KR101678365B1 - Transfer apparatus of target for using deposition process - Google Patents

Abstract

The present invention relates to a device for moving a target used in a deposition process, and relates to a target moving device for deposition process comprising: a movable carriage provided to be movable; a support fixture provided vertically to the moving carriage; an elevating shaft installed to move up and down along the support fixture; an elevation driving unit for moving the elevation shaft up and down; an arm provided horizontally on the elevating shaft; and a clamp adapted to clamp the target at the end of the arm. According to the present invention, the present invention is designed to easily and safely move a target for a deposition process having a size and weight which are difficult to carry and handle, thereby improving the efficiency of the deposition process, maintenance and management efficiency of the deposition equipment. Further, the safety of the worker can be improved.

Description

[0001] The present invention relates to a transfer apparatus for a deposition process,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a target moving apparatus for a deposition process, and more particularly, to a target moving apparatus for a deposition process, which enables easy and safe movement of a target used in a deposition process.

Recently, due to global warming and environmental pollution caused by combustion gas, the use of clean energy has become important. Among these clean energies, solar energy is absorbed by heat and used for heating, cooling, and hot water supply, and solar heat is used to generate high temperature working fluid for power generation.

The use of solar heat is relatively limited, and the use of solar heat is increasing due to the fact that it can be installed in a building or a house. The important thing in using the solar heat is the high efficiency of the absorption plate for collecting the solar heat have.

As a technique for a conventional solar absorbing plate, there is a "solar absorbing plate" of Korean Patent No. 10-1436317, which is a substrate for absorbing solar heat; An incident layer spaced apart from the substrate and to which the solar heat is incident; And an intermediate layer interposed between the substrate and the incident layer and transmitting the solar heat incident from the incident layer to the substrate, wherein the incident layer is formed of a convex or concave And the intermediate layer is formed through deposition on the upper surface of the substrate.

As described above, in order to achieve high efficiency, a conventional solar absorbing plate uses a deposition process for forming a thin film favorable to solar absorption on its surface. Most of the devices used in such a deposition process include a process gas and a vacuum A target that is installed inside the chamber and includes the same or similar material as the thin film of the solar absorbing plate; and fixing means for fixing the object to be deposited on the inside of the chamber.

The target of the conventional evaporation apparatus serves as a cathode, and a DC voltage necessary for the evaporation process is applied. In addition to the above-described solar absorption plate, the size and shape of the evaporation object such as a semiconductor wafer and a glass substrate, And thus have various specifications and shapes.

Such a target for a deposition process has a problem in that the size and weight of the target for the deposition process are increased in order to perform a deposition process on a solar absorbing plate or a glass substrate which becomes larger due to the increase in size, . In addition, in the case of a heavy target, there is a problem that it is damaged due to falling or the like during transportation and handling, or the worker is injured.

In order to solve the problems of the prior art as described above, it is an object of the present invention to easily and safely move a target for a deposition process having a size and a weight difficult to carry and handle, To improve the maintenance and management efficiency, and to secure the safety of workers.

Other objects of the present invention will become readily apparent from the following description of the embodiments.

According to an aspect of the present invention, there is provided an apparatus for moving a target used in a deposition process, the apparatus comprising: A support vertically provided to the moving truck; An elevating shaft installed to move up and down on the support frame; An elevation driving unit for moving the elevation shaft vertically; An arm horizontally provided on the lifting shaft; And a clamp adapted to clamp the target at an end of the arm.

The elevation shaft may be vertically mounted on the bracket so as to be vertically slidable on the bracket provided at a plurality of spaced apart upper and lower supports.

The elevation driving unit includes a lead screw that is screwed to the elevation shaft and moves up and down the elevation shaft according to the rotation direction; A decelerator coupled to the lead screw to rotate the lead screw; And a driving motor installed on the moving truck to rotate the speed reducer.

The arm includes a fixed shaft horizontally fixed to the elevating shaft; A movable shaft slidably coupled to the fixed shaft so as to extend in a horizontal direction and fixed to the fixed shaft by tightening the fixed bolt; A hinge coupling block provided at an end of the movable shaft; A pivot shaft hinged to the hinge connection block and installed to be rotatable up and down, the pivot being fixed at an end thereof; And an adjusting bolt that is threadedly coupled to the hinge-engaging block to support an end of the rotating shaft and adjusts an angle at which the rotating shaft hits downwardly in a rotating direction.

