KR200197284Y1 - Rambus handler - Google Patents

Abstract

A test handler for automatically testing a Rambus-type semiconductor device is disclosed. Disclosed is a user tray stacker for loading a plurality of user trays containing a semiconductor device to be tested or tested, a device loading unit for picking up a device from a user tray at a supply position and placing the device in a test tray at a loading position; The test tray that descends from the device loading section to the upper inlet is sequentially lowered and the preheating chamber is heated or cooled according to the test conditions to discharge to the lower outlet, and the test is performed by contacting the preheated device with the test port. The chamber, the test tray drawn from the test chamber to the bottom of the test chamber are sequentially raised to recover the tested device to room temperature and discharged to the top, and the test device discharged from the recovery chamber is picked up to the test result. According to plural A device classification unit for loading a certain area of the mobile buffer, and a device unloading unit for storing the device on the mobile buffer in the user tray divided by the class.

Description

Rambus handler

The present invention relates to a test handler for testing a assembled semiconductor device, and more particularly to a rambus handler for testing a rambus-type semiconductor device.

In general, in a semiconductor manufacturing process, it is necessary to test both parts of a device after assembling the semiconductor device. An apparatus for automatically performing this is a test handler. Therefore, an appropriate test handler is developed and used according to the shape of the semiconductor device.

Conventionally, since a semiconductor device whose lead is a pin type (PGA type) has been used, a test handler for testing it has been developed and used. However, due to the high integration of semiconductors, a pinless BGA or CSP type semiconductor device has been developed and cannot be tested by a conventional test handler for a pin type semiconductor device, and therefore, an apparatus capable of automatically testing it is required.

Here, a rambus type semiconductor device means a device whose lead shape is a pin type among devices in which semiconductor leads are arranged in an area array in accordance with high integration of semiconductor elements. Namely, the semiconductor device generally refers to a semiconductor device whose lead is a ball grid array (BGA) type or a chip size package (CSP) type.

The present invention has been made to solve the above problems, and an object thereof is to provide a test handler that can automatically test a Rambus type semiconductor device, that is, a BGA or CSP type semiconductor device.

1 is a perspective view showing a rambus handler according to an embodiment of the present invention.

FIG. 2 is a perspective view illustrating the user tray stacker of FIG. 1. FIG.

3 is a perspective view illustrating a variable hand of the device loading unit of FIG. 1;

4 is a perspective view illustrating a device classification unit of FIG. 1.

5 is a flow chart showing the flow of the semiconductor device of the Rambus handler of FIG.

* Description of the symbols for the main parts of the drawings *

1; user tray 2; test tray

10; main frame 20; base plate

100; user tray stacker 110; tray rack

120; trego front plate 130; tray robot

200; device loading unit 210; variable hand

220; loading robot 230; device buffer

300; preheat chamber 400; test chamber

500; recovery chamber 600; device classification

610; test tray moving shaft 620; 1-axis robot

630; Moving buffer 640; Variable hand

700; device unloading unit 710; unloading robot

720; Fixed Hand

The Rambus handler according to the present invention for achieving the above object is loaded with a plurality of user trays containing the semiconductor device to be tested and positioned at the supply position one by one, and the empty user tray to hold the tested device at the delivery position and test A user tray stacker for stacking the user tray containing the completed devices, a device loading unit for picking up the device from the user tray at the supply position and seating the device in the test tray at the loading position; and from the device loading unit to the upper inlet A preheating chamber which sequentially lowers the incoming test tray and heats or cools the device according to the test conditions and discharges it to the outlet of the lower part; and a test chamber which performs a test by contacting the preheated device in the preheating chamber with a test port; Test chamber A plurality of movements according to the test result by picking up the test chamber discharged from the test chamber discharged to the upper part and the test chamber discharged to the upper part by sequentially raising the test tray drawn to the A device classifier which loads a predetermined area of the buffer, and a device unloading unit for storing the devices on the mobile buffer in the user tray classified by class.

The device loading unit includes a two-axis loading robot having a sixteen pickup cylinders and a variable hand with a variable hand spacing therebetween, and a device buffer for temporarily storing a spare device.

