film, a data line, an active layer, or a composite layer pattern on the array substrate, and thus may be formed without any additional process. In addition, the alignment layer liquid barrier 12 on the array substrate may be independently converted into a common line or a repair line.

In addition, when the substrate 10 is a color filter substrate, the alignment layer liquid barrier 12 may be formed from a black matrix or a dummy pixel portion pattern on the color filter substrate, and the alignment layer repair on the color filter substrate may be performed. 12 may be independently converted into a dummy pixel portion pattern.

Subsequently, as illustrated in FIG. 6A, the thickness and area of the alignment layer are formed on the substrate 10 on which the alignment layer liquid barrier 12 is formed through at least one nozzle 16 into the active region 14. The alignment film liquid 18 is dropped (DROP) by the amount calculated as. FIG. 6B is a cross-sectional view taken along the line III-III of FIG. 6A and is not uniformly applied into the active region 14 of the substrate 10. On the other hand, the alignment layer liquid 18 may be lowered to the center of the substrate 10 instead of the center of the active region 14 in consideration of the rotation during the subsequent process.

On the other hand, in lowering the alignment film liquid into the active region on the substrate by the nozzle, as shown in Fig. 7A, the alignment film on the substrate 10 is provided with a nozzle 16a having a thin cylindrical shape. The alignment film liquid 18 is dropped in a dot-dot (DOT) manner into the active region 14 defined by the liquid barrier 12, or as shown in FIG. 7B, the blade-shaped nozzle 16b As a result, the alignment layer liquid 18 can be dropped in a linear or planar manner into the active region 14 defined by the alignment layer liquid barrier 12 on the substrate 10.

Then, as shown in FIG. 8A, when the substrate 10 is rotated, the alignment film liquid 18 is evenly dispersed in the active region 14 by centrifugal force. This is illustrated in FIG. 8B, which shows a plane cut along the line V-V of FIG. 8A. At this time, the arrow shown in the drawing indicates the dispersion direction of the alignment film liquid 18.

Subsequently, when the substrate 10 is rotated by appropriately adjusting the rotational speed and the parallelism of the substrate 10 so that the alignment film liquid 18 can be more dispersed, as shown in FIG. The alignment film liquid 18 is evenly distributed in the active region 14, and as shown in FIG. 9B, the alignment film liquid 18 is uniform in the active region 14 defined by the alignment film liquid barrier 12 on the substrate 10. An alignment film 18 having a thickness is formed. 9B is a cross section taken along the line VI-VI shown in FIG. 9A.

Here, the substrate 10 is rotated by a predetermined rotating device, as shown in FIG. 10, a rotating arm 70 (ARM) is provided on the outer surface of the rotating device (not shown) to provide the substrate 10. Is rotated in close contact with the rotating arm 70, or as shown in Figure 11, by attaching a swivel 80 to a rotating device (not shown), the substrate 10 on the swivel 80 Can be attached and rotated.

On the other hand, as shown in Figure 12, if the hot wire 82 is embedded in the swivel 80, the alignment film can be cured immediately after applying the alignment film on the substrate on the swivel 80.

In addition, in the method of manufacturing a liquid crystal display device using the spin coating method according to the present invention, the liquid crystal injection method first prepares an array substrate and a color filter substrate in a vacuum chamber as a first step, and the vacuum chamber has a vacuum degree of 0 to. It is preferable that it is 1.0x10 <^-3> Torr. On the other hand, there must be an assembly (ASSEMBLY) device that can bond the two substrates in the vacuum chamber.

Next, as shown in FIG. 13A, the liquid crystal 1100 is dropped by using the liquid crystal injection apparatus 2000 on the substrate 1000 in the vacuum chamber (not shown) as a second step. In parallel, the sealant 1200 (SEALANT) is coated using the sealant coating device 2100. In this case, as shown in FIGS. 13B and 13C, the liquid crystal 1100 is formed on the arbitrary substrate 1000 among the array substrate and the color filter substrate by using the liquid crystal injection apparatus 2000. The drop is injected, and the sealant 1200 is coated on the other substrate 1020 using the sealant coating device 2100. That is, the liquid crystal 1100 and the silent 1200 may be formed on the same substrate 1000 as shown in FIG. 13A, or different substrates 1000 as shown in FIGS. 4B and 4C, respectively. It may be formed on the (1020).