Wherein the clamp is fixed to an end of the arm and has a first groove portion to which a side of the target is closely contacted; A pivot block hinged to the fixed block and formed with a second groove portion corresponding to the first groove in contact with the other side portion of the target and pivoting from the fixed block to open the first groove portion; A hinge coupling portion provided on one of the fixed block and the pivot block; A locking part provided on the other of the fixed block and the pivot block; A turning bolt hinged to the hinge engaging part and extending to the engaging part side; An engaging member inserted into the rotation bolt and installed to engage with the engaging portion; And a locking member which is screwed to the pivoting bolt so that the locking member is caught by the locking portion by fastening so that the target is fixed between the first and second groove portions, And a tightening nut for separating the target from the space between the first and second trenches.

The target moving apparatus for the deposition process according to the present invention can easily and safely move a target for a deposition process having a size and a weight difficult to carry and handle, thereby improving the efficiency of the deposition process and maintenance And the management efficiency can be enhanced, and the safety of the operator can be improved.

1 is a perspective view illustrating a target moving apparatus for a deposition process according to an embodiment of the present invention.
Figure 2 is a perspective view of an arm and clamp of a target moving device for a deposition process in accordance with one embodiment of the present invention.
3 is a perspective view showing a clamp of a target moving apparatus for a deposition process according to an embodiment of the present invention.
4 is a perspective view illustrating an operation of a target moving apparatus for a deposition process according to an embodiment of the present invention.

The present invention is capable of various modifications and various embodiments, and specific embodiments are illustrated and described in detail in the drawings. It is to be understood, however, that the invention is not to be limited to the specific embodiments, but is to be understood to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention, And the scope of the present invention is not limited to the following examples.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings, wherein like or corresponding elements are denoted by the same reference numerals, and redundant explanations thereof will be omitted.

1 is a perspective view illustrating a target moving apparatus for a deposition process according to an embodiment of the present invention.

Referring to FIG. 1, a target moving apparatus 100 for a deposition process according to an embodiment of the present invention includes a moving carriage 110, a support 120, an elevation shaft 130, an elevation driving unit 140, an arm 150 And a clamp 160. In the present invention, the target 10 may correspond to a cathode of a deposition apparatus, and may be made of a thin film material to be formed on a solar absorption plate. For example, the target 10 may be made of pure aluminum (Al) ), An alloy of titanium (Ti), an aluminum (Al) alloy, or the like. In addition, the target 10 can be provided with a magnet inside, and cooling water can be circulated around the magnet. Also, during the deposition process, the target 10 is supplied with power necessary for the deposition process. For example, a DC voltage of about 300 to 500 V may be supplied from the power supply unit. Such a target 10 is merely an example, and it goes without saying that the target 10 may be formed in various sizes and shapes used in various types of deposition processes.

A plurality of casters 111 are provided on the bottom surface of the moving carriage 110 so that the moving carriage 110 can be shifted along the paper surface. .

The support base 120 is vertically provided on the moving bogie 110 by various methods such as bolting or welding or the like so that the target 10 has a relatively large weight, for example, 20 to 50 kg, The arm 150, and the clamp 160, and may have a reinforcing structure to prevent fracture or warping due to a load. The support base 120 may be fixed to at least one surface for supporting the lifting shaft 130, for example, a bracket 121 slidably coupled to the lifting shaft 130 by bolting or welding. .

The lifting shaft 130 is vertically mounted on the support 120 so as to be slidable up and down on a bracket 121 provided on the support 120 in a plurality of up and down positions as in the present embodiment. . Here, the bracket 121 is formed of two pieces, for example, so that the upper and lower portions of the lifting shaft 130 can be slidably supported in the vertical direction, respectively.

The lifting and lowering drive unit 140 operates according to an operation of an operation unit having a switch or a button, and moves the lifting shaft 130 up and down. Here, the operating portion may be provided on the rear surface of the support base 120, for example. The lifting drive unit 140 may be composed of various linear reciprocating devices using a driving means such as a motor or a cylinder for vertically moving the lifting shaft 130. In this embodiment, A lead screw 141 which is arranged in line with the elevating shaft 130 and moves up and down the elevating shaft 130 in accordance with the rotating direction, a speed reducer 141 which is coupled to the lead screw 141 to rotate, And a driving motor 143 mounted on the moving carriage 110 to rotate the speed reducer 142. [ Here, the decelerator 142 can rotate the lead screw 141 by connecting the lead screw 141 to the rotation axis of the decelerator 142 by its fitting member or the like. The driving motor 143 can drive the speed reducer 142 by connecting the pulley 143a fixed to the shaft of the driving motor 143 and the pulley 142a of the speed reducer 142 with the belt 144. [

