KR20010096282A - Equalizer cylinder - Google Patents

Abstract

PURPOSE: An equalizer cylinder is provided to improve the workability when repeating the forward and reverse operation of sliders by a same distance without any deviation when pistons having a phase difference. CONSTITUTION: An equalizer cylinder includes a single cylinder block(10) having a plurality of cylinder chambers(11) formed with air ports, and assembling screw-holes(13) formed at both side surfaces and a top surface, a plurality of pistons(20) received in the plurality of cylinder chambers, a phase difference connection element(30) connecting the pistons with a same distance of no deviation while the pistons having a phase difference, thereby providing forward and reverse operation, a plurality of sliders(40) mounted to the pistons and having jig holders(41) formed with assembling holes(42) for attaching jigs and slide elements(43) formed with bearing grooves(44) longitudinally and assembling screw-holes(49) for attaching jigs, the jig holders being perpendicular to the slide elements, a plurality of guide rails(50) having U-shaped guide grooves(51) for guiding the forward and reverse operation of the sliders, bearing grooves(52) formed at both sides longitudinally facing to the bearing grooves of the slide elements, and assembling screw-holes(53) in conformity with the assembling screw-holes of the cylinder block to be coupled with the cylinder block by screws(54), a plurality of metal roller bearings(61) crossed by 90° along the bearing grooves of the guide grooves and the bearing grooves of the slide elements, and spacer bearings(62) formed of resin and interposed between the roller bearings.

Description

Equalizer Cylinder {EQUALIZER CYLINDER}

The present invention relates to a double-acting type cylinder used in various industrial machinery, and more particularly, the front and back operation is provided without deviation of the same distance in the state that a plurality of pistons have a phase difference, the handling of parts Due to the drastically reduced workability of the device, the efficiency of device operation and variable mounting of sliders with separate jigs can be used depending on the device's operation, maximizing convenience of use and reducing manufacturing costs by simplifying components. This relates to the equalizer cylinder provided.

In general, in the manufacture of micro products such as semiconductors, assembly equipment is indispensable for the assembly of small parts required in each manufacturing line, and such assembly equipment is transported by clamping, absorbing, and moving the assembly parts that are transferred along the automation line. It is used to mount a separate jig (JIG) to the cylinder for the purpose of clamping or adsorbing a small component such as a chip or the like as described above and insert work on the wafer.

Such a cylinder is composed of a cylinder tube, a cylinder block for accommodating the cylinder tube, a piston reciprocating in the cylinder tube, and a piston rod mounted on the piston, the outer shape of the piston and the inside of the cylinder tube. It is cylindrical in shape, and has a structure in which the piston rod is located at the center.

Such a conventional cylinder has a large rod because the piston and the piston rod are rotated during the reciprocating operation of the piston, so that a separate rod guider is used when the piston and the piston rod are mounted on the equipment requiring precise reciprocating motion and accurate position. Due to the friction with the rod guider due to the reciprocating operation of the piston rod, the operating efficiency is reduced, making it difficult to use in small assembly equipment used for assembling small parts such as semiconductors. It has a disadvantage that cannot guarantee the precision of operation.

Thus, the present applicant has been filed with a patent No. 222421 for the application of a small stopper cylinder suitable for application to such small component handling equipment such as semiconductors.

Such a stopper cylinder of the present applicant has a disadvantage of poor workability due to the handling of very small parts on the automation line in the single-acting type.

For example, when applied to insert work of a chip on a semiconductor wafer, the applicant's prior application technique picks up a chip on a transfer line by a forward movement of a piston and performs a reverse operation, and then back to the wafer by the piston forward operation. The process of inserting the chip proceeds, that is, the insert work step of moving the piston forward, backward, forward and backward, and the pick-up step in which the chip is picked up and moved backward by the forward movement of the piston. There is a disadvantage that the assembly of the provided workability is lowered.

In addition, the applicant's prior application technology of the slider to which the separate jig is attached is maintained only in a single fixed state is applied to the equipment, the position can not be changed according to the work position was inconvenient to use the constraint of the equipment application.

In addition, the contact friction force between a plurality of metal roller bearings that are accommodated in the cross state on the slider and the guide rail is not minimized, so that smooth feed is not provided during the forward and backward movements of the slider, and noise and roller bearings are generated. Due to the rapid progress of wear, there is a disadvantage that the life is shortened.

