KR20020078804A - Atmosphere pressure plasma generator - Google Patents

Abstract

PURPOSE: An apparatus for generating plasma of atmospheric pressure is provided to perform a plasma treatment on a target with a large area, by having electrodes to form a U-typed discharge region and by including a plasma discharge hole of a predetermined length along the electrodes. CONSTITUTION: Different discharge voltages are applied to the first and second electrodes(40,42). The first and second electrodes are insulated from each other by an insulator. A source gas introducing hole for introducing plasma source gas into a gap between the first and second electrodes is formed. A plasma discharge hole(50) for discharging plasma is formed. The discharge area(48) of the first and second electrodes is of a U-type. The plasma discharge hole is of a predetermined length.

Description

Atmospheric pressure plasma generator

The present invention relates to a plasma generator, and more particularly, to an atmospheric pressure plasma generator.

Plasma is a gas in an ionized state. Unlike a hot gas made up of electrically neutral atoms, plasma has a mixture of oppositely charged particles: electrons and an atomic nucleus. Therefore, the plasma is neutral in general, but locally the electric field by the charge separation between the ions and electrons, the current and magnetic field due to the flow of the charge is generated.

Such plasma may be classified into low temperature or high temperature plasma according to the temperature at the time of formation, and low pressure (several mmTorr to the number Torr) or normal pressure (˜760torr) plasma depending on the pressure at the time of formation.

Among these, the atmospheric pressure plasma is formed at atmospheric pressure, and thus, there is an advantage that a high-cost vacuum system is not required as in the case of forming the low pressure plasma.

Despite these advantages, the atmospheric pressure plasma is difficult to be large in area because it is formed between the electrodes with narrow spacing, and therefore the application object is limited to the object having a small area.

Accordingly, an object of the present invention is to improve the above-described problems of the related art, and to provide an atmospheric pressure plasma generator capable of effectively plasma processing an object having a large area.

Another object of the present invention is to provide a plasma processing method using the atmospheric pressure plasma generator.

1 is a side view of an atmospheric pressure plasma generator according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view of FIG. 1 taken along the 2-2 'direction.

3 is a plan view of the atmospheric pressure plasma generator shown in FIG. 1.

4 is a bottom view of the atmospheric pressure plasma generator shown in FIG. 1.

5 is a cross-sectional view of an electrode part different from the first embodiment in the atmospheric pressure plasma generator according to the second embodiment of the present invention.

6 is a side view of an atmospheric pressure plasma generator according to a third embodiment of the present invention.

7 is a plan view of an atmospheric pressure plasma generator according to a fourth embodiment of the present invention.

FIG. 8 is a cross-sectional view of FIG. 7 taken in the 8-8 'direction.

9 and 10 are diagrams illustrating a plasma processing method according to the first and second embodiments of the present invention, respectively.

* Description of Signs of Major Parts of Drawings *

40: first electrode 42, 52: second electrode

44: insulating sealing cap 46, 54, 56: second electrode support

48: discharge area 50: plasma discharge port

60: atmospheric pressure plasma generator 62: plasma treatment object

70: gas inlet 72: gas supply pipe

74: spray nozzles 76, 78: first and second electrodes

80: injection means 82, 84: first and second connection portion

88: mounting base 90: insulation plate

92, 94: first and second electrode cover 96, 98: first and second fixing means

In order to achieve the above technical problem, the present invention provides a plasma source between the first and second electrodes to which different discharge voltages are applied, an insulator for insulating the first and second electrodes, and the first and second electrodes. Source gas inlet provided for introducing a gas, and a plasma discharge port for plasma discharge,

The first and second electrodes are provided such that the discharge region is in the shape of a citron (U), and the plasma discharge port has a predetermined length.

In this case, the first electrode is provided in a form of enclosing the second electrode in the shape of a citron (U) with the discharge region therebetween.

The plasma discharge port is formed at the bottom of the first electrode facing the downward peak portion of the second electrode.

The plasma source gas inlet is provided on the side of the first electrode.

The second electrode is composed of a plurality of electrodes, and each electrode is connected to a support penetrating the insulation.