The device sorting unit includes a test tray moving shaft which moves the test tray in the front-rear direction (Y direction) and stops at the device adsorption position, and two ones which pick up the device on the test tray according to the test result and settle it in a predetermined area of the moving buffer. It comprises an axis orthogonal robot, and two moving buffers for loading the device of the test tray to convey the device to the device unloading unit.

The one-axis orthogonal robot includes a variable hand having eight pickup cylinders and variable spacing between the pickup cylinders.

The device unloading unit includes a two-axis unloading robot to which a pickup hand consisting of sixteen pickup cylinders is attached.

Hereinafter, with reference to the accompanying drawings, a preferred embodiment of the present invention will be described in detail.

1 is a perspective view showing a rambus handler according to an embodiment of the present invention, Figure 2 is a perspective view showing the user tray stacker of Figure 1 in detail, Figure 3 is a perspective view showing a variable hand of the device loading portion of FIG. to be. 4 is a perspective view illustrating a device classification unit of FIG. 1, and FIG. 5 is a flowchart illustrating a flow of a semiconductor device of a rambus handler according to an embodiment of the present invention.

As shown in FIG. 1, the Rambus handler according to an embodiment of the present invention includes a user tray stacker 100, a device loading unit 200, a preheating chamber 300, a test chamber 400, a recovery chamber 500, The device classifying unit 600 and the device unloading unit 700 are included. Hereinafter, in describing an embodiment of the present invention, the direction in which the tray racks installed in front of the upper surface of the main frame 10 forms a row is defined as the X direction, and forms a direction perpendicular to the X direction and toward the rear of the main frame. Used to define in Y direction.

The user tray stacker 100 is installed in front of the upper surface of the main frame 10, the tray rack 110 on which the user tray 1 is stacked, the tray fixing plate 120 fixing the tray 1 one by one, and the tray. And a tray robot 130 for loading / unloading (1). In addition, a base plate 20 is provided above the user tray stacker.

The tray rack 110 is a plate on which a guide bar 111 is formed so that a plurality of user trays 1 can be stacked, and can be moved back and forth in the Y direction by a cylinder. A plurality of tray racks 110 are installed in front of the upper surface of the main frame 10 so as to form a row, and typically, two tray racks 110a for loading a user tray containing a semiconductor device to be tested are loaded with empty user trays. There is one rack 110b, and five racks 110c for loading user trays containing devices classified according to the test results.

The tray fixing plate 120 is installed below the base plate 20 to the upper side of the tray rack 110 and is installed to correspond to the tray rack except for the empty user tray rack 110b in a structure capable of lifting and lowering by the cylinder 121. When the tray fixing plate 120 loads the user tray 1 and ascends, the tray fixing plate 120 coincides with the hole formed so that the user tray 1 is exposed on the base plate 20 so that the device supply position P1 and the device storage position P6 are adjusted. Achieve.

The tray robot 130 is an orthogonal robot having an X-direction shaft 131 and two vertically moving shafts 133, and a tray holding gripper 135 is mounted on each of the shafts 133 moving vertically. The user tray 1 is loaded / unloaded between the fixed plate 120 and the tray rack 110. The robot 130 has an operating area that can cover the entire tray rack.

The device loading unit 200 sucks the device from the user tray 1 fixed at the device supply position 101 to load the device on the test tray 2 at the device loading position 201, and the variable hand ( 210, the loading robot 220, and the device buffer 230.

In the variable hand 210, sixteen pickup cylinders 211 are arranged in two rows of eight, and the intervals between the cylinders 211 are close and distant. When the distance is close, the device of the user tray abnormality (1) is held. When the distance is far, the device is placed on the test tray (2).

The loading robot 220 is a two-axis orthogonal coordinate robot that attaches the variable hand 210 to operate in the XY direction. The test tray of the user tray 1 of the device supply position P1 and the device loading position P2 ( 2) is installed in the upper space to include in the working area.