That is, the applicant's prior application technology is accommodated so that a plurality of metal roller bearings are freely moved by crossing 90 degrees in the bearing guide groove of the slider and the bearing guide groove of the slider, but the rolling of each roller bearing according to the forward and backward operations is At the same time, the parts are in close contact with each other, and these parts are quickly worn out due to the severe friction of the cross contact surfaces between the roller bearings due to such close contact, and noises are generated. The former had the disadvantage of poor precision in reverse operation.

In particular, the air inlet and outlet according to the forward and backward reciprocating operation of the piston is required to ensure the airtightness of the piston has a disadvantage in that the manufacturing cost of the component constituting the piston is complicated.

The present invention has been researched and developed to effectively solve the disadvantages of the prior art as described above and the disadvantages of the applicant's prior application technology,

SUMMARY OF THE INVENTION An object of the present invention is to move a plurality of sliders forward and backward without shifting the same distance in a state in which a plurality of pistons are controlled by air control in a single cylinder block, thereby allowing pickup and handling of handling parts simultaneously. The assembly work is provided to provide an equalizer cylinder that can maximize workability.

An object of the present invention is to provide an equalizer cylinder maximizing the ease of use with the compatibility according to the equipment can be used by variable mounting the slider attached to the jig according to the operation of the device.

An object of the present invention is to provide an equalizer cylinder that maximizes the reliability of the product by minimizing the contact friction between the roller bearings for supporting the forward and backward operation to provide a smooth transfer and extension of the service life, minimizing the noise.

SUMMARY OF THE INVENTION An object of the present invention is to provide an equalizer cylinder capable of minimizing the manufacturing cost by simplifying the constituent members of the piston for air tightness because the air control according to the forward and backward operation of the piston is possible by a single port provided in each cylinder chamber. Is in.

The object of the present invention is a cylinder block having a plurality of cylinder chambers each formed with an air port and assembly screw holes corresponding to both side and upper surface directions;

A phase difference connector for providing forward and backward operations by linking the same distance without deviation without shifting a plurality of pistons accommodated in the plurality of cylinder chambers and the plurality of pistons have a phase difference;

Sliders provided with a mounting screw hole for jig attachment respectively mounted to the piston,

A guide rail mounted to the assembling screw hole of the cylinder block to guide the forward and backward operations of the slider;

Equalizer consisting of a plurality of metal roller bearings received in a 90 degree cross state along the bearing grooves of the sliders and the guide rails of the guide rails, and a spacer bearing of resin material provided between the metal roller bearings. By the cylinder.

1 is a perspective view of a first embodiment of the present invention;

2 is an exploded perspective view of FIG. 1;

3 is a plan view of a first embodiment of the present invention;

4 is a plan sectional view of FIG. 3;

5 is a front sectional view of the first embodiment of the present invention;

6 is a front view of a first embodiment of the present invention;

7 is a rear view of the first embodiment of the present invention;

8 is a perspective view of a second embodiment of the present invention;

9 is a front view of FIG. 8;

<Description of the reference numerals for the main parts of the drawings>

10: cylinder block 20: piston

30: phase difference connector 40: slider

50: guide rail 61: metal roller bearing

62: spacer bearing of resin material

Hereinafter, the configuration of the present invention will be described in detail with reference to the accompanying drawings.

That is, the present invention, as shown in Figures 1 to 7 shown in the first embodiment, a plurality of cylinder chambers (11, 11) formed with each of the airports (12, 12) and the assembly screw holes (both sides and upper surfaces) A single cylinder block 10 having 13 and 13, respectively,

A plurality of pistons (20, 20) accommodated in the plurality of cylinder chambers (11, 11) and the plurality of pistons in the state having a phase difference (연계 相差) in connection with the same distance without deviation to provide forward and backward operation Phase difference connector 30,

Jig holders 41 and 41 mounted on the pistons 20 and 20 and provided with jig mounting assembly holes 42 and 42, and jig attaching assembly to bearing grooves 44 and 44 and side surfaces in both longitudinal directions. A plurality of sliders 40 and 40 having integrally formed at right angles between the slides 43 and 43 provided with the slots 49 and 49,

Guide grooves 51 and 51 having a “c” shape are formed to guide the forward and backward movements of the sliders 40 and 40. The bearing grooves 52, both of which are opposed to the bearing grooves 44 and 44. 52 and a plurality of guide rails 50 which are respectively mounted by screws 54 and 54 through assembly screw holes 53 and 53 which coincide with the assembly screw holes 13 and 13 of the cylinder block 10. 50),

A plurality of metals accommodated in a 90 degree cross state along the bearing grooves 44 and 44 between the slides 43 and 43 and the bearing grooves 52 and 52 of the guide grooves 51 and 51. And a spacer bearing 62 made of a resin material provided between the roller bearing 61 and the metal roller bearing.

