KR200187492Y1 - A up/down moving mechanism in the wafer cassette loading/unloading system - Google Patents
A up/down moving mechanism in the wafer cassette loading/unloading system Download PDFInfo
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- KR200187492Y1 KR200187492Y1 KR2019970043620U KR19970043620U KR200187492Y1 KR 200187492 Y1 KR200187492 Y1 KR 200187492Y1 KR 2019970043620 U KR2019970043620 U KR 2019970043620U KR 19970043620 U KR19970043620 U KR 19970043620U KR 200187492 Y1 KR200187492 Y1 KR 200187492Y1
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- lead screw
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- opening
- movable body
- wafer cassette
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
Abstract
본고안은 반도체 생산장비 내측으로 웨이퍼 장착된 웨이퍼 카셋트를 투입하거나 인출토록 하는 반도체 웨이퍼 카셋트 수납장비에 있어서, 반도체 웨이퍼 카셋트 수납장비 위에 얹어지는 반도체 보관용기인 포드(Pod)를 개폐토록 하기 위하여 반도체 웨이퍼 카셋트 수납장비의 가동몸체를 상승토록 하는 반도체 웨이퍼 카셋트 수납장비의 가동몸체 상,하 작동장치에 관한 것이다.This paper proposes a semiconductor wafer cassette storage device for inserting or withdrawing a wafer cassette loaded into a semiconductor production equipment. The semiconductor wafer is used to open and close a pod, which is a semiconductor storage container placed on a semiconductor wafer cassette storage device. A movable body up and down operating apparatus of a semiconductor wafer cassette storage device for raising the movable body of a cassette storage device.
본고안의 구성으로는 가동몸체와 고정몸체로 구성된 몸체를 가지며, 그 일측에 개폐판 보호커버를 갖는 반도체 웨이퍼 카셋트 수납장비에 있어서, 고정몸체 내측에 위치하는 가동몸체 하단 좌우양측에 체결판을 각각 부착토록 하며, 상기 체결판의 타측은 작동판과 고정토록 하며, 상기 작동판에는 리드스크류를 삽치한 스크류너트가 일체로 부착되어지며, 상기 스크류너트에 삽치된 리드스크류의 일측단부는 모타축과 연결되며, 리드스크류의 상,하 단부는 상,하 브라켓트에 회전 자재하게 유설되는 한편, 상기 상,하 브라켓트는 리드스크류 지지몸체에 고정되어지며, 리드스크류 지지몸체 좌우양측에 길이 방향으로 부착된 안내블럭를 삽치하며, 상기 가동몸체 일측에는 가운데 개폐창을 갖는 개폐판이 일체로 부착되어지며, 상기 개폐판은 개폐판 보호커버 내측에 삽치되도록 한 것이다.In this configuration, a semiconductor wafer cassette storage device having a body composed of a movable body and a fixed body, and having an opening / closing plate protective cover on one side thereof, each of which has fastening plates attached to the left and right sides of the bottom of the movable body located inside the fixed body. The other side of the fastening plate is fixed to the working plate, and the working plate is integrally attached with a screw nut into which the lead screw is inserted, and one end of the lead screw inserted into the screw nut is connected to the motor shaft. The upper and lower ends of the lead screw are rotatably installed on the upper and lower brackets, while the upper and lower brackets are fixed to the lead screw support bodies, and guides are attached to the left and right sides of the lead screw support bodies in the longitudinal direction. Inserting the block, one side of the movable body is integrally attached to the opening and closing plate having an opening and closing window, the opening and closing plate is the opening and closing plate A call is to be sapchi the inner cover.
이와 같은 본고안은 모타가 리드스크류를 회전시킬 때 이에 삽치된 스크류너트에 의해 작동판, 체결판 및 포드를 삽치한 인덱스 테이블 및 가동몸체를 상승 하강토록 하는 것이다.In this paper, when the motor rotates the lead screw, the screw nut inserted into the motor raises and lowers the index table and the movable body in which the operating plate, the fastening plate, and the pod are inserted.
