KR20010108015A - Ferroelectric pump - Google Patents

Abstract

The ferroelectric pump has one or more variable volume pump chambers inside the housing. Each chamber includes a dome-shaped ferroelectric actuator in which at least one wall has a dome that varies in height depending on the voltage applied between the inner and outer surfaces of the actuator. The pumped medium enters and exits each pump chamber in response to the displacement of the ferroelectric actuator. The ferroelectric actuator separates each ferroelectric actuator from the pumped medium inside each wall, providing a path for the voltage applied to each ferroelectric actuator, and actively up to the total permissible displacement of each ferroelectric actuator in response to the applied voltage. Provide suppression.

Description

Ferroelectric pumps {FERROELECTRIC PUMP}

Conventional pumps are generally divided into two types, volumetric and pressure. In a pressure pump, when a force is applied to a material through a mechanical movable part, the pressure is generated by the force.

Volumetric pumps operate on the principle of compression of materials. Examples include reciprocating pumps and bellows pumps. The reciprocating pump is usually used by using a piston of a cylinder and supplying an external force necessary for mechanical movement of the piston. The bellows pump typically consists of a pumping vessel having two non-deformable end plates which are formed with a deformable membrane between the end plates and driven by external forces.

Heat losses associated with copper windings and magnetic force losses due to eddy currents cause a reduction in the efficiency of conventional pumps using mechanically movable components. Even if the flow rate of the pump is matched with the pressurizing capacity of the conventional pump, the heat loss cannot be reduced. In addition, it is desirable to reduce the size and complexity of the structure and thus reduce manufacturing costs. In addition, the reduction in the number of mechanical moving parts can reduce wear and contamination and increase reliability.

Many current pumps use piezoelectric devices rather than conventional pistons, bellows and the like. The opposite behavior of two piezoelectric materials is described in US Pat. Nos. 3,963,380 and 4,842,493. U. S. Patent No. 3,963, 380 discloses a micropump with a variable volume chamber consisting of one or two commercially available disk benders fixed to a mounting ring. Disc benders consist of a thin film wafer of piezoelectric material bonded to a slightly larger brass plate disc with an epoxy binder. When a voltage is applied, the piezoelectric wafer expands or contracts in diameter in the same plane. This is because the diameter cannot change because the circumference of the wafer is bonded to the brass disk. As a result of this operation, the central surface of the wafer swells into a spherical shape.

U. S. Patent No. 4,842, 493 discloses a piezoelectric pump, wherein the piezoelectric components are arranged in such a way that they change all of their length, width and height at the same time to produce the required displacement of the pump. Since piezoelectric elements of small displacement are conventionally used, relatively long pumping channels are used to provide a suitable pumping volume, which requires complex assembly of components.

The concept described in US Pat. No. 4,939,405 is believed to be useful only for the pumping of small fluid pressure heads, i.e. fluids with very low back pressure. The concept is based on increasing the optimum amplitude of the piezoelectric wafer by hooking the piezoelectric wafer to the elastic film and driving the wafer at the resonant frequency. The disadvantage of this patent is that it has a small force and therefore a small fluid-head capacity associated with such a resonant system. This concept also requires complex assembly of components.

US Pat. Nos. 4,944,659 and 5,094,594 each use piezoelectric disks as deformation means coupled to the deformable chamber walls of the pump. U.S. Patent 4,944,659 relates to a pump with remotely commandable control logic that causes a relatively small amount of fluid to be discharged to a small fluid pressure head. The pumping action is provided by piezoelectric disks attached to the membrane to bend the piezoelectric disks. US Pat. No. 5,094,594 is considered to be a pump for use in combination with an electrophoresis device for supplying precise and highly repetitive fine amounts (pico liters) of fluid. The variable volume chamber includes a thin film wafer of piezoelectric material attached to a larger core disk. The diameter cannot be changed around the wafer. Because the diameter is fixed on the disk, the center of the wafer rises as a result of the voltage applied.

