KR20000067392A - Apparatus for developing various optical disks - Google Patents

Abstract

PURPOSE: A multiple optical disk developing apparatus is to develop various formated disks respectively having various track pitches using one developing apparatus, thereby reducing a cost for additional developing apparatus. CONSTITUTION: A multiple optical disk developing apparatus comprises a reflecting mirror(331,332,333,334,335,336) arranged to be corresponding to an angle for detecting a diffraction light with respect to each optical disk and reflecting the diffraction light generated by a track pitch of the selected optical disk, an optical detector(341,343,345) for detecting an intensity of the diffraction light reflected from the mirror, and a controlling portion for controlling a developing process based on the detected intensity of the diffraction light. In the apparatus, the apparatus further comprises an amplifier(351,353,355) for amplifying the detected intensity of the diffraction light, and a displaying portion(361,363,365) for receiving the amplified intensity of the diffraction light from the amplifier and then displaying the intensity of the diffraction light so that the developing process is automatically or manually controlled.

Description

Multi-optical disk developing device {APPARATUS FOR DEVELOPING VARIOUS OPTICAL DISKS}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical disc developing apparatus used in an optical disc manufacturing process, and more particularly, to a multiple optical disc developing apparatus capable of controlling a developing process for various types of optical discs using one developing apparatus.

In recent years, with the rapid development of technology, recording media having greatly improved performance, such as storing large amounts of information and processing information at high speed, have been developed or used, and one of them is an optical disc. Such an optical disc stores information by changing the surface state of the disc itself. Generally, such an optical disc can be classified into a read-only type, an additional recordable type, and a rewritable type according to a recording method.

In the general process of mastering an optical disk, the surface of a flat glass disk is sufficiently polished, cleaned and dried ultrasonically, and then a positive photoresist is applied to the surface of the glass to perform a backing. Make At this time, since the thickness of the photoresist corresponds to the depth of the pit, accurate thickness setting and control is required to obtain the optical effect most efficiently in the optical disk environment to be used.

Subsequently, after the baking process described above, a laser beam cutting process is performed in which a predetermined information pattern is exposed to a glass disk coated with a photoresist using a laser light source using an exposure machine such as a master code cutter (MCC). And developing a portion of the photoresist exposed by the laser of the MCC with a developing solution to form a plurality of pits on the glass disk. At this time, by irradiating a helium-neon laser beam to the developing glass substrate, the depth and width of the pit are measured by monitoring the diffracted light generated by the pit or groove formed in the photoresist layer, thereby determining the end point of development. do.

When the development process is completed, a nickel conductive film is formed on the unevenness of the photoresist formed according to the information on the glass disc with the pit to form a disk master, which is put into an electrolytic casting machine (electroplating bath) to be a cathode. A nickel film is plated on the glass disc with a nickel chip containing sulfur as an anode. Then, the back of the nickel shell formed on the surface of the glass disk is polished to an appropriate surface state, and the nickel plated on the glass disk surface is separated and washed. In this case, the separated nickel is called a metal master.

Subsequently, after removing and baking the photoresist remaining on the metal master information surface, a protective film is formed to protect the pits formed on the information surface and punched into a shape suitable for ejecting a circular stamper to form a stamper. In addition, the stamper is cut to match the inside and outside diameters in order to be injected into the injection process, and the disc substrate is manufactured by injecting and compressing the molten resin into the injection machine, transferring the signal, and then cooling the signal. In this case, the fabricated disk substrate is a transparent resin, and in the case of a reproduction-only disk, an aluminum reflecting film for reflecting a laser beam and a recordable type undergo a stuffing process for forming a recording film and a dielectric film. Is done.

On the other hand, in the developing step of forming a plurality of pits on the glass disk using the developing solution in each of the above-described steps, the development degree of the developing is controlled using the developing apparatus. In other words, the development process is controlled by irradiating the laser to determine the progress of the development process by using the intensity of the diffracted light generated by the diffraction grating corresponding to the track pitch.

FIG. 1 shows a schematic configuration of such a conventional developing device, which includes a laser 110, a glass 120, first and second and third photodetectors 131, 133, and 135, and a first. And second and third amplifiers 141, 143 and 145 and first and second and third displays 151, 153 and 155.

In the conventional general disc manufacturing process, the development process is controlled by using a shape device as shown in the same drawing, which will be described in detail as follows.

During the development process, light is irradiated onto the glass 120 using the laser 110 to determine the development progress. After that, when the developer is sprayed onto the glass 120, the exposed part of the exposure process is exposed to the developer. Is gradually etched to form a grating in the glass 120. Since the grating is not generated before the initial development, the zero-order light passing through the glass 120 reaches the first photo detector 131. . However, as the phenomenon progresses gradually, the diffraction light is generated as the track pitch is generated, and the diffraction angle of the generated diffraction light is sin a = (m · laser wavelength) / lattice period (where a is The angle of the diffracted light, m is the diffracted light order).