Description
본고안은 반도체 생산장비 내측으로 웨이퍼가 장착된 웨이퍼 카셋트를 투입하거나 인출토록 하는 반도체 웨이퍼 카셋트 수납장비에 있어서, 반도체 웨이퍼 수납장비 위에 얹어지는 반도체 웨이퍼 카셋트 보관용기인 포드(Pod)를 개폐토록 하기 위하여 반도체 웨이퍼 수납장비의 가동몸체를 상승 작동시키기 위한 반도체 웨이퍼 카셋트 수납장비의 가동몸체 상,하 작동장치에 관한 것이다.This paper proposes to open and close a pod, which is a semiconductor wafer cassette storage container on a semiconductor wafer storage device, in a semiconductor wafer cassette storage device which inputs or withdraws a wafer cassette loaded with a wafer into a semiconductor production equipment. It relates to a movable body upper and lower operating device of the semiconductor wafer cassette storage device for raising and operating the movable body of the semiconductor wafer storage device.
반도체 제조에 사용되는 웨이퍼는 웨이퍼 카셋트 보관용기인 포드(Pod)에 담겨져 보관되며, 또한, 반도체 웨이퍼는 카셋트에 수납되어 보관용기인 포드에 담겨져 제조장비와 장비사이를 이동하게 된다.Wafers used in semiconductor manufacturing are stored in pods, which are wafer cassette storage containers, and semiconductor wafers are stored in pods and stored in pods, which move between manufacturing equipment and equipment.
반도체 생산장비 입구에는 반도체 생산장비 내측으로 반도체의 소재가 되는 웨이퍼를 장착한 웨이퍼 카셋트를 수납하는 반도체 웨이퍼 카셋트 수납장비가 부착되어지며, 상기 반도체 웨이퍼 카셋트 수납장비 위에서 웨이퍼를 삽치 보관한 카셋트 보관용기인 포드(Pod)가 장착되어 반도체 생산장비 내측으로 포드내에 삽치된 웨이퍼 장착 카셋트를 이동하거나 반대로 반도체 생산장비 내측으로부터 포드(Pod)로 웨이퍼가 장착된 카셋트를 인출하여 적재하게 된다.At the entrance of the semiconductor production equipment, a semiconductor wafer cassette storage device for storing a wafer cassette containing a wafer made of semiconductor material is attached to the inside of the semiconductor production equipment, and a pod, a cassette storage container for inserting and storing wafers on the semiconductor wafer cassette storage equipment. (Pod) is mounted to move the wafer-mounted cassette inserted into the pod into the semiconductor production equipment or, on the contrary, to draw and load the wafer-mounted cassette from the inside of the semiconductor production equipment to the pod.
본고안은 이와 같이 반도체 생산장비 내측으로 반도체 웨이퍼를 공급토록 하는 반도체 웨이퍼 카셋트 수납장비에 있어서, 반도체 웨이퍼 카셋트 수납장비 위에 얹어지는 포드의 바닥과 포드의 뚜껑을 분리시킨 후, 이를 포드의 뚜껑을 가동몸체와 동시에 상승시켜 포드 내측에 삽치된 반도체 웨이퍼 카셋트를 반도체 생산장비 내측으로 공급토록 하는 반도체 웨이퍼 카셋트 수납장비의 가동몸체 상,하 작동장치에 관한 것이다.In this paper, in the semiconductor wafer cassette storage device for supplying the semiconductor wafer into the semiconductor production equipment as described above, the bottom of the pod and the lid of the pod placed on the semiconductor wafer cassette storage device are separated, and then the lid is operated. The present invention relates to a moving body upper and lower operating device of a semiconductor wafer cassette storage device for raising a semiconductor wafer cassette inserted into the pod and feeding the semiconductor wafer cassette into the semiconductor production equipment.
