KR20010112879A - After Service Method Using Web based system for detecting trouble of machine and controlling - Google Patents

Abstract

An aluminum deposition shield substantially improves transfer of radiated heat from within the vacuum chamber, in comparison to a stainless steel deposition shield. The aluminum deposition shield remains cooler during wafer processing and assists in cooling the chamber components.

Description

After Service Method Using Web based system for detecting trouble of machine and controlling}

The present invention relates to a facility after-service method using a web-based facility failure diagnosis and control system. If there is a failure in a facility, the present invention detects this by self-diagnosis, and transmits an abnormal state of the facility to a remote failure diagnosis server. The server transmits an abnormality to the facility manager and can be repaired quickly without detecting the facility at all times.

In the past, when there is an abnormality in a facility, the manager of the facility detects the abnormal state directly or a device is installed in the facility to detect such an abnormality.

As described above, if an abnormality is detected by the administrator, the malfunctioning facility is often left for a long time, and even if there is a device that detects a failure in the facility, a failure is not immediately reported. Is still high. In addition, if there is a problem with the equipment, most of the maintenance requests are made by telephone. It is difficult for an administrator, who may be a non-expert, to provide accurate information on the failure, and there is a failure recognition device in the equipment to cause the failure. Even if the information is provided, there is a problem that the non-expert manager delivers the information about the information to the maintenance person by telephone. Therefore, in order to repair a malfunctioning facility, a repair agent first needs to grasp the exact cause of the failure and necessary parts in the field, and later secure parts and repair the site again.

In the present invention, in order to solve the problems of the prior art as described above, if the abnormality of the equipment is detected by the remote diagnosis and control server, if there is an error, the status is immediately received by the server, the server receiving the failure is the equipment I would like to propose a method for repairing a faulty facility in a short time by communicating with a manager.

1 is a configuration diagram of a network for performing after-sales service according to the present invention;

2 is a block diagram showing a communication relationship between a failure detection system and a remote failure diagnosis server;

3 is a detailed configuration diagram of a failure detection system.

Facility after-sales service method using the web-based facility failure diagnosis and control system according to the present invention in order to achieve the object as described above is a database by collecting parts and after-sales service method required in the after-sales service according to the case of various equipment failure (A); Remote failure diagnosis and control server detects the abnormality of the equipment through the internet communication with the control computer connected to the equipment. If the equipment is detected, the control computer is informed about the status of the failure and the location of the equipment that has failed. (B) sending a message to the remote failure diagnosis and control server; (C) the fault diagnosis and control server determining whether to perform a repair by a remote control or a repair by a facility manager based on the data databased in the step (a); (D) if the web-based facility failure diagnosis and control server determines repair by the facility manager in step (c), the information on the abnormality of the facility to the facility manager; (E) identifying, by the facility manager, information on the abnormality of the facility and contacting a parts company or a service company to obtain necessary parts and services when a special part or service is required for repairing the abnormal facility; Characterized in that the facility manager includes the step (f) for repairing the facility having the abnormality.

Hereinafter, a facility after-service method using a web-based facility diagnosis and control system according to the present invention will be described in detail with reference to the accompanying drawings.

1 is a block diagram of a network for carrying out after-sales according to the present invention.

The facility after-service related DB shown in FIG. 1 is a collection and database of parts and after-service methods necessary for after-sales service according to the failure of each equipment. In order to perform the after-sales service according to the present invention, it is preferable to construct such a database. to be. The database stores a list of all the facilities managed by the remote fault diagnosis server, the general abnormalities of each of those facilities, and the parts and repairs required at that time. Provide the remote fault diagnosis server with the repair method and information necessary for the abnormal condition.

The determination of abnormality of the installed equipment is made by the failure detection system. 2 is a block diagram illustrating a communication relationship between a failure detection system and a remote failure diagnosis server, and FIG. 3 is a detailed configuration diagram of the failure detection system.

As shown in Fig. 2, the facility is connected with a PLC (Programmable Logic Controller, hereinafter referred to as "PLC") for determining whether the facility has a failure, and a signal for determining the failure by the PLC is transmitted to the control computer. Is sent.

Referring to Figure 3 will be described in detail with respect to the system and method for detecting abnormalities of the facility.

If the equipment is in an abnormal state, it will send a special signal that is different from the normal state. The signals are different for each facility and even if they are the same, they have different waveforms depending on the cause of the failure. Such a signal may be a digital signal 31 or a signal which is an analog signal 32 as shown in FIG. The PLC 33 plays a role of determining whether there is an abnormality of the facility by grasping the signal sent by the facility. PLC integrates the functions of relay control, relay, timer and counter using microprocessor. By creating a program in this PLC, sequence control, arithmetic operations, logical operations, data processing, and the like are possible. According to the present invention, a program suitable for a facility in which a PLC is installed in the PLC is created, and a signal generated when the machine has an error through the PLC in which the program is written is detected for each cause of the error. The PLC, which determines the failure of the equipment, transmits the information on the occurrence of the failure to the Ethernet module and the details of the failure. It also sends information about the location of the facility so that the facility manager can repair the broken site on site.

The Ethernet module 34 converts the communication protocol between the equipment and the PLC into the TCP / IP protocol so that the remote fault diagnosis and control server can receive the information transmitted from the PLC through the Internet. The signal converted to the TCP / IP protocol is sent to a control computer connected to a remote fault diagnosis server. The controlling computer serves as a server for transmitting the converted signal to the remote failure diagnosis server.