In addition, the present invention, in order to achieve the above technical problem, the first and second electrodes provided up and down with an insulating plate therebetween, the first and second electrode cover for covering the first and second electrodes, and First and second fixing means for connecting the first and second electrodes to an external power source while fixing the first and second electrodes to the first and second electrode covers, respectively, and a block including the elements. A support for supporting, a gas inlet provided on a surface with the first fixing means, a gas supply pipe connected directly below the gas inlet, and a direction perpendicular to the gas supply pipe, one end of which is provided in the gas supply pipe; It is connected to the other end, characterized in that the injection means provided so that the gas injected through the gas inlet is injected through the first electrode on the insulating plate corresponding to the second electrode It provides a plasma generator.

Here, the injection means is a nozzle block composed of a plurality of injection nozzles provided side by side.

The gas supply pipe is provided to be connected to one end of the plurality of injection nozzles.

Connections to both ends of the gas supply pipe may be connected to a second atmospheric pressure plasma generator including the above components.

The first and second electrodes are plate-shaped electrodes and line-shaped electrodes each having a length corresponding to the injection nozzle block and provided in parallel with the gas supply pipe.

In order to achieve the above technical problem, the present invention is the first and second electrodes to which different discharge voltage is applied; An insulator for insulating the first and second electrodes; A plasma source gas inlet for introducing a plasma source gas between the first and second electrodes; And a discharge port for plasma emission, wherein the first and second electrodes are provided such that a U-type discharge region is formed therebetween, wherein the plasma processing method comprises: Loading a plasma treatment object under the generator; And plasma processing the object while moving the plasma generator from one end to the other end of the plasma processing object.

In this process, the object is plasma-processed while moving the plasma generator up and down according to the curvature of the plasma-processed object.

In addition, in order to achieve the above another technical problem, the present invention includes: first and second electrodes to which different discharge voltages are applied; An insulator for insulating the first and second electrodes; A plasma source gas inlet for introducing a plasma source gas between the first and second electrodes; And a discharge port for plasma emission, wherein the first and second electrodes are provided such that a U-type discharge region is formed therebetween, wherein the plasma processing method comprises: Loading an object; And performing a plasma treatment while moving the plasma treatment object under the plasma generator, and moving the treatment object up and down according to the curvature of the surface of the treatment object.

When the atmospheric pressure plasma generator according to the present invention is used, the surface of an object having a large area can be easily plasma treated.

Hereinafter, an atmospheric pressure plasma generator according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. In the process, the regions shown in the drawings are exaggerated for clarity.

<First Embodiment>

Referring to FIG. 1, reference numeral 40 is a first electrode having a predetermined length, and 42 is a second electrode to which a voltage opposite to the voltage applied to the first electrode 40 is applied.

For example, when a positive voltage is applied to the first electrode 40, a negative voltage is applied to the second electrode 42, and when a negative voltage is applied to the first electrode 40, the second electrode ( Positive voltage is applied to 42).

In the following description, it is assumed that a negative voltage is applied to the first electrode 40 and a positive voltage is applied to the second electrode 42, respectively.

The second electrode 42 is shorter in length than the first electrode 40 but similarly has a predetermined length.

Reference numeral 42a denotes a source gas inlet for plasma formation formed on the side of the first electrode 40. As shown in the figure, a plurality of source gas inlets 42a are formed on the side of the first electrode 40. The source gas inlet 42a is also formed at the center of the side surface of the first electrode 40 for uniform gas inflow, but the illustration is omitted for convenience.

Reference numeral 44 is an insulating sealing cap formed on the first electrode 40, and 46 is a support for supporting the second electrode 42 while supplying power to the second electrode 42 therethrough. The second electrode 42 is supported by two supports 46. The number of supports 46 can be increased or decreased in consideration of the weight of the second electrode 42, the plasma generation efficiency, and the like.