The disadvantages of existing piezoelectric pumps are small flow rates and small pressurization capacity. Moreover, assembly of the joined components is usually necessary. Therefore, there is a need for a new piezoelectric pump having a higher flow rate and pressure than the current piezoelectric pump apparatus, maintaining reliability, operating efficiency, and small size and low cost. There is also a need for piezoelectric pumps that do not require assembly of the joined components. These pumps can benefit many markets. The new piezoelectric pumps can be used in military applications and biomedical applications, as well as in inkjet printers and chemical titration processes. The new piezo pumps are also useful for fuel pumps and small feed pumps.

The present invention relates to PCT Application 98/26380, entitled “Ferroelectric Fluid Flow Control Valve” co-pending in the name of the applicant.

The invention described below is invented by an employee of the United States Government and it is understood that it can be manufactured and used by the United States Government without paying a royalty.

The present invention relates to a pump for both liquid and gas, and more particularly to one or more domes having a curvature and a height of a dome that varies with the voltage applied between the inner and outer surfaces of the actuator. It relates to a ferroelectric pump using a ferroelectric actuator with an internally initial stress of the shape.

1 shows an embodiment of a pump with three pump chambers.

2 is a cross-sectional view of a single chamber pump with a valve.

3 is a cross-sectional view of a single chamber pump with a fluid valve.

4 illustrates an electronic circuit for providing a voltage that varies sinusoidally.

5 shows an electronic circuit suitable for providing a voltage that changes from a fixed frequency into a sinusoidal waveform.

6 is an exploded view of the ferroelectric actuator mounting structure

7 is a plan view of the electrical contact ring;

It is therefore an object of the present invention to provide a pump that is smaller in size than current piezoelectric pumps and can maintain a flow rate and pressurization capacity equal to or greater in the current piezoelectric pump size.

Another object of the present invention is to provide a pump without mechanical moving parts.

Another object of the present invention is to provide a pump which does not require complicated assembly of joined components.

Another object of the present invention is to provide a pump using a ferroelectric actuator having an initial stress applied therein in one or more dome shapes, wherein each actuator has a curvature and is applied to a voltage applied between the inner and outer surfaces of the actuator. The height of the dome changes accordingly.

Another object of the present invention is to provide a pump using a ferroelectric actuator having an initial stress applied therein in one or more dome shapes, wherein each actuator has a curvature and is applied to a voltage applied between the inner and outer surfaces of the actuator. With the height of the dome varying, the mounting means of each actuator separates the actuator from the pumped fluid, provides a passage through which the voltage can be applied to the actuator, and causes the entire actuator to be displaced in response to the applied voltage. It is done in a way that actively restrains.

Another object of the present invention is to provide a pump for continuously pumping both liquid and gas in one direction.

Another object of the present invention is to provide a pump capable of periodically compressing the gas.

Additional objects and advantages of the invention will be described in detail in the accompanying drawings and the specification below.

According to the present invention, the above objects and advantages are ferroelectrics using one or more ferroelectrically internally applied dome-shaped ferroelectric actuators each having a curvature and having a height of a dome varying with a voltage applied between the inner and outer surfaces thereof. By providing a pump.

The pump of the present invention is based on the recognition that ferroelectric devices can only be used as essential and major parts of a fluid pump mechanism, although in the past they were considered merely transducers that convert electrical forces into mechanical motion. The present invention differs from a reciprocating pump in that the ferroelectric actuator itself performs both the functions of a piston and a cylinder. Moreover, the motive force applied to the piston is produced complex inside the piezoelectric device rather than externally supplied. The pump of the present invention differs from the bellows type pumps in that both the end plate as well as the deformable membrane and the mechanical movable part are in a single part, ie ferroelectric actuator.

