FR2727474B1 - INTEGRATED ELECTRIC DISCHARGE MICRO ACTUATOR AND MICROSYSTEM COMPRISING THIS MICRO ACTUATOR - Google Patents

INTEGRATED ELECTRIC DISCHARGE MICRO ACTUATOR AND MICROSYSTEM COMPRISING THIS MICRO ACTUATOR

Info

Publication number
FR2727474B1
FR2727474B1 FR9414262A FR9414262A FR2727474B1 FR 2727474 B1 FR2727474 B1 FR 2727474B1 FR 9414262 A FR9414262 A FR 9414262A FR 9414262 A FR9414262 A FR 9414262A FR 2727474 B1 FR2727474 B1 FR 2727474B1
Authority
FR
France
Prior art keywords
micro actuator
microsystem
electric discharge
integrated electric
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9414262A
Other languages
French (fr)
Other versions
FR2727474A1 (en
Inventor
Daniel Esteve
Pierre Bayle
Robert Caen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR9414262A priority Critical patent/FR2727474B1/en
Priority to PCT/FR1995/001525 priority patent/WO1996017172A1/en
Publication of FR2727474A1 publication Critical patent/FR2727474A1/en
Application granted granted Critical
Publication of FR2727474B1 publication Critical patent/FR2727474B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F99/00—Subject matter not provided for in other groups of this subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/20—Other positive-displacement pumps
    • F04B19/24—Pumping by heat expansion of pumped fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F1/00—Pumps using positively or negatively pressurised fluid medium acting directly on the liquid to be pumped
    • F04F1/06—Pumps using positively or negatively pressurised fluid medium acting directly on the liquid to be pumped the fluid medium acting on the surface of the liquid to be pumped
    • F04F1/16—Pumps using positively or negatively pressurised fluid medium acting directly on the liquid to be pumped the fluid medium acting on the surface of the liquid to be pumped characterised by the fluid medium being suddenly pressurised, e.g. by explosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08—Characterised by the construction of the motor unit
    • F15B15/10—Characterised by the construction of the motor unit the motor being of diaphragm type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
FR9414262A 1994-11-25 1994-11-25 INTEGRATED ELECTRIC DISCHARGE MICRO ACTUATOR AND MICROSYSTEM COMPRISING THIS MICRO ACTUATOR Expired - Fee Related FR2727474B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR9414262A FR2727474B1 (en) 1994-11-25 1994-11-25 INTEGRATED ELECTRIC DISCHARGE MICRO ACTUATOR AND MICROSYSTEM COMPRISING THIS MICRO ACTUATOR
PCT/FR1995/001525 WO1996017172A1 (en) 1994-11-25 1995-11-20 Integrated electrical discharge microactuator and microsystem comprising same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9414262A FR2727474B1 (en) 1994-11-25 1994-11-25 INTEGRATED ELECTRIC DISCHARGE MICRO ACTUATOR AND MICROSYSTEM COMPRISING THIS MICRO ACTUATOR

Publications (2)

Publication Number Publication Date
FR2727474A1 FR2727474A1 (en) 1996-05-31
FR2727474B1 true FR2727474B1 (en) 1997-01-10

Family

ID=9469232

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9414262A Expired - Fee Related FR2727474B1 (en) 1994-11-25 1994-11-25 INTEGRATED ELECTRIC DISCHARGE MICRO ACTUATOR AND MICROSYSTEM COMPRISING THIS MICRO ACTUATOR

Country Status (2)

Country Link
FR (1) FR2727474B1 (en)
WO (1) WO1996017172A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1137884A1 (en) * 1998-12-11 2001-10-04 The Government of the United States of America as represented by the Administrator of the National Aeronautics and Space Adm. Ferroelectric pump
US8353682B2 (en) 2007-11-23 2013-01-15 Stichting Imec Nederland Microfluidic-device systems and methods for manufacturing microfluidic-device systems

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3266438A (en) * 1965-07-21 1966-08-16 William H Savage Pumps
US3586461A (en) * 1969-01-16 1971-06-22 Continental Can Co Sonic multistage pump
DE4105675C1 (en) * 1991-01-30 1992-04-30 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De Miniature electrostatic pump or flow velocity sensor - has semiconductor device sandwiched between facing plates with flow apertures
US5256036A (en) * 1991-04-11 1993-10-26 Southwest Research Institute Method and apparatus for pumping a medium
DE4239464A1 (en) * 1992-11-24 1994-05-26 Heinzl Joachim Electrothermal static micro-pump with fluid-pressure-operated valve - drives liq. past resilient flap into outlet by expansion of vapour bubble generated by electric heating element

Also Published As

Publication number Publication date
WO1996017172A1 (en) 1996-06-06
FR2727474A1 (en) 1996-05-31

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Legal Events

Date Code Title Description
ST Notification of lapse