Therefore, as the development progresses, primary light and secondary light are generated to reach the second photodetector 133 and the third photodetector 135, respectively. In this case, each photodetector 131, 133, 135 The intensity of each diffracted light (0th order light, 1st order light, 2nd order light) is detected, and each detected light intensity is displayed on the display 151 via the amplifier 141, thereby developing manually or automatically. Control of whether or not the process is terminated.

On the other hand, there are generally discs of various formats, and each optical disc having such various formats has different track pitches as shown in Table 1, and therefore, angles of the primary and secondary diffracted light are different.

Optical disc format CD DVD-RAM (2.6 GB) DVD-RAM (4.7 GB) DVD-R (3.95 GB) DVD-ROM (4.7 GB) Track pitch 1.6 μm 1.48 μm 1.23 μm 0.8 μm 0.74 μm Primary light angle 23.297 25.313 30.962 52.279 58.775 Secondary light angle 52.279 58.775 - - -

Therefore, in the conventional disc manufacturing process, there is a problem that a developing device corresponding to each disc format must be separately provided. In other words, since the lattice period is different depending on the format of the disk, the position of the light detector for detecting the primary light and the secondary light is different. Therefore, the development of the disk using the separate development apparatus corresponding to the format of the disk is complicated to configure the entire system for the optical disk manufacturing process, there was a problem that excessive system design cost.

Accordingly, an object of the present invention is to provide a multi-optical disk developing apparatus capable of developing and controlling a disk of various formats having different lattice cycles by using one developing apparatus.

According to an aspect of the present invention, there is provided a multi-optical disk developing apparatus capable of controlling n types of optical disk developing processes having different track pitches by detecting the intensity of diffracted light by a laser light source. M optical detectors disposed respectively corresponding to respective angles capable of detecting diffracted light for each optical disc, and detecting an intensity of diffracted light generated by a track pitch of a selected optical disc among the optical discs; Provided is a multiple optical disc developing apparatus comprising control means for controlling the developing process based on the detected intensity of each diffracted light.

According to another aspect of the present invention, there is provided a multiple optical disc developing apparatus capable of controlling n types of optical disc developing processes having different track pitches by detecting the intensity of diffracted light by a laser light source. M reflection mirrors disposed respectively corresponding to respective angles capable of detecting diffracted light for each optical disc, and reflecting diffracted light generated by the track pitch of the selected optical disc among the optical discs; K photo detectors for detecting the intensities for the m diffracted light reflected from the respective reflecting mirrors; Provided is a multiple optical disc developing apparatus comprising control means for controlling the developing process based on the detected intensity of each diffracted light.

1 is a block diagram showing a configuration of a conventional general developing apparatus;

2 is a block diagram showing the configuration of a developing apparatus according to an embodiment of the present invention;

3 is a block diagram showing a configuration of a developing apparatus according to another embodiment of the present invention.

<Description of the code | symbol about the principal part of drawing>

310: laser 320: glass

331,... , 336: reflection mirror 341, 343, 345: light detector

351, 353, 355: Amplifiers 361, 363, 365: Display

Hereinafter, a multi-optical disk developing apparatus according to a preferred embodiment of the present invention with reference to the accompanying drawings in detail as follows.

FIG. 2 is a block diagram showing a configuration of a multiple optical disc developing apparatus according to an embodiment of the present invention, which includes a laser 210, a glass 220, a photo detector 231, ..., 236, an amplifier 241,. 246, and displays 251,..., 256.

Each of the photodetectors 231, ..., 236 shown in the same drawing is installed at a position corresponding to the diffracted light angle according to the track pitch of various formats as shown in Table 1 above to be diffracted from the glass 220. The intensity of the light is detected and provided to each of the amplifiers 241,. In other words, since the angle of diffracted light according to the format of each disc can be known in advance as shown in Table 1, the respective light detectors 231,..., 236 are placed at positions corresponding to the diffraction angle for each disc format. To place. The number of photodetectors arranged at this time is determined according to the type (format) number of disks and the type of diffraction angle for each disk. For example, since the diffracted light generated from each disk shown in Table 1 has all six diffraction angles including the diffraction angle with respect to the zeroth order light, at least six photo detectors should be disposed.

Referring to the multiple optical disc diffraction apparatus according to the present embodiment, taking the respective disc formats as shown in Table 1 as an example, first, the first optical detector 231 is always input with zero-order light regardless of the format of the optical disc. In the CD manufacturing process, the primary light is detected by the second photodetector 232, and the intensity of the secondary light is detected by the fifth photodetector 235. In 2.6 GB DVD-RAM production, primary light is detected by the third photodetector 233, secondary light is detected by the sixth photo detector 236, and primary light is produced in 4.7 GB DVD-RAM production. It is detected at the fourth photo detector 234 and no secondary light is generated.