반도체 생산장비 내측으로 반도체 웨이퍼를 공급하려면 반도체 웨이퍼가 수장된 카셋트 보관용기인 포드(Pod)를 반도체 웨이퍼 카셋트 수납장비에 얹어 놓게 되면 포드의 바닥은 인덱스 테이블과 고정하게 하며, 포드의 뚜껑은 인덱스 테이블과 고정하게 되며, 그 후, 포드의 뚜껑과 바닥의 잠금상태가 해제된 다음, 포드의 뚜껑을 고정한 인덱스 테두리와 일체로 형성된 가동몸체는 상승되어 포드의 바닥과 포드의 뚜껑을 분리시켜 포드 내측에 삽치된 웨이퍼 카셋트가 노출되게 된다.To supply semiconductor wafers into the semiconductor production equipment, a pod, a cassette storage container containing semiconductor wafers, is placed on a semiconductor wafer cassette storage device so that the bottom of the pod is fixed to the index table, and the lid of the pod is index table. After that, the pod lid and the bottom of the pod are unlocked, and then the movable body formed integrally with the index rim fixing the pod lid is lifted to separate the bottom of the pod and the lid of the pod, The inserted wafer cassette is exposed.
그후, 반도체 제조장비 내측으로부터 로버트 암(Robort Arm)이 반도체 웨이퍼가 수납된 카셋트를 잡아 반도체 제조장비 내측으로 반도체 웨이퍼 카셋트를 유입토록 하는 반도체 웨이퍼 카셋트 수납장비에 있어 본고안은 포드 뚜껑을 일체로 고정하는 가동몸체의 작동장치에 관한 것이다.Then, in the semiconductor wafer cassette storage device where the Robert Arm grabs the cassette containing the semiconductor wafer from the inside of the semiconductor manufacturing equipment and introduces the semiconductor wafer cassette into the semiconductor manufacturing equipment, the present paper fixes the pod lid integrally. It relates to an operation device of the movable body.
본고안은 상기 가동몸체의 하단부를 삽치하는 좌우 지지대를 가지며, 상기 지지대는 모타에 의해 회전되는 리드스크류에 의해 상,하로 작동하는 작동판과 일체로 고정되며, 상기 작동몸체를 상,하로 부드럽게 이동시키기 위한 레일을 좌우양측에 갖도록 하며, 또한, 상기 작동몸체의 상,하 작동범위를 감지하는 센서가 상,하로 부착되어 작동몸체가 일정범위내에서만 상,하로 작동되도록 한 것이다.The present invention has a left and right support for inserting the lower end of the movable body, the support is fixed integrally with the operating plate to operate up and down by the lead screw rotated by the motor, and smooth the operating body up and down It has a rail for moving on the left and right sides, and also, the sensor for detecting the upper and lower operating range of the operating body is attached to the upper and lower, so that the operating body is operated up and down only within a certain range.
도1 - 본고안인 반도체 웨이퍼 카셋트 수납장비의 사시도.1 is a perspective view of a semiconductor wafer cassette storage device of the present invention.
도2 - 본고안인 반도체 웨이퍼 카셋트 수납장비의 개략단면도.2 is a schematic cross-sectional view of the semiconductor wafer cassette storage device of the present invention.
도3 - 본고안의 부분단면도.Figure 3-Partial sectional view of the present article.
도4 - 본고안의 개략평단면도.4-Schematic top view of the present invention.
도5 - 본고안의 부분분해사시도.5-partially exploded perspective view of the present article.