Referring to FIG. 2 in which FIG. 1 is cut along the 2-2 'direction, the first electrode 40 has a U-shaped cross section, but has a plasma discharge port 50 formed at a lower end thereof. The left and right are symmetrically separated. The insulating sealing cap 44 covers the first electrode 40 and is in sealing contact with the upper end of the first electrode 40. In this way, the plasma can be prevented from leaking upward during discharge. The second electrode 42 is provided in a space made of the insulating sealing cap 44 and the first electrode 40, the upper end of which is connected to the support 46 passing through the insulating sealing cap 44 to maintain the sealing. The lower end thereof is extended downward in a non-contact state with the first electrode 40 so that the peak portion faces the plasma discharge port 50. When considering atmospheric pressure plasma formation, the diameter of the plasma discharge port 50 is preferably smaller than the diameter of the second electrode 42. The second electrode 42 as described above is provided in the space, thereby creating a U-shaped discharge region 48 surrounding the second electrode 42 between the first and second electrodes 40 and 42.

Subsequently, the plasma source gas inlets 42a are formed at both sides of the first electrode 40 which are symmetrically separated from the plasma discharge port 50. The plasma source gas inlet 42a may be any type as long as the plasma source gas can be introduced into the discharge region 48, but is preferably a form that can prevent the plasma from leaking from the discharge region 48. . The plasma source gas inlet 42a is preferably provided on both sides of the first electrode 40 so as to smoothly supply uniform plasma, but may be provided only on one side.

Referring to FIG. 3, the first electrode 40 and the second electrode 42 are provided in parallel with each other, and the discharge region 48 between the first and second electrodes 40 and 42 is also formed by the second electrode ( 42) Side by side in uniform thickness. In addition, the thickness of the support body 46 is thinner than the thickness of the second electrode 42. However, the thickness of the support 46 may be the same as or thicker than the thickness of the second electrode 42. The overall appearance of the plasma generator is rectangular. However, the shape of the plasma generator may be circular, elliptical, square, or the like.

4 is a view showing the bottom of the plasma generator having the above characteristics, it can be seen that the plasma discharge port 50 formed long along the longitudinal direction of the first and second electrodes 40, 42 with a predetermined thickness, It can also be confirmed that the thickness of the plasma discharge port 50 is thinner than the thickness of the second electrode 42.

Second Embodiment

In the plasma generator according to the first embodiment, the second electrode 42 (refer to FIG. 2) may have various shapes, and an example thereof is given in the second embodiment. In this case, the same reference numerals are used for the same members as the members described in the first embodiment, and description thereof will be omitted.

Incidentally, the same parts as those shown in the first embodiment are omitted.

Referring to FIG. 5, the second electrode 52 connected to the support 46 is composed of first and second portions 52a and 52b facing the plasma discharge port 50 (see FIG. 2). The first and second portions 52a and 52b are side by side, respectively, and become one at the portion connected to the support 46.

Third Embodiment

The configuration of the second electrode is different from that of the first embodiment. In this case, the same reference numerals are used for the same members as those described in the first embodiment, and description thereof will be omitted.

Specifically, referring to FIG. 6, one first electrode 40 and two second electrodes 54a and 56a are provided. Each of the two second electrodes 54a and 56a has the same shape as the second electrode 42 (see FIG. 2) of the first embodiment. However, each is powered and supported by one support 54 or 56.

Fourth Example

The atmospheric pressure plasma generator of a flat plate torch type | mold.

Referring to FIG. 7, reference numeral 70 denotes a gas inlet and 72 denotes a gas supply pipe connected to the gas inlet 70. In addition, reference numeral 80 denotes injection means for injecting the gas introduced through the gas inlet 72 between the first electrode 76 and the second electrode 78, and the injection means 80 is directed to the plurality of injection nozzles 74. Configured injection block. The first electrode 76 is a plate-shaped electrode having a length corresponding to the injection means 80 and provided in parallel with the gas supply pipe 72, and the second electrode 78 is a line-shaped electrode. The first electrode 76 is a cathode to which a negative voltage is applied, and the second electrode 86 is a cathode to which a positive voltage is applied. First and second connecting portions 82 and 84 are provided at both ends of the gas supply pipe 72. The first and second connectors 82 and 84 are connected to the second atmospheric pressure plasma generator, for example, the first connector 82 or the second connector 84 may have the same configuration as that of the fourth embodiment of the present invention. The second atmospheric pressure plasma generator may be connected. By connecting several atmospheric pressure plasma generators in this manner, a large atmospheric pressure plasma generator can be configured.