In this way, a plurality of photodetectors 231,... 236 are arranged at an angle at which diffracted light can be generated corresponding to each disc format, and the intensity of the diffracted light is detected and displayed through the respective amplifiers 241... 146. By providing the reference numerals 215, ..., 256, the development process end point is determined manually or automatically, and the developing process is completed through control means (not shown).

As a result, it is possible to perform the developing process for optical discs of all formats having different track pitches by using one developing apparatus as shown in FIG.

3 is a block diagram showing a configuration of a developing apparatus according to still another embodiment of the present invention, which includes a laser 310, a glass 320, a reflection mirror 331, ..., 336, a photo detector 341, 343, 345, amplifiers 351, 353, 355, and displays 361, 363, 365.

Each of the reflecting mirrors 331, ..., 336 shown in FIG. 3 is diffracted according to the track pitch of various formats as shown in Table 1, similar to the photo detectors 231, ..., 236 in the above-described embodiment. It is installed at a position corresponding to the light angle and reflects the light diffracted from the glass 320 to be provided to each of the photo detectors 341, 343, and 345. That is, since the angle of the diffracted light according to the format of each disc can be known in advance as shown in Table 1, the respective reflecting mirrors 331, ..., 336 are arranged at positions corresponding to the diffraction angle for each disc format. In this case, the number of reflecting mirrors arranged also has a number corresponding to the number of disk formats and the type of diffraction angle for each format. For example, at least six reflecting mirrors (including reflecting mirrors for zero order light) must be arranged to correspond to each disk shown in Table 1.

Similarly, when the multiple optical disc diffraction apparatus according to the present embodiment is described using each disc format as shown in Table 1 as an example, first order mirror is always reflected to the first reflection mirror 331 regardless of the format of the optical disc. Incident on the first photodetector 341, the primary light is reflected on the second reflective mirror 332 and incident on the second photodetector 343 during the CD manufacturing process, and the secondary light is the fifth reflective mirror. Reflected by 335 and provided to the third photodetector 345, its intensity is detected. In the manufacture of 2.6 GB DVD-RAM, primary light is reflected by the third reflecting mirror 333 to be provided to the second photodetector 343, and the secondary light is reflected by the sixth reflecting mirror 336 to produce the first light. 3 is incident on the photodetector 345. In the production of 4.7 GB DVD-RAM, the primary light is reflected by the fourth photodetector 334 and provided to the second photodetector 343, and no secondary light is generated.

As a result, when the glass 320 is gradually etched by the developer in the developing apparatus configured as described above to form a lattice, diffraction light is generated accordingly, so that the 0th order and the 1st order having an angle corresponding to the current disc format, Secondary diffracted light is reflected through respective corresponding mirrors of the plurality of reflective mirrors 331,..., 336, wherein each of the reflected diffracted light beams respectively corresponds to the corresponding photo detector photodetectors 341, 343, 345. Is provided. Each of the photodetectors 341, 343, and 345 measures the intensity of the diffracted light and provides the display 361, 363, 365 to the display 361, 363, 365 through the amplifiers 351, 353, and 355 to manually or automatically determine the end point of the development process. By the determination, the developing process is completed through control means (not shown). Therefore, as in the above-described embodiment, it is possible to perform the developing process for optical discs of all formats having different track pitches by using one developing apparatus as shown in FIG.

As described above, according to the present invention, it is possible to perform a developing process for optical discs of all formats having different track pitches using one developing device, and thus, for a developing device which is conventionally added separately according to each disc format. There is an effect to reduce the cost, it is effective to improve the system design and operation according to the optical disk manufacturing process.

Claims (2)

In the multiple optical disc developing apparatus capable of controlling the n types of optical disc developing processes having different track pitches by detecting the intensity of diffracted light by a laser light source, M optical detectors disposed respectively corresponding to respective angles capable of detecting diffracted light for the respective optical discs, and detecting the intensity of diffracted light generated by the track pitch of the selected optical disc among the optical discs; And control means for controlling the development process based on the detected intensity of each diffracted light. In the multiple optical disc developing apparatus capable of controlling the n types of optical disc developing processes having different track pitches by detecting the intensity of diffracted light by a laser light source, M reflection mirrors disposed respectively corresponding to respective angles capable of detecting diffracted light for the respective optical discs, and reflecting diffracted light generated by track pitches of the selected optical discs of the optical discs; K photo detectors for detecting the intensities for the m diffracted light reflected from the respective reflecting mirrors; And control means for controlling the development process based on the detected intensity of each diffracted light.