At this time, the guide rails (50, 50), as in the preferred embodiment of the present invention, the assembling screw holes (13, 13) and the guide rails (50, 50) provided on both sides of the cylinder block (10) The sliders 40 and 40 can be assembled in the same horizontal direction by the screws 54 and 54, respectively, while the screw holes 53 and 53 are aligned.

As shown in Figure 8 and 9 shown in another embodiment of the present invention the assembly screw holes of the guide rail (50, 50) in the assembly screw holes (13, 13) provided on the upper surface of the cylinder block ( 53 and 53, the sliders 40 and 40 can be assembled in the same vertical direction by screws 54 and 54, respectively, so that the sliders 40 and 40 can be assembled in the same vertical direction.

The cylinder block 10 is provided with a receiving groove 14 in the upper center, the receiving groove is a guide slot hole (15, 15) through the longitudinal vertical center of the cylinder chamber (11, 11) and the center in the center Screw holes 17 and 17 are formed in the shaft hole 16 and the front and rear thereof, and equipment mounting screw grooves 18 and 18 are formed outside the air holes 12 and 12 formed on the rear surface thereof.

The pistons 20 and 20 are piston heads 21 and 21 having air receiving grooves 22 and 22 confronted with the air ports 12 and 12 which penetrate the cylinder chambers 11 and 11 to the rear. Is formed, the piston packing (24, 24) is formed by forming step grooves (23, 23), the assembly bolt holes (25, 25) is formed in the forward jig holder of the slider (40, 40) It is connected by screw assembly via the assembly bolts 46 and 46 and the buffer packings 47 and 47 fitted through the bolt assembly holes 45 and 45 penetrated through the 41 and 41, and the cylinder block 10 of the Pin coupling grooves 26 and 26 are formed in the vertical direction as the positions of the guide slot holes 15 and 15.

The guide rails 50 and 50 pass through the tightening screw holes 55 at right angles to the upper side than the bearing grooves 52 and 52 opposed to the respective inner sides, and the tightening screws 56 are screwed together. Roller bearings 61 and 61 between the bearing groove 52 of the inner side and the bearing groove 44 of the slide 43 as the width adjustment of the guide groove 51 by the tightening degree of the tightening screw 56. The sliding friction of the can be adjusted.

The slides 43 and 43 of the sliders 40 and 40 stopper screws before and after the slides 43 and 43 to prevent the roller bearings 61 and the spacer bearings 62 from slipping out. 48 and 48 are assembled and positioned between them to be assembled to the guide groove 51 of the guide rail 50.

The phase difference connector 30 assembles the bearing 33 to the center hole 32 through which the yoke 31 having pin slots 35 and 35 opposed to both sides is centered, The shaft pin 34 is assembled to be rotatably coupled to the central shaft hole 16 of the receiving groove 14 by the assembly, the pin slot (35, 35) the operating pin (36, 36) is inserted into the guide slot Penetration through the balls (15, 15) and fitted into the pin coupling groove (26, 26) of the piston (20, 20) fitted in the cylinder chamber (11, 11), respectively, the piston (20) of the one side in the forward state, The piston 20 on the other side is assembled in a reverse state to have a mutual phase difference (preferably at an angle of 45 degrees), and the yoke cover 37 corresponding to the inner diameter of the receiving groove 14 is disposed at the upper portion of the yoke 31. It is covered by screw assembly through the screw holes (39, 39) corresponding to the screw grooves (17, 17) of the receiving groove (14) as the bottom assembly screw (38).

In the figure, reference numeral 27 denotes a magnet, and 28 denotes a magnetic detection rod.

The present invention is used to mount to the operating equipment through the equipment mounting screw grooves (18, 18) formed on the back of the cylinder block (10).

At this time, the jig holders 41 and 41 of the sliders 40 and 40 are provided with a work jig (not shown) such as clamping or adsorption through the jig attachment screw holes 42 and 42 formed on the front and side surfaces thereof. Done.