The device buffer 230 is installed between the device supply position (P1) and the device loading position (P2), the extra device is placed so that the variable hand 210 can always absorb and transport 16 devices It is a plate with many seating parts.

The preheating chamber 300 is installed at the rear of the upper surface of the main frame 10 and the inlet through which the test tray 2 enters is the same as the height of the device loading position P2, and the discharge port through which the test tray 2 exits is the main frame 10. ) The height of the upper surface has a certain difference between the height of the inlet and outlet. The device on the test tray 2 introduced into the preheat chamber 300 is heated or cooled while down to the outlet depending on the test conditions.

The test chamber 400 is installed on the main frame 10 next to the preheating chamber outlet so as to be connected to the preheating chamber 300 and performs a test by contacting the device with a test port installed under the upper surface of the main frame. A test head that vacuums the devices can test 16 devices at a time.

The recovery chamber 500 is connected to the side of the test chamber 400, and raises the test tray 2 from the test chamber 400 to the device loading height and restores the device to room temperature. The inlet is the same height as the outlet of the preheat chamber 300 and the outlet is formed at the device loading height.

The outlet height of the preheating chamber 300, the test tray stop and moving height of the test chamber 400, and the inlet height of the recovery chamber 500 are located on the same height, the test tray moving means consisting of a ball screw and a pneumatic cylinder Move between each chamber.

The device classification unit 600 includes a test tray moving shaft 610, two 1-axis robots 620, and two moving buffers 630.

The test tray moving shaft 610 receives and positions the test tray 2 discharged to the discharge port of the recovery chamber 500, and includes a motor, a ball screw, and an LM guide.

The one-axis robot 620 is installed above the test tray moving shaft 610 and the moving buffer 630, and carries the device of the test tray 2 to the moving buffer 630. The robot 620 includes eight pick-up cylinders 211 and a variable hand 640 having a change in distance between the cylinders 211 is attached.

The moving buffer 630 is installed on the side of the test tray moving shaft 610, and a plurality of seating parts on which the device is placed is formed on the upper surface of the moving plate 631 moving back and forth by the linear moving means. The mobile buffer 630 is a device unloading position located on the user tray stacker 100 side by a linear movement means composed of a motor, a ball screw, and an LM guide. Transport to P5).

In addition, the device sorting unit 600 has all the means and devices supplied with the test tray 2 from the recovery chamber 500 are transferred to the mobile buffer 630 so that the empty test tray 2 is transferred to the device loading unit 200. Means for moving to the device loading position of P1 is included. The means are usually constituted by a pneumatic cylinder.

The device unloading unit 700 is to place the device on the mobile buffer 630 in the user tray 1 in the device storage position (P6) classified by the grade according to the test result, the pickup hand 720 is attached It consists of an unloading robot 710 which is a two-axis rectangular coordinate robot operating in the XY direction.

The unloading robot 710 has a work area capable of covering the device unloading positions P5 of the two mobile buffers 630 and the user tray 2 placed at the device storage positions P6 separated by respective classes. It is installed in the upper space.

Pick-up hand 720 is composed of 16 pickup cylinders 211, because the space between the device seating portion of the mobile buffer 630 and the device seating portion of the user tray 1 is the same between the pickup cylinder 211 Not variable It is also possible to use a variable hand when the spacing of the seats changes.

Also, although not described above, the present embodiment includes a controller for controlling the respective components.

Hereinafter, the operation of the rambus handler according to an embodiment of the present invention as described above in detail.

The worker loads the user tray 1 containing the device into the supply tray rack 110a. At this time, the tray rack 110a is advanced, and the user tray 1 is loaded and the tray rack is finished after loading. Return 110a. In addition, an empty user tray without a device is loaded into the empty tray rack 110b at least the same quantity as the device test classification type.

When the tray 1 is loaded in the rack 110, the tray robot 130 senses the position of the uppermost tray of the supply tray rack 110a, grips the uppermost tray with the gripper 135, and evacuates to the next tray rack. The tray fixing plate 120 is lowered to the extent that the gripper 135 of the tray robot 130 can load / unload the tray 1. When the tray fixing plate 120 descends, the tray 1 held by the tray robot 130 is loaded on the tray fixing plate 120. When the tray robot 130 loads and evacuates the tray 1, the tray fixing plate 120 is raised again to expose the tray 1 to the hole formed in the base plate 20, thereby forming the device supply position P1. .