가동몸체(12)와 고정몸체(11)로 구성된 몸체(1)를 가지며, 그 일측에 개폐판 보호커버(41)를 갖는 반도체 웨이퍼 카셋트 수납장비에 있어서, 고정몸체(11) 내측에 위치하는 가동몸체(12) 하단 좌우양측에 체결판(13)을 각각 부착토록 하며, 상기 좌,우 체결판(13)의 타측단부는 작동판(14)의 좌우양측에 일체로 고정되어지며, 상기 작동판(14)에는 리드스크류(Lead screw)(15)를 삽치한 스크류너트(Screw nut)(16)가 일체로 부착되어지며, 상기 스크류너트(16)에 삽치된 리드스크류(15)의 일측단부는 모타(17) 축과 커플링(18)에 의해 연결되어지며, 상기 리드스크류(15)의 상,하 단부는 이를 회전 자재하게 지지하는 상,하 브라켓트(24)(25)에 삽치되며, 상기 상,하 브라켓트(24)(25)은 리드스크류 지지몸체(20)의 상단 및 하단에 각각 부착되어지며, 상기 리드스크류 지지몸체(20) 좌우양측에는 레일(27)(28)이 상,하 방향으로 부착되어지며, 상기 좌우 레일(27)(28)에는 작동판(14)과 일체로 부착고정되는 좌우 안내블럭(Guide block)(32)(33)이 삽치되어지며, 상기 가동몸체(12) 일측에는 가운데 개폐창(38-1)을 갖는 개폐판(38)이 일체로 부착되어지며, 상기 개폐판(38)은 개폐판 보호커버(41) 내측에 삽치되도록 한 것이다. 상기에 있어 리드스크류 지지몸체(20) 상,하 임의개소에 센서(34)(35)가 부착되어지며, 상기 센서(34)(35)가 작동하는 센서감지기(36)가 상기 작동판(14)에 부착되어 작동판(14)의 작동상태를 확인하게 된다.In a semiconductor wafer cassette storage device having a body (1) consisting of a movable body (12) and a fixed body (11), and having an opening and closing plate protective cover (41) on one side thereof, the movable body is located inside the fixed body (11). The fastening plate 13 is attached to the left and right sides of the lower body 12, respectively, and the other end of the left and right fastening plate 13 is fixed integrally to the left and right sides of the operating plate 14, and the operating plate The screw nut 16 into which the lead screw 15 is inserted is integrally attached to 14, and one end of the lead screw 15 inserted into the screw nut 16 is integrally attached to the screw nut 16. The motor 17 is connected to the shaft 18 and the coupling 18, and the upper and lower ends of the lead screw 15 are inserted into the upper and lower brackets 24 and 25 supporting the rotating material. The upper and lower brackets 24 and 25 are attached to the upper and lower ends of the lead screw support body 20, respectively, and the lead screw support bodies 20 are left and right. The rails 27 and 28 are attached to the side in the up and down directions, and the left and right rails 27 and 28 are guide blocks 32 which are fixedly attached and fixed to the operation plate 14. 33) is inserted, one side of the movable body 12 is integrally attached to the opening and closing plate 38 having a middle opening and closing window (38-1), the opening and closing plate 38 is the opening and closing plate protection cover 41 ) To be inserted inside. In the above, the sensors 34 and 35 are attached to the upper and lower arbitrary portions of the lead screw support body 20, and the sensor detector 36 to operate the sensors 34 and 35 is the operation plate 14. It is attached to the) to check the operating state of the operating plate (14).
또한, 상기 리드스크류 지지몸체(20) 길이 방향으로 부착되는 좌우 레일 (27)(28)은 안내블럭(32)(33)을 삽치하게 되며, 안내블럭(32)(33)은 레일(27)(28)로부터 빠지지 않는 구조를 가지며, 안내블럭(32)(33) 내측에는 레일(27)(28)과의 마찰을 감쇄하는 베어링이 삽치되는 구조를 갖게 된다.In addition, the left and right rails 27 and 28 attached to the lead screw support body 20 in the longitudinal direction insert the guide blocks 32 and 33, and the guide blocks 32 and 33 are rails 27. It has a structure which does not come out from (28), and has the structure which the bearing which attenuates friction with the rails 27 and 28 is inserted in the guide blocks 32 and 33 inside.
이와 같은 구조를 갖는 본고안은 다음과 같이 작동하게 된다.This paper having such a structure works as follows.
반도체 웨이퍼가 수납된 카셋트를 내장한 포드(31)를 몸체(1) 위에 얹어 놓게 되면 인덱스 테이블(22)은 포드(31)의 바닥(31-2)을 고정하며, 인덱스 테두리(21)는 포드(31)의 뚜껑(31-1)을 고정함과 동시에 인덱스 테이블(22) 내측에 장착된 포드 잠금 해제장치가 작동하여 포드의 바닥과 포드의 뚜껑의 잠금상태를 해제하게 된다.When the pod 31 containing the cassette containing the semiconductor wafer is placed on the body 1, the index table 22 fixes the bottom 31-2 of the pod 31, and the index rim 21 is placed on the pod 31. At the same time as fixing the lid 31-1 of (31), the pod lock device mounted inside the index table 22 operates to release the bottom of the pod and the lid of the pod.