In this state, when pneumatic pressure is applied from the pneumatic line (not shown) connected to the air port 12 to the piston 20 in the reverse state, the piston 20 is driven by the pneumatic force flowing into the cylinder chamber 11. In the forward operation of the one side piston 20, the other side piston 20 is reversed by the linkage operation by the phase difference connector 30.

That is, the forward operation of the one side piston 20 is the one operation pin 36 is fitted in the pin coupling groove 26 is moved along the guide slot hole 15, the forward movement of the operation pin 36 Movement along one side of the pin slot 35 is pushed at the same time as the yoke 31 is rotated about the shaft pin 34 and at the same time the working pin 36 fitted to the pin slot 35 on the other side of the guide slot hole The piston 20 connected to the actuating pin 36 through the pin coupling groove 26 is moved backward along the 15.

On the contrary, when pneumatic pressure is applied through the air port 12 provided in the cylinder chamber 11 of the reversed piston 20, the pneumatic pressure is the air receiving groove of the piston head 21 of the piston 20 ( The piston 20, which is pressurized while being easily drawn in by the air 22 and is advanced in the reverse order, is reversed.

Therefore, since the pistons 20 and 20 are always connected to the phase difference connector 30 in a state of having a phase difference, when the piston on one side moves forward, the piston 20 on the other side moves backward and the piston 20 on the other side again. When the piston is advanced, the one side of the piston 20 performs a repetitive operation of reversing, and the sliders 40 and 40 connected to the pistons 20 and 20 and slide along the guide rails 50 and 50 are moved. As the conventional jig installed in the jig holders 41 and 41 while repeating the same operation as the pistons 20 and 20, clamping and adsorption transfer of ultra-small components such as semiconductor components are provided.

As a result, when the piston 20 on one side always moves forward even if the plurality of pistons 20 and 20 always have the same phase difference as a single cylinder, the piston 20 on the other side moves backward, and the piston 20 on the other side moves forward. If one side of the piston 20 is equally repeated to operate the equal distance to the reverse to apply to the repetitive work the efficiency is doubled compared to the prior art.

In addition, if necessary, the positioning of the guide rails 50 and 50 and the sliders 40 and 40 can be used in a variable installation in terms of operating equipment or space utilization, thereby ensuring compatibility.

On the other hand, the air pressure according to the reciprocating operation of the piston (20, 20) is always made at the rear of the piston head (21, 21), the airtight of the cylinder chamber (11, 11) is assembled to the piston head (21, 21) The airtightness is ensured by the piston packings 24 and 24, so that the simplification of the constituent members is provided, and when the wear occurs due to long-term use, the replacement can be easily performed.

In addition, according to the present invention, according to the air pressure flowing into the cylinder chamber (11, 11) or according to the wear progress of the metal roller bearing 61 according to the long-term use, the tightening screw holes 55 of the guide rail (50, 50) Roller bearing between the bearing groove 52 of the inner side by the width adjustment of the guide groove 51 and the bearing groove 44 between the slides 43 by adjusting the width of the guide groove 51. (61, 61) The sliding friction of the power can be adjusted to use the equipment is effective.

In addition, the metal roller bearing 61 slides along the 90 ° V-shaped bearing grooves 44 and 52 formed of the sliders 40 and 40 and the respective guide rails 50 and 50, between them. The spacer bearing 62 of another material (resin material) interposed therebetween minimizes noise and reduces wear at the same time by a resin material whose friction is harder than metal on the cross contact surface (outer peripheral surface).

The spacer bearing 62 is preferably made of a Teflon material, but may be made of any resin material. The bearing grooves 44 may be formed at 45 degrees with the metal roller bearings 61 disposed to cross the 90 degrees. It is preferable to be disposed in the upright state in the longitudinal direction of 52, and to have a diameter smaller than the diameter of the metal roller bearing 61.

As described in detail above, in the present invention, a plurality of sliders have a phase difference in a single cylinder block in a state in which a plurality of sliders have the same distance, without shifting the same distance, without repetitive operation. When applied, the workability is doubled,

According to the operation of the device, a slider equipped with a separate jig can be mounted and used.

By minimizing contact friction between roller bearings, smooth conveyance and extension of service life, noise minimization effect, and simple structure of piston are possible, which reduces manufacturing cost.