Referring to FIG. 8, the gas supply pipe 72 is connected directly below the gas inlet 70, and one end of the injection means 80 is connected to the gas supply pipe 72. That is, one end of the plurality of injection nozzles 74 constituting the injection means 80 is all connected to the gas supply pipe 72. In this way, the gas flowing into the gas supply pipe 72 through the gas inlet 70 is supplied to the injection means 80 provided in the direction perpendicular to the gas supply pipe 72.

The first and second electrodes 76 and 78 are provided up and down with the insulating plate 90 interposed therebetween, but the first electrode (not the second electrode 78 is provided below or below the first electrode 76). Since the second electrode 78 is provided at the portion where 76 ends, the first and second electrodes 76 and 78 are provided on a diagonal line.

On the other hand, the other end of the injection nozzle 74, that is, the end through which the gas flowing through the gas inlet 70 is injected, passes through the first electrode 76 and onto the insulating plate 90 corresponding to the second electrode 78. It is provided to supply gas.

The first electrode 76 is covered with a first electrode cover 92, and the second electrode 78 is also covered with a second electrode cover 84, which is connected to the first and second fixing means 96, 98. It is fixed by. The first and second fixing means 96 and 98 are fixing bolts through which voltage is applied to the first and second electrodes 76 and 78 from an external power source (not shown).

Referring to FIGS. 7 and 8 together, it is more clear that the first electrode 76 is a flat electrode, and the second electrode 78 is more clearly in the form of a line.

In Figs. 7 and 8, reference numeral 88 denotes a mount for connecting a block composed of the above components to a support (not shown) supporting them. The circle 100 formed on the mounting table 88 represents a portion where the support and the mounting table 88 are connected.

Next, a plasma processing method using the above-described plasma generator will be briefly described.

Specifically, referring to FIG. 9, reference numeral 60 is any one selected from the plasma generators according to the first to third embodiments described above, and 62 is an object having a large area for plasma processing, the width of which is plasma. It is preferable to be narrower than the width in the longitudinal direction of the plasma discharge port (see 50 in FIG. 4) of the generator 60.

The plasma treatment object 62 is loaded under the plasma generator 60. Subsequently, when the loading of the plasma processing object 62 is confirmed, the surface of the plasma processing object 62 is plasma treated while the plasma generator 60 is moved. At this time, the plasma generator 60 moves while moving from one end of the plasma processing object 62 to the other end.

Although not shown in the drawing, when the surface of the plasma processing object 62 is bent, the surface of the plasma processing object 62 is moved while moving the plasma generator 60 up and down along the curvature of the surface of the plasma processing object 62. May be plasma treated.

On the other hand, when the subject of movement changes, as shown in FIG. 10, the plasma generator 60 is fixed and the plasma treatment object 62 is moved below the plasma discharge port of the plasma generator 60 by the method of plasma treatment object ( 62 may be plasma treated.

At this time, when the surface of the plasma processing object 62 is curved, it is preferable to move the plasma generator 60 up and down in accordance with the bending rather than moving the plasma processing object 62 up and down. This process is possible by finely adjusting the movement of the plasma treatment object 62 and the plasma generator 60.

While many details are set forth in the foregoing description, they should be construed as illustrative of preferred embodiments, rather than to limit the scope of the invention. For example, one of ordinary skill in the art may consider an atmospheric pressure plasma generator in which electrodes are disposed such that a discharge region is V-shaped, and the plurality of plasma generators of the present invention described above are provided side by side. Arranged plasma generators may be considered, and a plasma processing chamber equipped with these may be envisioned. Therefore, the scope of the present invention should not be defined by the described embodiments, but should be determined by the technical spirit described in the claims.