그 후, 모타(17)가 작동하여 모타축에 커플링(18)에 의해 고정된 리드스크류(15)를 회전시키면 리드스크류(15)의 상,하 양단은 리드스크류 지지몸체(20)에 고정된 상,하 브라켓트(24)(25)에 의해 회전 자재하게 유설되어 있으므로 자유롭게 리드스크류(15)는 회전되어지지만 리드스크류(15)에 삽치하는 스크류너트(16)는 작동판(14)과 일체로 고정되어 있으므로 리드스크류(15)의 회전은 스크류너트(16)를 리드스크류(15)를 따라 상승 또는 하강시키는 왕복운동을 하게 된다. 스크류너트(16)는 작동판(14)과 일체로 고정되어 있으므로 리드스크류(15)의 회전은 결국 작동판(14)을 상방 또는 하방으로 왕복 운동시키게 된다.After that, when the motor 17 is operated to rotate the lead screw 15 fixed by the coupling 18 to the motor shaft, the upper and lower ends of the lead screw 15 are fixed to the lead screw support body 20. Since the lead screw 15 is rotated freely by the upper and lower brackets 24 and 25 which are rotated freely, the screw nut 16 inserted into the lead screw 15 is provided with the operating plate 14. Rotation of the lead screw 15 is fixed integrally so as to reciprocate the screw nut 16 up or down along the lead screw 15. Since the screw nut 16 is fixed integrally with the operating plate 14, the rotation of the lead screw 15 causes the operating plate 14 to reciprocate upward or downward.
이와 같이 스크류너트(16)에 의해 상,하로 이동되는 작동판(14)은 그 양측에 체결판(13)이 부착되어지며, 체결판(13)은 가동몸체(12) 하방과 고정되어 있으므로 가동몸체(12)를 상,하로 작동시키게 된다. 이와 같이 모타(17)가 회전되어 리드스크류(15)을 회전시키고 회전되는 리드스크류(15)에 의해 상승 작동되는 스크류너트(16)는 이를 고정하는 작동판(14)과 체결판(13)을 상승시킬 때 체결판(13)에 고정된 가동몸체(12)가 상승하게 된다. 상기 가동몸체(12)는 인덱스 테두리(21)와 일체로 고정되어지며, 인덱스 테두리(21)에는 포드의 뚜껑(31-1)이 고정되어지므로 가동몸체(12)의 상승은 포드 뚜껑(31-1)을 상승시켜 포드 뚜껑(31-1)과 포드 바닥(31-2)을 분리시킴과 동시에 포드 내측에 장착된 반도체 웨이퍼가 삽치된 카셋트(51)를 노출시키게 된다.As described above, the operating plate 14 which is moved up and down by the screw nut 16 is attached to both sides of the fastening plate 13, and the fastening plate 13 is fixed to the lower side of the movable body 12. The body 12 is operated up and down. In this way, the motor 17 is rotated to rotate the lead screw 15, and the screw nut 16, which is lifted up by the lead screw 15, rotates the operation plate 14 and the fastening plate 13 to fix it. At the time of raising, the movable body 12 fixed to the fastening plate 13 is raised. The movable body 12 is fixed integrally with the index rim 21, and the lid 31-1 of the pod is fixed to the index rim 21 so that the rise of the movable body 12 is performed by the pod lid 31-. 1) is raised to separate the pod lid 31-1 and the pod bottom 31-2, and simultaneously expose the cassette 51 into which the semiconductor wafer mounted inside the pod is inserted.