Next, as a third step, the two substrates 1000 and 1020 are bonded to each other and the sealant 1200 is cured. At this time, the third step is a hot press step of maintaining a constant cell gap (CELL GAP) between the two substrates while sufficiently hardening the sealant in the bonded substrate to enhance adhesion. Here, curing sufficiently means that the sealant has a hardness such that the bonding accuracy of the substrate does not shake during rotation of the bonded substrate, which is performed to disperse the liquid crystal. At this time, as described above, if a heating device is attached as described later, or using a rotating table to which the heating device and the cooling device are attached, the bonding step of the substrate and the hot press step may be performed in parallel with the rotation target. Can be.

Next, as shown in FIGS. 14A and 14B, as a fourth step, the bonded substrates 1000 and 1020 may be replaced by a rotating device 2220 having a rotating arm 2200 attached thereto. Rotate the bonded substrates 1000 and 1020 by using. Here, the rotating device 2220 rotates the rotating arm 2200 so that the liquid crystal 1100 present in the bonded substrates 1000 and 1020 are evenly distributed in the substrates 1000 and 1020. In charge of. At this time, the arrow indicates the rotation direction.

Meanwhile, instead of the rotating arm 2000, as shown in FIG. 15, the bonded substrates 1000 and 1020 may be rotated using the rotating table 2300. In this case, although not shown in FIG. 15, a heating device, or a heating device and a cooling device may be provided in the rotating table 2300.

As described above, the step of dispersing the liquid crystal 1100 existing therein by rotating the bonded substrates 1000 and 1020 by using the temperature-controlled swivel table 2300, greatly varies in viscosity depending on temperature. The physical properties of the liquid crystal are used to control the dispersion of the liquid crystal in time and space.

The control of the liquid crystal dispersion by the temperature control, as shown in Figure 16, the heating device (not shown) and the cooling device (not shown) provided in the rotating table 2300, any particular region 2320 is heated and other The specific region 2340 may be cooled to prevent the liquid crystal 1100 from reaching the sealant 1200 before the sealant 1200 sufficiently cures. That is, reference numeral 2320 denotes a heating portion to apply heat only to the sealant 1200, and reference numeral 2340 holds the liquid crystal 1100 dropped as a cooling portion to hold the liquid crystal 1100 to the sealant. Dispersed toward 1200 to prevent contact. Here, it has already been described above that the process of bonding the substrates together using the pressing machine 2400 can be performed in parallel.

Next, as shown in FIG. 17, after the sealant 1200 is cured to have sufficient adhesive strength, the liquid crystal 1100 held by rotating the turntable 2300 is the substrate 1000 ( 1020 may be evenly distributed throughout, and in parallel, the viscosity of the liquid crystal is lowered by the extended heating portion 2300 to more easily disperse the liquid crystal 1100. As described above, the liquid crystal 1100 is dropped, the bonding of the substrates 1000 and 1020, the curing of the sealant 1200, and the rotation of the bonded substrates 1000 and 1020 are performed in parallel with the liquid crystal by temperature control ( By the dispersion of the 1100, the liquid crystal 1100 is evenly dispersed evenly throughout the entire surface of the substrate.

In this case, as shown in FIG. 18A, the disordered liquid crystal 1100 in the substrates 1000 and 1020 is subjected to reorientation heat treatment, as shown in FIG. 18B. An ISOTROPIC process for improving the orientation order of (1100) can also be performed.

In all of the above processes, as shown in FIG. 19, a panel in which the liquid crystal 1100 is evenly distributed on the entire surface of the substrate is completed.

Meanwhile, in order to more effectively perform the dispersion of the liquid crystal, as shown in FIG. 20, the liquid crystal 1100 is squeezed using a liquid crystal injection device 2500 in a thin area on a large area on the substrate 1000 by a squeezing method. Can be dropped. Then, the liquid crystal 1100 can be effectively dispersed from the beginning, and in this case, it is possible to effectively control the dispersion of the liquid crystal 1100 according to the temperature change of each region in the substrate 1000.

Various embodiments can be easily implemented as well as self-explanatory to those skilled in the art without departing from the principles and spirit of the present invention. Accordingly, the claims appended hereto are not limited to those already described above, and the following claims are intended to cover all of the novel and patented matters inherent in the invention, and are also common in the art to which the invention pertains. Includes all features that are processed evenly by the knowledgeable.

As described above, the manufacturing method of the liquid crystal display device using the spin coating according to the present invention has the following effects.

First, expensive equipment such as transfer plate or alignment film transfer roller is unnecessary and the process is simple.