If there is a tray 1 in the tray fixing plate 120, if the tray fixing plate 120 is lowered, the tray robot 130 is a tray on the tray fixing plate 120 with a gripper 135 that does not hold the tray 1. After unloading (1), the above operation is performed by the gripper 135 gripping the tray (1). The robot 130 holding the tray 1 on the tray fixing plate 120 loads the bin tray rack 110a or the tray containing the tested device in the rack 110c according to the state of the tray.

When the user tray 1 is at the supply position P1, the loading robot 220 sucks the device with the variable hand 210 and seats the device in the test tray 2 at the device loading position P2. At this time, the variable hand 210 adsorbs the device in the user tray 1 in a state where the space between the pickup cylinders 211 is narrow, and moves the device to the device loading position P2 to open the space between the pickup cylinders 211 and the test tray. Seat the device on (2).

If the number of devices adsorbed by the user tray 1 is not 16, the method of selecting a quick method for filling 16 devices into the device buffer 230 is compared to the number of devices in the device buffer 230, and the devices adsorbed to the device buffer 230 are selected. Put down, or absorb the insufficient device on the buffer 230 to fill 16. If there are no devices on the device buffer 230 and the variable hand 210 fails to adsorb 16 devices, all of the adsorption devices are put down on the buffer 230.

When the loading robot 220 fills the device in the test tray 2 at the device loading position P2, the loading robot 220 preheats the test tray 2 with the guide rod at the bottom of the variable hand 210. Drag to chamber 300. After that, the rotary cylinder installed in front of the inlet end of the preheating chamber 300 pushes the test tray 2 completely into the preheating chamber 300.

When the test tray 2 is introduced into the preheating chamber 300, the test tray at the bottom of the chamber 300 is carried out to the test chamber 400. That is, since there is a height difference between the inlet and the outlet of the preheating chamber 300, and a certain number of test trays 2 are loaded therebetween, the test trays 2 are sequentially discharged one by one in the order of introduction. Therefore, it takes a certain time until the test tray 2 is taken out to heat or cool the device to the required test temperature conditions.

The test tray 2 emerging from the outlet of the preheating chamber 300 is positioned above the test port of the test chamber 400. The test head in the test chamber 400 absorbs 16 devices at a time and contacts the test ports to perform the test. At this time, the handler controller remembers which class of device is placed in each seating part on the test tray 2 according to the test result. When the test is completed, the test tray 2 is introduced into the recovery chamber 500.

Like the preheating chamber 300, the recovery chamber 500 also has a height difference between the inlet and the outlet, so that the inlet tray 2 is sequentially discharged in the inlet order and the temperature of the device is restored to room temperature. However, there is a difference that the height of the outlet is higher than the inlet, the discharge direction is the upper side of the test chamber 400.

The test tray 2 discharged from the recovery chamber 500 is loaded on the tray moving shaft 610 of the device sorting unit 600. The test tray moving shaft 610 moves the test tray 2 in the front-rear direction (Y direction) by a ball screw, so that the single-axis robot 620 can suck the device on the test tray 2 (P3). Stop at).

The single-axis robot 620 is a variable hand 640 attached to the eight adsorption on the test tray (2) to move in the X direction, the movement in the position (P4) to receive the device according to the test grade The device rests on the buffer 630. Since the seating portion 631 of the mobile buffer 630 has a predetermined area for each test class in the handler controller, the device adsorbed by the 1-axis robot 620 moves according to the test result stored in the controller. It is placed in a specific area of the statue. This operation is performed according to the combination of the X-direction movement of the one-axis robot 620 and the Y-direction movement of the moving buffer 630. All devices are taken out by the single axis robot 620 and the empty test tray 2 is moved to the device loading position P1 by the tray moving means.