The remote fault diagnosis and control server 12 is connected to all the facilities 14 connected by the after-sales service method according to the present invention as shown in FIG. 1, as well as the facility after-service related DB 11 necessary for implementation. ), Facility manager (13), service provider (16), parts company (15) are all connected. The remote fault diagnosis and control server can not only set the mode to always check the fault by communicating with the control computer, but also set the mode to check only at regular intervals or to communicate only when there is a change in demand. Do.

When information on the presence, failure, and location of the equipment identified by the PLC is transmitted to the remote failure diagnosis and control server, the received remote failure diagnosis and control server communicates with the facility after-service related DB. Retrieve information about. The DB provides the remote failure diagnosis and control server with data on the repair method corresponding to the failure occurrence of the equipment transmitted by the server sent by the PLC, and information about a service or a part which is necessary for the repair.

The remote fault diagnosis and control server, which has received the repair method, the necessary services and parts of the repair from the DB, first determines whether the repair can be performed by the remote control based on the information. If remote control is available, it can be used to repair the faulty facility and send it to the facility manager, service provider, or component supplier if it is determined that direct manpower and parts replacement are necessary. However, when it is determined that no special parts and services are needed, the transmission shall be made only to the facility manager. The transmission to the facility manager is possible by sending an e-mail to a terminal installed where the facility manager is located, or by telephone through a call center or in case a facility manager is absent. In order to transmit detailed information, it is desirable to send information by e-mail. In order to transmit information through a call center or a mobile phone, digital information from a remote fault diagnosis and control server must be provided as voice information. Technology is used. The communication between the remote fault diagnosis server and the service provider or the parts supplier is the same as the communication with the facility manager.

The facility manager who received the above information from the remote fault diagnosis and control server decides which parts and how to repair them based on the information about the location of the facility, the occurrence of the fault and the repair method received from the DB. do. Since the judgment of the remote diagnosis and control server based on the DB information and the judgment of the facility manager may be different, the facility manager may determine that parts or services other than the necessary parts and services determined by the server are needed. In this case, since both the service provider and the parts supplier are connected with the remote failure diagnosis and control server, the facility manager can easily obtain necessary parts and services from the service provider and the parts company through the server. In addition, when it is determined that the information on the repair method, necessary parts, etc. transmitted from the DB is insufficient, additional data can be received from the DB through the server.

In addition, the facility manager, who has all the necessary data, services, and parts, goes to the site using the information about the location of the facility sent by the server, and takes care of repairing the broken facility.

As described above, according to the facility after-sales service method using the web-based facility failure diagnosis and control system according to the present invention, a communication between a failure detection system and a remote failure diagnosis and control server for detecting a failure based on a PLC By detecting the failure of the equipment, it is possible to detect the abnormality of the equipment faster than the existing manager can manage the equipment.The equipment manager repairs the service immediately after detecting the failure through the communication between the remote failure diagnosis server and the equipment manager. Since it can be put into, there is an advantage that can be repaired in a short time. In addition, each facility is equipped with a database of repair methods and necessary parts for failure status, which is then sent to the facility manager who will repair the facility. Quick and one-time repairs are possible.

Claims (6)

(A) collecting the necessary parts and the after-sales service method for after-sales service according to the case of failure of various facilities and making a database; Remote failure diagnosis and control server detects the abnormality of the equipment through the internet communication with the failure detection system connected to the equipment. When the equipment is detected, the failure detection system detects the failure status and the location of the equipment that has failed. (B) sending information on the remote fault diagnosis and control server; (C) the fault diagnosis and control server determining whether to perform a repair by a remote control or a repair by a facility manager based on the data databased in the step (a); (D) if the web-based facility failure diagnosis and control server determines repair by the facility manager in step (c), the information on the abnormality of the facility to the facility manager; (E) identifying, by the facility manager, information on the abnormality of the facility and contacting a parts company or a service company to obtain necessary parts and services when a special part or service is required for repairing the abnormal facility; And a step (f) of the facility manager repairing the facility having the abnormality. The method of claim 1, If the information on the abnormality of the facility sent by the remote failure diagnosis and control server to the facility manager in step (d) is insufficient, the facility manager diagnoses the remote failure data and the database data in step (a). Facility after-service method using the web-based facility failure diagnosis and control system further comprising the step of receiving additional transmission through the control server The method of claim 1, When transmitting the information on the abnormality of the facility of the step (d), the repair method and necessary parts, services corresponding to the facility having the abnormality among the data collected in the step (a) is also transmitted together Facility after-sales service method using web-based facility failure diagnosis and control system. The method of claim 1, Detecting the abnormality of the facility of step (b) is characterized in that the program to detect the failure state of the equipment by the signal sent from the equipment to the PLC and grasp the contents of the failure and the occurrence of the failure by the PLC Facility after-service method using web-based facility fault diagnosis and control system. The method of claim 1, In the step (b), the remote fault diagnosis and detection of abnormality through communication between the control server and the control computer can be divided into a regular basis, a regular cycle, a request, and a status change. Facility after-service method using facility failure diagnosis and control system. The method of claim 4, wherein The program to be written in the PLC facility after-sales service method using a web-based facility failure diagnosis and control system characterized in that the characteristics of the facility to be written differently for each facility.