Second, it is easy to adjust the thickness of the alignment film because only the amount of alignment film liquid to be applied according to the desired thickness to be adjusted.

Third, there is no change in thickness of the alignment film with time or mass production.

Fourth, since there is no waste of the alignment film liquid, the production cost can be reduced, and the treatment cost of the toxic alignment film liquid is not additionally added.

Fifth, the process is simple because it is not necessary to consider the error due to the elasticity of the transfer plate.

Sixth, since it can be performed in parallel with the alignment film forming step and the alignment film curing step, it can also bring about a synergistic effect that can simplify or reduce the process.

Seventh, by dropping the liquid crystal on the substrate, seal curing, and then rotating the bonded substrate it is possible to quickly and evenly disperse the liquid crystal throughout the substrate, and also to serve as an isotropic process after the liquid crystal injection process.

Therefore, according to the present invention, expensive equipment is unnecessary and the process is simplified, the thickness of the alignment film can be easily adjusted, and the alignment film forming process can be performed in parallel with the alignment film curing process, evenly dispersing the liquid crystal, temporal and spatial control of the liquid crystal dispersion, ensuring productivity, Elimination of constraints due to liquid crystal injection and substrate bonding, process time reduction and manufacturing cost reduction due to the reduction of the manufacturing process steps of the liquid crystal display device can be obtained.

Claims (20)

Forming an alignment film liquid barrier on any substrate selected from an array substrate or a color filter substrate, dropping the alignment film liquid through at least one nozzle in an active region on the substrate, and dropping the alignment film liquid onto the substrate. Rotating the light using a rotating device, and injecting a liquid crystal between the array substrate and the color filter substrate. The method of claim 1, And the alignment film liquid barrier on the array substrate is formed from a gate, an insulating film, a data line, an active layer, a protective film, or a composite layer pattern on the array substrate. The method of claim 2, And the alignment layer liquid barrier on the array substrate can be independently converted into a repair line or a common line. The method of claim 1, And the alignment film liquid barrier on the color filter substrate is formed from a black matrix or dummy pixel portion pattern on the color filter substrate. The method of claim 4, wherein And the alignment layer liquid barrier on the color filter substrate can be independently converted into a dummy pixel portion pattern. The method of claim 1, And the alignment layer liquid barrier is formed so that the substrate is divided into one active region or more active regions. The method of claim 1, And the nozzles drop the alignment film liquid in the dot form in the active region on the substrate or in the form of a linear or planar blade. The method of claim 1, And the rotating device has a rotating arm on its outer surface. The method of claim 1, The rotating device is a manufacturing method of a liquid crystal display using a spin coating, characterized in that provided with a rotating table. The method of claim 9, The rotating table is a manufacturing method of a liquid crystal display using spin coating, characterized in that the heating wire is built-in. The method of claim 1, Injecting the liquid crystal between the array substrate and the color filter substrate, the first step of preparing the array substrate and the color filter substrate in a vacuum chamber; Injecting a liquid crystal onto any one of the substrates and applying a sealant, or injecting a liquid crystal onto the arbitrary substrate and applying a sealant to another substrate; A third step of curing the sealant after bonding the arbitrary substrate with another substrate; And rotating the bonded arbitrary substrates and the other substrate by a rotating device to disperse the liquid crystal between the arbitrary substrates and the other substrates. Way. The method of claim 11, And a degree of vacuum in the vacuum chamber is 0 to 10 ^-3 Torr. The method of claim 11, And the rotating device has a rotating arm on its outer surface. The method of claim 11, The rotating device is a manufacturing method of a liquid crystal display using a spin coating, characterized in that provided with a rotating table. The method of claim 14, The rotating table has a temperature control device, characterized in that the manufacturing method of the liquid crystal display using spin coating. The method of claim 11, And the third and fourth steps are performed in parallel on the object to be rotated. The method of claim 11, And the third and fourth steps are performed in parallel on a rotation target provided with the temperature control device. The method of claim 11, The fourth step is a method of manufacturing a liquid crystal display device using a spin coating, characterized in that further comprising the step of rearrangement heat treatment of the liquid crystal. The method of claim 11, The fourth step is a manufacturing method of a liquid crystal display using a spin coating, characterized in that further comprising the step of rearrangement heat treatment of the liquid crystal in the rotation target having the temperature control device. The method of claim 11, And the liquid crystal is applied on the arbitrary substrates in a point, linear or plane form.