이와 같이 가동몸체(12)의 상승은 포드 뚜껑(31-1)만을 개방시킬 뿐아니라 가동몸체(12) 일측에 일체로 고정된 개폐판(38)을 동시에 상승시키게 되며, 개폐판(38)의 하방에 위치하는 개폐창(38-1)을 들어올려 개폐창(38-1)과 개폐판 보호커버의 개폐구(41-1) 일체로 될 때 반도체 제조장비로 통하는 입구가 형성되어지며, 그 후, 반도체 제조장비 측으로부터 로버트 암이 반도체 웨이퍼를 장착한 카셋트를 잡아 반도체 제조장비 내측으로 유입하게 된다.As such, the rise of the movable body 12 not only opens the pod lid 31-1, but simultaneously raises the opening and closing plate 38 integrally fixed to one side of the movable body 12, and of the opening and closing plate 38. An entrance to the semiconductor manufacturing equipment is formed when the opening and closing window 38-1 located below is integrated with the opening and closing window 38-1 and the opening and closing port 41-1 of the protective cover. From the semiconductor manufacturing equipment side, the Robert arm grabs the cassette on which the semiconductor wafer is mounted and flows into the semiconductor manufacturing equipment.
본고안은 반도체 웨이퍼 카셋트 보관용기인 포드를 개방토록 하는 가동몸체 상,하 작동장치에 관한 것으로, 모타(17) 축에 상,하 양단이 회전자재하게 상,하 브라켓트(24)(25)에 삽치된 리드스크류(15)의 일측 고정토록 하며, 상기 리드스크류(15)를 회전시킬 때 리드스크류(15)에 삽치되는 스크류너트(16)가 상,하로 직선방향으로 이동하며, 상기 스크류너트(16)에 일체로 고정된 작동판(14)에는 가동몸체(12)를 고정한 체결판(13)이 일체로 부착됨으로 인하여 가동몸체(12)가 상승 또는 하강되도록 하는 것으로, 모타의 회전량에 따라 정확히 가동몸체(12)가 상,하로 이동되어지며, 리드스크류 지지몸체(20)의 부착된 센서(34)(35)와 작동판(14)에 부착된 센서감지기(36)에 의해 상,하로 이동되는 작동판(14)의 작동상황을 감지할 수 있게 되며, 이와 같은 전반적인 구조가 간단하여 고장의 소지가 없으며, 정확히 작동될 수 있도록 한 아주 유용한 고안인 것이다.The present invention relates to a movable body upper and lower operating device for opening a pod, which is a semiconductor wafer cassette storage container, and the upper and lower ends of the motor 17 shaft are rotated on the upper and lower brackets 24 and 25. One side of the inserted lead screw 15 is fixed, and when the lead screw 15 is rotated, the screw nut 16 inserted into the lead screw 15 moves upward and downward in a linear direction, and the screw nut ( 16, the movable plate 12 is fixed to the operation plate 14 is fixed to the movable body 12, so that the movable body 12 is raised or lowered by being integrally attached, according to the amount of rotation of the motor The movable body 12 is moved up and down exactly, and is moved up and down by the sensor 34 attached to the working plate 14 and the sensors 34 and 35 attached to the lead screw support body 20. It is possible to detect the operating situation of the operating plate 14 is moved, such an overall structure Not only to the possession of a fault, it will be a very useful devised to be working correctly.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019970043620U KR200187492Y1 (en) | 1997-12-30 | 1997-12-30 | A up/down moving mechanism in the wafer cassette loading/unloading system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019970043620U KR200187492Y1 (en) | 1997-12-30 | 1997-12-30 | A up/down moving mechanism in the wafer cassette loading/unloading system |
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| Publication Number | Publication Date |
|---|---|
| KR19990030923U KR19990030923U (en) | 1999-07-26 |
| KR200187492Y1 true KR200187492Y1 (en) | 2000-07-15 |
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| KR2019970043620U KR200187492Y1 (en) | 1997-12-30 | 1997-12-30 | A up/down moving mechanism in the wafer cassette loading/unloading system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020071827A (en) * | 2002-08-23 | 2002-09-13 | 코리아테크노(주) | Door holder lifting apparatus for FOUP opener |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR101678365B1 (en) * | 2015-06-24 | 2016-11-23 | 선다코리아주식회사 | Transfer apparatus of target for using deposition process |
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1997
- 1997-12-30 KR KR2019970043620U patent/KR200187492Y1/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020071827A (en) * | 2002-08-23 | 2002-09-13 | 코리아테크노(주) | Door holder lifting apparatus for FOUP opener |
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| Publication number | Publication date |
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| KR19990030923U (en) | 1999-07-26 |
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