The pump of the present invention has one or more variable volume pumping chambers inside the housing. Each chamber has at least one wall consisting of an internally prestressed ferroelectric actuator of a dome shape having a curvature and a height of the dome that varies with the voltage applied between the inner and outer surfaces of the actuator. In response to the displacement of the ferroelectric actuator, the pumped medium enters and exits each pumping chamber. The ferroelectric actuator is mounted inside each wall to separate the pumped medium and the ferroelectric actuator, to provide a path to the voltage applied to each ferroelectric actuator, and to actively displace the actuator in response to the applied voltage. Bondage

A first embodiment according to the invention is shown in FIG. 1. 1 shows three pump chambers. The pump housing 30 surrounds three pumping chambers 32, 34, and 36. The pump housing may require the same number as the pumping chamber and may be used with fewer pumping chambers. Each pumping chamber has at least one wall 38 including a dome-shaped internally stressed ferroelectric actuator 40, the ferroelectric actuator 40 having a curvature and between the inner and outer surfaces of the actuator. It has a height of a dome that varies with the voltage applied. Examples of such actuators are U.S. Patent No. 5,471,721, entitled "Method for Manufacturing Single Prestressed Ceramic Device," which is available from Aura Ceramics and incorporated herein by reference, and is also incorporated herein by reference. It is found in US Pat. No. 5,632,841, entitled "Thin Film Composite Monotype Ferroelectric Driver and Sensor."

Applying a voltage to the ferroelectric actuator generates an electric field between the surfaces of the actuator and in response, changes the shape of the actuator. The actuator may be flattened or raised depending on the polarity of the applied voltage. This type of ferroelectric actuator essentially shows a good balance between the range of mechanical motion and the range of force output. The size of the ferroelectric actuator and the choice of voltage and frequency applied determine the inherent momentum and the magnitude of the force generated. This ferroelectric actuator can have up to several hundred percent strain and can hold a load of at least 10 pounds. One capacity of the pump can be increased by using a composite ferroelectric actuator mounted on a common manifold.

A pair of actuators stacked in a clamshell shape with their edges facing each other can obtain a double excitation amplitude. If larger excursions are required, several such actuators can be connected in series. Such arrangements are described in US Pat. No. 5,471,721, entitled "Method for Producing Single Prestressed Ceramic Devices," and US Pat. No. 5,491, "Thin Film Composite Monotype Ferroelectric Drivers and Sensors," which is also incorporated herein by reference. 5,632,841.

The actuator drive voltage may be any waveform voltage, but is preferably a sine wave. During the positive half period of the sinusoidal drive voltage, the actuators move in the direction of attraction to each other. Valves 44 and 46 are open, and valves 42 and 48 are closed. Liquid enters sections 32 and 36 and exits section 34. The actuators move in the direction of mutual repulsion while the sinusoidal drive voltage is a negative half cycle. Valves 44 and 46 are immediately closed and valves 42 and 48 are open. Liquid enters section 34 and liquid flows out of sections 32 and 36. Pumping medium enters each chamber from medium source 54 via inlet line 50. One medium feed inlet 52 is connected to a medium source 54. A feed inlet 50 located at each chamber inlet is connected to the chamber inlet 52. The pumped medium exits the chamber via outlet line 56. One-way flow valves 42 and 44 are located between feed inlet 52 and chamber inlet 50, allowing pumped media to enter each pumping chamber in response to the actuator, and backflow of the pumped media. To prevent. The outlet consists of a chamber outlet 56, a medium outlet outlet 58 and one-way flow valves 46 and 48, arranged similarly to the feed inlet. The configuration is shown in detail in FIG. 1, showing a state in which the volumes of the chambers 32 and 36 are decreasing and forcibly discharging the pumped medium. The valve 44 reduces the volume of the chambers 32 and 36, and if the chamber volume is reduced due to discharge, the valve 48 allows flow and prevents backflow of the medium. Inflows into the chamber have been shown to increase the volume 34 of the chamber. The valve 42 is opened to allow the pumped medium to enter the chamber 34 and the valve 46 is closed to prevent backflow of the pumped medium. Various pump chambers, valves and pipe arrangements are possible. 1 is only one example of such a pump configuration. It can be used as a single chamber and more than three multiple chambers can be used. Such as conventional valves or ferroelectric valves are described in detail in co-pending "ferroelectric flow control valves" and are incorporated by reference in the present patent application and the like can be used. The valve may also be of any suitable configuration and the inlet and outlet valves may be located at opposite ends of the chamber or at one end of the chamber. A simple single chamber pump is shown in FIG. 2 and performs the general operation of the three chamber descriptions. The pumped medium enters through valve 62 at feed inlet 60 and exits through valve 72 at outlet 70. The pumping chamber 64 is formed such that two ferroelectric actuators 66, a hermetic membrane 68, valves 62, 72 and all suitable configurations are possible. The opening 74 may be provided to prevent back pressure during operation of the actuator 66. 3 also shows an embodiment of a single chamber. On the other hand, the present embodiment uses the fluid valve form 76 and does not use any of the operating portions thereby. The diameter of the port 77 is smaller than the diameter of the discharge valve 78. Volume 79 is cylindrical in shape. The pumped medium enters through feed inlet 75 and then enters pump chamber 54 through port 77. Since the flow of the pumped medium has a velocity vector, it flows from port 77 to outlet 78. Such velocity vectors and emissions are not present at the inlet 75.