1 and 2, the arm 150 is provided horizontally on the lifting shaft 130 and moves up and down together with the lifting shaft 130. The arm 150 includes a fixed shaft 151 that is horizontally fixed to the lifting shaft 130 and a fixed shaft 151 that is slidably coupled to the fixed shaft 151 so as to extend in the horizontal direction, A hinge coupling block 153 provided at an end of the movable shaft 152 and a hinge coupling block 153 fixed to the hinge coupling block 153 by a hinge shaft 154a, A rotary shaft 154 coupled to the hinge joint block 153 so as to be rotatable up and down and fixed to the end of the hinge joint block 153; And an adjustment bolt 155 that adjusts the angle at which the pivot shaft 154 hits downward.

The fixing shaft 151 is fixed to extend in the horizontal direction from the fixing tube 151a which is fitted to the outside of the elevating shaft 130 and is fixed so as to be integral with the elevating shaft 130. In order to prevent sagging due to the load, 151b can be supported by the fixing tube 151a. The fixing shaft 151 is screwed to the fixing bolt 151c so as to limit the horizontal movement of the movable shaft 152. [ The fixing bolt 151c can be fixed by fixing and loosening the movable shaft 152. [ Further, the fixed shaft 151 is formed of a hollow tube and the movable shaft 152 is slidably inserted into the inner side.

The movable shaft 152 may be coupled to each other by a groove or a projection for sliding engagement with the fixed shaft 151. In this embodiment, the sliding groove 152a may be formed in the side portion along the longitudinal direction, The sliding coupling bolt 152b screwed to the fixed shaft 151 is inserted into the sliding groove 152a so that the sliding coupling bolt 152b inserted into the sliding groove 152a even if an eccentric load is applied with respect to the longitudinal direction, 152b are prevented from rotating about the longitudinal direction. The sliding coupling bolt 152b may serve to fix the movable shaft 152 to the fixed shaft 151 by tightening in the same manner as the fixed bolt 151c (shown in FIG. 1).

2 and 3, the clamp 160 is provided to clamp the target 10 (shown in FIG. 2) to the end of the arm 150. The clamp 160 is fixed to the end of the arm 150 as in the present embodiment and includes a fixed block 161 having a first groove 161a to which one side of the target 10 is closely contacted, A second groove portion 162a is hinged to correspond to the first groove 161a and the other side portion of the target 10 is brought into close contact with the first groove 161a and is rotated from the fixed block 161 to open the first groove portion 161a A hinge coupling portion 163 provided on one of the fixed block 161 and the pivot block 162 and a hinge coupling portion 163 provided on the other of the fixed block 161 and the pivot block 162, A rotation bolt 165 which is hingedly connected to the hinge engaging part 163 so as to be extended to the engaging part 164 side so as to be inserted into the rotation bolt 165 so as to be caught by the engaging part 164; The first and second groove portions 161a and 162a are screwed to the latching member 166 and the turning bolt 165 to be fastened so that the latching member 166 is caught by the latching portion 164, The target 10 can be fixed between the first and second trenches 161a and 162a by fixing the target 10 between the first and second trenches 161a and 162a by releasing the engaging member 166 from the engaging portion 164, And may include a tightening nut 167 for separating.

The fixed block 161 and the pivot block 162 may be hinged to each other via the hinge coupling piece 162b by being hinged to both sides of the hinge coupling piece 162b, for example. Further, the latching member 166 may be formed of at least one washer or various other fittings into which the pivotal bolt 165 is fitted.

The operation of the target moving apparatus for the deposition process according to the present invention will now be described.

As shown in FIG. 2, the movable bolt 151b (see FIG. 1) and the sliding bolt 152b are loosened and tightened so as to facilitate mounting and dismounting of the target 10, 152 can be moved and fixed in the direction A, thereby adjusting the length of the arm 150. Further, by loosening or tightening the adjustment bolt 155 as in the direction B, it is possible to change the position of supporting the end of the pivot shaft 154 hinged to the hinge pin 154a by the hinge coupling block 153, (C direction) of the rotating shaft 154 to which the load is applied to the other end.