The moving buffer 630 containing the device is moved to the device unloading position P5 by a linear moving means composed of ball screws. Two moving buffers 630 are arranged so that even if one moves to the device unloading position P5, the other can continue the operation of classifying and supplying devices from the device classifying unit 600 so that the test flow can be continued. This will not break.

When the mobile buffer 630 arrives at the device unloading position P5, the unloading robot 710 adsorbs the device on the mobile buffer 630 to the pickup hand 720 composed of 16 pickup cylinders 211, and according to the test grade. It is separated and placed on the user tray 1 placed in the device storage position P6. That is, the device in the first-class area of the mobile buffer 630 is placed in the user tray of the first-class device storage position, the device in the second-class area of the mobile buffer is placed in the second-class user tray, and the defective device is placed in the bad user tray. The devices are classified and placed in a user tray corresponding to each class of the mobile buffer.

4 is a view illustrating a flow of a semiconductor device in a rambus handler according to an embodiment of the present invention. The devices loaded on the user tray 1 at the supply position P1 are sucked by the variable hand 210 and placed in the test tray 2 at the device loading position P2 (arrow A). When the device is completely placed, the test tray 2 moves to the device classification unit 600 through the preheating chamber 300, the test chamber 400, and the recovery chamber 500 with the device placed therein (arrow B). When the test tray 2 comes to the device classifying unit 600, the devices are placed in a predetermined area of the mobile buffer 630 by the grades by two variable hands 640 (arrow C). The empty test tray 2 is moved to the device loading position P2. When the mobile buffer 630 is moved to the device unloading position P5, the device placed in the mobile buffer 630 by the fixed hand 720 is loaded in the user tray 1 classified according to the grade (arrow D).

Arrow E shows the flow of the user tray 1, and when the user tray 1 containing the device to be tested becomes empty, it is moved to contain the tested device.

As described above, according to the present invention, a Rambus type semiconductor device, that is, a BGA or CSP type semiconductor device can be automatically tested.

In the above described and preferred embodiments of the subject innovation, but also described, the subject innovation is not limited to the specific preferred embodiment described above, the subject innovation belongs without departing from the gist of the subject innovation claimed in the claims below Those skilled in the art will be able to implement various modifications.

Claims (5)

A user tray stack that loads a plurality of user trays containing semiconductor devices to be tested and positions them one by one in a supply position, positions an empty user tray for a tested device in a storage position, and stacks a user tray containing the tested devices in a layered manner. Beaker; A device loading unit which picks up the device from the user tray at the supply position and seats the device in the test tray at the loading position; A preheating chamber which sequentially descends the test tray drawn from the device loading unit to the inlet of the upper end and heats or cools the device according to the test condition and discharges the outlet to the lower outlet; A test chamber which performs a test by contacting a device preheated in the preheating chamber with a test port; A recovery chamber which sequentially raises the test tray drawn from the test chamber to the bottom and recovers the tested device to room temperature and discharges it to the top; A device sorting unit which picks up the tested device from the test tray discharged from the recovery chamber and loads the device in a predetermined area of a plurality of moving buffers according to a test result; And Rambus handler, characterized in that it comprises a device unloading unit for storing the device on the mobile buffer in the user tray classified by class. The method of claim 1, wherein the device loading unit, A two-axis loading robot having sixteen pickup cylinders and a variable hand having a variable hand spacing therebetween; And Rambus handler, comprising a device buffer for temporarily storing the extra device. The method of claim 1, wherein the device classification unit, A test tray moving shaft which moves the test tray in the front-rear direction (Y direction) to stop at the device suction position; Two one-axis robots that pick up the device on the test tray according to the test result and seat the device on the predetermined area of the moving buffer; And Rambus handler, characterized in that it comprises two moving buffers for loading the device of the test tray to convey to the device unloading unit. According to claim 3, wherein the one-axis robot, And a variable hand having eight pick-up cylinders and varying a pitch between the pick-up cylinders. The method of claim 1, wherein the device unloading unit, Rambus handler, characterized in that it comprises a two-axis unloading robot with a pickup hand consisting of 16 pickup cylinders.