The displacement of each actuator occurs when a voltage is supplied to the actuator. The change in amplifier and frequency is controlled by voltage, the pumping operation and thereby the pump flow rate. The flow rate allows for very precise maximum flows in the range of just over 100 percent of maximum flows. 4 is an electrical logic block diagram for providing a sinusoidal wave whose voltage waveform changes. The electrical logic includes a waveform generator 80 that generates a sinusoidal waveform for pump operation, a voltage amplifier 82 that amplifies the voltage and current to the level required by the actuator, the waveform generator 80 and the voltage amplifier 82. DC power supply 84 for providing a DC voltage to the. The circuit can amplify up to 1000 volts peak-to-peak in the 1Hz to 20KHz frequency range to provide sine wave output and hundreds of microamps of current. For the waveform generator 80, a function generator IC chip was used. For example, the XR2206 will add some resistors, capacitors, and potentiometers to provide the desired sinusoidal waveform, which will amplify and vary from 0 to 6 volt peak-to-peak and frequencies from 1 Hz to 20 KHz. Can be. This low level sine wave signal is coupled to a fixed input gain voltage amplifier 82 which provides up to 200 times the voltage amplification. The actual amplifier design uses two high voltage usable amplifiers, connected in a push-pull configuration, which will provide twice the output of a single OP amplifier. A wide choice of high voltage op amps is to use the circuit for high voltage output capacity at a moderate level of output current, or to provide an appropriate level of output voltage at higher output current capacities. The actual requirement of each actuator will be a decision to select the high voltage op amp. The proper configuration of the push-pull circuit uses two apex PA89 op amps manufactured by Apex Micro Technology Co., Ltd., and some external components that are essentially configured to provide the required voltage and current to drive the actuator. do. The DC power supply provides a DC voltage to the waveform generator 80 and the amplifier circuit 82. The power supply provides a 12 volt DC voltage to the waveform generator and amplifier circuits. Two dc-to-dc converter sections are required by the high voltage op amp in the amplifier circuit from +500 to -500 volts at 12 Vdc.