Claims (5)

A single cylinder block 10 having a plurality of cylinder chambers 11 and 11 formed with respective air ports 12 and 12 and assembly screw holes 13 and 13 respectively on both side and upper surfaces thereof; A plurality of pistons (20, 20) accommodated in the plurality of cylinder chambers (11, 11) and the plurality of pistons in the state having a phase difference (연계 相差) in connection with the same distance without deviation to provide forward and backward operation Phase difference connector 30, Jig holders 41 and 41 mounted on the pistons 20 and 20 and provided with jig mounting assembly holes 42 and 42, and jig attaching assembly to bearing grooves 44 and 44 and side surfaces in both longitudinal directions. A plurality of sliders 40 and 40 having integrally formed at right angles between the slides 43 and 43 provided with the slots 49 and 49, Guide grooves 51 and 51 having a “c” shape are formed to guide the forward and backward movements of the sliders 40 and 40. The bearing grooves 52, both of which are opposed to the bearing grooves 44 and 44. 52 and a plurality of guide rails 50 which are respectively mounted by screws 54 and 54 through assembly screw holes 53 and 53 which coincide with the assembly screw holes 13 and 13 of the cylinder block 10. 50), A plurality of metals accommodated in a 90 degree cross state along the bearing grooves 44 and 44 between the slides 43 and 43 and the bearing grooves 52 and 52 of the guide grooves 51 and 51. An equalizer cylinder comprising: a roller bearing (61) and a spacer bearing (62) made of a resin provided between the roller bearing made of metal. The method of claim 1, wherein the screw 54 in the state in which the assembly screw holes (13, 13) provided on both sides of the cylinder block 10 and the assembly screw holes (53, 53) of the guide rail (50, 50) are aligned. An equalizer cylinder, characterized in that the sliders (40) and (40) are mounted in the horizontal direction so as to be assembled in the same horizontal direction. According to claim 1 or 2, wherein the assembly screw holes (53, 53) of the guide rails (50, 50) are fitted to the assembly screw holes (13, 13) provided on the upper surface of the cylinder block (10). Equalizer cylinder, characterized in that the mounting in the vertical direction by the screws (54, 54) in the state so that the slider (40, 40) can be assembled and used in the same vertical direction. The slides 43 and 43 of claim 1, wherein the slides 43 and 43 of the sliders 40 and 40 are disposed between the slides 43 and 43 to prevent the roller bearings 61 and the spacer bearings 62 from escaping. An equalizer cylinder, characterized in that the front and rear stopper screws (48,48) are assembled and positioned between them and assembled in the guide groove (51) of the guide rail (50). The cylinder block 10 is provided with a receiving groove 14 in the upper center, the receiving groove is a guide slot hole (15, 15) through the longitudinal vertical center of the cylinder chamber (11, 11) and the center in the center Screw holes 17 and 17 are formed in the shaft hole 16 and the front and rear thereof, and equipment mounting screw grooves 18 and 18 are formed outside the air holes 12 and 12 formed on the rear surface thereof. The pistons 20 and 20 are piston heads 21 and 21 having air receiving grooves 22 and 22 confronted with the air ports 12 and 12 which penetrate the cylinder chambers 11 and 11 to the rear. Is formed, the piston packing (24, 24) is formed by forming step grooves (23, 23), the assembly bolt holes (25, 25) is formed in the forward jig holder of the slider (40, 40) It is connected by screw assembly via the assembly bolts 46 and 46 and the buffer packings 47 and 47 fitted through the bolt assembly holes 45 and 45 penetrated through the 41 and 41, and the cylinder block 10 of the Pin coupling grooves 26 and 26 are formed in the vertical direction as the positions of the guide slot holes 15 and 15, The phase difference connector 30 assembles the bearing 33 to the center hole 32 through which the yoke 31 having pin slots 35 and 35 opposed to both sides is centered, The shaft pin 34 is assembled to be rotatably coupled to the central shaft hole 16 of the receiving groove 14 by the assembly, the pin slot (35, 35) the operating pin (36, 36) is inserted into the guide slot Penetration through the balls (15, 15) and fitted into the pin coupling groove (26, 26) of the piston (20, 20) fitted in the cylinder chamber (11, 11), respectively, the piston (20) of the one side in the forward state, The piston 20 on the other side is assembled in a reverse state to have a mutual phase difference (preferably at an angle of 45 degrees), and the yoke cover 37 corresponding to the inner diameter of the receiving groove 14 is disposed at the upper portion of the yoke 31. Is covered with a screw assembly (39, 39) corresponding to the screw grooves (17, 17) of the receiving groove (14) as the bottom assembly screw (38) is fixed by screw assembly Equalizer cylinder.