As described above, the present invention provides an atmospheric pressure plasma generator provided with electrodes such that the discharge region is U-shaped, and a plasma discharge port having a predetermined length along the electrodes at the bottom of the discharge region. In the case of using the plasma generator of the present invention, the plasma treatment object can be plasma-processed by a scan method, and the substantial plasma generation region is an area determined by the product of the length of the discharge port and the scan distance. Therefore, the plasma treatment with respect to the object which has a large area can also be performed easily.

Claims (17)

First and second electrodes to which different discharge voltages are applied; An insulator for insulating the first and second electrodes; A source gas inlet provided for introducing a plasma source gas between the first and second electrodes; And Provided with a plasma discharge port for plasma emission, The first and second electrodes are provided such that the discharge region is in the form of a citron (U), and the plasma discharge port has a predetermined length. The plasma generator of claim 1, wherein the first electrode is provided in a form of enclosing the second electrode in a U-shape with the discharge region interposed therebetween. The plasma generator of claim 1, wherein the plasma discharge port is formed at a bottom of the first electrode facing a downward peak portion of the second electrode. The plasma generator of claim 1, wherein the plasma source gas inlet is provided at a side surface of the first electrode. 5. The plasma generator of claim 4, wherein a plurality of plasma source gas inlets are provided at both sides of the first electrode. The plasma generator of claim 1, wherein the insulator is in hermetic contact with an upper end of the first electrode in a form covering the first electrode. 7. The plasma generator of claim 6, wherein the second electrode is connected to a support passing through the insulator. 7. The plasma generator as set forth in claim 6, wherein said second electrode is composed of a plurality of electrodes, and each electrode is connected to a support that penetrates through said insulation body. First and second electrodes provided up and down with an insulating plate therebetween; First and second electrode covers covering the first and second electrodes; First and second fixing means for connecting the first and second electrodes to an external power source while fixing the first and second electrodes to the first and second electrode covers, respectively; A support for supporting a block comprising the elements; A gas inlet provided on a surface on which the first fixing means is provided; A gas supply pipe connected directly below the gas inlet; And It is provided in a direction perpendicular to the gas supply pipe, one end thereof is connected to the gas supply pipe, the other end is on the insulating plate corresponding to the second electrode through the gas injected through the gas inlet Plasma generator, characterized in that the injection means provided to be injected into. 10. The plasma generator as set forth in claim 9, wherein the injection means is a nozzle block composed of a plurality of injection nozzles provided side by side. The plasma generator of claim 10, wherein the gas supply pipe is connected to one end of the plurality of injection nozzles. 12. The plasma generator as set forth in claim 11, wherein a connection part to which a second atmospheric pressure plasma generator including the above components is connected is provided at both ends of the gas supply pipe. The plasma generator of claim 12, wherein the second atmospheric pressure plasma generator is connected to the connection unit. 10. The plasma generator of claim 9, wherein each of the first and second electrodes is a plate-shaped electrode and a line-shaped electrode which have a length corresponding to the injection nozzle block and are provided in parallel with the gas supply pipe. First and second electrodes to which different discharge voltages are applied; An insulator for insulating the first and second electrodes; A plasma source gas inlet for introducing a plasma source gas between the first and second electrodes; And a discharge port for plasma emission, wherein the first and second electrodes are provided such that a U-shaped discharge region is formed therebetween. Loading a plasma treatment object under the plasma generator; And And plasma processing the object while moving the plasma generator from one end of the plasma processing object to the other end. The plasma processing method according to claim 15, wherein the object is plasma-processed while the plasma generator is moved up and down in accordance with the bending of the plasma-processed object. First and second electrodes to which different discharge voltages are applied; An insulator for insulating the first and second electrodes; A plasma source gas inlet for introducing a plasma source gas between the first and second electrodes; And a discharge port for plasma emission, wherein the first and second electrodes are provided such that a U-shaped discharge region is formed therebetween. Loading a plasma treatment object; And Plasma processing while moving the plasma object under the plasma generator, the method comprising the step of moving the object up and down according to the curvature of the surface of the object.