Another electrical circuit of FIG. 5 is shown to provide a sinusoidal wave whose voltage changes at a fixed frequency of 60 Hz. The input of the variable transformer 90 is connected to a standard 117 volt outlet wall. The output of the variable transformer 90 is connected in a 1: 1 ratio to the separated transformer 92 for the safety of the operator. The output of the transformer 92 is connected to two sections of the power supply. One section is connected to a full-wave bridge rectifier 94, which includes a filter capacitor 96 that provides a positive DC bias at the output of the electrical circuit. Another section is connected to a booster 98 to provide the high voltage required by the actuator. The output of the booster 98 is connected in series with a positive DC bias voltage. Control of the booster 98 and the variable transformer 90 may provide amplification of the output voltage of the circuit up to 0-1000 volt peak-to-peak. Depending on the positive DC bias, the maximum output of the typical voltage is +600 volts (peak value) and -400 volts (peak value). The inherent characteristic of the actuator reacts at a voltage higher than the negative voltage. In this way, the positive DC bias is useful to generate the maximum displacement of the actuator.

The type of installation of the actuator separates each actuator from the pumped medium, provides a path for the human voltage to each actuator, and is installed for active suppression up to the full tolerance of each actuator in response to the applied voltage. have.

The actuator is shaped to separate each actuator from the pumped medium, provides a path for the voltage applied to each actuator, and actively suppresses each actuator up to the total permissible displacement of the actuator in response to the applied voltage. Installed to be provided. 6 is an exploded view of one embodiment of the housing and the pump chamber. The non-conductive pump housing 100 surrounds three pump chambers 102, 104, 106. The walls are assembled in a split shape between each chamber. Each wall is formed of two non-conductive sealing gaskets 108, two electrical insulators 110, two electrical contact rings 112, actuator spacers 114, and the actuators 116. The spacer 114 may have the same thickness as the actuator 116. The actuator 116 is located inside the spacer 114, and the circumference of the actuator 116 is adjacent to the inner diameter of the spacer 114. An electrical contact ring 112 is located adjacent each side 112 of the spacer and permits electrical contact with the actuator 116. The electrical insulator 110 is located adjacent to the outer surface of each contact ring 112 and the concentric circles of the actuator 116. The insulator 110 may match the pumped medium with latex having some elasticity. Non-conductive fluid, such as silicone fluid, is used between the insulator 110 and the actuator 116. The fluid is chemically stable, insulated from other components, and has a suitable viscosity to hold both the insulator 110 and the actuator 116. Elimination of air pockets increases efficiency and capacity. Sealing gasket 108 has an opening that shares a center with the opening of contact ring 112 and is positioned adjacent to each insulator 110. The sealing gasket 108 is made from a nonconductive material such as rubber. The assembly of the wall is secured by means such as a set of screws and contained between sections of the housing. The force required to fix it requires only the minimum force that is suitable to maintain the assembly. Initial stress is not necessary.

There is no limit to any fixed number, thickness or size of actuator in the design. Individual applications require careful consideration of the parameters of the component, such as the amount of actuator displacement and the force capability of the actuator.

Electrical conductors 118 are located in the housing 100 via openings drilled in the housing 100. The lid 118 contacts the set screw spring 120 and is located in the housing 100. The set screw spring 120 is connected to the electrical contact ring 112 to provide a voltage applied to the ring 112. The contact ring 112 partially covers both the spacer and the actuator. As shown in FIG. 7, the contact ring 112 has the actuator partially covering a portion 130. The contact ring 112 is an electrical conductor such as an aluminum thin film. The outlet portion 132 of the ring is in contact with the actuator and is a non-conductive material. The non-conductive material has a conductive portion 134 in contact with the set screw spring. Masking tape is one example of a suitable nonconductive material. Although circular actuators and components are recommended to be installed in a circular shape, other shapes are available. One example of a nonconductive material is a masking tape. Circular actuators and circular mounting components associated therewith are preferred, but other types are also available.

The positive and negative voltage levels applied to the actuator 26 change depending on the thickness of the actuator. Very large voltages generate an arc across the actuator.

The efficiency and capacity of the pump can be improved by the use of a valve capable of reacting to high frequencies. The fluid flow force can be increased several times by using the ferroelectric valve disclosed in PCT application "ferroelectric flow control valve".