Further, the engaging member 166 can be held in the engaged state by the fastening and unscrewing of the tightening nut 167 (in the direction of E) or can be separated from the engaging portion 164, When the engaging member 166 can be separated from the engaging portion 164 by the release of the engaging portion 167, the turning bolt 165 is rotated about the hinge engaging portion of the hinge engaging portion 163 The rotation block 162 can be rotated from the fixed block 161 with respect to the hinge engagement piece 162b so that the first and second groove portions 161a and 162a are opened, So that the target 10 can be inserted. When the locking bolt 165 is pivoted to a position where the locking member 166 can be caught by the locking portion 164 by the opposite operation and then the locking nut 167 is tightened, The fixed block 161 and the pivot block 162 clamp the both sides of the target 10 so that the target 10 is mounted on the clamp 160. [ The separation of the target 10 is the same as the operation for mounting the target 10 as described above.

4, when the target 10 is mounted on the clamp 160, movement of the moving carriage 110 causes the target 10, for example, to mount the target 10 to the deposition chamber, The elevation shaft 130 can be raised and lowered together with the arm 150 and the clamp 160 by driving the elevation driving unit 140 in accordance with the working height of the target 10. [

As described above, according to the present invention, it is possible to easily and safely move a target for a deposition process having a size and a weight which are difficult to carry and handle, thereby improving the efficiency of the deposition process and the maintenance and management efficiency of the deposition equipment And safety of the operator can be achieved.

Although the present invention has been described with reference to the accompanying drawings, it is to be understood that various changes and modifications may be made without departing from the spirit of the invention. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be determined by the scope of the appended claims and equivalents thereof.

10: Target 110: Moving truck
111: Caster 112: Handle
120: Support base 121: Bracket
130: lifting shaft 140:
141: lead screw 142: speed reducer
142a: Pulley 143: Drive motor
143a: pulley 144: belt
150: arm 151: fixed shaft
151a: Fixing tube 151b: Support
151c: Fixing bolt 152:
152a: Sliding groove 152b: Sliding engagement bolt
153: hinge coupling block 154:
154a: Hinge shaft 155: Adjusting bolt
160: Clamp 161: Fixed block
161a: first groove portion 162:
162a: second groove portion 162b:
163: Hinge coupling part 164:
165: turning bolt 166: latching member
167: tightening nut

Claims (5)

An apparatus for moving a target used in a deposition process,
A moving truck provided so as to be movable;
A support vertically provided to the moving truck;
An elevating shaft installed to move up and down on the support frame;
An elevation driving unit for moving the elevation shaft vertically;
An arm horizontally provided on the lifting shaft; And
A clamp adapted to clamp the target at an end of the arm;
Lt; / RTI >
The arm
A fixed shaft horizontally fixed to the lifting shaft;
A movable shaft slidably coupled to the fixed shaft so as to extend in a horizontal direction and fixed to the fixed shaft by tightening the fixed bolt;
A hinge coupling block provided at an end of the movable shaft;
A pivot shaft hinged to the hinge connection block and installed to be rotatable up and down, the pivot being fixed at an end thereof; And
An adjusting bolt screwed to the hinge-engaging block so as to support an end of the rotating shaft and adjusting an angle at which the rotating shaft hits downward along a rotating direction;
Wherein the target substrate is a substrate. The method according to claim 1,
The lift-
And a plurality of vertically spaced apart brackets mounted vertically on the support so as to be vertically slidable. The method according to claim 1,
The lifting /
A lead screw that is screwed to the elevating shaft and moves up and down the elevating shaft according to the rotating direction;
A decelerator coupled to the lead screw to rotate the lead screw; And
A drive motor installed on the moving truck to rotate the speed reducer;
Wherein the target substrate is a substrate. delete The method according to any one of claims 1 to 3,
The clamp
A fixing block fixed to an end of the arm and having a first groove portion to which a side of the target is closely contacted;
A rotation block hinged to the fixed block and formed with a second groove portion corresponding to the first groove portion in contact with the other side portion of the target and rotating from the fixed block to open the first groove portion;
A hinge coupling portion provided on one of the fixed block and the pivot block;
A locking part provided on the other of the fixed block and the pivot block;
A turning bolt hinged to the hinge engaging part and extending to the engaging part side;
An engaging member inserted into the rotation bolt and installed to engage with the engaging portion;
And the locking member is screwed to the locking bolt so that the locking member is engaged with the locking portion so that the target is fixed between the first and second groove portions, So as to separate the target from the space between the first and second grooves;
Wherein the target substrate is a substrate.

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