KR20000071648A - 미량시료분석장치 - Google Patents
미량시료분석장치 Download PDFInfo
- Publication number
- KR20000071648A KR20000071648A KR1020000019161A KR20000019161A KR20000071648A KR 20000071648 A KR20000071648 A KR 20000071648A KR 1020000019161 A KR1020000019161 A KR 1020000019161A KR 20000019161 A KR20000019161 A KR 20000019161A KR 20000071648 A KR20000071648 A KR 20000071648A
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- KR
- South Korea
- Prior art keywords
- sample
- hole
- rays
- sample stage
- heavy metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims abstract description 34
- 229910001385 heavy metal Inorganic materials 0.000 claims abstract description 29
- 239000010408 film Substances 0.000 claims abstract description 23
- 238000004458 analytical method Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 8
- 238000001035 drying Methods 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims description 2
- 239000007788 liquid Substances 0.000 abstract description 2
- 239000011347 resin Substances 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 238000001228 spectrum Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000002083 X-ray spectrum Methods 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 239000013077 target material Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000921 elemental analysis Methods 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910021654 trace metal Inorganic materials 0.000 description 1
- 235000013619 trace mineral Nutrition 0.000 description 1
- 239000011573 trace mineral Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/309—Accessories, mechanical or electrical features support of sample holder
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/321—Accessories, mechanical or electrical features manipulator for positioning a part
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/50—Detectors
- G01N2223/507—Detectors secondary-emission detector
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
Claims (10)
- 미량의 시료를 분석하는 장치에 있어서,1차 X선을 발생시키는 X선원과,이 X선을 조사하는 시료를 고정하는 이동 가능한 시료 스테이지와,상기 시료로부터 발생된 형광 X선을 검출하는 검출기로 구성되며,상기 시료 스테이지에는, 1차 X선의 조사 빔의 축을 중심축으로 하여, 직경 2 ~ 10 mm정도의 원주형이나 혹은 이 원주에 외접하는 각추형의 관통한 구멍이 한 개 또는 병행하여 복수 개가 형성되어 있고, 각각 구멍의 내면에 중금속 피막을 부착하는 것을 특징으로 하는 미량시료분석장치.
- 미량의 시료를 분석하는 장치에 있어서,1차 X선을 발생시키는 X선원과,이 X선을 조사하는 시료를 고정하는 이동 가능한 시료 스테이지와,상기 시료로부터 발생된 형광 X선을 검출하는 검출기로 구성되며,상기 시료 스테이지는, 1차 X선의 조사 빔의 축을 중심축으로 하여, 직경 2 ~ 10 mm정도의 원주형이나 또는 이 원주에 외접하는 각추형의 구멍을 한 개 또는 병렬로 복수 개를 가지며, 각각의 구멍의 깊이는 상기 1차 X선 빔이 상기 구멍의 저면에 만든 조사 부위가 검출기로부터 보이지 않은 깊이이고, 각 구멍의 저면과 내면에 중금속 피막이 부착된 것을 특징으로 하는 미량시료분석장치.
- 미량의 시료를 분석하는 장치에 있어서,1차 X선을 발생시키는 X선원과,이 X선을 조사하는 시료를 고정하는 이동 가능한 시료 스테이지와,상기 시료로부터 발생된 형광 X선을 검출하는 검출기로 구성되며,상기 시료 시테이지에는 1차 X선의 조사 빔의 축을 중심축으로 하여, 개구부가 직경 2 ~ 10 mm정도의 원이고, 1차 X선의 조사방향을 향해서 점차적으로 괴가 작아지는 역원추형이나 이 원추에 외접하는 각추형의 구멍이 한 개 또는 병렬로 복수개가 형성되며, 각 구멍의 내면에 중금속 피막이 부착되는 것을 특징으로 하는 미량시료분석장치.
- 미량의 시료를 분석하는 장치에 있어서,1차 X선을 발생시키는 X선원과,이 X선을 조사하는 시료를 고정하는 이동 가능한 시료 스테이지와,상기 시료로부터 발생된 형광 X선을 검출하는 검출기로 구성되며,상기 시료 스테이지는, 2 ~ 10 mm 간격으로 1차 X선의 조사 빔의 축과 평행한 2장 이상의 중금속판과 상기 중금속판에 수직인 2 ~ 10 mm 간격으로 평행한 2장 이상의 중금속판이 격자형으로 구성되며,상기 중금속판을 지지하는 저면은 동일한 원소의 중금속판으로 구성되며,상기 중금속판으로 둘러싸인 부분을 구멍이라고 보면, 상기 1차 X선 빔이 구멍의 저면으로 조사하는 조사 부위가 검출기로 볼 수 없을 정도의 깊이를 갖는 것을 특징으로 하는 미량시료분석장치.
- 제1항, 제2항 또는 제3항에 있어서,시료 스테이지 상에 놓인 측정시료 상에 설치 가능하며 상기 시료 스테이지의 구멍 내면과 동일한 중금속 피막을 상면에 얹은 덮개를 가지며, 상기 덮개에는, 덮개를 시료스테이지에 포개었을 때에 시료 스테이지에 형성된 구멍과 동일한 중심을 갖는 직경 2 ~ 10 mm의 구멍이 형성되어 있는 것을 특징으로 하는 미량시료분석장치.