Compared with the conventional displacement pumps, the pump according to the present invention has a low cost because the reliability is improved and there is no mechanical operation. The pump according to the invention also has an improved efficiency over conventional pumps. It sufficiently eliminates magnetic losses due to eddy currents as well as heat losses associated with the copper windings. The pump according to the invention has also improved the small size associated with current piezoelectric pumps due to its reliability, low cost, low complexity, and elimination of assembly / gluing of multiple piezoelectric disks. The same force and displacement can be obtained, which is immediately possible only by the assembly of the piezoelectric disk. Furthermore, the mounting means allows full displacement of each actuator in response to the applied voltage.

Many modifications and variations of the present invention are possible in light of the above teachings. Accordingly, it will be appreciated that the invention may be practiced otherwise than as described in the appended claims.

Claims (14)

A pump housing; Internally stressed in the dome shape having a curvature, a dome with a border and a vertex, and a height of the dome that varies with the voltage applied between its inner and outer surfaces as measured from a plane to the vertex from the plane. At least one variable volume pump chamber having at least one wall of applied ferroelectric actuators and installed inside the housing; Inlet means for introducing a pumped medium into each of said pump chambers in response to said actuator displacement; Discharge means for discharging the pumped medium from the pump chamber in response to the actuator displacement; Separating the actuator from a pumped medium and providing a path for the voltage applied to the actuator inside the wall and providing active suppression of displacement of the entire actuator in response to the voltage. Mounting means for installing the actuator; And And a voltage supply means for supplying a voltage to the actuator. The method of claim 1 wherein the inlet means: At least one pumped media feed inlet connected to a pumped media source, Chamber supply inlets installed in each chamber, and A one-way valve inserted between the pumped medium feed supply inlet and the chamber feed feed inlet, wherein the pumped medium enters the pumping chamber in response to displacement of the actuator and prevents unwanted backflow of the pumped medium. A ferroelectric pump, characterized in that the prevention. The method of claim 1 wherein said discharge means: Chamber discharge outlet connected to the chamber, At least one pumped medium discharge outlet, and A one-way valve interposed between the chamber discharge outlet and the pumped medium discharge outlet, wherein the pumped medium exits the pumping chamber in response to displacement of the actuator and prevents undesired backflow of the pumped medium. Ferroelectric pump, characterized in that. The method of claim 1 wherein said mounting means is: A spacer having a first spacer plane and a second spacer plane and a central opening, in which the actuator is positioned such that its outer periphery is in contact with the periphery of the opening; A first electrical contact ring is adjacent to a portion of the first spacer plane and a second electrical contact ring is positioned adjacent to a portion of the second spacer plane, each opening centrally to make electrical contact with the actuator. Two electrical contact rings having; Having a first separation plane and a second separation plane, the first separation plane being concentrically positioned adjacent to a portion of the outer surface of the first contact ring, and located concentrically with the actuator, Two separation membranes in which the first separation plane is concentrically located adjacent to a portion of the outer surface of the second contact ring and at the same time as the actuator and concentrically; A nonconductive fluid having an appropriate viscosity to be used between the actuator and the separator and to support the separator and the actuator together; Two non-conductive sealing gaskets having a central opening formed concentrically with said separation membrane and positioned adjacent to said separation membrane and installed concentrically adjacent to said second contact ring; And And fixing means for securing the spacer, the electrical contact ring, the separator, and the non-conductive sealing gasket to the housing. Pump housings; The internal stress of the dome has a curvature, a dome shape that has a border and a vertex, and a height of the dome that changes with the voltage applied between its inner and outer surfaces as measured from a plane to the vertex from the plane. At least one variable volume pump chamber having at least one wall of applied ferroelectric actuators and installed inside the housing; Fluid valve means for introducing and discharging the pumped medium into the respective pump chambers in response to the actuator displacement; Separating the actuator from a pumped medium and providing a path for the voltage applied to the actuator inside the wall and