KR20010028523A - Micro passive element and method for manufacturing micro passive element - Google Patents

Micro passive element and method for manufacturing micro passive element Download PDF

Info

Publication number
KR20010028523A
KR20010028523A KR1019990040802A KR19990040802A KR20010028523A KR 20010028523 A KR20010028523 A KR 20010028523A KR 1019990040802 A KR1019990040802 A KR 1019990040802A KR 19990040802 A KR19990040802 A KR 19990040802A KR 20010028523 A KR20010028523 A KR 20010028523A
Authority
KR
South Korea
Prior art keywords
forming
mold
passive element
insulation film
depositing
Prior art date
Application number
KR1019990040802A
Other languages
Korean (ko)
Other versions
KR100357096B1 (en
Inventor
Jae Yeong Park
Original Assignee
Lg Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lg Electronics Inc filed Critical Lg Electronics Inc
Priority to KR1019990040802A priority Critical patent/KR100357096B1/en
Publication of KR20010028523A publication Critical patent/KR20010028523A/en
Application granted granted Critical
Publication of KR100357096B1 publication Critical patent/KR100357096B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type 
    • H01F17/0006—Printed inductances
    • H01F17/0033—Printed inductances with the coil helically wound around a magnetic core
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Coils Or Transformers For Communication (AREA)

Abstract

PURPOSE: A micro passive element and method for manufacturing micro passive element is provided to reduce skin effect and eddy current losses in a high frequency by dividing the magnetic core into a plurality of rectangular fragments. CONSTITUTION: A micro passive element comprises a substrate; upper and lower magnetic cores(1,2) formed onto the substrate; a plurality of side magnetic cores(3) arranged between each of edges of upper and lower magnetic cores; conductive lines(5,6) wound at the circumference of the side magnetic core. A method comprises the steps of forming a first mold for forming the lower magnetic core by forming a sacrificial layer onto the substrate and patterning the resultant structure; depositing magnetic alloys to the first mold and forming an insulation film all over the resultant structure; forming a second mold for forming the lower conductive line by forming and patterning the sacrificial layer onto the insulation film; depositing a conductive material onto the second mold and forming an insulation film all over the resultant structure; selectively forming a via to the conductive material, and forming a third mold by forming and patterning a sacrificial layer onto the insulation film; depositing a conductive material onto the third mold and forming an insulation film all over the resultant structure; forming a fourth mold and a fifth mold; and depositing magnetic alloys to the fifth mold and removing the sacrificial layer.
KR1019990040802A 1999-09-21 1999-09-21 micro passive element and fabrication method KR100357096B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019990040802A KR100357096B1 (en) 1999-09-21 1999-09-21 micro passive element and fabrication method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019990040802A KR100357096B1 (en) 1999-09-21 1999-09-21 micro passive element and fabrication method

Publications (2)

Publication Number Publication Date
KR20010028523A true KR20010028523A (en) 2001-04-06
KR100357096B1 KR100357096B1 (en) 2002-10-18

Family

ID=19612547

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019990040802A KR100357096B1 (en) 1999-09-21 1999-09-21 micro passive element and fabrication method

Country Status (1)

Country Link
KR (1) KR100357096B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100776406B1 (en) * 2006-02-16 2007-11-16 삼성전자주식회사 Micro inductor and fabrication method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5945902A (en) * 1997-09-22 1999-08-31 Zefv Lipkes Core and coil structure and method of making the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100776406B1 (en) * 2006-02-16 2007-11-16 삼성전자주식회사 Micro inductor and fabrication method

Also Published As

Publication number Publication date
KR100357096B1 (en) 2002-10-18

Similar Documents

Publication Publication Date Title
NO20001442L (en) Core and coil structure, and method of manufacture thereof
JPS54110424A (en) Transformer
WO1998044487A3 (en) Method of manufacturing a magnetic head having a structure of layers
JPS6455716A (en) Thin film magnetic head and its manufacture
TW325561B (en) Thin film magnetic head tip and manufacturing method thereof
JPS6112004A (en) Multipolar core made of amorphous alloy and manufacture thereof
ATE380651T1 (en) METHOD FOR PRODUCING A TRANSFORMER COIL WITH DISPOSABLE CORE AND TOOL
KR20010028523A (en) Micro passive element and method for manufacturing micro passive element
JPS56157011A (en) Open-magnetic-circuit type laminated coil
JP4431302B2 (en) Magnetic domain controlled soft magnetic thin film, method for producing the same, and high frequency magnetic device
CN109920640A (en) A kind of method and associated film core inductance in printed circuit board Planar integration thin film magnetic core inductance
JPS5766522A (en) Thin-film magnetic head
CN210956326U (en) Permalloy winding runway-shaped iron core
JPS5715225A (en) Magnetic resistance effect type magnetic head
JPS5898906A (en) Iron core
Yamada et al. Fabrication of wrapped micro coils wound around a magnetic core
JPS5832218A (en) Production of magnetic head
JPS5587406A (en) Induction coil
JPS5788518A (en) Manufacture for thin film magnetic head
JPS56133803A (en) Reinforcing structure of pancake coil for pancake-type superconductive winding
JPS56145516A (en) Production of electromagnetic transducer
JPS56112840A (en) Outer rotor motor
JPS57127911A (en) Thin film magnetic head
Gabriel et al. Extrusion of Fe-Nd-B Magnets. A Direct Approach to Obtaining Integrated Inductor Devices
JPS5539620A (en) Multiwound coil

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
N231 Notification of change of applicant
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20070918

Year of fee payment: 6

LAPS Lapse due to unpaid annual fee