- 제4항에 있어서,시료 스테이지 상에 놓인 측정시료 상에 설치 가능하며 격자형의 시료 스테이지와 동일한 중금속 피막을 상면에 얹은 덮개를 가지며, 상기 덮개에는, 덮개를 시료스테이지에 포개었을 때에 시료 스테이지 형성된 구멍과 동일한 중심을 갖는 직경 2 ~ 10 mm의 구멍을 형성하는 것을 특징으로 하는 미량시료분석장치.
- 제1항 내지 제6항 중 어느 한 항에 있어서,상기 구멍의 내면이나 저면에 형성된 피막, 또는 격자상이나 덮개의 상면에 놓인 피막이 X선원의 타겟 원소와 동일한 것을 특징으로 하는 미량시료분석장치.
- 제5항에 있어서,시료 스테이지에 형성된 각 구멍의 중심과 그 위에 얹은 덮개의 각 구멍의 중심을 일치시키도록 도계 또는 위치결정핀 등의 위치결정기구를 구비하고 있는 미량시료분석장치.
- 제6항에 있어서,중금속판으로 둘러싸인 부분을 구멍이라고 볼 때, 각 구멍의 중심과 그 위에 놓인 상기 덮개의 각 구멍의 중심을 일치시키도록 도계 또는 위치결정핀 등의 위치결정기구를 구비한 미량시료분석장치.
- 제8항 또는 제9항에 있어서,유기박막적하건조법에 사용할 수 있는 시판되는 극박 유기박막지지체를 잘 맞출 수 있는 단을 시료 스테이지에 형성하는 것을 특징으로 하는 미량시료분석장치.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP99-104573 | 1999-04-12 | ||
JP10457399A JP3330563B2 (ja) | 1999-04-12 | 1999-04-12 | 微量試料分析装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20000071648A true KR20000071648A (ko) | 2000-11-25 |
KR100797680B1 KR100797680B1 (ko) | 2008-01-23 |
Family
ID=14384192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020000019161A Expired - Fee Related KR100797680B1 (ko) | 1999-04-12 | 2000-04-12 | 미량시료분석장치 |
Country Status (5)
Country | Link |
---|---|
US (1) | US6539075B1 (ko) |
JP (1) | JP3330563B2 (ko) |
KR (1) | KR100797680B1 (ko) |
DE (1) | DE10018161B4 (ko) |
TW (1) | TW484010B (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20200102279A (ko) * | 2019-02-21 | 2020-08-31 | 주식회사 아스타 | 레이저 비젼 동축 ldi 장치 |
KR20230088013A (ko) * | 2021-12-10 | 2023-06-19 | 한국세라믹기술원 | 미소 충전 샘플링에 의한 peb 유도 에너지 분석 방법 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003294633A (ja) * | 2002-03-29 | 2003-10-15 | Otsuka Denshi Co Ltd | 蛍光測定装置 |
DE10351400B4 (de) * | 2003-11-04 | 2005-10-06 | Umformtechnik Alfred Burggraf Gmbh | Schüttgutsortierer |
ATE423382T1 (de) * | 2005-08-22 | 2009-03-15 | Unisantis Fze | Vorrichtung und verfahren zum positionieren einer röntgenlinse und röntgengerät mit einer solchen vorrichtung |
JP5045999B2 (ja) * | 2006-03-30 | 2012-10-10 | エスアイアイ・ナノテクノロジー株式会社 | 蛍光x線分析装置 |
CN103105407B (zh) * | 2011-11-15 | 2016-04-20 | 江苏天瑞仪器股份有限公司 | 测定液体样品中重金属的含量的装置、方法及应用 |
CN106338424A (zh) * | 2015-07-10 | 2017-01-18 | 中国石油化工股份有限公司 | 一种高石英含量岩石样品中的粘土矿物的分析方法 |
CN115019994B (zh) * | 2022-07-21 | 2024-05-14 | 中国核动力研究设计院 | 一种基于离子注入机的透射电镜试样辐照装置及控温方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4974244A (en) * | 1988-08-04 | 1990-11-27 | Angelo M. Torrisi | Sample positioning method and system for X-ray spectroscopic analysis |
JP2890127B2 (ja) * | 1990-01-30 | 1999-05-10 | 中国電力株式会社 | 蛍光x線分析用試料ホルダ |
-
1999
- 1999-04-12 JP JP10457399A patent/JP3330563B2/ja not_active Expired - Fee Related
-
2000
- 2000-04-11 US US09/546,765 patent/US6539075B1/en not_active Expired - Lifetime
- 2000-04-12 DE DE10018161A patent/DE10018161B4/de not_active Expired - Fee Related
- 2000-04-12 KR KR1020000019161A patent/KR100797680B1/ko not_active Expired - Fee Related
- 2000-04-12 TW TW089106824A patent/TW484010B/zh active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20200102279A (ko) * | 2019-02-21 | 2020-08-31 | 주식회사 아스타 | 레이저 비젼 동축 ldi 장치 |
KR20230088013A (ko) * | 2021-12-10 | 2023-06-19 | 한국세라믹기술원 | 미소 충전 샘플링에 의한 peb 유도 에너지 분석 방법 |
Also Published As
Publication number | Publication date |
---|---|
DE10018161B4 (de) | 2008-04-10 |
JP3330563B2 (ja) | 2002-09-30 |
US6539075B1 (en) | 2003-03-25 |
JP2000292381A (ja) | 2000-10-20 |
KR100797680B1 (ko) | 2008-01-23 |
DE10018161A1 (de) | 2000-10-19 |
TW484010B (en) | 2002-04-21 |
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