providing active suppression of displacement of the entire actuator in response to the voltage. Mounting means for installing the actuator, and A ferroelectric pump comprising voltage supply means for supplying voltage to the actuator. In the ferroelectric actuator installation method, Positioning the actuator within the spacer such that the spacer has openings in the first and second planes and the center and the outer boundary of the actuator is adjacent to the opening boundary; The contact layer has an opening in the center, the first contact layer is located adjacent a portion of the first plane, the second contact layer is located adjacent a portion of the second plane, and is in contact with the actuator. Positioning two electrical contact layers to provide a voltage; The insulator has a first plane and a second plane, the first insulator plane being centered and positioned adjacent to a portion of the outer surface of the first contact layer, covering the center of the actuator, the first insulator Positioning two electrical insulators such that the plane is centered and positioned adjacent a portion of the outer surface of the second contact layer and covering the center of the actuator; Simultaneously holding the insulators and the actuator with a non-conductive fluid between the actuator and the insulator of suitable viscosity; Said gasket having an opening at its center and covering the contact layer opening in a center and positioning two nonconductive sealing gaskets adjacent to coincide with a second plane of the insulator; Providing fixing means for securing the spacer, the contact layer, the insulator and the gasket to the housing. As the mounting structure of the ferroelectric actuator, A spacer having a first spacer plane and a second spacer plane and a central opening, in which the actuator is positioned such that its outer periphery is in contact with the periphery of the opening; A first electrical contact ring is adjacent to a portion of the first spacer plane and a second electrical contact ring is positioned adjacent to a portion of the second spacer plane, each opening centrally to make electrical contact with the actuator. Two electrical contact rings having; Having a first separation plane and a second separation plane, the first separation plane being concentrically positioned adjacent to a portion of the outer surface of the first contact ring, and located concentrically with the actuator, Two separation membranes in which the first separation plane is concentrically located adjacent to a portion of the outer surface of the second contact ring and at the same time as the actuator and concentrically; A nonconductive fluid having an appropriate viscosity to be used between the actuator and the separator and to support the separator and the actuator together; Two non-conductive sealing gaskets having a central opening formed concentrically with said separation membrane and positioned adjacent to said separation membrane and installed concentrically adjacent to said second contact ring; And And fixing means for securing the spacer, the electrical contact ring, the separator, and the non-conductive sealing gasket to the housing. The method of claim 1 wherein said voltage supply means is: A waveform generator for generating a waveform for the pump operation; A voltage amplifier for raising the level of the voltage and current of the waveform generator required by the actuator; And a DC power supply for providing a DC voltage to the waveform generator and the voltage amplifier. The method of claim 1 wherein the voltage means is: Variable transformer; A separation transformer connected to the variable transformer; A full-wave bridge rectifier connected to the separation transformer, and And a boost transformer connected to the separation transformer, wherein the full-wave bridge rectifier and the boost transformer are connected in series. The ferroelectric pump of claim 1, wherein the pumping medium is a liquid. The ferroelectric pump of claim 1, wherein the pumping medium is a gas. 3. The ferroelectric control valve of claim 2, wherein the valve means is a ferroelectric control valve including an internally stressed ferroelectric actuator of a domed shape having a curvature, wherein the dome shaped actuator has an edge and a vertex and passes through the edge from a plane. A ferroelectric pump, characterized in that it has a height of a dome that varies with the voltage applied between its inner and outer surfaces when measured to a peak. 4. The ferroelectric control valve of claim 3, wherein the valve means comprises a ferroelectric control valve having an internally stressed ferroelectric actuator of a dome shape having a curvature, wherein the dome shaped actuator has an edge and a vertex and passes through the edge from a plane. A ferroelectric pump, characterized in that it has a height of a dome that varies with the voltage applied between its inner and outer surfaces when measured to a peak. The method of claim 1 wherein the voltage supply means: An electrical conductor installed in the housing, and And a set screw spring in contact with said electrical conductor and in contact with said mounting means.